Business Combination - Consideration (Details) $ in Thousands		3 Months Ended	9 Months Ended
	Jan. 31, 2023 USD ($)	Sep. 30, 2024 USD ($)	Sep. 30, 2024 USD ($)	Sep. 30, 2023 USD ($)
Business Combination
Increase (decrease) in contingent consideration			$ (4,775)	$ 1,167
Contingent consideration payment			$ 1,818	$ 2,500
Epiluvac AB
Business Combination
Acquisition date fair value	$ 56,400
Cash paid, net of cash acquired	30,400
Contingent consideration	$ 26,100
Contingent consideration measurement input	0.0554	0.049	0.049
Business Combination, Contingent Consideration, Liability, Measurement Input	us-gaap:MeasurementInputDiscountRateMember	us-gaap:MeasurementInputDiscountRateMember	us-gaap:MeasurementInputDiscountRateMember
Contingent consideration	$ 26,100
Increase (decrease) in contingent consideration		$ (4,600)	$ (4,800)
Contingent consideration payment			1,800
Epiluvac AB | Other liabilities.
Business Combination
Contingent consideration		$ 17,700	$ 17,700
Epiluvac AB | Completion of certain defined milestones
Business Combination
Contingent consideration payments, High end of range	15,000
Epiluvac AB | Percentage of orders received during defined Earn-out period
Business Combination
Contingent consideration payments, High end of range	$ 20,000
Maximum earn-out period	4 years