X0201 3 2003-09-10 0 0000931059 TEGAL CORP /DE/ TGAL 0001044321 MARXE AUSTIN W & GREENHOUSE DAVID M 153 E 53RD ST 55TH FL NEW YORK NY 10022 0 0 1 0 Common Stock 800 I By Limited Partnerships Convertible Secured Debenture 0.35 2003-07-01 2011-06-30 Common Shares 761971 I By Limited Partnerships Convertible Secured Debenture 0.35 2003-09-10 2011-09-09 Common Stock 6216286 I By Limited Partnerships Warrants 0.5 2003-07-01 2011-06-30 Common Stock 185312 I By Limited Partnerships Warrants 0.5 2003-09-10 2011-09-09 Common Stock 1243240 I By Limited Partnerships This is a joint filing by Austin W. Marxe (Marxe) and David M. Greenhouse (Greenhouse). They share voting and investment control over all securities owned by Special Situations Private Equity Fund, LP (PE), Special Situations Technology Fund, L.P. (Tech) and Special Situations Technology II, L.P. (Tech II), respectively. 800 shares of Common Stock, 1,465,350 Bond Cvt for 4,186,714 Common Shares & 857,131 Wts are held by PE, 159,942 Bonds Cvt for 456,977 common shares & 93,515 Wts are held by Tech and 817,098 Bonds Cvt for 2,334,566 Common Shares & 477,906 Wts are held by Tech II. The interest of Marxe and Greenhouse in the above shares owned by PE, Tech, and Tech II is limited to the extent of his pecuniary interest. Austin W. Marxe 2003-10-09 David M. Greenhouse 2003-10-09