EX-21 5 kl03036_ex21-01.txt EXHIBIT 21.01 SUBSIDIARIES
Exhibit 21.01 ATMI, INC. SUBSIDIARIES ------------------------------------------------------------- ----------------------------------------------------------- Entity State or Jurisdiction of Incorporation or Organization ------------------------------------------------------------- ----------------------------------------------------------- Advanced Technology Materials, Inc. Delaware ------------------------------------------------------------- ----------------------------------------------------------- Epitronics Corporation Delaware ------------------------------------------------------------- ----------------------------------------------------------- ATMI Ecosys Corporation California ------------------------------------------------------------- ----------------------------------------------------------- Advanced Delivery & Chemical Systems Nevada, Inc. Nevada ------------------------------------------------------------- ----------------------------------------------------------- Advanced Delivery & Chemical Systems Holdings, LLC Delaware ------------------------------------------------------------- ----------------------------------------------------------- Advanced Delivery & Chemical Systems Operating, LLC Delaware ------------------------------------------------------------- ----------------------------------------------------------- Advanced Delivery & Chemical Systems Manager, Inc. Delaware ------------------------------------------------------------- ----------------------------------------------------------- ATMI Materials, Ltd. Texas ------------------------------------------------------------- ----------------------------------------------------------- ATMI Korea Co. Ltd. Korea ------------------------------------------------------------- ----------------------------------------------------------- ATMI UK Limited Scotland ------------------------------------------------------------- ----------------------------------------------------------- ATMI Fab Services, Inc. (fka ESCA, Inc.) New Mexico ------------------------------------------------------------- ----------------------------------------------------------- ATMI Fab Services Ireland (fkaESCA Ireland, Inc.) New Mexico ------------------------------------------------------------- ----------------------------------------------------------- MST Analytics, Inc. Delaware ------------------------------------------------------------- ----------------------------------------------------------- FPM Analytics, Inc. Illinois ------------------------------------------------------------- ----------------------------------------------------------- MST Measurement Systems, Inc. Illinois ------------------------------------------------------------- ----------------------------------------------------------- ATMI Packing Inc. (fka NOW Technologies, Inc.) Minnesota ------------------------------------------------------------- ----------------------------------------------------------- ATMI Packaging International Inc. (fka NOW Technologies Minnesota International, Ltd.) ------------------------------------------------------------- ----------------------------------------------------------- NOW Japan Branch Japan ------------------------------------------------------------- ----------------------------------------------------------- ATMI International Holdings, Inc. Delaware ------------------------------------------------------------- ----------------------------------------------------------- ATMI Taiwan Holdings, Inc. Delaware ------------------------------------------------------------- ----------------------------------------------------------- ATMI Belgium Holdings, Inc. Delaware ------------------------------------------------------------- ----------------------------------------------------------- ATMI Belgium, LLC Delaware ------------------------------------------------------------- ----------------------------------------------------------- Emosyn LLC Delaware ------------------------------------------------------------- ----------------------------------------------------------- Hypernex, Inc. Delaware ------------------------------------------------------------- ----------------------------------------------------------- Newform, N.V. Belgium ------------------------------------------------------------- ----------------------------------------------------------- ATMI Japan Branch Japan ------------------------------------------------------------- ----------------------------------------------------------- ATMI Taiwan Co. Ltd. (fka ATMI Taiwan Branch) Taiwan ------------------------------------------------------------- ----------------------------------------------------------- ATMI GmbH Germany ------------------------------------------------------------- ----------------------------------------------------------- Advanced Technology Materials FSC, Inc. Barbados ------------------------------------------------------------- ----------------------------------------------------------- ATMI PTE LTD. Singapore ------------------------------------------------------------- -----------------------------------------------------------