X0201 4 2003-12-03 0 0000931059 TEGAL CORP /DE/ TGAL 0001044321 MARXE AUSTIN W & GREENHOUSE DAVID M 153 E 53RD ST 55TH FL NEW YORK NY 10022 0 0 1 0 Common Stock 2003-12-03 4 S 0 32000 2.6053 D 7780109 I By Limited Partnerships Common Stock 2003-12-04 4 S 0 147000 2.6674 D 7633109 I By Limited Partnerships Convertible Bonds 0.35 2003-12-03 4 C 0 11200 0.35 D 2003-07-01 2011-06-30 Common Stock 32000 2223045 I By Limited Partnerships Convertible Bonds 0.35 2003-12-04 4 C 0 47345 0.35 D 2003-07-01 2011-06-30 Common Stock 135271 2175700 I By Limited Partnerships Convertible Bonds 0.35 2003-12-04 4 C 0 4105 0.35 D 2003-09-10 2011-09-09 Common Stock 11729 2171595 I By Limited Partnerships This is a joint filing by Austin W. Marxe (Marxe) and David M. Greenhouse (Greenhouse). They share voting and investment control over all securities owned by Special Situations Private Equity Fund, LP (PE), Special Situations Technology Fund, L.P. (Tech) and Special Situations Technology II, L.P. (Tech II), respectively. 1,303,755 Bond Cvt for 3,725,014 Common Shares & 857,131 Wts are held by PE, 141,707 Bonds Cvt for 404,877 Common Shares & 93,515 Wts are held by Tech and 726,133 Bonds Cvt for 2,074,665 Common Shares & 477,906 Wts are held by Tech II. The interest of Marxe and Greenhouse in the above shares owned by PE, Tech, and Tech II is limited to the extent of his pecuniary interest. Austin W. Marxe 2003-12-05 David M. Greenhouse 2003-12-05