<SEC-DOCUMENT>0001193125-16-472547-index.html : 20160223
<SEC-HEADER>0001193125-16-472547.hdr.sgml : 20160223
<ACCEPTANCE-DATETIME>20160223073337
ACCESSION NUMBER:		0001193125-16-472547
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		21
CONFORMED PERIOD OF REPORT:	20160222
ITEM INFORMATION:		Entry into a Material Definitive Agreement
ITEM INFORMATION:		Other Events
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20160223
DATE AS OF CHANGE:		20160223

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MKS INSTRUMENTS INC
		CENTRAL INDEX KEY:			0001049502
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				042277512
		STATE OF INCORPORATION:			MA
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-23621
		FILM NUMBER:		161446817

	BUSINESS ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
		BUSINESS PHONE:		978-645-5500

	MAIL ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
</SEC-HEADER>
<DOCUMENT>
<TYPE>8-K
<SEQUENCE>1
<FILENAME>d25375d8k.htm
<DESCRIPTION>8-K
<TEXT>
Document 1 - file: d25375d8k.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-2.1
<SEQUENCE>2
<FILENAME>d25375dex21.htm
<DESCRIPTION>EX-2.1
<TEXT>
Document 2 - file: d25375dex21.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-10.1
<SEQUENCE>3
<FILENAME>d25375dex101.htm
<DESCRIPTION>EX-10.1
<TEXT>
Document 3 - file: d25375dex101.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.1
<SEQUENCE>4
<FILENAME>d25375dex991.htm
<DESCRIPTION>EX-99.1
<TEXT>
Document 4 - file: d25375dex991.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.2
<SEQUENCE>5
<FILENAME>d25375dex992.htm
<DESCRIPTION>EX-99.2
<TEXT>
Document 5 - file: d25375dex992.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>g25375ex99_2s10g1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 6 - file: g25375ex99_2s10g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>7
<FILENAME>g25375ex99_2s11g1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 7 - file: g25375ex99_2s11g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>8
<FILENAME>g25375ex99_2s12g1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 8 - file: g25375ex99_2s12g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>9
<FILENAME>g25375ex99_2s13g1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 9 - file: g25375ex99_2s13g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>10
<FILENAME>g25375ex99_2s14g1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 10 - file: g25375ex99_2s14g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>11
<FILENAME>g25375ex99_2s15g1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 11 - file: g25375ex99_2s15g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>12
<FILENAME>g25375ex99_2s1g1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 12 - file: g25375ex99_2s1g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>13
<FILENAME>g25375ex99_2s2g1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 13 - file: g25375ex99_2s2g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>14
<FILENAME>g25375ex99_2s3g1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 14 - file: g25375ex99_2s3g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>15
<FILENAME>g25375ex99_2s4g1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 15 - file: g25375ex99_2s4g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>16
<FILENAME>g25375ex99_2s5g1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 16 - file: g25375ex99_2s5g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>17
<FILENAME>g25375ex99_2s6g1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 17 - file: g25375ex99_2s6g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>18
<FILENAME>g25375ex99_2s7g1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 18 - file: g25375ex99_2s7g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>19
<FILENAME>g25375ex99_2s8g1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 19 - file: g25375ex99_2s8g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>20
<FILENAME>g25375ex99_2s9g1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 20 - file: g25375ex99_2s9g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>21
<FILENAME>g25375img001.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 21 - file: g25375img001.jpg

</DOCUMENT>
</SEC-DOCUMENT>