Note 7 - Revenue From Contracts With Customers - Disaggregation of Revenues (Details) - USD ($) $ in Thousands	3 Months Ended																12 Months Ended
	Dec. 31, 2021	[1]	Sep. 30, 2021	[2]	Jun. 30, 2021	[3]	Mar. 31, 2021	[4]	Dec. 31, 2020	[5]	Sep. 30, 2020	[6]	Jun. 30, 2020	[7]	Mar. 31, 2020	[8]	Dec. 31, 2021	Dec. 31, 2020
Revenue	$ 22,358		$ 21,144		$ 21,820		$ 19,556		$ 14,875		$ 14,443		$ 13,275		$ 11,230		$ 84,878	$ 53,823
Semiconductor Market [Member]
Revenue																	54,937	26,870
Industrial Market [Member]
Revenue																	17,257	15,370
Defense/ Aerospace [Member]
Revenue																	4,125	6,314
Automotive [Member]
Revenue																	4,325	1,930
Other Multi Markets [Member]
Revenue																	4,234	3,339
Thermal Testing Products [Member]
Revenue																	19,156	15,768
Thermal Process [Member]
Revenue																	26,260	18,966
Semiconductor Production Test Products [Member]
Revenue																	31,825	13,112
Service and Other Products [Member]
Revenue																	7,637	5,977
End User [Member]
Revenue																	72,738	48,041
OEM and Integrators [Member]
Revenue																	$ 12,140	$ 5,782

[1] The quarter ended December 31, 2021 includes a recovery of $17 of restructuring and other charges which are discussed in Note 5.

[2] The quarter ended September 30, 2021 includes $51 of restructuring and other charges which are discussed in Note 5.

[3] The quarter ended June 30, 2021 includes $197 of restructuring and other charges which are discussed in Note 5.

[4] The quarter ended March 31, 2021 includes $55 of restructuring and other charges which are discussed in Note 5.

[5] The quarter ended December 31, 2020 includes $1,078 of restructuring and other charges which are discussed in Note 5.

[6] The quarter ended September 30, 2020 includes $161 of restructuring and other charges which are discussed in Note 5.

[7] The quarter ended June 30, 2020 includes $38 of restructuring and other charges which are discussed in Note 5.

[8] The quarter ended March 31, 2020 includes $8 of restructuring and other charges which are discussed in Note 5.