Finite lived intangible asset lease favorable gross.

No definition available.

Name:	mksi_FiniteLivedIntangibleAssetLeaseFavorableGross
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Accumulated amount of amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 350
-SubTopic 30
-Section 50
-Paragraph 2
-Subparagraph (a)(1)
-URI http://asc.fasb.org/extlink&oid=66006027&loc=d3e16323-109275

+ Details

Name:	us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

+ Details

Name:	us-gaap_FiniteLivedIntangibleAssetsLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Amount of increase in assets, excluding financial assets, lacking physical substance with a definite life, from an acquisition.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 350
-SubTopic 30
-Section 50
-Paragraph 1
-Subparagraph (a)(1)
-URI http://asc.fasb.org/extlink&oid=66006027&loc=d3e16265-109275

+ Details

Name:	us-gaap_FinitelivedIntangibleAssetsAcquired1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Details

Name:	us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerRelationshipsMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=mksi_PatentsTrademarksTradeNamesAndOtherMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_BusinessAcquisitionAxis=mksi_ElectroScientificIndustriesIncMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=mksi_CompletedTechnologyRightsMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=mksi_TrademarksTradenamesAndBacklogMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Goodwill and Intangible Assets - Intangible Assets (Parenthetical) (Detail) - USD ($) $ in Millions		12 Months Ended
	Feb. 01, 2019	Dec. 31, 2019	Mar. 31, 2020
Finite-Lived Intangible Assets [Line Items]
Accumulated Amortization		$ 308.0	$ 324.3
Customer Relationships [Member]
Finite-Lived Intangible Assets [Line Items]
Accumulated Amortization		84.2	89.1
Patents, Trademarks, Trade Names and Other [Member]
Finite-Lived Intangible Assets [Line Items]
Accumulated Amortization		45.5	$ 46.6
Electro Scientific Industries Inc [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price	$ 316.2	316.2
Finite lived intangible asset , gross favorable lease		6.4
Electro Scientific Industries Inc [Member] \| Completed Technology [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price		274.0
Electro Scientific Industries Inc [Member] \| Customer Relationships [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price	$ 25.4	25.4
Electro Scientific Industries Inc [Member] \| Trademarks Tradenames and Backlog [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price		16.8
Electro Scientific Industries Inc [Member] \| Patents, Trademarks, Trade Names and Other [Member]
Finite-Lived Intangible Assets [Line Items]
Accumulated Amortization		$ 3.4