Commitments and Contingencies (Details)	1 Months Ended	12 Months Ended
	May 31, 2020	Dec. 31, 2020 USD ($) ft²	Dec. 31, 2018 USD ($)	Dec. 31, 2019 USD ($)
Leases
Area of leased property (in square feet) | ft²		19,467
Operating lease, option to extend	true
Operating lease, extension term	3 years
Variable lease payments		$ 0
Residual value guarantee		0
Operating lease right-of-use assets		2,683,000		$ 2,938,000
Operating lease liability		2,819,000
Term of royalty agreement			8 years
Royalty expense			$ 565,000
Credit of royalty expense			$ 10,000
Formal cross license and covenant agreement
Leases
Royalty expense		$ 174,000
Payment period to Sumitomo		10 years
Dingxing
Leases
Total investment agreement value		$ 90,000,000
Kazuo
Leases
Total investment agreement value		15,000,000
Kazuo | Beijing BoYu Semiconductor Vessel Craftwork Technology Co
Leases
Total investment agreement value		$ 8,000,000