Note 8 - Revenue From Contracts With Customers - Disaggregation of Revenues (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2022	Jun. 30, 2021	Jun. 30, 2022	Jun. 30, 2021
Revenue	$ 29,571	$ 21,820	$ 53,652	$ 41,376
Semiconductor Market [Member]
Revenue	16,409	15,677	29,799	28,997
Industrial Market [Member]
Revenue	2,930	1,524	5,729	2,951
Automotive [Member]
Revenue	3,594	842	6,350	2,169
Defense/ Aerospace [Member]
Revenue	1,423	1,522	2,916	2,774
Life Sciences [Member]
Revenue	1,169	586	1,868	1,229
Security [Member]
Revenue	794	0	1,368	0
Other Multi Markets [Member]
Revenue	3,252	1,669	5,622	3,256
Thermal Testing Products [Member]
Revenue	5,951	4,537	11,008	8,842
Thermal Process [Member]
Revenue	9,968	6,807	16,964	12,373
Semiconductor Production Test Products [Member]
Revenue	6,891	8,954	13,239	17,274
Video Imaging [Member]
Revenue	2,395	0	4,245	0
Flying Probe and In-circuit Testers [Member]
Revenue	2,065	0	3,754	0
Service and Other Products [Member]
Revenue	2,301	1,522	4,442	2,887
End User [Member]
Revenue	23,114	19,266	42,693	36,925
OEM and Integrators [Member]
Revenue	$ 6,457	$ 2,554	$ 10,959	$ 4,451