X0202 4 2006-07-11 0 0000931059 TEGAL CORP /DE/ TGAL 0001044321 MARXE AUSTIN W & GREENHOUSE DAVID M C/O SPECIAL SITUATIONS FUNDS 527 MADISON AVENUE, SUITE 2600 NEW YORK NY 10022 0 0 1 0 Common Stock 2006-07-11 4 P 0 32465 0.3393 A 23374064 I By Limited Partnerships Common Stock 2006-07-12 4 P 0 96000 0.3649 A 23470064 I By Limited Partnerships This is a joint filing by Austin W. Marxe (Marxe) & David M. Greenhouse (Greenhouse). They share voting and investment control over all securities owned by Special Situations Fund III QP, L.P. (QP), Special Situations Cayman Fund, L.P. (Cay), Special Situations Private Equity Fund, L.P. (PE), Special Situations Technology Fund, LP (Tech) & Special Situations Technology II, Fund, L.P. (Tech II), respectively. 7,602,299 shares of CS, 3,776,649 Wts are held by QP, 2,089,923 shares of CS, 1,038,462 Wts with varying terms are held by Cay, 2,175,003 shares of CS, 1,816,712 Wts with varying terms are held by PE, 408,815 shares of CS, 287,292 Wts with varying terms are held by Tech & 2,574,954 shares of CS, 1,699,955 Wts with varying terms are held by Tech II. The interest of Marxe and Greenhouse in the shares of Common Stock owned by QP, Cay, PE, Tech, and Tech II is limited to the extent of his pecuniary interest. Austin W. Marxe 2006-07-13 David M. Greenhouse 2006-07-13