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Assets - Inventories (Details) - USD ($)
$ in Thousands
Mar. 31, 2024
Dec. 31, 2023
Inventories    
Materials $ 144,793 $ 139,884
Work-in-process 75,344 71,278
Finished goods 3,670 6,183
Evaluation inventory 19,459 20,290
Total $ 243,266 $ 237,635