X0201 4 2004-01-15 0 0000931059 TEGAL CORP /DE/ TGAL 0001044321 MARXE AUSTIN W & GREENHOUSE DAVID M 153 E 53RD ST 55TH FL NEW YORK NY 10022 0 0 1 0 Common Stock 2004-01-15 4 S 0 200000 3.639 D 5451609 I By Limited Partnerships Common Stock 2004-01-15 4 S 0 270000 3.6893 D 5181609 I By Limited Partnerships Convertible Bonds 0.35 2004-01-15 4 C 0 164500 0.35 D 2003-09-10 2011-09-09 Common Stock 470000 1313570 I By Limited Partnerships This is a joint filing by Austin W. Marxe (Marxe) and David M. Greenhouse (Greenhouse). They share voting and investment control over all securities owned by Special Situations Private Equity Fund, L.P. (SSPE), Special Situations Technology Fund, LP (Tech) and Special Situations Technology Fund II, L.P., respectively. 789,430 Bonds Cvt for 2,255,514 Common Shares and 857,131 Wts are held by PE, 84,902 Bonds Cvt for 242,577 Common Shares and 93,515 Wts are held by Tech, and 439,238 Bonds Cvt for 1,254,966 Common Shares and 477,906 Wts are held by Tech II. The interest of Marxe and Greenhouse in the shares of Common Stock owned by PE, Tech, and Tech II is limited to the extent of his pecuniary interest. Austin W.Marxe 2004-01-16 David M. Greenhouse 2004-01-16