EXHIBIT 23.2

                       CONSENT OF INDEPENDENT ACCOUNTANTS

    We consent to the use in this Registration Statement on Form S-3 of our
reports dated January 26, 2001 relating to the consolidated financial
statements and consolidated financial statement schedule of Rudolph
Technologies, Inc., which appear in such Registration Statement. We also
consent to the reference to us under the heading "Experts" in such Registration
Statement.

                                          /s/ PricewaterhouseCoopers LLP
Florham Park, New Jersey
February 2, 2001