Segments (Reconciliation of Revenue from Segments to Consolidated) (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended
	Mar. 31, 2013		Mar. 31, 2012
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenues	$ 99,407		$ 92,574
Microelectronics [Member]
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenues	88,111	[1]	83,465	[1]
LifeSciences [Member]
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenues	11,281	[1]	9,109	[1]
All Other [Member]
Segment Reporting, Revenue Reconciling Item [Line Items]
Total revenues	$ 15	[1]

[1] Intersegment sales were not significant for the three month periods ended March 31, 2013 and 2012.