Business Combination - Consideration (Details) $ in Thousands		1 Months Ended	3 Months Ended
	Jan. 31, 2023 USD ($)	Jan. 31, 2023 USD ($)	Mar. 31, 2024 USD ($)
Business Combination
Increase (decrease) in contingent consideration			$ (625)
Contingent consideration payment			$ 1,818
Epiluvac AB
Business Combination
Acquisition date fair value		$ 56,400
Cash paid, net of cash acquired		30,400
Contingent consideration		$ 26,100
Business Combination, Contingent Consideration, Liability, Measurement Input	us-gaap:MeasurementInputDiscountRateMember	us-gaap:MeasurementInputDiscountRateMember	us-gaap:MeasurementInputDiscountRateMember
Contingent consideration measurement input	0.0554	0.0554	0.056
Contingent consideration	$ 26,100	$ 26,100
Increase (decrease) in contingent consideration			$ (600)
Contingent consideration payment			1,800
Epiluvac AB | Other liabilities.
Business Combination
Contingent consideration			$ 21,800
Epiluvac AB | Completion of certain defined milestones
Business Combination
Contingent consideration payments, High end of range	15,000	15,000
Epiluvac AB | Percentage of orders received during defined Earn-out period
Business Combination
Contingent consideration payments, High end of range	$ 20,000	$ 20,000
Maximum earn-out period	4 years