Acquisition - Summary of Purchase Price (Detail) - USD ($) $ in Millions			12 Months Ended
	Aug. 17, 2022	Jul. 15, 2021	Dec. 31, 2022	Dec. 31, 2021	Dec. 31, 2020
Business Acquisition [Line Items]
Repayment of Atotech debt			$ 962	$ 15	$ 84
Total purchase price, net of cash and cash equivalents acquired			$ 4,473	$ 268	$ 0
Photon Control Inc [Member]
Business Acquisition [Line Items]
Cash paid for outstanding shares		$ 302
Less: Cash and cash equivalents acquired		(34)
Total purchase price, net of cash and cash equivalents acquired		$ 268
Atotech Limited [Member]
Business Acquisition [Line Items]
Cash paid for outstanding shares	$ 2,886
Value of MKS shares issued	1,186
Repayment of Atotech debt	1,545
Settlement of share-based awards	47
Total purchase price, net of cash and cash equivalents acquired	5,664
Total purchase price, net of cash and cash equivalents acquired	$ 5,664