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Redeemable Noncontrolling Interests (Details) - Beijing Tongmei Xtal Technology - USD ($)
$ in Millions
1 Months Ended 3 Months Ended 12 Months Ended
Jan. 25, 2021
Jan. 31, 2021
Mar. 31, 2023
Dec. 31, 2020
Noncontrolling Interest        
Increase in redeemable noncontrolling interests   $ 1.5   $ 48.1
Redeemable noncontrolling interests ownership percentage       7.06%
Investments, government approved $ 49.0      
Percentage of equity issued on conversion of noncontrolling interests 7.28%   14.50%  
Redemption value     $ 49.0