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Inventories (Details) - USD ($)
$ in Thousands
Mar. 31, 2021
Dec. 31, 2020
Inventories    
Raw materials $ 25,189 $ 24,738
Work in process 26,288 24,215
Finished goods 3,204 2,562
Inventories, Total 54,681 51,515
Inventory reserve 18,300 17,700
Excess and obsolete inventory $ 269,000 $ 162,000