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Inventories (Details) - USD ($)
Sep. 30, 2022
Dec. 31, 2021
Inventories    
Raw materials $ 44,145,000 $ 29,658,000
Work in process 40,491,000 32,605,000
Finished goods 3,860,000 3,649,000
Inventories, Total 88,496,000 65,912,000
Inventory reserve 23,000,000.0 19,600,000
Excess and obsolete inventory $ 42,000 $ 66,000