Redeemable Noncontrolling Interests (Details) - Beijing Tongmei Xtal Technology - USD ($) $ in Millions		1 Months Ended	6 Months Ended	12 Months Ended
	Jan. 25, 2021	Jan. 31, 2021	Jun. 30, 2022	Dec. 31, 2020
Noncontrolling Interest [Line Items]
Issue of redeemable noncontrolling interests		$ 1.5		$ 48.1
Redeemable noncontrolling interests ownership percentage				7.06%
Investments, government approved	$ 49.0
Percentage of equity issued on conversion of noncontrolling interests	7.28%		14.50%
Redemption value			$ 49.0