X0202 3 2005-09-19 0 0000931059 TEGAL CORP /DE/ TGAL 0001044321 MARXE AUSTIN W & GREENHOUSE DAVID M 153 E 53RD ST 55TH FL NEW YORK NY 10022 0 0 1 0 Common Stock 7169230 I By Limited Partnerships Warrants 0.5 2003-06-30 2011-06-30 Common Stock 760509 I By Limited Partnerships Warrants 0.5 2003-09-09 2011-09-09 Common Stock 497296 I By Limited Partnerships Warrants 1 2005-07-14 2010-07-14 Common Stock 652400 I By Limited Partnerships Warrants 1 2005-09-19 2010-09-19 Common Stock 2932216 I By Limited Partnership This is a joint filing by Austin W. Marxe (Marxe) and David M. Greenhouse (Greenhouse). They share voting and investment control over all securities owned by Special Situations Cayman Fund, L.P. (Cayman), Special Situations Private Equity Fund, L.P. (PE), Special Situations Technology Fund, LP (Tech) and Special Situations Technology II, Fund, L.P. (Tech II), respectively. 2,076,923 shares of Common Stock are held by Cayman, 2,141,538 shares of Common Stock are held by PE, 404,615 shares of Common Stock are held by Tech and 2,546,154 shares of Common Stock are held by Tech II. The interest of Marxe and Greenhouse in the shares of Common Stock owned by Cayman, PE, Tech, and Tech II is limited to the extent of his pecuniary interest. This is a joint filing by Austin W. Marxe (Marxe) and David M. Greenhouse (Greenhouse). They share voting and investment control over all securities owned by Special Situations Cayman Fund, L.P. (Cayman), Special Situations Private Equity Fund, L.P. (PE), Special Situations Technology Fund, LP (Tech) and Special Situations Technology II, Fund, L.P. (Tech II), respectively. 1,038,462 Warrants with varying terms are held by Cayman, 1,816,712 Warrants with varying terms are held by PE, 287,292 Warrants with varying terms are held by Tech and 1,699,955 Warrants with varying terms are held by Tech II. The interest of Marxe and Greenhouse in the shares of Common Stock owned by Cayman, PE, Tech, and Tech II is limited to the extent of his pecuniary interest. Austin W. Marxe 2005-09-21 David M. Greenhouse 2005-09-21