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Inventories (Details) - USD ($)
Dec. 31, 2022
Dec. 31, 2021
Inventories    
Raw materials $ 46,476,000 $ 29,658,000
Work in process 39,956,000 32,605,000
Finished goods 3,197,000 3,649,000
Inventories, Total 89,629,000 65,912,000
Inventory reserve 24,700,000 19,600,000
Excess and obsolete inventory $ 47,000 $ 66,000