X0201 4 2004-01-16 0 0000931059 TEGAL CORP /DE/ TGAL 0001044321 MARXE AUSTIN W & GREENHOUSE DAVID M 153 E 53RD ST 55TH FL NEW YORK NY 10022 0 0 1 0 Common Stock 2004-01-16 4 S 0 235183 3.8679 D 4946426 I By Limited Partnerships Common Stock 2004-01-20 4 S 0 189000 3.7339 D 4757426 I By Limited Partnerships Convertible Bonds 0.35 2004-01-16 4 C 0 82600 0.35 D 2003-09-10 2011-09-09 Common Stock 236000 1230970 I By Limited Partnerships Convertible Bonds 0.35 2004-01-20 4 C 0 65975 0.35 D 2003-09-10 2011-09-09 Common Stock 188500 1164995 I By Limited Partnerships This is a joint filing by Austin W. Marxe (Marxe) and David M. Greenhouse (Greenhouse). They share voting and investment control over all securities owned by Special Situations Private Equity Fund, L.P. (PE), Special Situations Technology Fund, LP (Tech) and Special Situations Technology II, Fund, L.P. (Tech II), respectively. 700,880 Bonds Cvt for 2,002,514 Common Stock and 857,131 Wts are held by PE, 75,627 Bonds Cvt for 216,077 Common Stock and 93,515 Wts are held by Tech and 317 Common Stock, 388,488 Bonds Cvt for 1,109,966 Common Stock and 477,906 Wts are held by Tech II. The interest of Marxe and Greenhouse in the shares of Common Stock owned by PE, Tech, and Tech II is limited to the extent of his pecuniary interest. Austin W. Marxe 2004-01-21 David M. Greenhouse 2004-01-21