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Filing Detail
Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001564590-22-007637
Filing Date
2022-02-28
Accepted
2022-02-28 16:28:05
Documents
143
Period of Report
2021-12-31

Document Format Files

Seq Description Document Type Size
1 10-K mksi-10k_20211231.htm   iXBRL 10-K 6229198
2 EX-2.2 mksi-ex22_527.htm EX-2.2 91972
3 EX-21.1 mksi-ex211_9.htm EX-21.1 29827
4 EX-23.1 mksi-ex231_12.htm EX-23.1 2565
5 EX-31.1 mksi-ex311_7.htm EX-31.1 16633
6 EX-31.2 mksi-ex312_11.htm EX-31.2 16647
7 EX-32.1 mksi-ex321_13.htm EX-32.1 10350
8 GRAPHIC gmewoofkpnyl000001.jpg GRAPHIC 520377
  Complete submission text file 0001564590-22-007637.txt   27227581

Data Files

Seq Description Document Type Size
9 XBRL TAXONOMY EXTENSION SCHEMA mksi-20211231.xsd EX-101.SCH 125836
10 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE mksi-20211231_cal.xml EX-101.CAL 123204
11 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE mksi-20211231_def.xml EX-101.DEF 459613
12 XBRL TAXONOMY EXTENSION LABEL LINKBASE mksi-20211231_lab.xml EX-101.LAB 883949
13 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE mksi-20211231_pre.xml EX-101.PRE 761243
137 EXTRACTED XBRL INSTANCE DOCUMENT mksi-10k_20211231_htm.xml XML 6778365
Mailing Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810
Business Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810 978-645-5500
MKS INSTRUMENTS INC (Filer) CIK: 0001049502 (see all company filings)

IRS No.: 042277512 | State of Incorp.: MA | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-23621 | Film No.: 22690120
SIC: 3823 Industrial Instruments For Measurement, Display, and Control
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