Note 5 - Revenue From Contracts With Customers - Disaggregation of Revenues (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2023	Mar. 31, 2022
Revenue	$ 31,919	$ 24,081
Semiconductor Market [Member]
Revenue	17,683	13,390
Industrial Market [Member]
Revenue	3,137	2,799
Automotive [Member]
Revenue	2,597	2,756
Life Sciences [Member]
Revenue	1,513	699
Defense/ Aerospace [Member]
Revenue	2,839	1,493
Security [Member]
Revenue	966	574
Other Multi Markets [Member]
Revenue	3,184	2,370
Thermal Testing Products [Member]
Revenue	5,820	5,057
Thermal Process [Member]
Revenue	9,822	6,996
Semiconductor Production Test Products [Member]
Revenue	8,105	6,008
Video Imaging [Member]
Revenue	2,648	1,850
Flying Probe and In-circuit Testers [Member]
Revenue	1,160	1,688
Service and Other Products [Member]
Revenue	4,364	2,482
End User [Member]
Revenue	21,594	17,142
OEM and Integrators [Member]
Revenue	$ 10,215	$ 6,939