Note 8 - Revenue From Contracts With Customers - Disaggregation of Revenues (Details) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Sep. 30, 2022	Sep. 30, 2021	Sep. 30, 2022	Sep. 30, 2021
Revenue	$ 30,771	$ 21,144	$ 84,423	$ 62,520
Semiconductor Market [Member]
Revenue	19,170	13,656	48,969	42,653
Industrial Market [Member]
Revenue	2,130	2,191	7,859	5,142
Automotive [Member]
Revenue	1,621	1,339	7,971	3,508
Life Sciences [Member]
Revenue	1,715	715	3,583	1,944
Defense/ Aerospace [Member]
Revenue	1,914	947	4,830	3,721
Security [Member]
Revenue	871	6	2,239	6
Other Multi Markets [Member]
Revenue	3,350	2,290	8,972	5,546
Thermal Testing Products [Member]
Revenue	5,836	5,284	16,844	14,126
Thermal Process [Member]
Revenue	11,026	6,412	27,990	18,785
Semiconductor Production Test Products [Member]
Revenue	7,770	7,561	20,409	24,455
Video Imaging [Member]
Revenue	2,447	0	6,692	0
Flying Probe and In-circuit Testers [Member]
Revenue	1,605	0	5,359	0
Service and Other Products [Member]
Revenue	2,087	1,887	7,129	5,154
End User [Member]
Revenue	22,351	15,818	60,785	49,224
OEM, Integrators and Distributor [Member]
Revenue	$ 8,420	$ 5,326	$ 23,638	$ 13,296