Redeemable Noncontrolling Interests (Details) - USD ($) $ in Thousands		1 Months Ended	12 Months Ended
	Jan. 25, 2021	Jan. 31, 2021	Dec. 31, 2022	Dec. 31, 2021	Dec. 31, 2020
Noncontrolling Interest
Increase in redeemable noncontrolling interests				$ 1,514
Beijing Tongmei Xtal Technology
Noncontrolling Interest
Increase in redeemable noncontrolling interests		$ 1,500			$ 48,100
Redeemable noncontrolling interests ownership percentage					7.06%
Investments, government approved	$ 49,000
Percentage of equity issued on conversion of noncontrolling interests	7.28%		14.50%
Redemption value			$ 49,000