Note 7 - Revenue From Contracts With Customers - Disaggregation of Revenues (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2022	Mar. 31, 2021
Revenue	$ 24,081	$ 19,556
Semiconductor Market [Member]
Revenue	13,390	13,320
Industrial Market [Member]
Revenue	2,799	1,427
Automotive [Member]
Revenue	2,756	1,327
Defense/ Aerospace [Member]
Revenue	1,493	1,252
Life Sciences [Member]
Revenue	699	643
Security [Member]
Revenue	574	0
Other Multi Markets [Member]
Revenue	2,370	1,587
Thermal Testing Products [Member]
Revenue	5,057	4,305
Thermal Process [Member]
Revenue	7,465	5,566
Semiconductor Production Test Products [Member]
Revenue	6,348	8,320
Video Imaging [Member]
Revenue	1,851	0
Flying Probe and In-circuit Testers [Member]
Revenue	1,688	0
Service and Other Products [Member]
Revenue	1,672	1,365
End User [Member]
Revenue	19,579	17,660
OEM and Integrators [Member]
Revenue	$ 4,502	$ 1,896