Fair Value Measurements - Assets and liabilities measured at fair value on a recurring basis (Details) - USD ($) $ in Thousands		3 Months Ended		6 Months Ended
	Jan. 14, 2022	Jun. 30, 2023	Jun. 30, 2022	Jun. 30, 2023	Jun. 30, 2022	Dec. 31, 2022	Dec. 31, 2021	Dec. 31, 2020
Fair Value
Change in fair value of contingent consideration		$ 15,308	$ (5,066)	$ 24,077	$ (2,605)
Recurring basis | Level 1 | Cash and cash equivalents
Fair Value
Assets, Fair Value		120,818		120,818		$ 212,577
Recurring basis | Level 1 | U.S. Treasuries
Fair Value
Assets, Fair Value		287,992		287,992		1,139,310
Recurring basis | Level 1 | Equity securities
Fair Value
Assets, Fair Value		67,753		67,753		134,836
Recurring basis | Level 2 | Corporate bonds
Fair Value
Assets, Fair Value		149,659		149,659		193,633
Recurring basis | Level 3 | Contingent consideration
Fair Value
Liabilities, Fair value		119,841		119,841		116,165
Joule Processing LLC
Fair Value
Contingent consideration	$ 130,000
Change in fair value of contingent consideration		11,300		18,000
Consideration paid	$ 69,872
Carrying value | Recurring basis | Contingent consideration
Fair Value
Liabilities, Fair value		119,841		119,841		116,165
Carrying value | Recurring basis | Cash and cash equivalents
Fair Value
Assets, Fair Value		120,818		120,818		212,577
Carrying value | Recurring basis | Corporate bonds
Fair Value
Assets, Fair Value		149,659		149,659		193,633
Carrying value | Recurring basis | U.S. Treasuries
Fair Value
Assets, Fair Value		287,992		287,992		1,139,310
Carrying value | Recurring basis | Equity securities
Fair Value
Assets, Fair Value		67,753		67,753		134,836
Fair value | Recurring basis | Contingent consideration
Fair Value
Liabilities, Fair value		119,841		119,841		116,165
Fair value | Recurring basis | Cash and cash equivalents
Fair Value
Assets, Fair Value		120,818		120,818		212,577
Fair value | Recurring basis | Corporate bonds
Fair Value
Assets, Fair Value		149,659		149,659		193,633
Fair value | Recurring basis | U.S. Treasuries
Fair Value
Assets, Fair Value		287,992		287,992		1,139,310
Fair value | Recurring basis | Equity securities
Fair Value
Assets, Fair Value		67,753		67,753		134,836
Fair value | Giner ELX, Inc | Contingent consideration
Fair Value
Liabilities, Fair value		16,800		16,800		14,500
Contingent consideration								$ 16,000
Change in fair value of contingent consideration		3,500		2,300
Fair value | United Hydrogen Group Inc | Contingent consideration
Fair Value
Liabilities, Fair value		1,700		1,700		1,500
Contingent consideration								$ 1,100
Change in fair value of contingent consideration		100		200
Fair value | Applied Cryo Technologies | Contingent consideration
Fair Value
Contingent consideration							$ 14,000
Fair value | Frames Holding B.V. | Contingent consideration
Fair Value
Liabilities, Fair value		30,200		30,200		$ 31,000
Contingent consideration							$ 29,100
Change in fair value of contingent consideration		500		(800)
Fair value | Joule Processing LLC | Recurring basis | Contingent consideration
Fair Value
Liabilities, Fair value		71,200		71,200
Fair value | 2020 and 2021 acquisitions | Recurring basis | Contingent consideration
Fair Value
Liabilities, Fair value		$ 48,600		$ 48,600