X0306 4 2022-05-16 0 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001073329 KEITHLEY JOSEPH P C/O AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915 1 0 0 0 Common Stock 2022-05-16 4 A 0 2689 0.00 A 25375 D These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 16, 2023. Of the shares held after this grant on of May 16, 2022, 2,689 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture. Lynnette C. Fallon, as attorney in fact for Joseph P. Keithley 2022-05-16