X0201 4 2003-11-07 0 0000931059 TEGAL CORP /DE/ TGAL 0001044321 MARXE AUSTIN W & GREENHOUSE DAVID M 153 E 53RD ST 55TH FL NEW YORK NY 10022 0 0 1 0 Common Stock 2003-11-07 4 S 0 129100 10.6014 D 8236109 I By Limited Partnerships Convertible Bonds 0.35 2003-11-07 4 C 0 45185 0.35 D 2003-07-01 2011-06-30 Common Stock 129100 2382365 I By Limited Partnerships This is a joint filing by Austin W. Marxe (Marxe) and David M. Greenhouse (Greenhouse). They share voting and investment control over all securities owned by Special Situations Private Equity Fund, LP (PE), Special Situations Technology Fund, L.P. (Tech) and Special Situations Technology II, L.P. (Tech II), respectively. 800 shares of Common Stock, 1,429,475 Bond Cvt for 4,084,214 Common Shares & 857,131 Wts are held by PE, 155,882 Bonds Cvt for 445,377 Common Shares & 93,515 Wts are held by Tech and 797,008 Bonds Cvt for 2,277,165 Common Shares & 477,906 Wts are held by Tech II. The interest of Marxe and Greenhouse in the above shares owned by PE, Tech, and Tech II is limited to the extent of his pecuniary interest. Austin W. Marxe 2003-11-10 David M. Greenhouse 2003-11-10