0001558370-24-007070.txt : 20240507 0001558370-24-007070.hdr.sgml : 20240507 20240507163103 ACCESSION NUMBER: 0001558370-24-007070 CONFORMED SUBMISSION TYPE: 10-Q PUBLIC DOCUMENT COUNT: 84 CONFORMED PERIOD OF REPORT: 20240331 FILED AS OF DATE: 20240507 DATE AS OF CHANGE: 20240507 FILER: COMPANY DATA: COMPANY CONFORMED NAME: VEECO INSTRUMENTS INC CENTRAL INDEX KEY: 0000103145 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] ORGANIZATION NAME: 06 Technology IRS NUMBER: 112989601 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 FILING VALUES: FORM TYPE: 10-Q SEC ACT: 1934 Act SEC FILE NUMBER: 000-16244 FILM NUMBER: 24922517 BUSINESS ADDRESS: STREET 1: TERMINAL DRIVE CITY: PLAINVIEW STATE: NY ZIP: 11803 BUSINESS PHONE: 516 677-0200 MAIL ADDRESS: STREET 1: TERMINAL DRIVE CITY: PLAINVIEW STATE: NY ZIP: 11803 FORMER COMPANY: FORMER CONFORMED NAME: VACUUM ELECTRONIC MANUFACTURING CORP DATE OF NAME CHANGE: 19700408 10-Q 1 veco-20240331x10q.htm 10-Q
P1Yhttp://fasb.org/us-gaap/2023#FairValueInputsLevel2Memberhttp://www.veeco.com/20240331#AccruedAndOtherLiabilitiesCurrenthttp://fasb.org/us-gaap/2023#OperatingLeaseLiabilityNoncurrent http://www.veeco.com/20240331#AccruedAndOtherLiabilitiesCurrent0000103145--12-312024Q1falsehttp://fasb.org/us-gaap/2023#FairValueInputsLevel2MemberP1Yhttp://fasb.org/us-gaap/2023#MeasurementInputDiscountRateMemberhttp://fasb.org/us-gaap/2023#FairValueInputsLevel2Memberhttp://fasb.org/us-gaap/2023#MeasurementInputDiscountRateMember0000103145srt:MinimumMember2024-01-012024-03-310000103145us-gaap:AccumulatedOtherComprehensiveIncomeMember2023-01-012023-03-310000103145srt:MaximumMemberveco:RevolvingCreditFacilityDecember2021Member2021-12-160000103145veco:RevolvingCreditFacilityDecember2021Memberus-gaap:SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember2021-12-160000103145veco:CertificateOfDepositsAndTimeDepositsMemberus-gaap:FairValueInputsLevel1Memberus-gaap:FairValueMeasurementsRecurringMember2024-03-310000103145us-gaap:USTreasurySecuritiesMemberus-gaap:FairValueInputsLevel1Memberus-gaap:FairValueMeasurementsRecurringMember2024-03-310000103145us-gaap:MoneyMarketFundsMemberus-gaap:FairValueInputsLevel1Memberus-gaap:FairValueMeasurementsRecurringMember2024-03-310000103145us-gaap:CorporateDebtSecuritiesMemberus-gaap:FairValueInputsLevel2Memberus-gaap:FairValueMeasurementsRecurringMember2024-03-310000103145veco:CertificateOfDepositsAndTimeDepositsMemberus-gaap:FairValueMeasurementsRecurringMember2024-03-310000103145us-gaap:USTreasurySecuritiesMemberus-gaap:FairValueMeasurementsRecurringMember2024-03-310000103145us-gaap:MoneyMarketFundsMemberus-gaap:FairValueMeasurementsRecurringMember2024-03-310000103145us-gaap:CorporateDebtSecuritiesMemberus-gaap:FairValueMeasurementsRecurringMember2024-03-310000103145veco:CertificateOfDepositsAndTimeDepositsMemberus-gaap:FairValueInputsLevel1Memberus-gaap:FairValueMeasurementsRecurringMember2023-12-310000103145us-gaap:MoneyMarketFundsMemberus-gaap:FairValueInputsLevel1Memberus-gaap:FairValueMeasurementsRecurringMember2023-12-310000103145us-gaap:CorporateDebtSecuritiesMemberus-gaap:FairValueInputsLevel2Memberus-gaap:FairValueMeasurementsRecurringMember2023-12-310000103145veco:CertificateOfDepositsAndTimeDepositsMemberus-gaap:FairValueMeasurementsRecurringMember2023-12-310000103145us-gaap:MoneyMarketFundsMemberus-gaap:FairValueMeasurementsRecurringMember2023-12-310000103145us-gaap:CorporateDebtSecuritiesMemberus-gaap:FairValueMeasurementsRecurringMember2023-12-310000103145veco:DerivativeContractCappedCallMember2020-05-130000103145veco:DerivativeContractCappedCallMember2020-05-132020-05-130000103145veco:EpiluvacAbMemberveco:PercentageOfOrdersReceivedDuringEarnOutPeriodMember2023-01-312023-01-310000103145us-gaap:CommonStockMember2024-01-012024-03-310000103145us-gaap:CommonStockMember2023-01-012023-03-310000103145us-gaap:RetainedEarningsMember2024-03-310000103145us-gaap:AdditionalPaidInCapitalMember2024-03-310000103145us-gaap:AccumulatedTranslationAdjustmentMember2024-03-310000103145us-gaap:AccumulatedOtherComprehensiveIncomeMember2024-03-310000103145us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember2024-03-310000103145us-gaap:RetainedEarningsMember2023-12-310000103145us-gaap:AdditionalPaidInCapitalMember2023-12-310000103145us-gaap:AccumulatedTranslationAdjustmentMember2023-12-310000103145us-gaap:AccumulatedOtherComprehensiveIncomeMember2023-12-310000103145us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember2023-12-310000103145us-gaap:RetainedEarningsMember2023-03-310000103145us-gaap:AdditionalPaidInCapitalMember2023-03-310000103145us-gaap:AccumulatedOtherComprehensiveIncomeMember2023-03-310000103145us-gaap:RetainedEarningsMember2022-12-310000103145us-gaap:AdditionalPaidInCapitalMember2022-12-310000103145us-gaap:AccumulatedOtherComprehensiveIncomeMember2022-12-310000103145us-gaap:CommonStockMember2024-03-310000103145us-gaap:CommonStockMember2023-12-310000103145us-gaap:CommonStockMember2023-03-310000103145us-gaap:CommonStockMember2022-12-310000103145srt:MinimumMemberus-gaap:RestrictedStockMember2024-01-012024-03-310000103145srt:MaximumMemberus-gaap:RestrictedStockMember2024-01-012024-03-310000103145veco:RestrictedAndPerformanceSharesMember2024-03-310000103145veco:RestrictedAndPerformanceSharesMember2023-12-310000103145veco:RestrictedAndPerformanceSharesMember2024-01-012024-03-310000103145srt:MinimumMember2024-04-012024-03-310000103145srt:MaximumMember2024-04-012024-03-3100001031452024-04-012024-03-310000103145veco:SemiconductorMember2024-01-012024-03-310000103145veco:ScientificAndOtherMember2024-01-012024-03-310000103145veco:RestOfWorldMember2024-01-012024-03-310000103145veco:DataStorageMember2024-01-012024-03-310000103145veco:CompoundSemiconductorMember2024-01-012024-03-310000103145veco:AsiaPacificExcludingChinaMember2024-01-012024-03-310000103145us-gaap:EMEAMember2024-01-012024-03-310000103145country:US2024-01-012024-03-310000103145country:CN2024-01-012024-03-310000103145veco:SemiconductorMember2023-01-012023-03-310000103145veco:ScientificAndOtherMember2023-01-012023-03-310000103145veco:RestOfWorldMember2023-01-012023-03-310000103145veco:DataStorageMember2023-01-012023-03-310000103145veco:CompoundSemiconductorMember2023-01-012023-03-310000103145veco:AsiaPacificExcludingChinaMember2023-01-012023-03-310000103145us-gaap:EMEAMember2023-01-012023-03-310000103145country:US2023-01-012023-03-310000103145country:CN2023-01-012023-03-310000103145us-gaap:MachineryAndEquipmentMember2024-03-310000103145us-gaap:LeaseholdImprovementsMember2024-03-310000103145us-gaap:LandMember2024-03-310000103145us-gaap:BuildingAndBuildingImprovementsMember2024-03-310000103145us-gaap:MachineryAndEquipmentMember2023-12-310000103145us-gaap:LeaseholdImprovementsMember2023-12-310000103145us-gaap:LandMember2023-12-310000103145us-gaap:BuildingAndBuildingImprovementsMember2023-12-310000103145us-gaap:AccumulatedTranslationAdjustmentMember2024-01-012024-03-310000103145us-gaap:AccumulatedOtherComprehensiveIncomeMember2024-01-012024-03-310000103145us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember2024-01-012024-03-310000103145us-gaap:RetainedEarningsMember2024-01-012024-03-310000103145us-gaap:RetainedEarningsMember2023-01-012023-03-310000103145srt:MinimumMemberveco:RevolvingCreditFacilityDecember2021Member2021-12-162021-12-160000103145srt:MaximumMemberveco:RevolvingCreditFacilityDecember2021Member2021-12-162021-12-160000103145veco:RevolvingCreditFacilityDecember2021Member2021-12-160000103145veco:RevolvingCreditFacilityDecember2021LetterOfCreditMember2021-12-160000103145veco:RevolvingCreditFacilityDecember2021Member2024-01-012024-03-310000103145veco:RevolvingCreditFacilityDecember2021Member2023-01-012023-12-310000103145us-gaap:FairValueInputsLevel2Memberus-gaap:FairValueMeasurementsRecurringMemberus-gaap:USGovernmentAgenciesDebtSecuritiesMember2024-03-310000103145us-gaap:FairValueInputsLevel2Memberus-gaap:FairValueMeasurementsRecurringMemberus-gaap:CorporateDebtSecuritiesMember2024-03-310000103145us-gaap:FairValueInputsLevel1Memberus-gaap:FairValueMeasurementsRecurringMemberus-gaap:USTreasurySecuritiesMember2024-03-310000103145us-gaap:FairValueMeasurementsRecurringMemberus-gaap:USTreasurySecuritiesMember2024-03-310000103145us-gaap:FairValueMeasurementsRecurringMemberus-gaap:USGovernmentAgenciesDebtSecuritiesMember2024-03-310000103145us-gaap:FairValueMeasurementsRecurringMemberus-gaap:CorporateDebtSecuritiesMember2024-03-310000103145us-gaap:FairValueInputsLevel2Memberus-gaap:FairValueMeasurementsRecurringMember2024-03-310000103145us-gaap:FairValueInputsLevel1Memberus-gaap:FairValueMeasurementsRecurringMember2024-03-310000103145us-gaap:FairValueMeasurementsRecurringMember2024-03-310000103145us-gaap:FairValueInputsLevel2Memberus-gaap:FairValueMeasurementsRecurringMemberus-gaap:USGovernmentAgenciesDebtSecuritiesMember2023-12-310000103145us-gaap:FairValueInputsLevel2Memberus-gaap:FairValueMeasurementsRecurringMemberus-gaap:CorporateDebtSecuritiesMember2023-12-310000103145us-gaap:FairValueInputsLevel2Memberus-gaap:FairValueMeasurementsRecurringMemberus-gaap:CommercialPaperMember2023-12-310000103145us-gaap:FairValueInputsLevel1Memberus-gaap:FairValueMeasurementsRecurringMemberus-gaap:USTreasurySecuritiesMember2023-12-310000103145us-gaap:FairValueMeasurementsRecurringMemberus-gaap:USTreasurySecuritiesMember2023-12-310000103145us-gaap:FairValueMeasurementsRecurringMemberus-gaap:USGovernmentAgenciesDebtSecuritiesMember2023-12-310000103145us-gaap:FairValueMeasurementsRecurringMemberus-gaap:CorporateDebtSecuritiesMember2023-12-310000103145us-gaap:FairValueMeasurementsRecurringMemberus-gaap:CommercialPaperMember2023-12-310000103145us-gaap:FairValueInputsLevel2Memberus-gaap:FairValueMeasurementsRecurringMember2023-12-310000103145us-gaap:FairValueInputsLevel1Memberus-gaap:FairValueMeasurementsRecurringMember2023-12-310000103145us-gaap:FairValueMeasurementsRecurringMember2023-12-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2027Memberus-gaap:OtherNonoperatingIncomeExpenseMember2023-01-012023-12-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2025Memberus-gaap:OtherNonoperatingIncomeExpenseMember2023-01-012023-12-310000103145us-gaap:TrademarksAndTradeNamesMember2024-03-310000103145us-gaap:TechnologyBasedIntangibleAssetsMember2024-03-310000103145us-gaap:OtherIntangibleAssetsMember2024-03-310000103145us-gaap:CustomerRelationshipsMember2024-03-310000103145us-gaap:TrademarksAndTradeNamesMember2023-12-310000103145us-gaap:TechnologyBasedIntangibleAssetsMember2023-12-310000103145us-gaap:OtherIntangibleAssetsMember2023-12-310000103145us-gaap:CustomerRelationshipsMember2023-12-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2027Member2023-05-192023-05-190000103145veco:ConvertibleSeniorUnsecuredNotesDue2025Member2023-05-192023-05-190000103145veco:ConvertibleSeniorUnsecuredNotesDue2025AndDue2027Member2023-05-192023-05-190000103145veco:ConvertibleSeniorUnsecuredNotesDue2023Member2021-01-012021-12-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2023Member2020-01-012020-12-310000103145veco:RevolvingCreditFacilityDecember2021Member2021-12-162021-12-160000103145veco:ConvertibleSeniorUnsecuredNotesDue2029Member2023-12-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2027Member2023-12-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2025Member2023-12-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2023Member2017-01-100000103145veco:ConvertibleSeniorUnsecuredNotesDue2025Due2027AndDue2029Member2024-01-012024-03-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2025AndDue2027Member2024-01-012024-03-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2029Member2023-05-192023-05-190000103145veco:ConvertibleSeniorUnsecuredNotesDue2025Member2020-11-172020-11-170000103145veco:ConvertibleSeniorUnsecuredNotesDue2027Member2020-05-182020-05-180000103145veco:ConvertibleSeniorUnsecuredNotesDue2029Member2023-05-190000103145veco:ConvertibleSeniorUnsecuredNotesDue2025Member2020-11-170000103145veco:ConvertibleSeniorUnsecuredNotesDue2027Member2020-05-180000103145srt:MinimumMemberveco:RevolvingCreditFacilityDecember2021Memberus-gaap:SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember2021-12-162021-12-160000103145srt:MinimumMemberveco:RevolvingCreditFacilityDecember2021Memberus-gaap:BaseRateMember2021-12-162021-12-160000103145srt:MaximumMemberveco:RevolvingCreditFacilityDecember2021Memberus-gaap:SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember2021-12-162021-12-160000103145srt:MaximumMemberveco:RevolvingCreditFacilityDecember2021Memberus-gaap:BaseRateMember2021-12-162021-12-160000103145veco:ConvertibleSeniorUnsecuredNotesDue2029Member2024-03-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2027Member2024-03-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2025Member2024-03-3100001031452023-03-3100001031452022-12-310000103145veco:EpiluvacAbMember2024-03-310000103145us-gaap:OtherNoncurrentLiabilitiesMemberveco:EpiluvacAbMember2024-03-310000103145veco:EpiluvacAbMember2023-01-310000103145veco:EpiluvacAbMemberveco:PercentageOfOrdersReceivedDuringEarnOutPeriodMember2023-01-310000103145veco:EpiluvacAbMemberveco:CompletionOfMilestonesMember2023-01-310000103145veco:EpiluvacAbMember2024-01-012024-03-310000103145veco:EpiluvacAbMember2023-01-012023-01-310000103145us-gaap:CommercialPaperMember2023-12-310000103145us-gaap:USTreasurySecuritiesMember2024-03-310000103145us-gaap:USGovernmentAgenciesDebtSecuritiesMember2024-03-310000103145us-gaap:CorporateDebtSecuritiesMember2024-03-310000103145us-gaap:USTreasurySecuritiesMember2023-12-310000103145us-gaap:USGovernmentAgenciesDebtSecuritiesMember2023-12-310000103145us-gaap:CorporateDebtSecuritiesMember2023-12-310000103145veco:PotentiallyDilutiveSharesMember2024-01-012024-03-310000103145veco:PotentiallyDilutiveSharesMember2023-01-012023-03-310000103145us-gaap:ConvertibleDebtMember2023-01-012023-03-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2029Member2024-01-012024-03-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2027Member2024-01-012024-03-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2025Member2024-01-012024-03-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2027Member2023-01-012023-03-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2025Member2023-01-012023-03-310000103145veco:ConvertibleSeniorUnsecuredNotesDue2023Member2023-01-012023-03-310000103145us-gaap:SellingGeneralAndAdministrativeExpensesMember2024-01-012024-03-310000103145us-gaap:ResearchAndDevelopmentExpenseMember2024-01-012024-03-310000103145us-gaap:CostOfSalesMember2024-01-012024-03-310000103145us-gaap:SellingGeneralAndAdministrativeExpensesMember2023-01-012023-03-310000103145us-gaap:ResearchAndDevelopmentExpenseMember2023-01-012023-03-310000103145us-gaap:CostOfSalesMember2023-01-012023-03-310000103145us-gaap:AdditionalPaidInCapitalMember2024-01-012024-03-310000103145us-gaap:AdditionalPaidInCapitalMember2023-01-012023-03-3100001031452023-01-012023-03-3100001031452024-03-3100001031452023-12-310000103145veco:JohnKiernanMember2024-03-310000103145veco:JohnKiernanMember2024-01-012024-03-3100001031452024-05-0100001031452024-01-012024-03-31xbrli:sharesiso4217:USDxbrli:pureiso4217:USDxbrli:sharesveco:Dveco:segmentveco:item

UNITED STATES

SECURITIES AND EXCHANGE COMMISSION

Washington, D.C. 20549

FORM 10-Q

(Mark One)

QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934

For the quarterly period ended March 31, 2024

OR

TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934

Commission file number 0-16244

VEECO INSTRUMENTS INC.

(Exact Name of Registrant as Specified in Its Charter)

Delaware

    

11-2989601

(State or Other Jurisdiction of Incorporation or Organization)

(I.R.S. Employer Identification No.)

Terminal Drive
Plainview, New York

11803

(Address of Principal Executive Offices)

(Zip Code)

Registrant’s telephone number, including area code:

(516) 677-0200

Securities registered pursuant to Section 12(b) of the Act:

Title of each class

Trading Symbol(s)

Name of each exchange on which registered

Common Stock, par value $0.01 per share

VECO

The NASDAQ Global Select Market

Indicate by check mark whether the registrant (1) has filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that the registrant was required to file such reports), and (2) has been subject to such filing requirements for the past 90 days.  Yes   No 

Indicate by check mark whether the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T (§232.405 of this chapter) during the preceding 12 months (or for such shorter period that the registrant was required to submit such files).Yes   No 

Indicate by check mark whether the registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer, smaller reporting company, or an emerging growth company. See the definitions of “large accelerated filer,” “accelerated filer,” “smaller reporting company,” and “emerging growth company” in Rule 12b-2 of the Exchange Act.

Large accelerated filer 

    

    

Accelerated filer 

Non-accelerated filer 

Smaller reporting company 

Emerging growth company

If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act.

Indicate by check mark whether the registrant is a shell company (as defined in Rule 12b-2 of the Exchange Act).  Yes   No 

As of May 1, 2024, there were 56,637,662 shares of the registrant’s common stock outstanding.

Safe Harbor Statement

This quarterly report on Form 10-Q (the “Report”) contains forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended. Discussions containing such forward-looking statements may be found in Part I - Items 1, 2, and 3 hereof, as well as within this Report generally. In addition, when used in this Report, the words “believes,” “anticipates,” “expects,” “estimates,” “targets,” “plans,” “intends,” “will,” and similar expressions related to the future are intended to identify forward-looking statements. All forward-looking statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from projected results.

In addition, the preparation of financial statements in conformity with U.S. Generally Accepted Accounting Principles (“U.S. GAAP”) requires management to make estimates and assumptions that affect the amounts reported in the financial statements and accompanying notes. Although these estimates and assumptions are based on knowledge of current events and planned actions to be undertaken in the future, they may ultimately differ from actual results. Operating results for the three months ended March 31, 2024 are not necessarily indicative of the results that may be expected for the year ending December 31, 2024. All estimates and assumptions are subject to a number of risks and uncertainties that could cause actual results to differ materially from these estimates and assumptions.

The risks and uncertainties of Veeco Instruments Inc. (together with its consolidated subsidiaries, “Veeco,” the “Company,” “we,” “us,” and “our,” unless the context indicates otherwise) include, without limitation, those set forth under the heading “Risk Factors” in Part 1, Item 1A of our 2023 Form 10-K, and the following:

Risks Related to Our Business and Industry

Unfavorable market conditions have adversely affected, and may continue to adversely affect, our operating results;

We face significant competition;

We operate in industries characterized by rapid technological change;

Certain of our sales are dependent on the demand for consumer electronic products and automobiles, which can experience significant volatility;

We have a concentrated customer base, located primarily in a limited number of regions, which operates in highly concentrated industries;

The cyclicality of the industries we serve directly affects our business;

Our failure to estimate customer demand accurately could result in inventory obsolescence, liabilities to our suppliers for products no longer needed, and manufacturing interruptions or delays which could affect our ability to meet customer demand;

1

We rely on a limited number of suppliers, some of whom are our sole source for particular components;

Our failure to successfully manage our outsourcing activities or failure of our outsourcing partners to perform as anticipated could adversely affect our results of operations;

The timing of our orders, shipments, and revenue recognition may cause our quarterly operating results to fluctuate significantly;

Our sales cycle is long and unpredictable;

Our backlog is subject to customer cancellation or modification which could result in decreased sales, increased inventory obsolescence, and liabilities to our suppliers for products no longer needed;

We are exposed to risks associated with business combinations, acquisitions, strategic investments and divestitures;

Risks Associated with Operating a Global Business

We are exposed to risks of operating businesses outside the United States;

Changes in U.S. trade policy and export controls and ongoing trade disputes between the U.S. and China have adversely affected, and may continue to adversely affect, our business, results of operations, and financial conditions;

We may be unable to obtain required export licenses for the sale of our products;

We are exposed to various risks associated with global regulatory requirements;

Risks Related to Intellectual Property and Cybersecurity

Disruptions in our information technology systems or data security incidents could result in significant financial, legal, regulatory, business, and reputational harm to us;

We may be unable to effectively enforce and protect our intellectual property rights;

We may be subject to claims of intellectual property infringement by others;

Financial, Accounting, and Capital Markets Risks

Our operating results may be adversely affected by tightening credit markets;

We are subject to foreign currency exchange risks;

We may be required to take impairment charges on assets;

Changes in accounting pronouncements or taxation rules, practices, or rates may adversely affect our financial results;

Our current debt facilities contain certain restrictions, covenants and repurchase provisions that may limit our ability to raise the funds necessary to meet our working capital needs, which may include the cash conversion of the Notes or repurchase of the Notes for cash upon a fundamental change;

2

Issuance of our common stock, if any, upon conversion of the Notes, as well as the capped call transactions and the hedging activities of the option counterparties, may impair or reduce our ability to utilize our research and development credits carryforwards in the future;

The capped call transactions may affect the value of the 2027 Notes and our common stock;

General Risk Factors

The price of our common shares is volatile and could decrease;

Our inability to attract, retain, and motivate employees could have a material adverse effect on our business;

We are subject to risks of non-compliance with environmental, health, and safety regulations;

We are exposed to risks associated with the increased attention by our stakeholders to environmental, social and governance (“ESG”) matters; and

We have adopted certain measures that may have anti-takeover effects, which may make an acquisition of our Company by another company more difficult.

Consequently, such forward looking statements and estimates should be regarded solely as the current plans and beliefs of Veeco. We do not undertake any obligation to update any forward-looking statements to reflect future events or circumstances after the date of such statements.

3

PART IFINANCIAL INFORMATION

Item 1. Financial Statements

Veeco Instruments Inc. and Subsidiaries

Consolidated Balance Sheets

(in thousands, except share amounts)

March 31,

December 31,

    

2024

    

2023

Assets

(unaudited)

Current assets:

Cash and cash equivalents

$

173,998

$

158,781

Restricted cash

326

339

Short-term investments

 

122,886

 

146,664

Accounts receivable, net

 

106,532

 

103,018

Contract assets

34,336

24,370

Inventories

 

243,266

 

237,635

Prepaid expenses and other current assets

34,550

35,471

Total current assets

 

715,894

 

706,278

Property, plant, and equipment, net

 

115,297

 

118,459

Operating lease right-of-use assets

23,685

24,377

Intangible assets, net

42,054

43,945

Goodwill

 

214,964

 

214,964

Deferred income taxes

118,724

117,901

Other assets

 

3,075

 

3,117

Total assets

$

1,233,693

$

1,229,041

Liabilities and stockholders' equity

Current liabilities:

Accounts payable

$

54,011

$

42,383

Accrued expenses and other current liabilities

 

59,259

 

57,624

Contract liabilities

 

93,812

 

118,026

Income taxes payable

 

852

 

Current portion of long-term debt

 

26,425

 

Total current liabilities

 

234,359

 

218,033

Deferred income taxes

 

6,496

 

6,552

Long-term debt

 

248,811

 

274,941

Long-term operating lease liabilities

30,949

31,529

Other liabilities

 

25,168

 

25,544

Total liabilities

 

545,783

 

556,599

Stockholders' equity:

Preferred stock, $0.01 par value; 500,000 shares authorized; no shares issued and outstanding.

 

Common stock, $0.01 par value; 120,000,000 shares authorized; 56,637,473 shares issued and outstanding at March 31, 2024 and 56,364,131 shares issued and outstanding at December 31, 2023

 

566

 

564

Additional paid-in capital

 

1,196,180

 

1,202,440

Accumulated deficit

 

(510,315)

 

(532,169)

Accumulated other comprehensive income

 

1,479

 

1,607

Total stockholders' equity

 

687,910

 

672,442

Total liabilities and stockholders' equity

$

1,233,693

$

1,229,041

See accompanying Notes to the Consolidated Financial Statements.

4

Veeco Instruments Inc. and Subsidiaries

Consolidated Statements of Operations

(in thousands, except per share amounts)

(unaudited)

Three months ended March 31,

    

2024

    

2023

    

Net sales

$

174,484

$

153,504

Cost of sales

 

99,065

 

91,487

Gross profit

 

75,419

62,017

Operating expenses, net:

Research and development

 

29,642

 

27,562

Selling, general, and administrative

 

24,700

 

22,627

Amortization of intangible assets

 

1,891

 

2,111

Other operating expense (income), net

(2,859)

(89)

Total operating expenses, net

53,374

52,211

Operating income

 

22,045

 

9,806

Interest income

 

3,324

 

2,073

Interest expense

 

(2,619)

 

(2,875)

Income before income taxes

 

22,750

9,004

Income tax expense

 

896

 

263

Net income

$

21,854

$

8,741

Income per common share:

Basic

$

0.39

$

0.17

Diluted

$

0.37

$

0.17

Weighted average number of shares:

Basic

 

55,968

 

50,559

Diluted

 

60,764

 

59,856

See accompanying Notes to the Consolidated Financial Statements.

5

Veeco Instruments Inc. and Subsidiaries

Consolidated Statements of Comprehensive Income

(in thousands)

(unaudited)

Three months ended March 31,

    

2024

    

2023

    

    

Net income

$

21,854

$

8,741

Other comprehensive income (loss), net of tax:

Unrealized gain (loss) on available-for-sale securities

 

(95)

 

470

Change in currency translation adjustments

 

(33)

 

6

Total other comprehensive income (loss), net of tax

 

(128)

 

476

Total comprehensive income

$

21,726

$

9,217

See accompanying Notes to the Consolidated Financial Statements.

6

Veeco Instruments Inc. and Subsidiaries

Consolidated Statements of Cash Flows

(in thousands)

(unaudited)

Three months ended March 31,

    

2024

    

2023

    

Cash Flows from Operating Activities

Net income

$

21,854

$

8,741

Adjustments to reconcile net income to net cash provided by (used in) operating activities:

Depreciation and amortization

 

6,405

 

6,276

Non-cash interest expense

296

226

Deferred income taxes

 

(842)

 

191

Share-based compensation expense

 

8,082

 

7,027

Change in contingent consideration

(625)

Changes in operating assets and liabilities:

Accounts receivable and contract assets

 

(13,480)

 

3,157

Inventories

 

(4,838)

 

(25,763)

Prepaid expenses and other current assets

 

395

 

(4,783)

Accounts payable and accrued expenses

 

17,621

 

13,431

Contract liabilities

 

(24,215)

 

5,534

Income taxes receivable and payable, net

 

853

 

94

Other, net

 

(2,145)

 

(213)

Net cash provided by (used in) operating activities

 

9,361

 

13,918

Cash Flows from Investing Activities

Capital expenditures

 

(5,990)

 

(6,946)

Acquisition of businesses, net of cash acquired

(30,373)

Proceeds from the sale of investments

 

53,473

 

40,049

Payments for purchases of investments

 

(28,791)

 

(3,492)

Proceeds from sale of productive assets

 

2,033

 

Net cash provided by (used in) investing activities

20,725

(762)

Cash Flows from Financing Activities

Restricted stock tax withholdings

(14,340)

(8,509)

Contingent consideration payment

(1,818)

Proceeds (net of tax withholdings) from option exercises and employee stock purchase plan

 

1,318

 

1,241

Extinguishment of Convertible Notes

 

 

(20,173)

Net cash provided by (used in) financing activities

 

(14,840)

 

(27,441)

Effect of exchange rate changes on cash and cash equivalents

 

(42)

 

10

Net increase (decrease) in cash, cash equivalents, and restricted cash

 

15,204

 

(14,275)

Cash, cash equivalents, and restricted cash - beginning of period

 

159,120

 

155,472

Cash, cash equivalents, and restricted cash - end of period

$

174,324

$

141,197

Supplemental Disclosure of Cash Flow Information

Interest paid

$

619

$

2,744

Income taxes paid, net of refunds received

992

386

Non-cash activities

Capital expenditures included in accounts payable and accrued expenses

599

5,052

Net transfer of inventory to property, plant and equipment

4,304

Right-of-use assets obtained in exchange for lease obligations

630

See accompanying Notes to the Consolidated Financial Statements.

7

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements

(unaudited)

Note 1 — Basis of Presentation

The accompanying unaudited Consolidated Financial Statements of Veeco have been prepared in accordance with U.S. GAAP as defined in Financial Accounting Standards Board (“FASB”) Accounting Standards Codification 270 for interim financial information and with the instructions to Rule 10-01 of Securities and Exchange Commission Regulation S-X. Accordingly, they do not include all of the information and footnotes required by U.S. GAAP for complete financial statements as the interim information is an update of the information that was presented in Veeco’s most recent annual financial statements. For further information, refer to Veeco’s Consolidated Financial Statements and Notes thereto included in the Annual Report on Form 10-K for the year ended December 31, 2023 (“2023 Form 10-K”). In the opinion of management, all adjustments considered necessary for a fair presentation have been included. All such adjustments are of a normal, recurring nature.

Veeco reports interim quarters on a 13-week basis ending on the last Sunday of each quarter. The fourth quarter always ends on the last day of the calendar year, December 31. The 2024 interim quarters end on March 31, June 30, and September 29, and the 2023 interim quarters ended on April 2, July 2, and October 1. These interim quarters are reported as March 31, June 30, and September 30 in Veeco’s interim consolidated financial statements.

The preparation of financial statements in conformity with U.S. GAAP requires the Company’s management to make estimates and assumptions that affect the amounts reported in the financial statements and accompanying notes. Although these estimates are based on management’s knowledge of current events and actions it may undertake in the future, actual results may differ from these estimates.

Revenue Recognition

Revenue is recognized upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration the Company expects to receive in exchange for such product or service. The Company’s contracts with customers generally do not contain variable consideration. In the rare instances where variable consideration is included, the Company estimates the amount of variable consideration and determines what portion of that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. The Company’s contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, maintenance, and service plans. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. The Company also evaluates whether multiple transactions with the same customer or related parties should be considered part of a single contract based on an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another.

   

When there are separate units of accounting, the Company allocates revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which the Company separately sells the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, the Company estimates stand-alone selling prices generally using an expected cost plus margin approach.

   

Most of the Company’s revenue is recognized at a point in time when the performance obligation is satisfied. The Company considers many facts when evaluating each of its sales arrangements to determine the timing of revenue recognition, including its contractual obligations and the nature of the customer’s post-delivery acceptance provisions. The Company’s system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. For many of these arrangements, a customer source inspection of the system is performed in the Company’s facility, test data is sent to the customer documenting that the system is functioning to the agreed upon specifications prior to delivery, or other quality assurance testing is performed

8

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

internally to ensure system functionality prior to shipment. Historically, such source inspection or test data replicates the field acceptance provisions that are performed at the customer’s site prior to final acceptance of the system. When the Company objectively demonstrates that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or the Company’s historical experience of its tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where the Company cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. The Company recognizes such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met.

   

In certain cases the Company’s contracts with customers contain a billing retention, which is billed by the Company and payable by the customer when field acceptance provisions are completed. Revenue recognized in advance of the amount that has been billed is recorded as a contract asset on the Consolidated Balance Sheets.

   

The Company recognizes revenue related to maintenance and service contracts over time based upon the respective contract term. Installation revenue is recognized over time as the installation services are performed. The Company recognizes revenue from the sales of components, spare parts, and specified service engagements at a point in time, which is typically consistent with the time of delivery in accordance with the terms of the applicable sales arrangement.

   

The Company may receive advanced payments on system transactions. The timing of the transfer of goods or services related to the advanced payments is either at the discretion of the customer or generally expected to be within one year from the advanced receipt. As such, the Company does not adjust transaction prices for the time value of money. Incremental direct costs incurred related to the acquisition of a customer contract, such as sales commissions, are expensed as incurred since the expected amortization period is one year or less.

The Company has elected to treat shipping and handling costs as a fulfillment activity, and the Company includes such costs in cost of sales when the Company recognizes revenue for the related goods. Taxes assessed by governmental authorities that are collected by the Company from a customer are excluded from revenue.

Inventories

Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter the Company assesses the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods; and evaluation inventory at customer facilities. Obsolete inventory or inventory in excess of management’s estimated usage requirement is written down to its estimated net realizable value if less than cost. The Company evaluates usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for the Company’s products may require a write down of inventory, which would be reflected in cost of sales in the period the revision is made. Inventory acquired as part of a business combination is recorded at fair value on the date of acquisition.

Recent Accounting Standards Not Yet Adopted

In November 2023, the FASB issued ASU 2023-07: Segment Reporting (Topic 280) – Improvements to Reportable Segment Disclosures. This standard primarily enhances disclosures about significant segment expenses. The standard requires interim and annual disclosure of significant segment expenses that are regularly provided to the chief operating decision-maker (“CODM”) and included within the reported measure of a segment’s profit or loss, requires interim disclosures about a reportable segment’s profit and loss and assets that are currently required annually, requires disclosure of the position and title of the CODM, clarifies circumstances in which an entity can disclose multiple

9

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

segment measures of profit or loss and contains other disclosure requirements. This authoritative guidance is effective for fiscal years beginning after December 15, 2023, and interim periods within fiscal years beginning after December 15, 2024, with early adoption permitted. The Company is evaluating the effect of this new guidance on its consolidated financial statements.

Note 2 — Income Per Common Share

Basic income per share is calculated by dividing net income by the weighted average number of shares outstanding during the period. Diluted income per share is calculated by dividing net income available to common shareholders by the weighted average number of shares used to calculate basic income per share plus the weighted average number of common share equivalents outstanding during the period. The dilutive effect of outstanding options to purchase common stock and share-based awards is considered in diluted income per share by application of the treasury stock method. The dilutive effect of performance share units is included in diluted income per common share if the performance targets have been achieved, or would have been achieved if the reporting date was the end of the contingency period. Finally, the Company includes the dilutive effect of shares issuable upon conversion of its Notes in the calculation of diluted income per share using the if-converted method. The Company has the option for the 2025 and 2027 Notes to settle the conversion value in any combination of cash or shares, and as such, the maximum number of shares issuable are included in the dilutive share count if the effect would be dilutive. The Company must settle the principal amount of the 2029 Notes in cash, and has the option to settle any excess of the conversion value over the principal amount in any combination of cash or shares. As such, the Company only includes the excess shares that may be issuable above the principal amount of the 2029 Notes in the dilutive share count, if the effect would be dilutive.

The computations of basic and diluted income per share for the three months ended March 31, 2024 and 2023 are as follows:

Three months ended March 31,

    

2024

    

2023

    

    

(in thousands, except per share amounts)

Numerator:

Net income

$

21,854

$

8,741

Interest expense associated with convertible notes

514

1,277

Net income available to common shareholders

$

22,368

$

10,018

Denominator:

Basic weighted average shares outstanding

 

55,968

 

50,559

Effect of potentially dilutive share-based awards

939

355

Dilutive effect of convertible notes

 

3,857

 

8,942

Diluted weighted average shares outstanding

 

60,764

 

59,856

Net income per common share:

Basic

$

0.39

$

0.17

Diluted

$

0.37

$

0.17

Potentially dilutive shares excluded from the diluted calculation as their effect would be antidilutive

213

1,140

Potential shares to be issued for settlement of the convertible notes excluded from the diluted calculation as their effect would be antidilutive

5,603

10

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

Note 3 — Business Combination

Epiluvac

On January 31, 2023, the Company acquired Epiluvac AB, a privately held manufacturer of chemical vapor deposition (CVD) epitaxy systems that enable silicon carbide (SiC) applications in the electric vehicle market. This acquisition is expected to accelerate penetration into the emerging, high-growth SiC equipment market. The results of Epiluvac’s operations have been included in the consolidated financial statements since the date of acquisition. Acquisition date fair value totaled $56.4 million, which included $30.4 million of cash and $26.1 million of contingent consideration.

The purchase agreement included performance milestones that, if achieved, could trigger additional payments to the original selling shareholders. The contingent arrangements include payments up to $15.0 million based on the timely completion of certain defined milestones tied to strategic targets, and up to $20.0 million based on the percentage of orders received during the defined Earn-out period. The Earn-out period is four years after the closing date of the acquisition, or earlier if certain conditions are met.

The Company estimated the fair value of the contingent consideration by assigning probabilities and discount factors to each of the various defined performance milestones, while using a Monte-Carlo simulation model to determine the most likely outcome for payments to be based on value of orders received. These fair value measurements are based on significant inputs not observable in the market and thus represent a Level 3 measurement as defined in ASC 820. The discount rate used was 5.54% for the strategic target and order value related contingent payments. The rate was determined based on the nature of the milestone, the risks and uncertainties involved and the time period until the milestone was measured. The determination of the various probabilities and discount factors is highly subjective, requires significant judgment and is influenced by a number of factors, including the adoption of SiC technology. The aggregate fair value of the contingent consideration arrangement at the acquisition date was $26.1 million. While the use of SiC is expected to grow in the near future, it is difficult to predict the rate at which SiC will be adopted by the market and thus would impact the sales of our equipment.

The Company updates its estimate of fair value of the contingent consideration each reporting period, utilizing the same methodologies described above. The discount rate used was 5.6% for the strategic target and order value related contingent payments. During the three months ended March 31, 2024, the Company recognized approximately $0.6 million of a reduction to contingent consideration, included within “Other operating expense (income) net” in the Consolidated Statement of Operations. Additionally, during the three months ended March 31, 2024, the Company paid $1.8 million to the original selling shareholders in recognition of a performance milestone having been successfully completed. Total contingent consideration liability as of March 31, 2024 was $21.8 million included within “Other liabilities” on the Consolidated Balance Sheet.

Note 4 — Assets

Investments

Short-term investments are generally classified as available-for-sale and reported at fair value, with unrealized gains and losses, net of tax, presented as a separate component of stockholders’ equity under the caption “Accumulated other comprehensive income” in the Consolidated Balance Sheets. These securities may include U.S. treasuries, government agency securities, corporate debt, and commercial paper, all with maturities of greater than three months when purchased. All realized gains and losses and unrealized losses resulting from declines in fair value that are other than temporary are included in “Other operating expense (income), net” in the Consolidated Statements of Operations.

11

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

Fair value is the price that would be received for an asset or the amount paid to transfer a liability in an orderly transaction between market participants. Veeco classifies certain assets based on the following fair value hierarchy:

Level 1: Quoted prices in active markets that are unadjusted and accessible at the measurement date for identical, unrestricted assets or liabilities;

Level 2: Quoted prices for identical assets and liabilities in markets that are not active, quoted prices for similar assets and liabilities in active markets or financial instruments for which significant inputs are observable, either directly or indirectly; and

Level 3: Prices or valuations that require inputs that are both significant to the fair value measurement and unobservable.

A financial instrument’s level within the fair value hierarchy is based on the lowest level of any input that is significant to the fair value measurement. Veeco has evaluated the estimated fair value of financial instruments using available market information and valuations as provided by third-party sources. The use of different market assumptions or estimation methodologies could have a significant effect on the estimated fair value amounts.

The following table presents the portion of Veeco’s assets that were measured at fair value on a recurring basis at March 31, 2024 and December 31, 2023:

    

Level 1

    

Level 2

    

Level 3

    

Total

(in thousands)

March 31, 2024

Cash equivalents

Certificate of deposits and time deposits

$

84,211

$

$

$

84,211

Corporate debt

2,655

2,655

U.S. treasuries

9,999

9,999

Money market cash

21,363

21,363

Total

$

115,573

$

2,655

$

$

118,228

Short-term investments

U.S. treasuries

$

46,464

$

$

$

46,464

Government agency securities

25,425

25,425

Corporate debt

50,997

50,997

Total

$

46,464

$

76,422

$

$

122,886

December 31, 2023

Cash equivalents

Certificate of deposits and time deposits

$

74,262

$

$

$

74,262

Corporate debt

1,988

1,988

Money market cash

21,587

21,587

Total

$

95,849

$

1,988

$

$

97,837

Short-term investments

U.S. treasuries

$

59,493

$

$

$

59,493

Government agency securities

41,818

41,818

Corporate debt

35,409

35,409

Commercial paper

9,944

9,944

Total

$

59,493

$

87,171

$

$

146,664

There were no transfers between fair value measurement levels during the three months ended March 31, 2024.

12

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

At March 31, 2024 and December 31, 2023, the amortized cost and fair value of available-for-sale securities consist of:

    

    

Gross

    

Gross

    

Amortized

Unrealized

Unrealized

Estimated

Cost

Gains

Losses

Fair Value

(in thousands)

March 31, 2024

U.S. treasuries

$

46,565

$

$

(101)

$

46,464

Government agency securities

25,455

(30)

25,425

Corporate debt

51,098

(101)

50,997

Total

$

123,118

$

$

(232)

$

122,886

December 31, 2023

U.S. treasuries

$

59,541

$

3

$

(51)

$

59,493

Government agency securities

41,843

6

(31)

41,818

Corporate debt

 

35,447

9

(47)

 

35,409

Commercial paper

9,944

9,944

Total

$

146,775

$

18

$

(129)

$

146,664

Available-for-sale securities in a loss position at March 31, 2024 and December 31, 2023 consist of:

Continuous Loss Position

Continuous Loss Position

for Less than 12 Months

for 12 Months or More

    

    

Gross

    

    

Gross

Estimated

Unrealized

Estimated

Unrealized

Fair Value

Losses

Fair Value

Losses

(in thousands)

March 31, 2024

U.S. treasuries

$

46,464

$

(101)

$

$

Government agency securities

25,425

(30)

Corporate debt

 

45,471

 

(98)

 

1,495

 

(3)

Total

$

117,360

$

(229)

$

1,495

$

(3)

December 31, 2023

U.S. treasuries

$

43,118

$

(50)

$

$

Government agency securities

34,885

(31)

Corporate debt

 

23,262

 

(33)

 

2,618

 

(15)

Total

$

101,265

$

(114)

$

2,618

$

(15)

The contractual maturities of securities classified as available-for-sale at March 31, 2024 were as follows:

March 31, 2024

Amortized

Estimated

Cost

Fair Value

(in thousands)

Due in one year or less

$

112,231

$

112,050

Due after one year through two years

10,887

 

10,836

Total

$

123,118

$

122,886

13

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

Actual maturities may differ from contractual maturities because borrowers may have the right to call or prepay obligations with or without call or prepayment penalties. There were no realized gains or losses, or unrealized losses from declines in fair value that are other than temporary, for the three months ended March 31, 2024 and 2023.

Accounts Receivable

Accounts receivable is presented net of an allowance for doubtful accounts of $1.0 million at March 31, 2024 and December 31, 2023. The Company considered its current expectations of future economic conditions when estimating its allowance for doubtful accounts.

Inventories

Inventories at March 31, 2024 and December 31, 2023 consist of the following:

March 31,

December 31,

    

2024

    

2023

(in thousands)

Materials

$

144,793

$

139,884

Work-in-process

 

75,344

 

71,278

Finished goods

 

3,670

 

6,183

Evaluation inventory

19,459

20,290

Total

$

243,266

$

237,635

Prepaid Expenses and Other Current Assets

Prepaid expenses and other current assets primarily consist of supplier deposits, prepaid value-added tax, lease deposits, prepaid insurance, prepaid software and maintenance, and other receivables. The Company had deposits with its suppliers of $17.0 million and $19.4 million at March 31, 2024 and December 31, 2023, respectively.

Property, Plant, and Equipment

Property, plant, and equipment at March 31, 2024 and December 31, 2023 consist of the following:

March 31,

December 31,

    

2024

    

2023

(in thousands)

Land

$

5,061

$

5,061

Building and improvements

 

61,292

 

61,679

Machinery and equipment (1)

 

182,811

 

181,180

Leasehold improvements

 

53,009

 

52,913

Gross property, plant, and equipment

 

302,173

 

300,833

Less: accumulated depreciation and amortization

 

186,876

 

182,374

Net property, plant, and equipment

$

115,297

$

118,459

(1)Machinery and equipment also includes software, furniture and fixtures

For the three months ended March 31, 2024 and 2023, depreciation expense was $4.5 million and $4.2 million, respectively.

14

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

Goodwill

Goodwill represents the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. There were no changes to goodwill during the three months ended March 31, 2024.

Intangible Assets

Intangible assets consist of purchased technology, customer relationships, patents, trademarks and tradenames, licenses, and backlog, and are initially recorded at fair value. Long-lived intangible assets are amortized over their estimated useful lives in a method reflecting the pattern in which the economic benefits are consumed or amortized on a straight-line basis if such pattern cannot be reliably determined.

The components of purchased intangible assets were as follows:

March 31, 2024

December 31, 2023

Accumulated

Accumulated

    

Gross

    

Amortization

    

    

Gross

    

Amortization

    

Carrying

and

Net

Carrying

and

Net

Amount

Impairment

Amount

Amount

Impairment

Amount

(in thousands)

Technology

$

355,928

$

322,997

$

32,931

$

355,928

$

321,923

$

34,005

Customer relationships

146,925

138,154

8,771

146,925

137,649

9,276

Trademarks and tradenames

30,910

30,571

339

30,910

30,269

641

Other

 

3,746

 

3,733

 

13

 

3,746

 

3,723

 

23

Total

$

537,509

$

495,455

$

42,054

$

537,509

$

493,564

$

43,945

Other intangible assets primarily consist of patents, licenses, and backlog.

Note 5 — Liabilities

Accrued Expenses and Other Current Liabilities

The components of accrued expenses and other current liabilities at March 31, 2024 and December 31, 2023 consist of:

March 31,

December 31,

    

2024

    

2023

(in thousands)

Payroll and related benefits

$

35,059

$

28,321

Warranty

8,667

8,864

Operating lease liabilities

3,955

4,025

Interest

2,804

1,149

Professional fees

2,237

1,834

Sales, use, and other taxes

 

3,217

 

1,825

Contingent consideration

1,814

Other

 

3,320

 

9,792

Total

$

59,259

$

57,624

Warranty

Warranties are typically valid for one year from the date of system final acceptance. The Company estimates the costs that may be incurred under the warranty which are determined by analyzing specific product and historical configuration

15

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

statistics and regional warranty support costs and are affected by product failure rates, material usage, and labor costs incurred in correcting product failures during the warranty period. Unforeseen component failures or exceptional component performance can also result in changes to warranty costs. Changes in product warranty reserves for the three months ended March 31, 2024 include:

(in thousands)

Balance - December 31, 2023

$

8,864

Warranties issued

 

1,545

Consumption of reserves

 

(1,542)

Changes in estimate

 

(200)

Balance - March 31, 2024

$

8,667

Contract Liabilities and Performance Obligations

Contract liabilities consist of unsatisfied performance obligations related to advanced payments received and billing in excess of revenue recognized. The contract liability balance as of December 31, 2023 was approximately $118.0 million, of which the Company recognized approximately $35.6 million in revenue during the three months ended March 31, 2024.

This reduction in contract liabilities was offset in part by new billings for products and services which were unsatisfied performance obligations to customers and revenue had not yet been recognized as of March 31, 2024.

As of March 31, 2024, the Company has approximately $139.8 million of remaining performance obligations on contracts with an original estimated duration of one year or more, of which approximately 82% is expected to be recognized within one year, with the remaining amounts expected to be recognized between one to three years. The Company has elected to exclude disclosures regarding remaining performance obligations that have an original expected duration of one year or less.

Convertible Senior Notes

2023 Notes

On January 10, 2017, the Company issued $345.0 million of 2.70% convertible senior unsecured notes due 2023 (the “2023 Notes”). The 2023 Notes had a maturity date of January 15, 2023, unless earlier purchased by the Company, redeemed, or converted. The Company repurchased and retired approximately $111.5 million and $213.3 million of aggregate principal amount of its outstanding 2023 Notes during the years ended December 31, 2021 and December 31, 2020, respectively.

The 2023 notes that remained outstanding matured on January 15, 2023 and were paid in cash and settled by the Company at that time.

2025 Notes

On November 17, 2020, as part of the privately negotiated exchange agreement, the Company issued $132.5 million of 3.50% convertible senior notes due 2025 (the “2025 Notes”). The 2025 Notes bear interest at a rate of 3.50% per year, payable semiannually in arrears on January 15 and July 15 of each year, commencing on July 15, 2021. The 2025 Notes mature on January 15, 2025, unless earlier purchased by the Company, redeemed, or converted.

On May 19, 2023, in connection with the completion of a private offering of $230.0 million aggregate principal amount of 2.875% convertible senior notes due 2029 described below, the Company repurchased and retired approximately

16

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

$106.0 million in aggregate principal amount of its outstanding 2025 Notes, with a carrying amount of $105.4 million, for approximately $106.0 million of cash and 0.7 million shares of the Company’s common stock. The Company accounted for the partial settlement of the 2025 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $16.5 million for the year ended December 31, 2023.

2027 Notes

On May 18, 2020, the Company completed a private offering of $125.0 million of 3.75% convertible senior notes due 2027 (the “2027 Notes”). The Company received net proceeds of approximately $121.9 million, after deducting underwriting discounts and fees and expenses payable by the Company. Additionally, the Company used approximately $10.3 million of cash to purchase capped calls, discussed below. The 2027 Notes bear interest at a rate of 3.75% per year, payable semiannually in arrears on June 1 and December 1 of each year, commencing on December 1, 2020. The 2027 Notes mature on June 1, 2027, unless earlier purchased by the Company, redeemed, or converted.

On May 19, 2023, in connection with the completion of a private offering of $230.0 million aggregate principal amount of 2.875% convertible senior notes due 2029 described below, the Company repurchased and retired approximately $100.0 million in aggregate principal amount of its outstanding 2027 Notes, with a carrying amount of $98.5 million, for approximately $92.8 million of cash and 3.8 million shares of the Company’s common stock. The Company accounted for the partial settlement of the 2027 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $80.6 million for the year ended December 31, 2023.

2029 Notes

On May 19, 2023, the Company completed a private offering of $230.0 million of 2.875% convertible senior notes due 2029 (the “2029 Notes”). The Company received net proceeds of approximately $223.2 million, after deducting underwriting discounts and fees and expenses payable by the Company. Additionally, the Company used approximately $198.8 million of net proceeds from the offering to fund the cash portion of the 2025 Notes and 2027 Notes extinguishments described above and the remainder for general corporate purposes. The 2029 Notes bear interest at a rate of 2.875% per year, payable semiannually in arrears on June 1 and December 1 of each year, commencing on December 1, 2023. The 2029 Notes mature on June 1, 2029, unless earlier purchased by the Company, redeemed, or converted. The Company will settle any conversions of the 2029 Notes by paying cash up to the aggregate principal amount of the 2029 Notes to be converted, and paying or delivering either cash, shares of Company’s common stock, or a combination of cash and shares of common stock at the Company’s election, in respect of the remainder, if any, of the conversion obligation in excess of the aggregate principal amount of the 2029 Notes being converted.

The 2025 Notes, 2027 Notes, and 2029 Notes (collectively, the “Notes”) are unsecured senior obligations of Veeco and rank senior in right of payment to any of Veeco’s subordinated indebtedness; equal in right of payment to all of Veeco’s unsecured indebtedness that is not subordinated; effectively subordinated in right of payment to any of Veeco’s secured indebtedness to the extent of the value of the assets securing such indebtedness; and structurally subordinated to all indebtedness and other liabilities (including trade payables) of Veeco’s subsidiaries.

The Company may redeem for cash, at its option, all or any portion of (i) the outstanding 2025 Notes at any time on or after January 15, 2023, (ii) the outstanding 2027 Notes at any time on or after June 6, 2024 and/or (iii) the outstanding 2029 Notes at any time on or after June 8, 2026, in each case, at a redemption price equal to 100% of the principal amount of such Notes to be redeemed plus accrued and unpaid interest to, but excluding, the redemption date, if the last reported sale price of the common stock has been at least 130% of the conversion price for the applicable series of Notes then in effect for at least 20 trading days (whether or not consecutive) during any 30 consecutive trading day period (including the last trading day of such period) ending on, and including, the trading day immediately preceding the date

17

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

on which the Company provides the redemption notice. Upon the Company’s notice of redemption, holders may elect to convert their Notes based on the conversion rates and criteria outlined below.

The Notes are convertible at the option of the holders upon the satisfaction of specified conditions and during certain periods as described below. The initial conversion rates are 41.6667, 71.5372, and 34.21852 shares of the Company’s common stock per $1,000 principal amount of the 2025 Notes, 2027 Notes, and 2029 Notes, respectively, representing initial effective conversion prices of $24.00, $13.98, and $29.22 per share of common stock, respectively. The conversion rates may be subject to adjustment upon the occurrence of certain specified events.

Holders may convert all or any portion of their Notes, in multiples of one thousand dollar principal amount, at their option at any time prior to the close of business on the business day immediately preceding October 15, 2024, with respect to the 2025 Notes, October 1, 2026, with respect to the 2027 Notes, and February 1, 2029 with respect to the 2029 Notes, only under the following circumstances:

(i)During any calendar quarter (and only during such calendar quarter), if the last reported sale price of the common stock for at least 20 trading days (whether or not consecutive) during a period of 30 consecutive trading days ending on the last trading day of the immediately preceding calendar quarter is greater than or equal to 130% of the conversion price on each applicable trading day;

(ii)During the five consecutive business day period after any five consecutive trading day period (the “measurement period”) in which the trading price per one thousand dollar principal amount of Notes for each trading day of the measurement period was less than 98% of the product of the last reported sale price of Veeco’s common stock and the conversion rate on each such trading day;

(iii)If the Company calls any or all of applicable series of the Notes for redemption at any time prior to the close of business on the scheduled trading day immediately preceding the redemption date; or

(iv)Upon the occurrence of specified corporate events.

For the calendar quarter ended March 31, 2024, the last reported sales price of the common stock during the 30 consecutive trading days, based on the criteria outlined in (i) above, was greater than 130% of the conversion price of the 2025 Notes and 2027 Notes, and as such are convertible by the holders until June 30, 2024.

Holders may convert their Notes at any time, regardless of the foregoing circumstances, on October 15, 2024 with respect to the 2025 Notes, October 1, 2026 with respect to the 2027 Notes, and February 1, 2029 with respect to the 2029 Notes, until the close of business on the business day immediately preceding the respective maturity date.

The Notes are recorded as a single unit within liabilities in the consolidated balance sheets as the conversion features within the Notes are not derivatives that require bifurcation and the Notes do not involve a substantial premium. Transaction costs of $1.9 million, $3.1 million, and $6.8 million incurred in connection with the issuance of the 2025 Notes, 2027 Notes, and 2029 Notes, respectively, were recorded as direct deductions from the related debt liabilities and recognized as non-cash interest expense using the effective interest method over the expected terms of the Notes.

18

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

The carrying value of the 2025 Notes, 2027 Notes, and 2029 Notes are as follows:

March 31, 2024

December 31, 2023

  

Principal Amount

  

Unamortized
transaction costs

  

Net carrying value

  

Principal Amount

  

Unamortized
transaction costs

  

Net carrying value

(in thousands)

2025 Notes

$

26,500

$

(75)

$

26,425

$

26,500

$

(102)

$

26,398

2027 Notes

25,000

(293)

24,707

25,000

(313)

24,687

2029 Notes

230,000

(5,896)

224,104

230,000

(6,144)

223,856

Net carrying value

$

281,500

$

(6,264)

$

275,236

$

281,500

$

(6,559)

$

274,941

Total interest expense related to the 2023 Notes, 2025 Notes, 2027 Notes, and 2029 Notes is as follows:

Three months ended March 31,

    

2024

    

2023

    

 

(in thousands)

Cash Interest Expense

 

  

  

Coupon interest expense - 2023 Notes

$

$

23

Coupon interest expense - 2025 Notes

232

1,159

Coupon interest expense - 2027 Notes

234

1,172

Coupon interest expense - 2029 Notes

1,653

Non-cash Interest Expense

 

 

  

Amortization of debt discount/transaction costs- 2023 Notes

 

 

4

Amortization of debt discount/transaction costs- 2025 Notes

28

117

Amortization of debt discount/transaction costs- 2027 Notes

20

105

Amortization of debt discount/transaction costs- 2029 Notes

248

Total Interest Expense

$

2,415

$

2,580

The Company determined the 2025 Notes, 2027 Notes, and 2029 Notes are Level 2 liabilities in the fair value hierarchy and had an estimated fair value at March 31, 2024 of $36.8 million, $62.1 million, and $342.5 million, respectively.

Capped Call Transactions

In connection with the offering of the 2027 Notes, on May 13, 2020, the Company entered into privately negotiated capped call transactions (the “Capped Call Transactions”), pursuant to capped call confirmations, covering the total principal amount of the 2027 Notes for an aggregate premium of $10.3 million. The Capped Call Transactions are expected generally to reduce the potential dilution to the Company’s common stock upon any conversion of the 2027 Notes and/or offset any cash payments the Company is required to make in excess of the aggregate principal amount of converted 2027 Notes, as the case may be, with such reduction and/or offset subject to a cap based on the capped price of the Capped Call Transactions. The Capped Call Transactions exercise price is equal to the initial conversion price of the 2027 Notes, and the capped price of the Capped Call Transactions is approximately $18.46 per share and is subject to certain adjustments under the terms of the capped call confirmations.

The Capped Call Transactions are separate transactions entered into by the Company with the capped call counterparties, are not part of the terms of the 2027 Notes and do not change the holders’ rights under the 2027 Notes. Holders of the 2027 Notes do not have any rights with respect to the Capped Call Transactions. The cost of the Capped Call Transactions is not expected to be tax-deductible as the Company did not elect to integrate the Capped Call Transactions into the 2027 Notes for tax purposes. The Company used a portion of the net proceeds from the offering of the 2027 Notes to pay for the Capped Call Transactions, and the cost of the Capped Call Transactions was recorded as a reduction of the Company’s additional paid-in capital in the accompanying consolidated financial statements.

19

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

Revolving Credit Facility

On December 16, 2021, the Company entered into a loan and security agreement providing for a senior secured revolving credit facility in an aggregate principal amount of $150 million (the “Credit Facility”), including a $15 million letter of credit sublimit. The Credit Facility is guaranteed by the Company’s direct material U.S. subsidiaries, subject to customary exceptions. Borrowings under the Credit Facility are secured by a first-priority lien on substantially all of the assets of the Company, subject to customary exceptions. The Credit Facility has a term of five years, maturing on December 16, 2026, or earlier if certain liquidity measures are not met prior to the 2025 Notes maturing. Subject to certain conditions and the receipt of commitments from the lenders, the Loan and Security Agreement allows for revolving commitments under the Credit Facility to be increased by up to $75 million. The existing lenders under the Credit Facility are entitled, but not obligated, to provide such incremental commitments.

Borrowings will bear interest at a floating rate which can be, at the Company’s option, either (a) an alternate base rate plus an applicable rate ranging from 0.50% to 1.25% or (b) a Secured Overnight Financing Rate (“SOFR”) (with a floor of 0.00%) for the specified interest period plus an applicable rate ranging from 1.50% to 2.25%, in each case, depending on the Company’s Secured Net Leverage Ratio (as defined in the Loan and Security Agreement). The Company will pay an unused commitment fee ranging from 0.25% to 0.35% based on unused capacity under the Credit Facility and the Company’s Secured Net Leverage Ratio. The Company may use the proceeds of borrowings under the Credit Facility to pay transaction fees and expenses, provide for its working capital needs and reimburse drawings under letters of credit and for other general corporate purposes.

The Loan and Security Agreement contains customary affirmative covenants for transactions of this type, including, among others, the provision of financial and other information to the administrative agent, notice to the administrative agent upon the occurrence of certain material events, preservation of existence, maintenance of properties and insurance, compliance with laws, including environmental laws, the provision of additional guarantees, and an affiliate transactions covenant, subject to certain exceptions. The Loan and Security Agreement contains customary negative covenants, including, among others, restrictions on the ability to merge and consolidate with other companies, incur indebtedness, refinance our existing convertible notes, grant liens or security interests on assets, make investments, acquisitions, loans, or advances, pay dividends, and sell or otherwise transfer assets.

The Loan and Security Agreement contains financial maintenance covenants that require the Borrower to maintain an Interest Coverage Ratio (as defined in the Loan and Security Agreement) of not less than 3.00 to 1.00, a Total Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than 4.50 to 1.00, and a Secured Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than 2.50 to 1.00, in each case, tested at the end of each fiscal quarter commencing with the fiscal quarter ending September 30, 2022. The Loan and Security Agreement also provides for a number of customary events of default, including, among others: payment defaults to the lenders; voluntary and involuntary bankruptcy proceedings; covenant defaults; material inaccuracies of representations and warranties; certain change of control events; material money judgments; and other customary events of default. The occurrence of an event of default could result in the acceleration of obligations and the termination of lending commitments under the Loan and Security Agreement.

No amounts were outstanding under the Credit Facility as of March 31, 2024 or December 31, 2023.

Other Liabilities

Other liabilities at March 31, 2024 and December 31, 2023 were approximately $25.2 million and $25.5 million, respectively; which primarily included contingent consideration of $21.8 million and $22.4 million, respectively; medical and dental benefits from former executives of $1.9 million; and asset retirement obligations of $0.9 million.

20

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

Note 6 — Commitments and Contingencies

Leases

The Company’s operating leases primarily include real estate leases for properties used for manufacturing, R&D activities, sales and service, and administration, as well as certain equipment leases. Some leases may include options to renew for a period of up to 5 years, while others may include options to terminate the lease. The weighted average remaining lease term of the Company’s operating leases as of March 31, 2024 was 11 years, and the weighted average discount rate used in determining the present value of future lease payments was 5.6%.

The following table provides the maturities of lease liabilities at March 31, 2024:

Operating

    

Leases

(in thousands)

Payments due by period:

2024

$

2,557

2025

4,138

2026

4,097

2027

3,640

2028

3,422

Thereafter

30,824

Total future minimum lease payments

48,678

Less: Imputed interest

(13,774)

Total

$

34,904

Reported as of March 31, 2024

Accrued expenses and other current liabilities

$

3,955

Long-term operating lease liabilities

30,949

Total

$

34,904

Operating lease costs for the three months ended March 31, 2024 and 2023 were $1.2 million and $1.4 million, respectively. Variable lease costs for the three months ended March 31, 2024 and 2023 were $0.4 million and $0.3 million, respectively. Additionally, the Company has an immaterial amount of short-term leases. Operating cash outflows from operating leases for the three months ended March 31, 2024 and 2023 were $1.6 million and $1.4 million, respectively.

Receivable Purchase Agreement

The Company entered into a receivable purchase agreement with a financial institution to sell certain of its trade receivables from customers without recourse, up to $30.0 million at any point in time. Pursuant to this agreement, the Company did not sell any receivables during the three months ended March 31, 2024, and $18.9 million was available under the agreement for additional sales of receivables as of March 31, 2024. The Company sold $8.3 million of receivables under this agreement for the three months ended March 31, 2023. The net sale of accounts receivable under the agreement is reflected as a reduction of accounts receivable in the Company’s Consolidated Balance Sheet at the time of sale and any fees for the sale of trade receivables were not material for the periods presented.

21

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

Purchase Commitments

Veeco has purchase commitments of $200.8 million at March 31, 2024, substantially all of which become due within one year.

Bank Guarantees

Veeco has bank guarantees and letters of credit issued by a financial institution on its behalf as needed. At March 31, 2024, outstanding bank guarantees and standby letters of credit totaled $23.7 million, and unused bank guarantees and letters of credit of $17.0 million were available to be drawn upon.

Legal Proceedings

The Company is involved in various legal proceedings arising in the normal course of business. The Company does not believe that the ultimate resolution of these matters will have a material adverse effect on its consolidated financial position, results of operations, or cash flows.

Note 7 — Equity

Statement of Stockholders’ Equity

The following tables present the changes in Stockholders’ Equity:

    

    

    

    

    

Accumulated

    

Additional

Other

Common Stock

Paid-in

Accumulated

Comprehensive

Shares

Amount

Capital

Deficit

Income

Total

(in thousands)

Balance at December 31, 2023

 

56,364

$

564

$

1,202,440

$

(532,169)

$

1,607

$

672,442

Net income

 

 

 

 

21,854

 

 

21,854

Other comprehensive income (loss), net of tax

 

 

 

 

 

(128)

 

(128)

Share-based compensation expense

 

 

 

8,082

 

 

 

8,082

Net issuance under employee stock plans

273

2

(14,342)

(14,340)

Balance at March 31, 2024

 

56,637

$

566

$

1,196,180

$

(510,315)

$

1,479

$

687,910

    

    

    

    

    

Accumulated

    

Additional

Other

Common Stock

Paid-in

Accumulated

Comprehensive

Shares

Amount

Capital

Deficit

Income

Total

(in thousands)

Balance at December 31, 2022

 

51,660

$

517

$

1,078,180

$

(501,801)

$

928

$

577,824

Net income

 

 

 

 

8,741

 

 

8,741

Other comprehensive income (loss), net of tax

 

 

 

 

 

476

 

476

Share-based compensation expense

 

 

 

7,027

 

 

 

7,027

Net issuance under employee stock plans

33

(8,509)

(8,509)

Balance at March 31, 2023

 

51,693

$

517

$

1,076,698

$

(493,060)

$

1,404

$

585,559

22

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

Accumulated Other Comprehensive Income (“AOCI”)

The following table presents the changes in the balances of each component of AOCI, net of tax:

Unrealized

Gains (Losses)

Foreign

on Available

Currency

for Sale 

    

Translation

    

Securities

    

Total

(in thousands)

Balance - December 31, 2023

$

1,761

$

(154)

$

1,607

Other comprehensive income (loss)

 

(33)

 

(95)

 

(128)

Balance - March 31, 2024

$

1,728

$

(249)

$

1,479

There were minimal reclassifications from AOCI into net income for the three months ended March 31, 2024 and 2023.

Note 8 — Share-based Compensation

Restricted share awards are issued to employees and to members of our board of directors that are subject to specified restrictions and a risk of forfeiture. The restrictions typically lapse over one to four years and may entitle holders to dividends and voting rights. Other types of share-based compensation include performance share awards, performance share units, and restricted share units (collectively with restricted share awards, “restricted shares”), as well as options to purchase common stock.

Share-based compensation expense was recognized in the following line items in the Consolidated Statements of Operations for the three months ended March 31, 2024 and 2023:

Three months ended March 31,

    

2024

    

2023

    

    

(in thousands)

Cost of sales

 

$

1,730

 

$

1,451

 

 

Research and development

2,318

2,089

Selling, general, and administrative

4,034

3,487

Total

$

8,082

$

7,027

For the three months ended March 31, 2024, equity activity related to non-vested restricted shares and performance shares was as follows:

    

    

Weighted

Average

Number of

Grant Date

Shares

Fair Value

(in thousands)

Balance - December 31, 2023

2,464

$

26.19

Granted

1,019

37.72

Performance award adjustments

200

27.81

Vested

(1,040)

25.93

Forfeited

(13)

23.06

Balance - March 31, 2024

2,630

$

31.13

23

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

Note 9 — Income Taxes

Income taxes are estimated for each of the jurisdictions in which the Company operates. Deferred income taxes reflect the net tax effect of temporary differences between the carrying amount of assets and liabilities for financial reporting purposes and the amounts used for income tax purposes, as well as the tax effect of carryforwards. Realization of net deferred tax assets is dependent on future taxable income.

At the end of each interim reporting period, the effective tax rate is aligned with expectations for the full year. This estimate is used to determine the income tax provision on a year-to-date basis and may change in subsequent interim periods.

Income before income taxes and income tax expense for the three months ended March 31, 2024 and 2023 were as follows:

Three months ended March 31,

 

    

2024

    

2023

 

(in thousands, except percentages)

 

Income before income taxes

$

22,750

$

9,004

Income tax expense

 

$

896

 

$

263

Effective tax rate

 

3.94%

 

2.93%

The Company’s income tax expense for the three months ended March 31, 2024 was $0.9 million, compared to $0.3 million for the comparable prior period. For the three months ended March 31, 2024 and March 31, 2023, the effective tax rate was lower than the U.S. statutory tax rate primarily relating to a discrete income tax benefit for share-based compensation windfall. Additionally, the effective tax rate was also favorably impacted by the tax benefits related to Foreign-Derived Intangible Income and research and development tax credits.

Note 10 — Segment Reporting and Geographic Information

Veeco operates and measures its results in one operating segment and therefore has one reportable segment: the development, manufacture, sales, and support of semiconductor and thin film process equipment primarily sold to make electronic devices.

Veeco serves the following four end-markets:

Semiconductor

The Semiconductor market refers to early process steps in logic and memory applications where silicon wafers are processed. There are many different process steps in forming patterned wafers, such as deposition, etching, masking, and doping, where the microchips are created but remain on the silicon wafer. This market includes mask blank production for extreme ultraviolet (“EUV”) lithography, as well as Advanced Packaging, which refers to a portfolio of wafer-level assembly technologies that enable improved performance of electronic products, such as smartphones, high-end servers, and graphical processors.

Compound Semiconductor

The Compound Semiconductor market includes Photonics, Power Electronics, RF Filters and Amplifiers, and Solar applications. Photonics refers to light source technologies and laser-based solutions for 3D sensing, datacom and telecom applications. This includes micro-LED, laser diodes, edge emitting lasers and vertical cavity surface emitting lasers (“VCSELs”). Power Electronics refers to semiconductor devices such as rectifiers, inverters and converters for the

24

Table of Contents

Veeco Instruments Inc. and Subsidiaries

Notes to the Consolidated Financial Statements - continued

(unaudited)

control and conversion of electric power in applications such as fast or wireless charging of consumer electronics and automotive applications. RF power amplifiers and filters (including surface acoustic wave (“SAW”) and bulk acoustic wave (“BAW”) filters) are used in 5G communications infrastructure, smartphones, tablets, and mobile devices. They make use of radio waves for wireless broadcasting and/or communications. Solar refers to power obtained by harnessing the energy of the sun through the use of compound semiconductor devices such as photovoltaics.

Data Storage

Data Storage refers to the Hard Disk Drive (“HDD”) market, for which our systems enable customers to manufacture thin film magnetic heads for hard disk drives as part of large capacity storage applications.

Scientific & Other

Scientific & Other refers to advanced materials research and a range of manufacturing applications including optical coatings (laser mirrors, optical filters, and anti-reflective coatings).

Sales by end-market and geographic region for the three months ended March 31, 2024 and 2023 were as follows:

Three months ended March 31,

    

2024

2023

    

(in thousands)

Sales by end-market

Semiconductor

$

120,384

$

93,107

Compound Semiconductor

21,002

21,159

Data Storage

 

18,017

 

21,514

Scientific & Other

 

15,081

 

17,724

Total

$

174,484

$

153,504

Sales by geographic region

United States

$

27,868

$

31,011

EMEA(1)

8,488

22,947

China

64,308

60,747

Rest of APAC

73,220

38,744

Rest of World

 

600

 

54

Total

$

174,484

$

153,504

(1)EMEA consists of Europe, the Middle East, and Africa

For geographic reporting, sales are attributed to the location in which the customer facility is located.

25

Item 2. Management’s Discussion and Analysis of Financial Condition and Results of Operations

Cautionary Statement Regarding Forward Looking Statements

Our discussion below constitutes “forward-looking statements” within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended. When used in this Report, the words “believes,” “anticipates,” “expects,” “estimates,” “targets,” “plans,” “intends,” “will,” and similar expressions related to the future are intended to identify forward-looking statements. All forward-looking statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from projected results. You should not place undue reliance on any forward-looking statements, which speak only as of the dates they are made.

Executive Summary

We are an innovative manufacturer of semiconductor process equipment. Our proven ion beam, laser annealing, lithography, MOCVD, CVD, and single wafer wet processing technologies play an integral role in the fabrication and packaging of advanced semiconductor devices. With equipment designed to optimize performance, yield and cost of ownership, Veeco holds leading technology positions in the markets we serve. To learn more about Veeco’s systems and service offerings, visit www.veeco.com.

Business Update

The Semiconductor industry has been historically cyclical based on fluctuations in global chip production capacity and demand. Semiconductor industry sales declined in 2023 to approximately $550 billion dollars after several years of growth following the pandemic. Looking ahead, industry analysts are forecasting long-term growth of the Semiconductor industry, driven by secular growth trends such as artificial intelligence, high-performance computing, mobile connectivity, and the transformation of the automotive industry, as well as government programs globally to accelerate strategic investment in next-generation technologies.

Growth in the Semiconductor industry, coupled with increasing technological complexity of Semiconductor chips, are expected to drive long-term growth in Wafer Fab Equipment (“WFE”) spending. In an effort to improve chip performance and reduce costs, today’s most advanced Semiconductor manufacturers are shrinking device geometries and investing in more complex technologies, including 3D devices, Gate-All-Around architectures, as well as backside power delivery. As a result, growth of the WFE market is expected to keep pace with growth of the Semiconductor industry, which we believe should benefit semiconductor capital equipment providers, including Veeco.

Our strategy of investing in advanced logic and memory has enabled our Semiconductor business to outperform WFE growth for 3 consecutive years. Veeco technologies are at the forefront of new technological innovations in the Semiconductor industry, including manufacturing of higher performance AI chips, and we continue to invest in new technologies to expand our Served Available Market (“SAM”) to a broad range of new applications.

Semiconductor revenue increased by 29% in first quarter 2024 from the comparable year period, comprising 69% of total revenue. This increase was led by strong demand for our Laser Annealing systems. Our laser annealing solutions continue to gain share in advanced node logic, highlighted by recent wins at both new and existing customers. In 2023, we won business with a new Tier 1 logic customer for advanced anneal applications and shipped multiple systems to this customer. In first quarter 2024, we received a multi-tool laser annealing order from a leading edge logic foundry for their 2nm gate-all-around process. In the memory market, a Tier 1 memory customer placed several Laser Spike Annealing (“LSA”) orders for high volume production of High Bandwidth Memory (“HBM”) and advanced DRAM devices following a successful evaluation program, and we’ve shipped multiple systems to this customer. While our growth strategy is predominately focused on advanced node logic and memory, we continue to see strong growth for mature node applications predominantly in China driven by new greenfield fabs and capacity additions. In our continued efforts to grow our Laser Annealing business by driving product roadmap to address customer device challenges, we achieved a key milestone in fourth quarter 2023 upon shipping two next-generation annealing systems for nano second annealing applications to two Tier 1 logic customers. Nanosecond annealing provides Veeco with an opportunity to expand our

26

laser annealing SAM to new advanced node logic and memory applications, including 3D devices, Gate-All-Around architecture, and backside power delivery.

The ongoing adoption of EUV Lithography for advanced node semiconductor manufacturing continues to drive demand for our Ion Beam mask blank deposition systems, and we’re well-positioned for adoption of next-generation High-NA lithography. We achieved another significant milestone in fourth quarter 2023 upon shipment of our first two Ion Beam Deposition “IBD300” evaluation systems to Tier 1 memory customers for front end semiconductor applications. Our IBD300 system provides Veeco with another opportunity to expand our SAM to advanced node applications where low resistance films are critical, and our initial systems are being evaluated for advanced memory applications such as DRAM bitline. Additionally, our Wet Processing systems are used for Advanced Packaging applications, including 3D packaging technologies, and we continue to see strong demand for HBM. Our Advanced Packaging lithography systems are used for packaging approaches such as fan out wafer level packaging and other advanced packaging applications. Given our current backlog and visibility, we expect Semiconductor revenue to grow in 2024.

Veeco also serves customers in the Compound Semiconductor, Data Storage, and Scientific & Other markets.

We address the Compound Semiconductor market with a broad portfolio of technologies, including Wet Processing, MOCVD, MBE and Ion Beam, for a range of Power Electronics, Photonics, and 5G RF applications. Sales in the Compound Semiconductor market increased sequentially in first quarter 2024. Looking ahead, we’re focused on several long-term growth opportunities within Power Electronics and Photonics. We expect revenue in the Compound Semiconductor market to grow in 2024. We address the Data Storage market with sales of our Ion Beam Deposition technology. Demand for our Ion Beam products is driven by cloud-based storage, and sales declined sequentially in first quarter 2024. We expect revenue in the Data Storage market to be flat to up in 2024. Sales in the Scientific & Other market are largely driven by sales to governments, universities, and research institutions. We address the Scientific & Other market with several technologies, including MBE, ALD, MOCVD, Wet Processing, & IBD/IBE, which support scientific, optical coating and other applications, and sales in this market declined as compared to the prior quarter. We expect revenue in the Scientific and Other market to remain flat in 2024.

27

Results of Operations

For the three months ended March 30, 2024 and 2023

The following table presents revenue and expense line items reported in our Consolidated Statements of Operations for the indicated periods in 2024 and 2023 and the period-over-period dollar and percentage changes for those line items. Our results of operations are reported as one business segment, represented by our single operating segment.

Three Months Ended March 31,

Change

2024

2023

Period to Period

(dollars in thousands)

Net sales

    

$

174,484

    

100%

$

153,504

    

100%

$

20,980

    

14%

    

Cost of sales

 

99,065

 

57%

 

91,487

 

60%

 

7,578

 

8%

Gross profit

 

75,419

 

43%

 

62,017

 

40%

 

13,402

 

22%

Operating expenses, net:

 

  

 

  

 

  

 

 

  

 

Research and development

 

29,642

 

17%

 

27,562

 

18%

 

2,080

 

8%

Selling, general, and administrative

 

24,700

 

14%

 

22,627

 

15%

 

2,073

 

9%

Amortization of intangible assets

 

1,891

 

1%

 

2,111

 

1%

 

(220)

 

(10)%

Other operating expense (income), net

 

(2,859)

 

-

 

(89)

 

-

 

(2,770)

 

*

Total operating expenses, net

 

53,374

 

31%

 

52,211

 

34%

 

1,163

 

2%

Operating income

 

22,045

 

13%

 

9,806

 

6%

 

12,239

 

125%

Interest income (expense), net

 

705

 

0%

 

(802)

 

(1)%

 

1,507

 

(188)%

Income before income taxes

 

22,750

 

13%

 

9,004

 

6%

 

13,746

 

153%

Income tax expense (benefit)

 

896

 

-

 

263

 

-

 

633

 

*

Net income

$

21,854

 

13%

$

8,741

 

6%

$

13,113

 

150%

*

Not meaningful

Net Sales

The following is an analysis of sales by market and by region:

Three Months Ended March 31,

Change

 

2024

2023

Period to Period

 

(dollars in thousands)

 

Sales by end-market

    

  

    

  

  

    

  

  

    

  

    

Semiconductor

$

120,384

 

69%

$

93,107

 

60%

$

27,277

 

29%

Compound Semiconductor

 

21,002

 

12%

 

21,159

 

14%

 

(157)

 

(1)%

Data Storage

 

18,017

 

10%

 

21,514

 

14%

 

(3,497)

 

(16)%

Scientific & Other

 

15,081

 

9%

 

17,724

 

12%

 

(2,643)

 

(15)%

Total

$

174,484

 

100%

$

153,504

 

100%

$

20,980

 

14%

Sales by geographic region

 

  

 

  

 

  

 

  

 

  

 

United States

$

27,868

 

16%

$

31,011

 

20%

$

(3,143)

 

(10)%

EMEA

 

8,488

 

5%

 

22,947

 

15%

 

(14,459)

 

(63)%

China

64,308

37%

60,747

40%

3,561

 

6%

Rest of APAC

 

73,220

 

42%

 

38,744

 

25%

 

34,476

 

89%

Rest of World

 

600

 

-

 

54

 

-

 

546

 

*

Total

$

174,484

 

100%

$

153,504

 

100%

$

20,981

 

14%

*

Not meaningful

28

Sales increased for the three months ended March 31, 2024 against the comparable prior year period driven by sales in the Semiconductor market, partially offset by decreases in sales in the Data Storage, and Scientific & Other markets. By geography, sales increased in the Rest of APAC, and China regions, partially offset by decreases in the EMEA and United States regions. Sales in the Rest of APAC region for the three months ended March 31, 2024 included sales in Japan and Taiwan of $32.9 million, and $19.3 million respectively. Sales in the Rest of APAC region for the three months ended March 31, 2023 included sales in Taiwan and Thailand of $18.0 million and $8.4 million respectively. We expect there will continue to be year-to-year variations in our future sales distribution across markets and geographies. In light of the global nature of our business, we are impacted by conditions in the various countries in which we and our customers operate.

Gross Profit

For the three months ended March 31, 2024, gross profit increased against the comparable prior period primarily due to an increase in sales volume and increased gross margins. Gross margin increased principally due to higher volume and favorable product mix of sales in the periods. We expect our gross margins to fluctuate each period due to product mix and other factors.

Research and Development

The markets we serve are characterized by continuous technological development and product innovation, and we invest in various research and development initiatives to maintain our competitive advantage and achieve our growth objectives. Research and development expenses increased for the three months ended March 31, 2024 against the comparable prior period primarily due to an increase in project materials and personnel-related expenses as we invest in new research and development and additional applications for our technology in order to be well-positioned to capitalize on emerging global megatrends and support longer term growth in Semiconductor and Compound Semiconductor markets. However, expenses as a percentage of revenue are slightly down when compared to the prior period.

Selling, General, and Administrative

Selling, general, and administrative expenses increased for the three months ended March 31, 2024 against the comparable prior period primarily due to higher variable expenses associated with the increase in revenue and profitability. However, expenses as a percentage of revenue are slightly down when compared to the comparable prior year period.

Amortization Expense

Amortization expense decreased compared to the comparable prior year period primarily due to changes in amortization expense to reflect expected cash flows of certain intangible assets.

 

Interest Income (Expense)

We recorded net interest income of $0.7 million for the three months ended March 31, 2024, compared to net interest expense of $0.8 million for the comparable prior year period. The increase in net interest income of $1.5 million was primarily due to higher interest rates for the three months ended March 31, 2024, against the comparable prior year period.

Income Taxes

At the end of each interim reporting period, we estimate the effective income tax rate expected to be applicable for the full year. This estimate is used to determine the income tax provision or benefit on a year-to-date basis and may change in subsequent interim periods.

Our income tax expense for the three months ended March 31, 2024 was $0.9 million, compared to $0.3 million for the comparable prior period. For the three months ended March 31, 2024 and March 31, 2023, the effective tax rate was

29

lower than the U.S. statutory tax rate primarily relating to discrete income tax benefit for share-based compensation windfall. Additionally, the effective tax rate was also favorably impacted by the tax benefits related to Foreign-Derived Intangible Income and research and development tax credits.

Liquidity and Capital Resources

Our cash and cash equivalents, restricted cash, and short-term investments are as follows:

March 31,

December 31,

    

2024

    

2023

(in thousands)

Cash and cash equivalents

$

173,998

$

158,781

Restricted cash

 

326

 

339

Short-term investments

 

122,886

 

146,664

Total

$

297,210

$

305,784

At March 31, 2024 and December 31, 2023, cash and cash equivalents of $52.7 million and $46.8 million, respectively, were held outside the United States. As of March 31, 2024, we had $23.4 million of accumulated undistributed earnings generated by our non-U.S. subsidiaries for which the U.S. tax has previously been provided. Approximately $8.1 million of undistributed earnings will be subject to foreign withholding taxes if distributed back to the United States and we accrued $0.8 million for foreign withholding taxes for the undistributed earnings.

We believe that our projected cash flow from operations, combined with our cash and short-term investments, will be sufficient to meet our projected working capital requirements, contractual obligations, and other cash flow needs for the next twelve months, including scheduled interest payments on our convertible senior notes, purchase commitments, and payments in respect of operating leases.

A summary of the cash flow activity for the three months ended March 31, 2024 and 2023 is as follows:

Cash Flows from Operating Activities

Three Months Ended March 31,

    

    

2024

    

2023

    

(in thousands)

Net income

$

21,854

$

8,741

Non-cash items:

Depreciation and amortization

 

6,405

 

6,276

Non-cash interest expense

 

296

 

226

Deferred income taxes

 

(842)

 

191

Share-based compensation expense

 

8,082

 

7,027

Change in contingent consideration

 

(625)

 

Changes in operating assets and liabilities

 

(25,809)

 

(8,543)

Net cash provided by (used in) operating activities

$

9,361

$

13,918

Net cash provided by operating activities was $9.4 million for the three months ended March 31, 2024 and was due to net income of $21.9 million and adjustments for non-cash items of $13.3 million, partially offset by a decrease in cash flow from changes in operating assets and liabilities of $25.8 million. The changes in operating assets and liabilities were largely attributable to increases in inventories and; contract assets, and a decrease in contract liabilities; partially offset by increases in accounts payable and accrued expenses.

30

Cash Flows from Investing Activities

Three Months Ended March 31,

    

2024

    

2023

    

(in thousands)

Capital expenditures

$

(5,990)

$

(6,946)

Changes in investments, net

 

24,682

 

36,557

Acquisitions of businesses, net of cash acquired

(30,373)

Proceeds from the sale of productive assets

2,033

Net cash provided by (used in) investing activities

$

20,725

$

(762)

The cash provided by investing activities during the three months ended March 31, 2024 was primarily attributable to net cash provided by net investment activity and proceeds from the sale of productive assets, partially offset by capital expenditures. The cash used in investing activities during the three months ended March 31, 2023 was primarily attributable to net cash used in the acquisition of Epiluvac, and capital expenditures, partially offset by net investment activity.

 

Cash Flows from Financing Activities

Three Months Ended March 31,

    

2024

    

2023

    

(in thousands)

Settlement of equity awards, net of withholding taxes

$

(13,022)

$

(7,268)

Contingent consideration payment

(1,818)

Extinguishment of Convertible Notes

(20,173)

Net cash provided by (used in) financing activities

$

(14,840)

$

(27,441)

The cash used in financing activities for the three months ended March 31, 2024 was related to cash used to settle taxes related to employee equity programs and contingent consideration payment related to Epiluvac acquisition, partially offset by cash received under the Employee Stock Purchase Plan. The cash used in financing activities for the three months ended March 31, 2023 was related to the repayment of the 2023 Notes, as well as cash used to settle taxes related to employee equity programs, partially offset by cash received under the Employee Stock Purchase Plan.

Convertible Senior Notes

We have $26.5 million outstanding principal balance of 3.50% convertible senior notes that bear interest at a rate of 3.50% per year, payable semiannually in arrears on January 15 and July 15 of each year, and mature on January 15, 2025, unless earlier purchased by the Company, redeemed, or converted. In addition, we have $25.0 million outstanding principal balance of 3.75% convertible senior notes that bear interest at a rate of 3.75% per year, payable semiannually in arrears on June 1 and December 1 of each year, and mature on June 1, 2027, unless earlier purchased by the Company, redeemed, or converted. The 2027 Notes are currently convertible by shareholders until June 30, 2024. In addition, we have $230.0 million outstanding principal balance of 2.875% convertible senior notes that bear interest at a rate of 2.875% per year, payable semiannually in arrears on June 1 and December 1 of each year, and mature on June 1, 2029, unless earlier purchased by the Company, redeemed, or converted.

We believe that we have sufficient capital resources and cash flows from operations to support scheduled interest payments on these debts and the scheduled January 2025 principal payment due on the 2025 Notes. In addition, we have access to a $150.0 million revolving credit facility (including an ability to request an additional $75.0 million, for a total commitment of no more than $225.0 million) to provide for our working capital needs and reimburse drawings under letters of credit and for other general corporate purposes. The Company has no immediate plans to draw down on the facility, which expires in December of 2026. Interest under the facility is variable based on the Company’s secured net leverage ratio and is expected to bear interest based on SOFR plus a range of 150 to 225 basis points, if drawn. There is a yearly commitment fee of 25 to 35 basis points, based on the Company’s secured net leverage ratio, charged on the unused portion of the Facility.

31

Contractual Obligations and Commitments

We have commitments under certain contractual arrangements to make future payments for goods and services. These contractual arrangements secure the rights to various assets and services to be used in the future in the normal course of business. We expect to fund these contractual arrangements with cash generated from operations in the normal course of business.

Item 3. Quantitative and Qualitative Disclosures about Market Risk

Interest Rate Risk

Our exposure to market rate risk for changes in interest rates primarily relates to our investment portfolio. We centrally manage our investment portfolios considering investment opportunities and risks, tax consequences, and overall financing strategies. Our investment portfolio includes fixed-income securities with a fair value of approximately $122.9 million at March 31, 2024. These securities are subject to interest rate risk and, based on our investment portfolio at March 31, 2024, a 100 basis point increase in interest rates would result in a decrease in the fair value of the portfolio of $0.7 million. While an increase in interest rates may reduce the fair value of the investment portfolio, we will not realize the losses in the Consolidated Statements of Operations unless the individual fixed-income securities are sold prior to recovery or the loss is determined to be other-than-temporary.

Currency Exchange Risk

We conduct business on a worldwide basis and, as such, a portion of our revenues, earnings, and net investments in foreign affiliates is exposed to changes in currency exchange rates. The economic impact of currency exchange rate movements is complex because such changes are often linked to variability in real growth, inflation, interest rates, governmental actions, and other factors. These changes, if material, could cause us to adjust our financing and operating strategies. Consequently, isolating the effect of changes in currency does not incorporate these other important economic factors.

Changes in currency exchange rates could affect our foreign currency denominated monetary assets and liabilities and forecasted cash flows. We may enter into monthly forward derivative contracts from time to time with the intent of mitigating a portion of this risk. We only use derivative financial instruments in the context of hedging and not for speculative purposes and have not historically designated our foreign exchange derivatives as hedges. Accordingly, changes in fair value from these contracts are recorded as “Other, net” in our Consolidated Statements of Operations. We execute derivative transactions with highly rated financial institutions to mitigate counterparty risk.

Our net sales to customers located outside of the United States represented approximately 84% and 80% of our total net sales for the three months ended March 31, 2024 and 2023 respectively. We expect that net sales to customers outside the United States will continue to represent a large percentage of our total net sales. Our sales denominated in currencies other than the U.S. dollar represented approximately 3% of total net sales for both the three months ended March 31, 2024 and 2023.

A 10% change in foreign exchange rates would have an immaterial impact on the consolidated results of operations since most of our sales outside the United States are denominated in U.S. dollars.

Item 4. Controls and Procedures

Evaluation of Disclosure Controls and Procedures

Our principal executive and financial officers have evaluated and concluded that our disclosure controls and procedures are effective as of March 31, 2024. The disclosure controls and procedures are designed to ensure that the information required to be disclosed in this report filed under the Securities Exchange Act of 1934 is recorded, processed, summarized, and reported within the time periods specified in the Securities and Exchange Commission’s rules and

32

forms and is accumulated and communicated to our principal executive and financial officers as appropriate to allow timely decisions regarding required disclosure.

Changes in Internal Control Over Financial Reporting

During the quarter ended March 31, 2024, there were no changes in internal control that have materially affected or are reasonably likely to materially affect internal control over financial reporting.

PART II—OTHER INFORMATION

Item 1. Legal Proceedings

The Company is involved in various legal proceedings arising in the normal course of business. The Company does not believe that the ultimate resolution of these matters will have a material adverse effect on its consolidated financial position, results of operations, or cash flows.

Item 1A. Risk Factors

Information regarding risk factors appears in the Safe Harbor Statement at the beginning of this quarterly report on Form 10-Q, and in Part I — Item 1A of our 2023 Form 10-K. There have been no material changes from the risk factors previously disclosed.

Item 2. Unregistered Sales of Equity Securities and Use of Proceeds

None.

Item 3. Defaults Upon Senior Securities

None.

Item 4. Mine Safety Disclosures

Not Applicable.

Item 5. Other Information

During the fiscal quarter ended March 31, 2024, the following directors and Section 16 officers, as applicable, adopted, modified or terminated “Rule 10b5-1 trading arrangements” (as defined in Item 408 of Regulation S-K):

●  On February 29, 2024, John Kiernan, our Chief Financial Officer, entered into a trading plan intended to satisfy the affirmative defense conditions of Rule 10b5-1(c).  Mr. Kiernan’s plan covers the sale of 30,000 shares of our common stock, between June 10, 2024 and May 30, 2025. Transactions under the plan are based upon pre-established dates.

There were no “non-Rule 10b5-1 trading arrangements” (as defined in Item 408 of Regulation S-K) adopted, modified or terminated during the fiscal quarter ended March 31, 2024 by our directors and Section 16 officers. Each of the Rule 10b5-1 trading arrangements are in accordance with our Securities Trading Policy and actual sale transactions made pursuant to such trading arrangements will be disclosed publicly in Section 16 filings with the SEC in accordance with applicable securities laws, rules and regulations.

33

Item 6. Exhibits

Unless otherwise indicated, each of the following exhibits has been filed with the Securities and Exchange Commission by Veeco under File No. 0-16244.

Exhibit

Incorporated by Reference

Filed or
Furnished

Number

    

Exhibit Description

    

Form

    

Exhibit

    

Filing Date

    

Herewith

10.1

Form of Notice of Performance Restricted Stock Unit Award and related terms and conditions pursuant to the Veeco 2019 Stock Incentive Plan, effective March 2024.

*

10.2

Form of Notice of Restricted Stock Unit Award and related terms and conditions pursuant to Veeco 2019 Stock Incentive Plan, effective March 2024.

*

31.1

Certification of Chief Executive Officer pursuant to Rule 13a—14(a) or Rule 15d—14(a) of the Securities and Exchange Act of 1934.

*

31.2

Certification of Chief Financial Officer pursuant to Rule 13a—14(a) or Rule 15d—14(a) of the Securities and Exchange Act of 1934.

*

32.1

Certification of Chief Executive Officer pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes - Oxley Act of 2002.

*

32.2

Certification of Chief Financial Officer pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes - Oxley Act of 2002.

*

101.INS

XBRL Instance Document - the instance document does not appear in the Interactive Data File because its XBRL tags are embedded within the Inline XBRL document.

**

101.XSD

XBRL Schema.

**

101.PRE

XBRL Presentation.

**

101.CAL

XBRL Calculation.

**

101.DEF

XBRL Definition.

**

101.LAB

XBRL Label.

**

104

Cover Page Interactive Data File (formatted as Inline XBRL and contained in Exhibit 101).

**

​ ​​ ​​ ​

*     Filed herewith

**   Filed herewith electronically

34

SIGNATURES

Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned, thereunto duly authorized, on May 7, 2024.

Veeco Instruments Inc.

By:

/s/ WILLIAM J. MILLER, Ph.D.

William J. Miller, Ph.D.

Chief Executive Officer

By:

/s/ JOHN P. KIERNAN

John P. Kiernan

Senior Vice President and Chief Financial Officer

35

EX-10.1 2 veco-20240331xex10d1.htm EX-10.1

Exhibit 10.1

VEECO INSTRUMENTS INC. 2019 STOCK INCENTIVE PLAN

NOTICE OF PERFORMANCE RESTRICTED STOCK UNIT AWARD (2024)

Veeco Instruments Inc. (the “Company”) is pleased to confirm the award to the employee named below (the “Grantee”) of Restricted Stock Units (the “Award”), subject to the terms and conditions of this Notice of Performance Restricted Stock Unit Award (2024) (the “Notice”), the Veeco Instruments Inc. 2019 Stock Incentive Plan, as amended from time to time (the “Plan”) and the Veeco Instruments Inc. Terms and Conditions of Restricted Stock Unit Award (2024) (the “Terms and Conditions”) attached hereto, as follows. Unless otherwise provided herein, the terms in this Notice shall have the same meaning as those defined in the Plan.

Grantee:

Date of Award:

March 14, 2024

Target Number of Restricted Stock Units Awarded (the “Units”):

Performance Period:

March 14, 2024 to March 13, 2027

The Units shall be earned based on the Company’s Three Year Total Shareholder Return (“TSR”) versus the Three Year TSR of the Russell 2000 Index (the “Index”) measured at the end of the Performance Period. Subject to the Grantee’s Continuous Service and other limitations set forth in this Notice, the Terms and Conditions and the Plan, the Units shall be earned and will “vest” in accordance with the schedules set forth in Exhibit A. For purposes of this Notice and the Terms and Conditions, the term “vest” shall mean, with respect to any Units, that such Units are no longer subject to forfeiture to the Company. If the Grantee would become vested in a fraction of a Unit, such Unit shall not vest until the Grantee becomes vested in the entire Unit.

Except as may otherwise be specifically provided for under the terms of any other agreement or policy between the Company and the Grantee, vesting shall cease upon the date the Grantee terminates Continuous Service for any reason, including death or Disability, and in the event the Grantee terminates Continuous Service for any reason, including death or Disability, any unvested Units held by the Grantee at the time of such termination of the Grantee’s Continuous Service shall be forfeited.

Additional Provisions:

This Award shall be subject to the terms and conditions set forth in the Plan and the Terms and Conditions, including, without limitation, the Forfeiture for Restricted Activity, Clawback, Governing Law, and Venue and Jurisdiction provisions of Sections 2.2, 2.3, 4.1 through 4.5, 6.5, and 6.6 of the Terms and Conditions.

IMPORTANT NOTICE

Grantee must sign this Notice and return it to the Company’s Sr. VP, Chief Administrative Officer on or before April 29, 2024. Return your executed Notice to: Robert Bradshaw by mail at 1 Terminal Drive, Plainview, New York 11803, or email at RBradshaw@Veeco.com. If Grantee has received this Notice by way of email from the Company, and if Grantee is unable to sign and return the Notice on or before the aforementioned date, Grantee may accept the Award by reply email to the Company, stating “I accept” (or words to this effect) on or before the aforementioned date.

PLEASE NOTE THAT YOUR ACCEPTANCE OF THE AWARD WILL ALSO CONSTITUTE ACCEPTANCE OF, AND AGREEMENT TO BE BOUND BY THE TERMS AND CONDITIONS


GOVERNING THE PERFORMANCE RESTRICTED STOCK UNIT AWARD, INCLUDING WITHOUT LIMITATION, THE RESTRICTED ACTIVITY, CLAWBACK, GOVERNING LAW, AND VENUE AND JURISDICTION PROVISIONS OF SECTIONS 2.2, 2.3, 4.1 through 4.5, 6.5, AND 6.6 OF THE TERMS AND CONDITIONS.

VEECO INSTRUMENTS INC.

Graphic

Name: Robert Bradshaw
Title: Sr. VP, Chief Administrative Officer

______________________________

Grantee Date

VEECO INSTRUMENTS INC. 2019 STOCK INCENTIVE PLAN

TERMS AND CONDITIONS OF
RESTRICTED STOCK UNIT AWARD (2024)

These TERMS AND CONDITIONS OF RESTRICTED STOCK UNIT AWARD (2024) (these “Terms and Conditions”) apply to any award by Veeco Instruments Inc., a Delaware corporation (the “Company”), of Restricted Stock Units, subject to certain restrictions pursuant to the Veeco Instruments Inc. 2019 Stock Incentive Plan (as it may be amended from time to time, the “Plan”), which specifically references these Terms and Conditions.

ARTICLE 1
ISSUANCE OF UNITS

The Company hereby issues to the Grantee (the “Grantee”) named in the Notice of Performance Restricted Stock Unit Award (2024) (the “Notice”) an award (the “Award”) of Restricted Stock Units, as set forth in the Notice (the “Units”), subject to the Notice, these Terms and Conditions, and the terms and provisions of the Plan, which is incorporated herein by reference. Unless otherwise provided herein, the terms in these Terms and Conditions shall have the same meaning as those defined in the Plan.

ARTICLE 2
CONVERSION OF UNITS AND ISSUANCE OF SHARES
2.1General. Subject to Sections 2.2 through 2.4 below, one share of Common Stock shall be issuable for each Unit subject to the Award (the “Shares”) upon vesting. Immediately thereafter, or as soon as administratively feasible, the Company will transfer the appropriate number of Shares to the Grantee after satisfaction of any required tax or other withholding obligations. Any fractional Unit remaining after the Award is fully vested shall be discarded and shall not be converted into a fractional Share. Notwithstanding the foregoing, the relevant number of Shares shall be issued no later than March 15th of the year following the calendar year in which the Award vests. The Company may however, in its sole discretion, make a cash payment in lieu of the issuance of the Shares in an amount equal to the value of one share of Common Stock multiplied by the number of Units subject to the Award. The number of Shares covered by the Award shall be proportionately adjusted for any stock dividend affecting the Shares in accordance with Section 10 of the Plan.


2.2Forfeiture for Restricted Activity. The Grantee acknowledges that the Company is making this Award of additional compensation, among other reasons, to provide an incentive to the Grantee to remain with and to promote the best interests of, the Company, and to protect the Company’s assets, including its goodwill, Confidential Information (as defined below) and trade secrets, which are legitimate business interests of the Company, and that engaging in “Restricted Activities” (as described in Article 4 below), would be detrimental to the legitimate business interests of the Company. Therefore, in exchange for this Award, notwithstanding anything to the contrary in these Terms and Conditions or otherwise, if the Grantee engages in “Restricted Activities” (as described in Sections 4.1 through 4.5 below), (a) all unvested Units will immediately be forfeited, and (b) the Grantee shall be required to (i) return to the Company, within 10 business days after the Company’s request to Grantee therefor, all Shares received pursuant to the Award that are owned, directly or indirectly, by the Grantee, any Cash Dividend Equivalents, and any cash payment made in lieu of the issuance of the Shares, and (ii) pay to the Company, within 10 business days of the Company’s request to the Grantee therefor, an amount equal to the excess, if any, of the aggregate after-tax proceeds (taking into account all amounts of tax that would be recoverable upon a claim of loss for payment of such proceeds in the year of repayment) the Grantee received upon the sale or other disposition of all Shares received pursuant to the Award (the “After-Tax Proceeds”). The forfeiture for Restricted Activity provisions of this Section 2.2 and Article 4 shall survive and continue to apply beyond settlement of all Awards under the Plan, any termination or expiration of this Award for any reason, and after the provisions of any employment or other agreement between the Company and the Grantee have lapsed.
2.3Clawback. This Award, all Units received pursuant to the Award, all shares of Common Stock received pursuant to the Award that are owned, directly or indirectly, by the Grantee, any cash payments made in lieu of the issuance of the Shares, any Cash Dividend Equivalents, and any After-Tax Proceeds shall be subject to the Compensation Recoupment Policy, established by the Company, as amended from time to time, or any similar or successor policy.
2.4Delay of Issuance of Shares. The Company shall delay the issuance of any Shares under this Article 2 to the extent necessary to comply with Section 409A(a)(2)(B)(i) of the Code (relating to payments made to certain “specified employees” of certain publicly-traded companies); in such event, any Shares to which the Grantee would otherwise be entitled during the six (6) month period following the date of the Grantee’s termination of Continuous Service will be issuable on the first business day following the expiration of such six (6) month period.
ARTICLE 3
RIGHT TO SHARES

Except as set forth herein, the Grantee shall not have any right in, to or with respect to any of the Shares (including any voting rights) issuable under the Award until the Award is settled by the issuance of such Shares to the Grantee. Notwithstanding the foregoing, while one or more Shares remain subject to this Award, the Grantee shall have the right to accrue Cash Dividend Equivalents. For purposes herein, a “Cash Dividend Equivalent” means, for each Share subject to the Award, a cash payment equal to the cash dividend, if any, that would become payable to the Grantee with respect to such Share had the Grantee been the holder of such Share on the record date for such cash dividend. Cash Dividend Equivalents will be subject to all of the terms and conditions of the Award, including that the Cash Dividend Equivalents will vest, become payable, and be subject to forfeiture and clawback upon the same terms and at the same time as the Units to which they relate.

ARTICLE 4
FORFEITURE FOR RESTRICTED ACTIVITY
4.1Restricted Activity. For the avoidance of doubt, the Company and the Grantee agree that the Grantee is free to engage in the activities described in this Article 4 and that the Company will not seek to enjoin or otherwise stop the Grantee from engaging in any such Restricted Activities (provided, however, that the Company reserves such rights as may exist at law or in equity and/or pursuant to any other agreement entered into between the Company and the Grantee, including, without limitation, in the Veeco Instruments Inc. Employee Confidentiality and Inventions Agreement (“ECIA”)), but that if the Grantee engages in such activities the Company shall have all of the rights set forth in Section 2.2 with respect to the Award, all Shares or cash received pursuant to the Award, and any After-Tax Proceeds.


4.2Company Information. During the term of employment with the Company and for five years thereafter, the Grantee will not use or disclose to any individual or entity any Confidential Information (as defined below) of the Company except (i) in the performance of the Grantee’s duties for the Company, (ii) as authorized in writing by the Company, or (iii) as required by law or legal process, provided, that, prior to any such required disclosure, the Grantee will notify the Company of the requirement to disclose and, if requested, the Grantee will cooperate with the Company’s efforts to prevent or limit such disclosure. The Grantee understands that “Confidential Information” means any information that: (a) is disclosed to, learned by, or created by the Grantee in connection with the Grantee’s employment with the Company (or a predecessor company now owned by or part of the Company), and (b) the Company treats as proprietary, private or confidential. Confidential Information may include, without limitation, information relating to the Company’s products, services and methods of operation, the identities and competencies of the Company’s employees, customers and suppliers, trade secrets, know-how, processes, Inventions and the Company Related Inventions (each as defined in the ECIA), techniques, data, sketches, plans, drawings, chemical formulae, computer software, financial information, operating and cost data, research databases, selling and pricing information, business and marketing plans, and information concerning potential acquisitions, dispositions or joint ventures. The Grantee further understands that “Confidential Information” does not include any of the foregoing items that has become publicly known or made generally available (provided that information will not cease to be “Confidential Information” as a result of the Grantee’s breach of confidentiality). The Grantee will promptly notify the Company if the Grantee becomes aware of any unauthorized use or disclosure of Confidential Information.
4.3Third Party Information. The Grantee recognizes that the Company has received and in the future will receive from its customers, suppliers and trading partners their confidential or proprietary information subject to a duty on the Company’s part to maintain the confidentiality of such information and to use it only for certain limited purposes. The Grantee agrees to hold all such confidential or proprietary information in the strictest confidence and not to disclose it to any person or entity or to use it except as necessary in carrying out the Grantee’s work for the Company consistent with the Company’s agreement with such third party.
4.4Non-Competition. During employment with the Company and for one year thereafter, (a) the Grantee will not own, manage, work for or otherwise participate in any business whose products, services or activities compete with the current or currently contemplated products, services or activities of the Company in any state or country in which the Company sells products or conducts business and (x) in which the Grantee was involved or (y) with respect to which the Grantee had access to Confidential Information, in each case, during the 5 years prior to termination, provided, however, that the Grantee may own up to 1% of the securities of any such public company (but without otherwise participating in the activities of such enterprise); and (b) the Grantee will not, for himself or any other person: (i) induce or try to induce any customer, supplier, licensor or business relation to stop doing business with the Company or otherwise interfere with the relationship between the Company and any of its customers, suppliers, licensors or business relations; or (ii) solicit the business of any person known by the Grantee to be a customer of the Company, whether or not the Grantee had personal contact with such person, with respect to products or activities that compete with the products or activities of the Company in existence or contemplated at the time of termination of the Grantee’s Continuous Service. The Grantee agrees that this covenant is reasonable with respect to its scope, geographical area, and duration.
4.5Non-Solicitation. During employment with the Company and for one year thereafter, the Grantee will not, for himself or any other person: (a) induce or try to induce any employee to leave the Company or otherwise interfere with the relationship between the Company and any of its employees, or (b) employ or engage as an independent contractor, any current or former employee of the Company, other than former employees who have not worked for the Company within the past year. The Grantee agrees that this covenant is reasonable with respect to its scope and duration.
4.6Severability. The invalidity or unenforceability of any Section, paragraph, or provision (or any part thereof) of the Notice or these Terms and Conditions shall not affect the validity or enforceability of any one or more of the other paragraphs or provisions (or other parts thereof), and all other provisions shall remain in full force and effect. If any provision of the Notice or these Terms and Conditions is held to be excessively broad, then such provision shall be reformed and construed by limiting and reducing it so as to be enforceable to the maximum extent permitted by law.


4.7Notice of Immunity under the Defend Trade Secrets Act and Other Protected Rights. The Grantee understands that, in accordance with the Defend Trade Secrets Act of 2016, the Grantee will not be held criminally or civilly liable under any federal or state trade secret law for the disclosure of a trade secret that: (a) is made (i) in confidence to a federal, state or local government official, either directly or indirectly, or to an attorney; and (ii) solely for the purpose of reporting or investigating a suspected violation of law; or (b) is made in a complaint or other document that is filed under seal in a lawsuit or other proceeding. The Grantee also understands that if the Grantee ever files a lawsuit for retaliation by the Company for reporting a suspected violation of law, the Grantee may disclose trade secrets to the Grantee’s attorney and use the trade secret information in the court proceeding provided the Grantee: (a) files any document containing the trade secret under seal; and (b) does not disclose the trade secret, except pursuant to court order. Grantee understands that nothing contained in the Notice, these Terms and Conditions, or the Plan limits Grantee’s ability to file a charge or complaint with the Equal Employment Opportunity Commission, the National Labor Relations Board, the Occupational Safety and Health Administration, the Securities and Exchange Commission or any other federal, state or local governmental agency or commission (“Government Agencies”). Grantee further understands that nothing in the Notice, these Terms and Conditions, or the Plan limits Grantee’s ability to communicate with any Government Agencies or otherwise participate in any investigation or proceeding that may be conducted by any Government Agency, including providing documents or other information, without notice to the Company. Nothing in the Notice, these Terms and Conditions, or the Plan limits Grantee’s right to receive an award for information provided to any Government Agencies.
ARTICLE 5
TAXES
5.1Tax Liability. The Grantee is ultimately liable and responsible for all taxes owed by the Grantee in connection with the Award, regardless of any action the Company or any Related Entity takes with respect to any tax withholding obligations that arise in connection with the Award. Neither the Company nor any Related Entity makes any representation or undertaking regarding the treatment of any tax withholding in connection with any aspect of the Award, including the grant, vesting, assignment, release or cancellation of the Units, the delivery of Shares, the payment of any Cash Dividend Equivalents, the subsequent sale of any Shares acquired upon vesting and the receipt of any dividends or dividend equivalents. The Company does not commit and is under no obligation to structure the Award to reduce or eliminate the Grantee’s tax liability.
5.2Payment of Withholding Taxes. Prior to any event in connection with the Award (e.g., vesting) that the Company determines may result in any tax withholding obligation, whether United States federal, state, local or non-U.S., including any social insurance, employment tax, payment on account or other tax-related obligation (the “Tax Withholding Obligation”), the Grantee must arrange for the satisfaction of the amount of such Tax Withholding Obligation in a manner acceptable to the Company.
(a)By Share Withholding. If permissible under Applicable Law, the Grantee authorizes the Company to, upon the exercise of its sole discretion, withhold from those Shares otherwise issuable to the Grantee the whole number of Shares sufficient to satisfy the applicable Tax Withholding Obligation. The Grantee acknowledges that the withheld Shares may not be sufficient to satisfy the Grantee’s Tax Withholding Obligation. Accordingly, the Grantee agrees to pay to the Company or any Related Entity as soon as practicable, including through additional payroll withholding, any amount of the Tax Withholding Obligation that is not satisfied by the withholding of Shares described above.
(b)By Sale of Shares. Unless the Grantee determines to satisfy the Tax Withholding Obligation by some other means in accordance with clause (c) below, the Grantee’s acceptance of this Award constitutes the Grantee’s instruction and authorization to the Company and any brokerage firm determined acceptable to the Company for such purpose to, upon the exercise of Company’s sole discretion, sell on the Grantee’s behalf a whole number of Shares from those Shares issuable to the Grantee as the Company determines to be appropriate to generate cash proceeds sufficient to satisfy the applicable Tax Withholding Obligation. Such Shares will be sold on the day such Tax Withholding Obligation arises (e.g., a vesting date) or as soon thereafter as practicable. The Grantee will be responsible for all broker’s fees and other costs of sale, and the Grantee agrees to indemnify and hold the Company harmless from any losses, costs, damages, or expenses relating to any such sale. To the extent the proceeds of such sale exceed the Grantee’s Tax Withholding Obligation, the Company agrees to pay such excess in cash to the Grantee. The Grantee acknowledges that the Company or its designee is under no


obligation to arrange for such sale at any particular price, and that the proceeds of any such sale may not be sufficient to satisfy the Grantee’s Tax Withholding Obligation. Accordingly, the Grantee agrees to pay to the Company or any Related Entity as soon as practicable, including through additional payroll withholding, any amount of the Tax Withholding Obligation that is not satisfied by the sale of Shares described above.
(c)By Check, Wire Transfer or Other Means. At any time not less than five (5) business days (or such fewer number of business days as determined by the Administrator) before any Tax Withholding Obligation arises (e.g., a vesting date), the Grantee may elect to satisfy the Grantee’s Tax Withholding Obligation by delivering to the Company an amount that the Company determines is sufficient to satisfy the Tax Withholding Obligation by (x) wire transfer to such account as the Company may direct, (y) delivery of a certified check payable to the Company, or (z) such other means as specified from time to time by the Administrator.

Notwithstanding the foregoing, the Company or a Related Entity also may satisfy any Tax Withholding Obligation by offsetting any amounts (including, but not limited to, salary, bonus and severance payments) payable to the Grantee by the Company and/or a Related Entity. Furthermore, in the event of any determination that the Company has failed to withhold a sum sufficient to pay all withholding taxes due in connection with the Award, the Grantee agrees to pay the Company the amount of such deficiency in cash within five (5) calendar days after receiving a written demand from the Company to do so, whether or not the Grantee is an employee of the Company at that time.

ARTICLE 6
OTHER PROVISIONS
6.1Transfer Restrictions. The Units may not be transferred in any manner other than by will or by the laws of descent and distribution (if permitted under the Plan).
6.2No Right to Continued Employment. Nothing in the Notice, these Terms and Conditions or the Plan shall confer upon Grantee any right to continue in the service of the Company or any Related Entity or shall interfere with or restrict in any way the rights of the Company or any Related Entity, which are hereby expressly reserved, to discharge Grantee at any time for any reason whatsoever, with or without cause, except as may otherwise be provided by any written agreement entered into by and between the Company and Grantee.
6.3No Right to Future Awards. Nothing in the Notice, these Terms and Conditions or the Plan shall confer upon Grantee any right with respect to future Awards under the Plan, or any right with respect to any other award under any plan of the Company or any Related Entity.
6.4Entire Agreement. The Notice, the Plan, and these Terms and Conditions constitute the entire agreement of the parties with respect to the subject matter hereof and supersede in their entirety all prior undertakings and agreements of the Company and the Grantee with respect to the subject matter hereof, and may not be modified adversely to the Grantee’s interest except by means of a writing signed by the Company and the Grantee. For the avoidance of doubt, the restrictions set forth in Sections 4.1 through 4.5 above do not supersede any other agreement between the Company and Grantee, including, without limitation, the ECIA. Nothing in the Notice, the Plan and these Terms and Conditions (except as expressly provided therein) is intended to confer any rights or remedies on any persons other than the parties. Should any provision of the Notice, the Plan or these Terms and Conditions be determined to be illegal or unenforceable, such provision shall be enforced to the fullest extent allowed by law and the other provisions shall nevertheless remain effective and shall remain enforceable.
6.5Governing Law. The Notice, the Plan and these Terms and Conditions are to be construed in accordance with and governed by the internal laws of the State of New York, without giving effect to any choice of law rule that would cause the application of the laws of any jurisdiction other than the internal laws of the State of New York to the rights, duties, and obligations of the parties.
6.6Venue and Jurisdiction. The Company and the Grantee (the “parties”) expressly agree that any suit, action, or proceeding arising out of or relating to the Notice, the Plan or these Terms and Conditions shall be brought in the United States District Court for the Eastern District of New York (or should such court lack jurisdiction to hear such action, suit or proceeding, in a New York state court in the County of Nassau) and that the parties shall submit to the exclusive jurisdiction of such courts. The parties irrevocably waive, to the fullest extent


permitted by law, any objection the party may have to the laying of venue for any such suit, action or proceeding brought in such court. The parties agree and submit to personal jurisdiction in either court. The Parties further agree that this Venue and Jurisdiction is binding on all matters related to the Notice, the Plan, or these Terms and Conditions and may not be altered or amended by any other arrangement or agreement (including an employment agreement) without the express written consent of Grantee and the Company. If any one or more provisions of this Section 6.6 shall for any reason be held invalid or unenforceable, it is the specific intent of the parties that such provisions shall be modified to the minimum extent necessary to make it or its application valid and enforceable.
6.7Construction. The captions used in the Notice and these Terms and Conditions are inserted for convenience and shall not be deemed a part of the Award for construction or interpretation. Except when otherwise indicated by the context, the singular shall include the plural and the plural shall include the singular. Use of the term “or” is not intended to be exclusive, unless the context clearly requires otherwise.
6.8Administration and Interpretation. Any question or dispute regarding the administration or interpretation of the Notice, the Plan or these Terms and Conditions shall be submitted by the Grantee or by the Company to the Administrator. The resolution of such question or dispute by the Administrator shall be final and binding on all persons.
6.9Waiver of Jury Trial. THE PARTIES EXPRESSLY WAIVE ANY RIGHT THEY HAVE OR MAY HAVE TO A JURY TRIAL OF ANY SUCH SUIT, ACTION OR PROCEEDING.
6.10Severability. The invalidity or unenforceability of any paragraph or provision of these Terms and Conditions shall not affect the validity or enforceability of any other paragraph or provision, and all other provisions shall remain in full force and effect. If any provision of these Terms and Conditions is held to be excessively broad, then such provision shall be reformed and construed by limiting and reducing it so as to be enforceable to the maximum extent permitted by law.
6.11Notices. Any notice required or permitted hereunder shall be given in writing and shall be deemed effectively given upon personal delivery, upon deposit for delivery by an internationally recognized express mail courier service or upon deposit in the United States mail by certified mail (if the parties are within the United States), with postage and fees prepaid, addressed to the other party at its address as shown in these instruments, or to such other address as such party may designate in writing from time to time to the other party.
6.12Nature of Award. In accepting the Award, the Grantee acknowledges and agrees that:
(a)the Plan is established voluntarily by the Company, it is discretionary in nature, and it may be modified, amended, suspended or terminated by the Company at any time, unless otherwise provided in the Plan and these Terms and Conditions;
(b)the Award is voluntary and occasional and does not create any contractual or other right to receive future awards of Units, or benefits in lieu of Units, even if Units have been awarded repeatedly in the past;
(c)all decisions with respect to future awards, if any, will be at the sole discretion of the Company;
(d)the Grantee’s participation in the Plan is voluntary;
(e)the Grantee’s participation in the Plan shall not create a right to any employment with the Grantee’s employer and shall not interfere with the ability of the Company or the employer to terminate the Grantee’s employment relationship, if any, at any time;
(f)the Award is not part of normal or expected compensation or salary for any purposes, including, but not limited to, calculating any severance, resignation, termination, redundancy, end of service payments, bonuses, long-service awards, pension or retirement or welfare benefits or similar payments and in no event should be considered as compensation for, or relating in any way to, past services for the Company or any Related Entity;


(g)in the event that the Grantee is not an Employee of the Company or any Related Entity, the Award and the Grantee’s participation in the Plan will not be interpreted to form an employment or service contract or relationship with the Company or any Related Entity;
(h)the future value of the underlying Shares is unknown and cannot be predicted with certainty;
(i)in consideration of the Award, no claim or entitlement to compensation or damages shall arise from termination of the Award or diminution in value of the Award or Shares acquired upon vesting of the Award, resulting from termination of the Grantee’s Continuous Service by the Company or any Related Entity (for any reason whatsoever and whether or not in breach of local labor laws) and in consideration of the grant of the Award, the Grantee irrevocably releases the Company and any Related Entity from any such claim that may arise; if, notwithstanding the foregoing, any such claim is found by a court of competent jurisdiction to have arisen, then, by signing the Notice, the Grantee shall be deemed irrevocably to have waived his or her right to pursue or seek remedy for any such claim or entitlement;
(j)in the event of termination of the Grantee’s Continuous Service (whether or not in breach of local labor laws), the Grantee’s right to receive Awards under the Plan and to vest in such Awards, if any, will terminate effective as of the date that the Grantee is no longer providing services and will not be extended by any notice period mandated under local law (e.g., providing services would not include a period of “garden leave” or similar period pursuant to local law); furthermore, in the event of termination of the Grantee’s Continuous Service (whether or not in breach of local labor laws), the Administrator shall have the exclusive discretion to determine when the Grantee is no longer providing services for purposes of this Award;
(k)the Company is not providing any tax, legal or financial advice, nor is the Company making any recommendations regarding the Grantee’s participation in the Plan or the Grantee’s acquisition or sale of the underlying Shares; and
(l)the Grantee is hereby advised to consult with the Grantee’s own personal tax, legal and financial advisers regarding the Grantee’s participation in the Plan before taking any action related to the Plan.
6.13Data Protection and Privacy. The Grantee understands that the Company may (a) collect, process, store, use and disclose Grantee’s personal data, (b) make such data available to the Company’s affiliates and subsidiaries, as well as to certain appropriate third parties who provide products or services to the Company (for example, human resource service providers), and (c) transmit, transfer and store such data to/on the Company’s information systems which may be located outside Grantee’s home country, in countries which may have different data protection and privacy laws than Participant’s home country. Any such collection, processing, storage, use, disclosure, transmission or transfer shall be made only for lawful purposes, for example, managing Grantee’s employment relationship with the Company and administering the Company’s compensation programs. For more information, please consult the Company’s applicable policies covering personal data protection and privacy, as may be in effect from time to time.
6.14Language. If the Grantee has received these Terms and Conditions or any other document related to the Plan translated into a language other than English and if the translated version is different than the English version, the English version will control, unless otherwise prescribed by Applicable Law.
6.15Amendment and Delay to Meet the Requirements of Section 409A. The Grantee acknowledges that the Company, in the exercise of its sole discretion and without the consent of the Grantee, may amend or modify these Terms and Conditions in any manner and delay the issuance of any Shares issuable pursuant to these Terms and Conditions to the minimum extent necessary to meet the requirements of Section 409A of the Code as amplified by any Treasury regulations or guidance from the Internal Revenue Service as the Company deems appropriate or advisable. In addition, the Company makes no representation that the Award will comply with Section 409A of the Code and makes no undertaking to prevent Section 409A of the Code from applying to the Award or to mitigate its effects on any deferrals or payments made in respect of the Units. The Grantee is encouraged to consult a tax adviser regarding the potential impact of Section 409A of the Code.


* * * * *

EXHIBIT A

Three Year Relative Total Shareholder Return

The number of Units earned shall be determined pursuant to the Company’s Three Year Total Shareholder Return (“TSR”) versus the Three Year TSR of the Russell 2000 Index, as comprised on the first day of the Performance Period (the “Index”), measured at the end of the Performance Period.

Performance Range

Percentile Rank of

Russell 2000 Index

Percentage of Units Earned

Maximum

75th Percentile or greater

200%

Target

55th Percentile

100%

Threshold

25th Percentile

50%

Below Threshold

Less than 25th Percentile

0%

The number of Units earned shall be equal to the Target number of Units multiplied by the percentage of Units earned in the above table.
If the Company’s percentile rank for the Performance Period is equal to or greater than the Threshold, the percentage of Units earned will be determined through linear interpolation between the relevant data points (Threshold, Target, Maximum).
If the Company’s percentile rank is equal to or greater than the Maximum, 200% of the Target number of Units will be earned.
If the Company’s percentile rank is less than the Threshold, the Units will be forfeited.
Notwithstanding the above, if the Company’s TSR is less than zero, the Maximum number of Units that may be earned shall be the Target number of Units, even if the Company’s percentile rank for the Performance Period exceeds the 55th percentile.
Any Units that are not earned will be forfeited.
TSR for the Company and for each of the companies in the Index is calculated by (x) raising the quotient of the ending stock price divided by the beginning stock price to the 1/3 power and (y) subtracting one, as follows:

For purposes of computing TSR: (i) any dividends paid by the Company or the companies in the Index shall be treated as having been reinvested at the closing stock price on the ex-dividend date; (ii) the beginning stock price will be the average closing stock price over the 20 trading days preceding the beginning of the Performance Period; and (iii) the ending stock price will be the average closing stock price over the 20 trading days ending on the last day of the Performance Period, or in the case of a Corporate Transaction, ending on the date of such Change in Control or some earlier date, as determined by the Administrator.
The Company’s percentile rank versus the Index will be expressed as a percentage, with rounding to the nearest tenth of a percent, with all hundredths of a percent equal to or greater than 5 rounded up to the nearest tenth of a percent.
Companies in the Index that are acquired, are taken private, or are no longer publicly traded in the U.S. during the Performance Period will be removed from the Index and not included in the determination of the number of Units earned.
Companies in the Index that go bankrupt, are liquated or dissolved, or otherwise cease conducting operations during the Performance Period will be deemed to have a TSR equal to -100% for the Performance Period.
Upon the occurrence of a Corporate Transaction during the Performance Period, (i) if the Award (or a portion thereof) is neither Assumed or Replaced, the Award (or the portion thereof that is not Assumed or Replaced) shall automatically become fully vested immediately prior to the specified


effective date of such Corporate Transaction, provided the Grantee’s Continuous Service has not terminated prior to such date, and (ii) if the Award (or a portion thereof) is Assumed or Replaced, the service-based vesting conditions applicable to the Award (or the portion thereof that is Assumed or Replaced) shall remain in effect through the last day of the Performance Period, but the performance-based vesting condition shall be deemed achieved based on the greater of (A) assumed achievement of Target performance and (B) actual performance as determined by the Administrator through the date of the Corporate Transaction. For purposes of clause (i) above, the portion of such Award that shall become fully vested shall be based on the greater of (A) assumed achievement of Target performance and (B) actual performance as determined by the Administrator through the date of the Corporate Transaction.
The date that the Company determines the number of Units earned is the date such Units will be deemed to have become fully vested.
The Compensation Committee shall make all determinations and interpretations regarding the number of Units earned.


EX-10.2 3 veco-20240331xex10d2.htm EX-10.2

Exhibit 10.2

VEECO INSTRUMENTS INC. 2019 STOCK INCENTIVE PLAN

NOTICE OF RESTRICTED STOCK UNIT AWARD (2024)

Veeco Instruments Inc. (the “Company”) is pleased to confirm the award to the individual named below (the “Grantee”) of Restricted Stock Units (the “Award”), subject to the terms and conditions of this Notice of Restricted Stock Unit Award (2024) (the “Notice”), the Veeco Instruments Inc. 2019 Stock Incentive Plan, as amended from time to time (the “Plan”) and the Veeco Instruments Inc. Terms and Conditions of Restricted Stock Unit Award (2024) (the “Terms and Conditions”) attached hereto, as follows. Unless otherwise defined herein, the terms in this Notice shall have the same meaning as those defined in the Plan.

Grantee:

Award Date:

Total Number of Restricted Stock
Units Awarded (the “Units”):

Subject to the Grantee’s Continuous Service and other limitations set forth in this Notice, the Terms and Conditions and the Plan, the Units will “vest” in accordance with the following schedule (the “Vesting Schedule”): 1/3 of the Units comprising the Award will vest, and the restrictions with respect to such shares shall lapse, on each of the first (1st), second (2nd) and third (3rd) anniversaries of the Award Date (or, if later, the date on which the issuance of shares will not cause a violation of United States federal securities laws) (the later of each such dates, a “Vesting Date”). If the Grantee would become vested in a fraction of a share on a Vesting Date, such share shall not vest until the Grantee becomes vested in the entire share on the following Vesting Date.

For purposes of this Notice and the Terms and Conditions, the term “vest” shall mean, with respect to any Units, that such Units are no longer subject to forfeiture to the Company. If the Grantee would become vested in a fraction of a Unit, such Unit shall not vest until the Grantee becomes vested in the entire Unit.

Except as otherwise provided in an agreement with the Grantee or a plan or policy covering the Grantee, including, if applicable to the Grantee, the Company’s Amended and Restated Senior Executive Change in Control Policy (as may be amended or superseded, the “CIC Policy”), vesting shall cease upon the date the Grantee’s Continuous Service terminates for any reason other than a termination (i) due to the Grantee’s death or (ii) by the Company or a Related Entity due to the Grantee’s Disability (any such termination described in (i) or (ii) or, if the Grantee is a participant in the CIC Policy, any termination that results in vesting of equity awards under the CIC Policy, a “Qualifying Termination”), and any unvested Units held by the Grantee immediately upon such termination of the Grantee’s Continuous Service (other than a Qualifying Termination) shall be forfeited and deemed reconveyed to the Company and the Company shall thereafter be the legal and beneficial owner of such reconveyed Units and shall have all rights and interest in or related thereto without further action by the Grantee. In the event of a Qualifying Termination, the Units shall vest immediately as of the date of the Qualifying Termination.

IMPORTANT NOTICE

Grantee must sign this Notice and return it to the Company’s Sr. VP, Chief Administrative Officer on or before April 29, 2024. Return your executed Notice to: Robert Bradshaw by mail at 1 Terminal Drive, Plainview, New York 11803, or email at RBradshaw@Veeco.com. If Grantee has received this Notice by way of email from the Company, and if Grantee is unable to sign and return the Notice on or before the aforementioned date, Grantee may accept the Award by reply email to the Company, stating “I accept” (or words to this effect) on or before the aforementioned date.


PLEASE NOTE THAT YOUR acceptance of the Award will also constitute acceptance of, and agreement to be bound by, the Terms and Conditions governing the Award, including without limitation, the Forfeiture for Restricted Activity, Clawback, Governing Law and


Venue and Waiver of Jury Trial provisions of Sections 5.5, 5.10, 6.1 and 6.5 of the Terms and Conditions.

VEECO INSTRUMENTS INC.

Graphic

Name: Robert Bradshaw
Title: Sr. VP, Chief Administrative Officer

Grantee

______________________________________________________________

Print Name Signature Date


VEECO INSTRUMENTS INC. 2019 STOCK INCENTIVE PLAN

TERMS AND CONDITIONS OF RESTRICTED STOCK UNIT AWARD
(2024)

These TERMS AND CONDITIONS OF RESTRICTED STOCK UNIT AWARD (2024) (these “Terms and Conditions”) apply to any award by Veeco Instruments Inc., a Delaware corporation (the “Company”), of Restricted Stock Units, subject to certain restrictions pursuant to the Veeco Instruments Inc. 2019 Stock Incentive Plan (as it may be amended from time to time, the “Plan”), which specifically references these Terms and Conditions.

ARTICLE 1
ISSUANCE OF UNITS

The Company hereby issues to the Grantee (the “Grantee”) named in the Notice of Restricted Stock Unit Award (2024) (the “Notice”) an award (the “Award”) of the Total Number of Restricted Stock Units Awarded set forth in the Notice (the “Units”), subject to the Notice, these Terms and Conditions, and the terms and provisions of the Plan, which is incorporated herein by reference. Unless otherwise provided herein, capitalized terms in these Terms and Conditions shall have the same meaning as those defined in the Plan.

ARTICLE 2
CONVERSION OF UNITS AND ISSUANCE OF SHARES
2.1General. One share of Common Stock shall be issuable for each Unit subject to the Award that vests (the “Shares”) and, subject to Section 2.2, as soon as administratively feasible (and, in all events, not more than sity (60) days after the date the Units vest), the Company will transfer the appropriate number of Shares and the related Cash Dividend Equivalents (as defined in Article 3) with respect to such Shares to the Grantee after satisfaction of any required tax or other withholding obligations. Any fractional Unit remaining after the Award is fully vested shall be discarded and shall not be converted into a fractional Share. If a Cash Dividend Equivalent becomes payable with respect to vested Units and the Shares were issued after the dividend record date but before the dividend payment date, the related Cash Dividend Equivalents with respect to such Units shall be provided when the related dividend is paid. The Company may however, in its sole discretion, make a cash payment in lieu of the issuance of the Shares in an amount equal to the value of one share of Common Stock multiplied by the number of Units subject to the Award. The number of Shares covered by the Award shall be proportionately adjusted for any stock dividend affecting the Shares in accordance with Section 10 of the Plan.
2.2Delay of Issuance of Shares. The Company shall delay the issuance of any Shares and the payment of Cash Dividend Equivalents under this Article 2 to the extent necessary to comply with Section 409A(a)(2)(B)(i) of the Code (“Section 409A”) (relating to payments made to certain “specified employees” of certain publicly-traded companies); in such event, any Shares and Cash Dividend Equivalents to which the Grantee would otherwise be entitled during the six (6) month period following the date of the Grantee’s termination of Continuous Service will be issuable on the first business day following the expiration of such six (6) month period.
ARTICLE 3

RIGHT TO SHARES

Except as set forth herein, the Grantee shall not have any right in, to or with respect to any of the Shares (including any voting rights) issuable under the Award until the Award is settled by the issuance of such Shares to the Grantee. Notwithstanding the foregoing, while one or more Shares remain subject to this Award, the Grantee shall have the right to accrue Cash Dividend Equivalents (as defined in this Article 3). For purposes of this Agreement, a “Cash Dividend Equivalent” means, for each Share subject to the Award, a cash payment equal to the cash dividend, if any, that would have become payable to the Grantee with respect to such Share had the Grantee been the holder of such Share. Cash Dividend Equivalents that have accrued will vest and become payable upon the same terms and at the same time as the Units to which they relate, except as otherwise provided herein.

ARTICLE 4
TAXES
4.1Tax Liability. The Grantee is ultimately liable and responsible for all taxes owed by the Grantee in connection with the Award, regardless of any action the Company or any Related Entity takes with respect to any tax withholding obligations that arise in connection with the Award. Neither the Company nor any Related Entity makes any representation or


undertaking regarding the treatment of any tax withholding in connection with any aspect of the Award, including the grant, vesting, assignment, release or cancellation of the Units, the delivery of Shares, the payment of any Cash Dividend Equivalents, the subsequent sale of any Shares acquired upon vesting and the receipt of any dividends or dividend equivalents. The Company does not commit and is under no obligation to structure the Award to reduce or eliminate the Grantee’s tax liability.
4.2Payment of Withholding Taxes. Prior to any event in connection with the Award (e.g., vesting) that the Company determines may result in any tax withholding obligation, whether United States federal, state, local or non-U.S., including any social insurance, employment tax, payment on account or other tax-related obligation (the “Tax Withholding Obligation”), the Grantee must arrange for the satisfaction of the minimum amount of such Tax Withholding Obligation in a manner acceptable to the Company.
(a)By Share Withholding. If permissible under Applicable Law, the Grantee authorizes the Company to, upon the exercise of its sole discretion, withhold from those Shares otherwise issuable to the Grantee the whole number of Shares sufficient to satisfy the minimum applicable Tax Withholding Obligation with respect to the Shares. The Grantee acknowledges that the withheld Shares may not be sufficient to satisfy the Grantee’s minimum Tax Withholding Obligation. Accordingly, the Grantee agrees to pay to the Company or any Related Entity as soon as practicable, including through additional payroll withholding, any amount of the Tax Withholding Obligation that is not satisfied by the withholding of Shares described above. Share withholding may not be used to satisfy the Tax Withholding Obligation with respect to Cash Dividend Equivalents.
(b)By Sale of Shares. Unless the Grantee determines to satisfy the Tax Withholding Obligation by some other means in accordance with clause (iii) below, the Grantee’s acceptance of this Award constitutes the Grantee’s instruction and authorization to the Company and any brokerage firm determined acceptable to the Company for such purpose to, upon the exercise of Company’s sole discretion, sell on the Grantee’s behalf a whole number of Shares from those Shares issuable to the Grantee as the Company determines to be appropriate to generate cash proceeds sufficient to satisfy the minimum applicable Tax Withholding Obligation. Such Shares will be sold on the day such Tax Withholding Obligation arises (e.g., a vesting date) or as soon thereafter as practicable. The Grantee will be responsible for all broker’s fees and other costs of sale, and the Grantee agrees to indemnify and hold the Company harmless from any losses, costs, damages, or expenses relating to any such sale. To the extent the proceeds of such sale exceed the Grantee’s minimum Tax Withholding Obligation, the Company agrees to pay such excess in cash to the Grantee. The Grantee acknowledges that the Company or its designee is under no obligation to arrange for such sale at any particular price, and that the proceeds of any such sale may not be sufficient to satisfy the Grantee’s minimum Tax Withholding Obligation. Accordingly, the Grantee agrees to pay to the Company or any Related Entity as soon as practicable, including through additional payroll withholding, any amount of the Tax Withholding Obligation that is not satisfied by the sale of Shares described above.
(c)By Check, Wire Transfer or Other Means. At any time not less than five (5) business days (or such fewer number of business days as determined by the Administrator) before any Tax Withholding Obligation arises (e.g., a vesting date), the Grantee may elect to satisfy the Grantee’s Tax Withholding Obligation by delivering to the Company an amount that the Company determines is sufficient to satisfy the Tax Withholding Obligation by (x) wire transfer to such account as the Company may direct, (y) delivery of a certified check payable to the Company, or (z) such other means as specified from time to time by the Administrator.

Notwithstanding the foregoing, the Company or a Related Entity also may satisfy any Tax Withholding Obligation by offsetting any amounts (including, but not limited to, vested Cash Dividend Equivalents, salary, bonus and severance payments) payable to the Grantee by the Company and/or a Related Entity. Furthermore, in the event of any determination that the Company has failed to withhold a sum sufficient to pay all withholding taxes due in connection with the Award, the Grantee agrees to pay the Company the amount of such deficiency in cash within five (5) days after receiving a written demand from the Company to do so, whether or not the Grantee is an employee of the Company at that time.

ARTICLE 5
RESTRICTIONS
5.1Transfer Restrictions. The Units may not be transferred in any manner other than by will or by the laws of descent and distribution.
5.2Forfeiture. Unless otherwise provided by written agreement between the Company and the Grantee, which may be entered into at any time, including in connection with the termination of Grantee’s Continuous Service, any portion of the Award that is not vested at the time Grantee’s Continuous Service terminates shall thereupon be forfeited immediately and


without any further action by the Company or the Grantee. The Grantee also may be required to forfeit shares of Restricted Stock subject to the Award, including Shares received pursuant to the Award, in accordance with Section 5.5 below.
5.3Vesting and Lapse of Restrictions. Subject to the Notice, the Plan and these Terms and Conditions (including, for clarity, Sections 5.5 through 5.9), the exposure to the risk of forfeiture set forth in Section 5.2 shall lapse on the Vesting Dates set forth in the Notice. If Grantee would become vested in a fraction of a share on a Vesting Date, such share shall not vest until Grantee becomes vested in the entire share on the following Vesting Date.
5.4Legend. Until such time as the Award has vested and the exposure to forfeiture of the Shares received pursuant to the Award set forth in Section 5.5 and Sections 5.6 through 5.9 (the “Restrictions”) have lapsed, the Company may instruct the transfer agent for the Shares and/or other record-keepers to include a restrictive code or similar notation in its records (or legend on stock certificates, if any) to denote the Restrictions and any applicable federal and/or state securities laws restrictions relating to Restricted Stock. The notation or legend may include the following:

“THE SECURITIES REPRESENTED BY THIS CERTIFICATE ARE SUBJECT TO RESTRICTIONS SET FORTH IN THE PLAN AND IN THE TERMS AND CONDITIONS APPLICABLE TO THE RESTRICTED STOCK AWARD, COPIES OF WHICH ARE ON FILE AT THE PRINCIPAL OFFICE OF THE CORPORATION.”

5.5Forfeiture for Restricted Activity. The Grantee acknowledges that the Company is making this Award of additional compensation, among other reasons, to provide an incentive to the Grantee to remain with and to promote the best interests of, the Company, and to protect the Company’s assets, including its goodwill, Confidential Information (as defined below) and trade secrets, which are legitimate business interests of the Company, and that engaging in restricted activities described in Sections 5.6 through 5.9 (the “Restricted Activities”) would be detrimental to the legitimate business interests of the Company. Therefore, in exchange for this Award, notwithstanding anything to the contrary in these Terms and Conditions or otherwise, if the Grantee engages in Restricted Activities, (a) all unvested portions of the Award will immediately be forfeited, and (b) the Grantee shall be required to (i) return to the Company, within 10 business days after the Company’s request to the Grantee therefor, all Shares received pursuant to the Award that are owned, directly or indirectly, by the Grantee and (ii) pay to the Company, within 10 business days of the Company’s request to the Grantee therefor, an amount equal to the excess, if any, of the aggregate after-tax proceeds (taking into account all amounts of tax that would be recoverable upon a claim of loss for payment of such proceeds in the year of repayment) Grantee received upon the sale or other disposition of all Shares received pursuant to the Award (the “After-Tax Proceeds”). The forfeiture for Restricted Activity provisions of this Section 5.5 and Sections 5.6 through 5.9 shall survive and continue to apply beyond settlement of all Awards under the Plan, any termination or expiration of this Award for any reason, and after the provisions of any employment or other agreement between the Company and Grantee have lapsed.
5.6Company Information. During the term of employment with the Company and for five years thereafter, the Grantee will not use or disclose to any individual or entity any Confidential Information (as defined below) of the Company except (i) in the performance of the Grantee’s duties for the Company, (ii) as authorized in writing by the Company, or (iii) as required by law or legal process, provided, that, prior to any such required disclosure, the Grantee will notify the Company of the requirement to disclose and, if requested, the Grantee will cooperate with the Company’s efforts to prevent or limit such disclosure. The Grantee understands that “Confidential Information” means any information that: (a) is disclosed to, learned by, or created by Grantee in connection with the Grantee’s employment with the Company (or a predecessor company now owned by or part of the Company), and (b) the Company treats as proprietary, private or confidential. Confidential Information may include, without limitation, information relating to the Company’s products, services and methods of operation, the identities and competencies of the Company’s employees, customers and suppliers, trade secrets, know-how, processes, Inventions and the Company Related Inventions (each as defined in the Veeco Instruments Inc. Employee Confidentiality and Inventions Agreement (“ECIA”)), techniques, data, sketches, plans, drawings, chemical formulae, computer software, financial information, operating and cost data, research databases, selling and pricing information, business and marketing plans, and information concerning potential acquisitions, dispositions or joint ventures. The Grantee further understands that Confidential Information does not include any of the foregoing items which has become publicly known or made generally available (provided that information will not cease to be Confidential Information as a result of Grantee’s breach of confidentiality). The Grantee will promptly notify the Company if the Grantee becomes aware of any unauthorized use or disclosure of Confidential Information.
5.7Third Party Information. The Grantee recognizes that the Company has received and in the future will receive from its customers, suppliers and trading partners their confidential or proprietary information subject to a duty on the Company’s part to maintain the confidentiality of such information and to use it only for certain limited purposes. The Grantee agrees to hold all such confidential or proprietary information in the strictest confidence and not to disclose it to any person or


entity or to use it except as necessary in carrying out the Grantee’s work for the Company consistent with the Company’s agreement with such third party.
5.8Non-Competition. During employment with the Company and for one year thereafter:

(a)the Grantee will not own, manage, work for or otherwise participate in any business whose products, services or activities compete with the current or currently contemplated products, services or activities of the Company in any state or country in which the Company sells products or conducts business and (x) in which the Grantee was involved or (y) with respect to which the Grantee had access to Confidential Information, in each case, during the 5 years prior to termination, provided, however, that Grantee may own up to 1% of the securities of any such public company (but without otherwise participating in the activities of such enterprise); and

(b) the Grantee will not, for himself or any other person: (i) induce or try to induce any customer, supplier, licensor or business relation to stop doing business with the Company or otherwise interfere with the relationship between the Company and any of its customers, suppliers, licensors or business relations; or (ii) solicit the business of any person known by the Grantee to be a customer of the Company, whether or not the Grantee had personal contact with such person, with respect to products or activities that compete with the products or activities of the Company in existence or contemplated at the time of termination of the Grantee’s Continuous Service. The Grantee agrees that this covenant is reasonable with respect to its scope, geographical area, and duration.

5.9Non-Solicitation. During employment with the Company and for one year thereafter, the Grantee will not, for himself or any other person:

(a)induce or try to induce any employee to leave the Company or otherwise interfere with the relationship between the Company and any of its employees; or

(b) employ or engage as an independent contractor, any current or former employee of the Company, other than former employees who have not worked for the Company within the past year. The Grantee agrees that this covenant is reasonable with respect to its scope and duration.

5.10Clawback. This Award and all shares of Common Stock received pursuant to the Award that are owned, directly or indirectly, by the Grantee and any After-Tax Proceeds shall be subject to the Compensation Recoupment Policy, established by the Company, as amended from time to time, or any similar or successor policy.
5.11Notice of Immunity under the Defend Trade Secrets Act and Other Protected Rights. The Grantee understands that, in accordance with the Defend Trade Secrets Act of 2016, the Grantee will not be held criminally or civilly liable under any federal or state trade secret law for the disclosure of a trade secret that: (a) is made (i) in confidence to a federal, state or local government official, either directly or indirectly, or to an attorney; and (ii) solely for the purpose of reporting or investigating a suspected violation of law; or (b) is made in a complaint or other document that is filed under seal in a lawsuit or other proceeding. The Grantee also understands that if Grantee ever files a lawsuit for retaliation by the Company for reporting a suspected violation of law, Grantee may disclose trade secrets to the Grantee’s attorney and use the trade secret information in the court proceeding provided Grantee: (a) files any document containing the trade secret under seal; and (b) does not disclose the trade secret, except pursuant to court order. The Grantee understands that nothing contained in the Notice, these Terms and Conditions, or the Plan limits the Grantee’s ability to file a charge or complaint with the Equal Employment Opportunity Commission, the National Labor Relations Board, the Occupational Safety and Health Administration, the Securities and Exchange Commission or any other federal, state or local governmental agency or commission (“Government Agencies”). The Grantee further understands that nothing in the Notice, these Terms and Conditions, or the Plan limits Grantee’s ability to communicate with any Government Agencies or otherwise participate in any investigation or proceeding that may be conducted by any Government Agency, including providing documents or other information, without notice to the Company. Nothing in the Notice, these Terms and Conditions, or the Plan limits the Grantee’s right to receive an award for information provided to any Government Agencies.
5.12Restricted Activity. For the avoidance of doubt, the Company and Grantee agree that the Grantee is free to engage in the activities described in Sections 5.6 through 5.9 and that the Company will not seek to enjoin or otherwise stop the Grantee from engaging in any such Restricted Activities (provided, however, that the Company reserves such right as it may exist at law or in equity and/or pursuant to any other agreement entered into between the Company and the Grantee, including, without limitation, in the ECIA), but that if the Grantee engages in such activities the Company shall have all of the rights set forth in Section 5.5 with respect to the Award, all Shares received pursuant to the Award, and any After-Tax Proceeds.


ARTICLE 6

OTHER PROVISIONS

ARTICLE 1Entire Agreement; Governing Law. The Notice, the Plan and these Terms and Conditions constitute the entire agreement of the parties with respect to the subject matter hereof and supersede in their entirety all prior undertakings and agreements of the Company and the Grantee with respect to the subject matter hereof, and may not be modified adversely to the Grantee’s interest except by means of a writing signed by the Company and the Grantee. For the avoidance of doubt, the restrictions set forth in Sections 5.6 through 5.9 above do not supersede any other agreement between the Company and Grantee, including, without limitation, the ECIA. Nothing in the Notice, the Plan and these Terms and Conditions (except as expressly provided therein) is intended to confer any rights or remedies on any persons other than the parties. Should any provision of the Notice, the Plan or these Terms and Conditions be determined to be illegal or unenforceable, such provision shall be enforced to the fullest extent allowed by law and the other provisions shall nevertheless remain effective and shall remain enforceable. The Notice, the Plan and these Terms and Conditions are to be construed in accordance with and governed by the internal laws of the State of New York without giving effect to any choice of law rule that would cause the application of the laws of any jurisdiction other than the internal laws of the State of New York to the rights and duties of the parties. Should any provision of the Notice or these Terms and Conditions be determined to be illegal or unenforceable, the other provisions shall nevertheless remain effective and shall remain enforceable.
6.2Construction. The captions used in the Notice and these Terms and Conditions are inserted for convenience and shall not be deemed a part of the Award for construction or interpretation. Except when otherwise indicated by the context, the singular shall include the plural and the plural shall include the singular. Use of the term “or” is not intended to be exclusive, unless the context clearly requires otherwise.
6.3Administration and Interpretation. Any question or dispute regarding the administration or interpretation of the Notice, the Plan or these Terms and Conditions shall be submitted by the Grantee or by the Company to the Administrator. The resolution of such question or dispute by the Administrator shall be final and binding on all persons.
6.4Severability. The invalidity or unenforceability of any paragraph or provision (or any part thereof) of the Notice or these Terms and Conditions shall not affect the validity or enforceability of any one or more of the other paragraphs or provisions (or other parts thereof), and all other provisions shall remain in full force and effect. If any provision of the Notice or these Terms and Conditions is held to be excessively broad, then such provision shall be reformed and construed by limiting and reducing it so as to be enforceable to the maximum extent permitted by law.
6.5Venue and Waiver of Jury Trial. The parties agree that any suit, action, or proceeding arising out of or relating to the Notice, the Plan or these Terms and Conditions shall be brought exclusively in the United States District Court for the Eastern District of New York (or should such court lack jurisdiction to hear such action, suit or proceeding, in a New York state court in the County of Nassau) and that the parties shall submit to the jurisdiction of such court. The parties irrevocably waive, to the fullest extent permitted by law, any objection the party may have to the laying of venue for any such suit, action or proceeding brought in such court. THE PARTIES ALSO EXPRESSLY WAIVE ANY RIGHT THEY HAVE OR MAY HAVE TO A JURY TRIAL OF ANY SUCH SUIT, ACTION OR PROCEEDING. If any one or more provisions of this Section 6.5 shall for any reason be held invalid or unenforceable, it is the specific intent of the parties that such provisions shall be modified to the minimum extent necessary to make it or its application valid and enforceable.
6.6Notices. Any notice required or permitted hereunder shall be given in writing and shall be deemed effectively given upon personal delivery, upon deposit for delivery by an internationally recognized express mail courier service or upon deposit in the United States mail by certified mail (if the parties are within the United States), with postage and fees prepaid, addressed to the other party at its address as shown in these instruments, or to such other address as such party may designate in writing from time to time to the other party.
6.7Conformity to Securities Laws. Grantee acknowledges that the Plan and these Terms and Conditions are intended to conform to the extent necessary with all provisions of the Securities Act of 1933, as amended, and the Securities Exchange Act of 1934, as amended (the “Exchange Act”), and any and all regulations and rules promulgated thereunder by the Securities and Exchange Commission, including without limitation Rule 16b-3 under the Exchange Act. Notwithstanding anything herein to the contrary, the Plan shall be administered, and the Award is granted, only in such a manner as to conform to such laws, rules and regulations. To the extent permitted by applicable law, the Plan and these Terms and Conditions shall be deemed amended to the extent necessary to conform to such laws, rules and regulations.
6.8Nature of Award. In accepting the Award, the Grantee acknowledges and agrees that:


(a)the Plan is established voluntarily by the Company, it is discretionary in nature, and it may be modified, amended, suspended or terminated by the Company at any time, unless otherwise provided in the Plan and these Terms and Conditions;
(b)the Award is voluntary and occasional and does not create any contractual or other right to receive future awards of Units, or benefits in lieu of Units, even if Units have been awarded repeatedly in the past;
(c)all decisions with respect to future awards, if any, will be at the sole discretion of the Company;
(d)the Grantee’s participation in the Plan is voluntary;
(e)the Grantee’s participation in the Plan shall not create a right to any employment with the Grantee’s employer and shall not interfere with the ability of the Company or the employer to terminate the Grantee’s employment relationship, if any, at any time;
(f)the Award is not part of normal or expected compensation or salary for any purposes, including, but not limited to, calculating any severance, resignation, termination, redundancy, end of service payments, bonuses, long-service awards, pension or retirement or welfare benefits or similar payments and in no event should be considered as compensation for, or relating in any way to, past services for the Company or any Related Entity;
(g)in the event that the Grantee is not an Employee of the Company or any Related Entity, the Award and the Grantee’s participation in the Plan will not be interpreted to form an employment or service contract or relationship with the Company or any Related Entity;
(h)the future value of the underlying Shares is unknown and cannot be predicted with certainty;
(i)in consideration of the Award, no claim or entitlement to compensation or damages shall arise from termination of the Award or diminution in value of the Award or Shares acquired upon vesting of the Award, resulting from termination of the Grantee’s Continuous Service by the Company or any Related Entity (for any reason whatsoever and whether or not in breach of local labor laws) and in consideration of the grant of the Award, the Grantee irrevocably releases the Company and any Related Entity from any such claim that may arise; if, notwithstanding the foregoing, any such claim is found by a court of competent jurisdiction to have arisen, then, by signing the Notice, the Grantee shall be deemed irrevocably to have waived his or her right to pursue or seek remedy for any such claim or entitlement;
(j)in the event of termination of the Grantee’s Continuous Service (whether or not in breach of local labor laws), the Grantee’s right to receive Awards under the Plan and to vest in such Awards, if any, will terminate effective as of the date that the Grantee is no longer providing services and will not be extended by any notice period mandated under local law (e.g., providing services would not include a period of “garden leave” or similar period pursuant to local law); furthermore, in the event of termination of the Grantee’s Continuous Service (whether or not in breach of local labor laws), the Administrator shall have the exclusive discretion to determine when the Grantee is no longer providing services for purposes of this Award;
(k)the Company is not providing any tax, legal or financial advice, nor is the Company making any recommendations regarding the Grantee’s participation in the Plan or the Grantee’s acquisition or sale of the underlying Shares; and
(l)the Grantee is hereby advised to consult with the Grantee’s own personal tax, legal and financial advisers regarding the Grantee’s participation in the Plan before taking any action related to the Plan.
6.9Certain Provisions Applicable to Grantees Employed at International Locations. The Company will assess its requirements regarding Tax Withholding Obligations and reporting in connection with the Award and any Shares issued pursuant to the Award. These requirements may change from time to time as laws or interpretations change. Regardless of the actions of the Company in this regard, the Grantee hereby acknowledges and agrees that the ultimate liability for any and all Tax Withholding Obligation is and remains his or her responsibility and liability and that the Company makes no representations nor undertakings regarding treatment of any Tax Withholding Obligation in connection with any aspect of the Award and does not commit to structure the terms of the grant or any aspect of the Award to reduce or eliminate the Grantee’s liability regarding Tax Withholding Obligations. In the event that the Company has any Tax Withholding Obligation in connection with the Award, the Grantee agrees to make arrangements satisfactory to the Company to satisfy all withholding requirements. The Grantee


authorizes the Company to withhold all applicable Tax Withholding Obligations legally due from Grantee from his or her wages or other cash compensation paid him or her by the Company and/or to cause the sale of Shares on Grantee’s behalf or reduce the number of Shares delivered to Grantee as contemplated by Section 2.1 above, to satisfy such Tax Withholding Obligations.
6.10Data Privacy. The Grantee hereby explicitly and unambiguously consents to the collection, use and transfer, in electronic or other form, of the Grantee’s personal data as described in the Notice and these Terms and Conditions by and among, as applicable, the Grantee’s employer, the Company and any Related Entity for the exclusive purpose of implementing, administering and managing the Grantee’s participation in the Plan. The Grantee understands that the Company and the Grantee’s employer may hold certain personal information about the Grantee, including, but not limited to, the Grantee’s name, home address and telephone number, date of birth, social insurance or other identification number, salary, nationality, job title, any Shares or directorships held in the Company, details of all Units or any other entitlement to Shares awarded, canceled, vested, unvested or outstanding in the Grantee’s favor, for the exclusive purpose of implementing, administering and managing the Plan (“Data”). The Grantee understands that Data will be transferred to any third party assisting the Company with the implementation, administration and management of the Plan. The Grantee understands that the recipients of the Data may be located in the Grantee’s country, or elsewhere, and that the recipients’ country may have different data privacy laws and protections than the Grantee’s country. The Grantee understands that the Grantee may request a list with the names and addresses of any potential recipients of the Data by contacting the Grantee’s local human resources representative. The Grantee authorizes the Company and any other possible recipients which may assist the Company (presently or in the future) with implementing, administering and managing the Plan to receive, possess, use, retain and transfer the Data, in electronic or other form, for the sole purpose of implementing, administering and managing the Grantee’s participation in the Plan. The Grantee understands that Data will be held only as long as is necessary to implement, administer and manage the Grantee’s participation in the Plan. The Grantee understands that the Grantee may, at any time, view Data, request additional information about the storage and processing of Data, require any necessary amendments to Data or refuse or withdraw the consents herein, in any case without cost, by contacting in writing the Grantee’s local human resources representative. The Grantee understands, however, that refusal or withdrawal of consent may affect the Grantee’s ability to participate in the Plan. For more information on the consequences of the Grantee’s refusal to consent or withdrawal of consent, the Grantee understands that the Grantee may contact the Grantee’s local human resources representative.
6.11No Right to Continued Employment. Nothing in the Notice, these Terms and Conditions or the Plan shall confer upon Grantee any right to continue in the service of the Company or any Related Entity or shall interfere with or restrict in any way the rights of the Company or any Related Entity, which are hereby expressly reserved, to discharge Grantee at any time for any reason whatsoever, with or without cause, except as may otherwise be provided by any written agreement entered into by and between the Company and Grantee.
6.12No Right to Future Awards. Nothing in the Notice, these Terms and Conditions or the Plan shall confer upon Grantee any right with respect to future Awards under the Plan, or any right with respect to any other award under any plan of the Company or any Related Entity.
6.13Language. If the Grantee has received these Terms and Conditions or any other document related to the Plan translated into a language other than English and if the translated version is different than the English version, the English version will control, unless otherwise prescribed by Applicable Law.
6.14Section 409A. The Award is intended to comply with Section 409A of the Code or, if applicable, an exemption from Section 409A, and the terms governing the Award will be interpreted accordingly. If the terms of any other agreement, plan or policy applicable to the Award woud cause the Award not to comply with Section 409A, such terms shall (a) be modified (to the minimum extent necessary) to avoid such non-complance or (b) if such non-compliance may not be remedied by modification of terms, not apply to the Award. The Grantee acknowledges that the Company, in the exercise of its sole discretion and without the consent of the Grantee, may amend or modify these Terms and Conditions in any manner and delay or otherwise modify the timing of the issuance of any Shares (or cash) issuable pursuant to these Terms and Conditions to the minimum extent necessary to meet the requirements of Section 409A of the Code as amplified by any Treasury regulations or guidance from the Internal Revenue Service as the Company deems appropriate or advisable. In addition, the Company makes no representation that the Award will comply with Section 409A of the Code and makes no undertaking to prevent Section 409A of the Code from applying to the Award or to mitigate its effects on any deferrals or payments made in respect of the Units. The Grantee is encouraged to consult a tax adviser regarding the potential impact of Section 409A of the Code.

* * * * *


EX-31.1 4 veco-20240331xex31d1.htm EX-31.1

Exhibit 31.1

CERTIFICATION PURSUANT TO

RULE 13a — 14(a) or RULE 15d — 14(a)

OF THE SECURITIES EXCHANGE ACT OF 1934

I, William J. Miller, Ph.D., certify that:

1.

I have reviewed this quarterly report on Form 10-Q for the period ended March 31, 2024 of Veeco Instruments Inc.;

2.

Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;

3.

Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this report;

4.

The registrant’s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

(a)

designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;

(b)

designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;

(c)

evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and

(d)

disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during the registrant’s most recent fiscal quarter (the registrant’s fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the registrant’s internal control over financial reporting; and

5.

The registrant’s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or persons performing the equivalent functions):

(a)

all significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant’s ability to record, process, summarize and report financial information; and

(b)

any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant’s internal control over financial reporting.

By:

/s/ WILLIAM J. MILLER, Ph.D.

William J. Miller, Ph.D.

Chief Executive Officer

Veeco Instruments Inc.

May 7, 2024


EX-31.2 5 veco-20240331xex31d2.htm EX-31.2

Exhibit 31.2

CERTIFICATION PURSUANT TO

RULE 13a — 14(a) or RULE 15d — 14(a)

OF THE SECURITIES EXCHANGE ACT OF 1934

I,  John P. Kiernan, certify that:

1.    I have reviewed this quarterly report on Form 10-Q for the period ended March 31, 2024 of Veeco Instruments Inc.;

2.    Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;

3.    Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this report;

4.    The registrant’s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

(a)  designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;

(b)  designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;

(c)  evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and

(d)  disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during the registrant’s most recent fiscal quarter (the registrant’s fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the registrant’s internal control over financial reporting; and

5.    The registrant’s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or persons performing the equivalent functions):

(a)  all significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant’s ability to record, process, summarize and report financial information; and

(b)  any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant’s internal control over financial reporting.

By:

/s/ JOHN P. KIERNAN

John P. Kiernan

Senior Vice President and Chief Financial Officer

Veeco Instruments Inc.

May 7, 2024


EX-32.1 6 veco-20240331xex32d1.htm EX-32.1

Exhibit 32.1

CERTIFICATION PURSUANT TO

18 U.S.C. SECTION 1350,

AS ADOPTED PURSUANT TO

SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

In connection with the quarterly report of Veeco Instruments Inc. (the “Company”) on Form 10-Q for the period ended March 31, 2024 as filed with the Securities and Exchange Commission on the date hereof (the “Report”), I, William J. Miller, Ph.D., Chief Executive Officer of the Company, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, that:

(1)

The Report fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934; and

(2)

The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.

By:

/s/ WILLIAM J. MILLER Ph.D.

William J. Miller, Ph.D.

Chief Executive Officer

Veeco Instruments Inc.

May 7, 2024

A signed original of this written statement required by Section 906 has been provided to Veeco Instruments Inc. and will be retained by Veeco Instruments Inc. and furnished to the Securities and Exchange Commission or its staff upon request.


EX-32.2 7 veco-20240331xex32d2.htm EX-32.2

Exhibit 32.2

CERTIFICATION PURSUANT TO

18 U.S.C. SECTION 1350,

AS ADOPTED PURSUANT TO

SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

In connection with the quarterly report of Veeco Instruments Inc. (the “Company”) on Form 10-Q for the period ended March 31, 2024 as filed with the Securities and Exchange Commission on the date hereof (the “Report”), I, John P. Kiernan, Senior Vice President and Chief Financial Officer of the Company, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, that:

(1)

The Report fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934; and

(2)

The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.

By:

/s/ JOHN P. KIERNAN

John P. Kiernan

Senior Vice President and Chief Financial Officer

Veeco Instruments Inc.

May 7, 2024

A signed original of this written statement required by Section 906 has been provided to Veeco Instruments Inc. and will be retained by Veeco Instruments Inc. and furnished to the Securities and Exchange Commission or its staff upon request.


GRAPHIC 8 veco-20240331xex10d1001.jpg GRAPHIC begin 644 veco-20240331xex10d1001.jpg M_]C_X 02D9)1@ ! @ 0 ! #_VP!# ," @," @,# P,$ P,$!0@%!00$ M!0H'!P8(# H,# L*"PL-#A(0#0X1#@L+$!80$1,4%145# \7&!84&!(4%13_ MVP!# 0,$! 4$!0D%!0D4#0L-%!04%!04%!04%!04%!04%!04%!04%!04%!04 M%!04%!04%!04%!04%!04%!04%!04%!3_P 1" !& /L# 2( A$! Q$!_\0 M'P 04! 0$! 0$ $" P0%!@<("0H+_\0 M1 @$# P($ P4% M! 0 %] 0(# 01!1(A,4$&$U%A!R)Q%#*!D:$((T*QP152T? D,V)R@@D* M%A<8&1HE)B7J#A(6&AXB)BI*3E)66EYB9FJ*CI*6FIZBIJK*SM+6VM[BYNL+#Q,7& MQ\C)RM+3U-76U]C9VN'BX^3EYN?HZ>KQ\O/T]?;W^/GZ_\0 'P$ P$! 0$! M 0$! 0 $" P0%!@<("0H+_\0 M1$ @$"! 0#! <%! 0 0)W $" M Q$$!2$Q!A)!40=A<1,B,H$(%$*1H;'!"2,S4O 58G+1"A8D-.$E\1<8&1HF M)R@I*C4V-S@Y.D-$149'2$E*4U155E=865IC9&5F9VAI:G-T=79W>'EZ@H.$ MA8:'B(F*DI.4E9:7F)F:HJ.DI::GJ*FJLK.TM;:WN+FZPL/$Q<;'R,G*TM/4 MU=;7V-G:XN/DY>;GZ.GJ\O/T]?;W^/GZ_]H # ,! (1 Q$ /P#]4Z*** "B MBB@ HHHH **BN;J&SA::XFC@B49:21@JCZDUP]]\>OASIMR]O<>-M$CF3AE^ MVH=OUP: .]HK,T#Q/I'BJS%WHVJ6FJ6Q_P"6MG,LJ_FI-:= !1110 4444 % M%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !12$A023 M@#J37$_%[XR>$O@=X+N?$_C'68M&TN$[%:0%I)Y.<1QH.78X. /KTYH [5W" M+D\ =3Z5\[_$#]KNQ?Q+<>"OA=HD_P 2?&\;%)(K%MNGV3 =;BX^Z ./E&37 M!V-Q\5?VT[M9)K?4_A/\%Y%(,;,(M9UM#TZKZ3\$?A_H5@MC8>"]"M[0*%\L6$9R!TY(R?Q MKMNE(SA3@]>WO0!\7?M4_!Z+]F[0KKXV?"><>%+_ $)DGU?08G*:?JUON 9& MC'"OSPP%?4/P<^(]E\7OA;X8\9:?$\%IK5A%=I$_5-PY7\#D5\I?ME>++O\ M:?\ $=G^SG\/+@7KW5Q'/XOU>W^>+2;5&#>6S8QYA('RY[ >M?7'PY\$Z3\+ MO >B>%-'0Q:7HUHEI",?PH "3[D\GWS0!T]%,\P=#D'TZT"0'/7@9^Z: 'T4 MWS!OV\YX_K_A31*"<;6'KD4 2445\P_ME_M+ZQ\)=,T/P5\.K6/7_BWXKE%O MI.F(/-:WA/W[AQV48."W'!/130!]/45YE^SU\/M?^%WPJT30/%7B>[\6Z_'N MFO=4NI"Q>5V+,BYZ*I.T#/:O2W<1J6;@#VH =2,P49-9VN^(-.\.:1=ZIJM] M#IFF6<9FN+R[<1Q1(#R68X KY'UO]K#QC^T7K5UX4_9QTLW5I%(8K_XAZQ R M:=:#=AOLZL,S/@^GIQC!H ]Y^-?[2/@;X Z1'=^+=56WNK@8L],MQYMW=OV6 M.->3GUZ5\A?'_P#X*$?%GX?^$;'Q5I_PQL_#.B7]RMMIUKXEN2=2OF)X9+=. M0O?GV'>K?BN/P)^R;XHL;66&^^-_[2?B%0+1[\>:9N)^SNPR5YY'K@],XKLJ^>H/ MA=\?M8E:?5?C-INE[@,V>B^&X@D9P,@/*S,W?DT6GP6^.&E3F2V^/+7@(/[O M4_#EM*N>WW=IZ4 ?0M%>)KXI^,O@*-9/$GAW2/'.E1C]]=^%F:VOE7N_V:8L MLA YPK@GH!7HGP\^)7AWXI>%X->\.:BFH6$C-$V$:.2*53AXI(V 9'4@@JPR M* .HHHHH **** "BBB@ HHHH KZA)/#87,EM!]JN5B9HH/,\OS& .%W?PY/& M>V:^,_@)^RYXQ^*/Q!?XS?M&'[7XGANG?P_X.\X/I^B1JQ"L4&59^ 0FQO_ ,MI MO3 R0/Q/% '=?M(?M7>&?V=]/@LWC;Q%XXU$!-'\*:<6>YO)#P 0H.Q<_P 1 M'YUZ/\+/$_B'QAX&TC5_%/AEO!^MW<(EN=&DN5N&MB>BEU !/?L17@GP6_9I M\/?LV:)JWQ/^(5_/XU^(LD!O-8\1741N'M^,LEL@!*J.GRC)QV'%><7/_!1" MS^-OC >#OAKJ&F>"A(P1O%'C3]R"I./]&MB09'SC&X@#O0!]B_$7XG^%_A5H M3ZOXIUVST.P7@/*\;O]5^(O[3=C]CT&VU3X5?#^X.9 M=?O56/6]1A(^[:P$?Z,K#_EI)\V#P@K;\%? GP7X LO^$W\5ZD?'7B.V@-Y/ MXQ\12+.8E !9X$_U=O&,9 C /7)-?/\ XR_;SO\ XI-?Q?#>_P!+\'>$(I#" M_C?Q'EVG(."ME9CYI6]"1B@#Z#TO2O@_^Q3\-9IEGT[P=H:'?PUG7K-)'UBRVY,B1'< MT$9;:1O&7 Z**^)_BC\ YOCEIDNHW;*!\I&> MBMGU Z5I>"O^"?>N>(]0;3O^&KM6M_B38(+K6M/TRY>[^RL^<]+A''/&6'X5 M[Q\?I- _9+_8BUF\^"]A'IB7%I"+34+",O-(90!]H=\$EMO.X]/:N(_X)E6G MPR^'WP)F\=7OBG3)/&FN%KG7]0U"\430?,=L;[CD>ON2: -N[_9)_:D\*Z%= M6?A7]J2?4C*!&JZ_I8+!?]F8^6]Q;L055#@,@P<@&W\<:Z=R M3^)+J,P:/8#(!G:79'Q+\0M=;[+H'ANV8":YF; M@.XYVQKU)./3W&/^RY^S/=?#*:_^('Q!NX_$_P 8/$@\S5=8EPRV2,01:6W' MR1KP/E W%1T &9^RU^SYJVBZO]U'XF:I--\)M#CA.D>$(+HPP7]P M&EN;PK@L@8\+GGOP,-RO[.O[3FM?%'XF_$WP[X$\*Z/#\&_!EHUMH^K6%NT0 M>YC3 C50=K*65R-J_= .?FKY?_:U_P""@#?M":_I/PE^'T>OZ7X=OK@0^([N MRM&;49USMDMHHAT&,@\X.0.!G/TI\.?#/QA\.?#F#P%\(_AAI?PN\+P1F*/6 M/%M\);V5F4!IW@B!W.WN>O& !B@#S;_@EA86GQ)\9?%7XG^)[C^UOB!)JK69 M:Y+,]K"23A=WW1GCIT&*]"^*7[)^O? GXFZS\;?@CXQT7P??7ZM)KOA_Q:Y7 M2;Y2=Q/F @QG.3@]"3AE'!]3_9#_ &.]+_9:TK79O[7D\0^)O$$WGZGJ+1^4 MA;))5$YP,DGFOGK_ (*9?LU:UXLT#5_&K:YXO\71,(K72/!FDQ_Z):3GCSY, M9R!R>5R2<9 H Z'X._\ !63P-XSOY-!\3^%M9T?Q!:;UNY=!A_M:Q)0G?(CP MY(=2@^U:MY'&(8H3E8QG).X((&\PWGB:\9X=_?9;H1&H]L'\: ,CXC_\ !1+X5^%]2AT/ MPA?'XF>+[UMEEI7AZ9/)DD["2Y)\M!@9)RV #Q5[]DKP7XB\-:O\1/&7C77O M#D>O^-M3COW\/>'KSSK33]J; I:QK M/EL6>UTRSATJ-SCC_4XP1Z@9[4 ?I6=LJC),DRH /Q-,T[Q1 MI>K)OL=1L[U!G_9 ^#_A**6+1O!%II<,KF22*UN)T1V(P25$F#QQ^7I0!?U?]I_X M6:%XRM_"=_X]T&V\23R")-.:\4R%SP%./NDG@9Z_C7J=<'X<^ WPY\(SK<:1 MX'T&SNU.1="PC:;.2<^8P+=2>]=V,\9P/44 +1110 4444 1W$;2P2(C^6[* M0KXSM/8X]J^5?V7?V([CX*?%KQ=\3?&'BIO''C77'DCBOI(M@MX6.3U_B("K MQP ,"OJZB@!CQ))&T;HK(PP589!'N*\N^+7[,7PU^-'AIM%\2^%;&2U#K(LM MG"D$Z$'/RNHR,]_6O5** .3\._#7P_X9\!6G@FUL$;PS;V?]GI97!,H> @@H MQ/)R#SGK7+?#K]ESX5_"N6*?PWX'TK3[J)V>.X:'S9(R23\K-G;^&*]5HH Y M?XC_ W\-_%CPK=>&O%>D0ZUHUUCS;:?.W(Z'(Z$5YKH?[$WP4T6\M;Q? =C M>W=J"L4VI/).S=A+/X:@Q'8RR+C:2JXPN//% M_P 6)_ GB5&1M-T7PZS/9V<8.=DF2!(?4XK2\;?##]L/_A$M7T'2OB+X5U87 M4.R#5%M6M+V$@@@AN5R0",XQR:^T:* /E3]C/P[^T1X&CG\.?%];'6M+CWW$ M6O?VCYUTTAQB+:% VC!Y]Z^H]1L8-3L+BTN8A-;SQM%)&>-RL""/R-6** /* MOA/^R_\ ##X):E=:CX/\(6.E:EI^6O/'6G44 (JA M1@#%+110 FT$YQS0 !T%+10 4444 %%%% !1110 4444 %%%% !1110 4444 M %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 *4444 %%%% '_V0$! end GRAPHIC 9 veco-20240331xex10d2001.jpg GRAPHIC begin 644 veco-20240331xex10d2001.jpg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end EX-101.SCH 10 veco-20240331.xsd EX-101.SCH 99900 - Disclosure - Standard And Custom Axis Domain Defaults link:presentationLink link:calculationLink link:definitionLink 00100 - Statement - Consolidated Balance Sheets link:presentationLink link:calculationLink link:definitionLink 00200 - Statement - Consolidated Statements of Operations link:presentationLink link:calculationLink link:definitionLink 00300 - Statement - Consolidated Statements of Comprehensive Income link:presentationLink link:calculationLink link:definitionLink 00400 - Statement - Consolidated Statements of Cash Flows link:presentationLink link:calculationLink link:definitionLink 40201 - Disclosure - Income Per Common Share - Basic and Diluted (Details) link:presentationLink link:calculationLink link:definitionLink 40301 - Disclosure - Business Combination - Consideration (Details) link:presentationLink link:calculationLink link:definitionLink 40402 - Disclosure - Assets - Available-For-Sale Securities (Details) link:presentationLink link:calculationLink link:definitionLink 40404 - Disclosure - Assets - Inventories (Details) link:presentationLink link:calculationLink link:definitionLink 40406 - Disclosure - Assets - Property, Plant, and Equipment (Details) link:presentationLink link:calculationLink link:definitionLink 40408 - Disclosure - Assets - Intangible Assets (Details) link:presentationLink link:calculationLink link:definitionLink 40501 - Disclosure - Liabilities - Accrued Expenses and Other Current Liabilities (Details) link:presentationLink link:calculationLink link:definitionLink 40508 - Disclosure - Liabilities - Convertible Senior Notes Carrying Value (Details) link:presentationLink link:calculationLink link:definitionLink 40509 - Disclosure - Liabilities - Convertible Senior Notes - Interest Expense (Details) link:presentationLink link:calculationLink link:definitionLink 40602 - Disclosure - Commitments and Contingencies - Minimum lease commitments (Details) link:presentationLink link:calculationLink link:definitionLink 40903 - Disclosure - Commitments and Contingencies - Minimum lease commitments (Details) (calc 2) link:presentationLink link:calculationLink link:definitionLink 40202 - Disclosure - Income Per Common Share - Shares Excluded from EPS (Details) link:presentationLink link:calculationLink link:definitionLink 40401 - Disclosure - Assets - Fair Value (Details) link:presentationLink link:calculationLink link:definitionLink 40403 - Disclosure - Assets - Accounts Receivable (Details) link:presentationLink link:calculationLink link:definitionLink 40407 - Disclosure - Assets - Goodwill (Details) link:presentationLink link:calculationLink link:definitionLink 40505 - Disclosure - Liabilities - Performance Obligations Timing (Details) link:presentationLink link:calculationLink link:definitionLink 40505 - Disclosure - Liabilities - Performance Obligations Timing Default (Details) link:presentationLink link:calculationLink link:definitionLink 40506 - Disclosure - Liabilities - 2023, 2025, 2027 and 2029 Convertible Senior Notes (Details) link:presentationLink link:calculationLink link:definitionLink 40507 - Disclosure - Liabilities - Convertible Senior Notes (Details) link:presentationLink link:calculationLink link:definitionLink 40510 - Disclosure - Liabilities - Capped Call Transactions (Details) link:presentationLink link:calculationLink link:definitionLink 40511 - Disclosure - Liabilities - Revolving Credit Facility (Details) link:presentationLink link:calculationLink link:definitionLink 40512 - Disclosure - Liabilities - Other Liabilities (Details) link:presentationLink link:calculationLink link:definitionLink 40701 - Disclosure - Equity - Statement of Stockholders' Equity (Details) link:presentationLink link:calculationLink link:definitionLink 40702 - Disclosure - Equity - AOCI Rollforward (Details) link:presentationLink link:calculationLink link:definitionLink 40801 - Disclosure - Share-based Compensation - Recognized Share-based Compensation (Details) link:presentationLink link:calculationLink link:definitionLink 40802 - Disclosure - Share-based Compensation - Restricted shares and performance shares (Details) link:presentationLink link:calculationLink link:definitionLink 40901 - Disclosure - Income Taxes (Details) link:presentationLink link:calculationLink link:definitionLink 41001 - Disclosure - Segment Reporting and Geographic Information (Details) link:presentationLink link:calculationLink link:definitionLink 00090 - Document - Document and Entity Information link:presentationLink link:calculationLink link:definitionLink 00105 - Statement - Consolidated Balance Sheets (Parenthetical) link:presentationLink link:calculationLink link:definitionLink 10101 - Disclosure - Basis of Presentation link:presentationLink link:calculationLink link:definitionLink 10201 - Disclosure - Income Per Common Share link:presentationLink link:calculationLink link:definitionLink 10301 - Disclosure - Business Combination link:presentationLink link:calculationLink link:definitionLink 10401 - Disclosure - Assets link:presentationLink link:calculationLink link:definitionLink 10501 - Disclosure - Liabilities link:presentationLink link:calculationLink link:definitionLink 10601 - Disclosure - Commitments and Contingencies link:presentationLink link:calculationLink link:definitionLink 10701 - Disclosure - Equity link:presentationLink link:calculationLink link:definitionLink 10801 - Disclosure - Share-based Compensation link:presentationLink link:calculationLink link:definitionLink 10901 - Disclosure - Income Taxes link:presentationLink link:calculationLink link:definitionLink 11001 - Disclosure - Segment Reporting and Geographic Information link:presentationLink link:calculationLink link:definitionLink 20102 - Disclosure - Basis of Presentation (Policies) link:presentationLink link:calculationLink link:definitionLink 30203 - Disclosure - Income Per Common Share (Tables) link:presentationLink link:calculationLink link:definitionLink 30403 - Disclosure - Assets (Tables) link:presentationLink link:calculationLink link:definitionLink 30503 - Disclosure - Liabilities (Tables) link:presentationLink link:calculationLink link:definitionLink 30603 - Disclosure - Commitments and Contingencies (Tables) link:presentationLink link:calculationLink link:definitionLink 30703 - Disclosure - Equity (Tables) link:presentationLink link:calculationLink link:definitionLink 30803 - Disclosure - Share-based Compensation (Tables) link:presentationLink link:calculationLink link:definitionLink 30903 - Disclosure - Income Taxes (Tables) link:presentationLink link:calculationLink link:definitionLink 31003 - Disclosure - Segment Reporting and Geographic Information (Tables) link:presentationLink link:calculationLink link:definitionLink 40101 - Disclosure - Basis of Presentation - Fiscal Period (Details) link:presentationLink link:calculationLink link:definitionLink 40102 - Disclosure - Basis of Presentation - Revenue Recognition (Details) link:presentationLink link:calculationLink link:definitionLink 40405 - Disclosure - Assets - Prepaid Expenses and Other Current Assets (Details) link:presentationLink link:calculationLink link:definitionLink 40502 - Disclosure - Liabilities - Warranty (Details) link:presentationLink link:calculationLink link:definitionLink 40503 - Disclosure - Liabilities - Contract Liabilities (Details) link:presentationLink link:calculationLink link:definitionLink 40601 - Disclosure - Commitments and Contingencies - Lease terms (Details) link:presentationLink link:calculationLink link:definitionLink 40603 - Disclosure - Commitments and Contingencies - Lease costs (Details) link:presentationLink link:calculationLink link:definitionLink 40604 - Disclosure - Commitments and Contingencies - Receivable Purchase Agreement (Details) link:presentationLink link:calculationLink link:definitionLink 40605 - Disclosure - Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details) link:presentationLink link:calculationLink link:definitionLink EX-101.CAL 11 veco-20240331_cal.xml EX-101.CAL EX-101.DEF 12 veco-20240331_def.xml EX-101.DEF EX-101.LAB 13 veco-20240331_lab.xml EX-101.LAB EX-101.PRE 14 veco-20240331_pre.xml EX-101.PRE XML 16 R1.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Document and Entity Information - shares
3 Months Ended
Mar. 31, 2024
May 01, 2024
Cover [Abstract]    
Document Type 10-Q  
Document Quarterly Report true  
Document Period End Date Mar. 31, 2024  
Document Transition Report false  
Entity File Number 0-16244  
Entity Registrant Name VEECO INSTRUMENTS INC.  
Entity Incorporation, State or Country Code DE  
Entity Tax Identification Number 11-2989601  
Entity Address, Address Line One Terminal Drive  
Entity Address, City or Town Plainview  
Entity Address, State or Province NY  
Entity Address, Postal Zip Code 11803  
City Area Code 516  
Local Phone Number 677-0200  
Title of 12(b) Security Common Stock  
Trading Symbol VECO  
Security Exchange Name NASDAQ  
Entity Current Reporting Status Yes  
Entity Interactive Data Current Yes  
Entity Filer Category Large Accelerated Filer  
Entity Small Business false  
Entity Emerging Growth Company false  
Entity Shell Company false  
Entity Common Stock, Shares Outstanding   56,637,662
Entity Central Index Key 0000103145  
Current Fiscal Year End Date --12-31  
Document Fiscal Year Focus 2024  
Document Fiscal Period Focus Q1  
Amendment Flag false  
XML 17 R2.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Consolidated Balance Sheets - USD ($)
$ in Thousands
Mar. 31, 2024
Dec. 31, 2023
Current assets:    
Cash and cash equivalents $ 173,998 $ 158,781
Restricted cash 326 339
Short-term investments 122,886 146,664
Accounts receivable, net 106,532 103,018
Contract assets 34,336 24,370
Inventories 243,266 237,635
Prepaid expenses and other current assets 34,550 35,471
Total current assets 715,894 706,278
Property, plant, and equipment, net 115,297 118,459
Operating lease right-of-use assets 23,685 24,377
Intangible assets, net 42,054 43,945
Goodwill 214,964 214,964
Deferred income taxes 118,724 117,901
Other assets 3,075 3,117
Total assets 1,233,693 1,229,041
Current liabilities:    
Accounts payable 54,011 42,383
Accrued expenses and other current liabilities 59,259 57,624
Contract liabilities 93,812 118,026
Income taxes payable 852  
Current portion of long-term debt 26,425  
Total current liabilities 234,359 218,033
Deferred income taxes 6,496 6,552
Long-term debt 248,811 274,941
Long-term operating lease liabilities 30,949 31,529
Other liabilities 25,168 25,544
Total liabilities 545,783 556,599
Stockholders' equity:    
Preferred stock, $0.01 par value; 500,000 shares authorized; no shares issued and outstanding.
Common stock, $0.01 par value; 120,000,000 shares authorized; 56,637,473 shares issued and outstanding at March 31, 2024 and 56,364,131 shares issued and outstanding at December 31, 2023 566 564
Additional paid-in capital 1,196,180 1,202,440
Accumulated deficit (510,315) (532,169)
Accumulated other comprehensive income 1,479 1,607
Total stockholders' equity 687,910 672,442
Total liabilities and stockholders' equity $ 1,233,693 $ 1,229,041
XML 18 R3.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Consolidated Balance Sheets (Parenthetical) - $ / shares
Mar. 31, 2024
Dec. 31, 2023
Consolidated Balance Sheets    
Preferred stock, par value (in dollars per share) $ 0.01 $ 0.01
Preferred stock, shares authorized 500,000 500,000
Preferred stock, shares issued 0 0
Preferred stock, shares outstanding 0 0
Common stock, par value (in dollars per share) $ 0.01 $ 0.01
Common stock, authorized shares 120,000,000 120,000,000
Common stock, shares issued 56,637,473 56,364,131
Common stock, shares outstanding 56,637,473 56,364,131
XML 19 R4.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Consolidated Statements of Operations - USD ($)
shares in Thousands, $ in Thousands
3 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Consolidated Statements of Operations    
Net sales $ 174,484 $ 153,504
Cost of sales 99,065 91,487
Gross profit 75,419 62,017
Operating expenses, net:    
Research and development 29,642 27,562
Selling, general, and administrative 24,700 22,627
Amortization of intangible assets 1,891 2,111
Other operating expense (income), net (2,859) (89)
Total operating expenses, net 53,374 52,211
Operating income 22,045 9,806
Interest income 3,324 2,073
Interest expense (2,619) (2,875)
Income before income taxes 22,750 9,004
Income tax expense 896 263
Net income $ 21,854 $ 8,741
Income per common share:    
Basic (in dollars per share) $ 0.39 $ 0.17
Diluted (in dollars per share) $ 0.37 $ 0.17
Weighted average number of shares:    
Basic (in shares) 55,968 50,559
Diluted (in shares) 60,764 59,856
XML 20 R5.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Consolidated Statements of Comprehensive Income - USD ($)
$ in Thousands
3 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Consolidated Statements of Comprehensive Income    
Net Income (Loss) $ 21,854 $ 8,741
Other comprehensive income (loss), net of tax:    
Unrealized gain (loss) on available-for-sale securities (95) 470
Change in currency translation adjustments (33) 6
Total other comprehensive income (loss), net of tax (128) 476
Total comprehensive income $ 21,726 $ 9,217
XML 21 R6.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Consolidated Statements of Cash Flows - USD ($)
$ in Thousands
3 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Cash Flows from Operating Activities    
Net income $ 21,854 $ 8,741
Adjustments to reconcile net income to net cash provided by (used in) operating activities:    
Depreciation and amortization 6,405 6,276
Non-cash interest expense 296 226
Deferred income taxes (842) 191
Share-based compensation expense 8,082 7,027
Change in contingent consideration (625)  
Changes in operating assets and liabilities:    
Accounts receivable and contract assets (13,480) 3,157
Inventories (4,838) (25,763)
Prepaid expenses and other current assets 395 (4,783)
Accounts payable and accrued expenses 17,621 13,431
Contract liabilities (24,215) 5,534
Income taxes receivable and payable, net 853 94
Other, net (2,145) (213)
Net cash provided by (used in) operating activities 9,361 13,918
Cash Flows from Investing Activities    
Capital expenditures (5,990) (6,946)
Acquisition of businesses, net of cash acquired   (30,373)
Proceeds from the sale of investments 53,473 40,049
Payments for purchases of investments (28,791) (3,492)
Proceeds from sale of productive assets 2,033  
Net cash provided by (used in) investing activities 20,725 (762)
Cash Flows from Financing Activities    
Restricted stock tax withholdings (14,340) (8,509)
Contingent consideration payment (1,818)  
Proceeds (net of tax withholdings) from option exercises and employee stock purchase plan 1,318 1,241
Extinguishment of Convertible Notes   (20,173)
Net cash provided by (used in) financing activities (14,840) (27,441)
Effect of exchange rate changes on cash and cash equivalents (42) 10
Net increase (decrease) in cash, cash equivalents, and restricted cash 15,204 (14,275)
Cash, cash equivalents, and restricted cash - beginning of period 159,120 155,472
Cash, cash equivalents, and restricted cash - end of period 174,324 141,197
Supplemental Disclosure of Cash Flow Information    
Interest paid 619 2,744
Income taxes paid, net of refunds received 992 386
Non-cash activities    
Capital expenditures included in accounts payable and accrued expenses $ 599 5,052
Net transfer of inventory to property, plant and equipment   4,304
Right-of-use assets obtained in exchange for lease obligations   $ 630
XML 22 R7.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Basis of Presentation
3 Months Ended
Mar. 31, 2024
Significant Accounting Policies  
Basis of Presentation

Note 1 — Basis of Presentation

The accompanying unaudited Consolidated Financial Statements of Veeco have been prepared in accordance with U.S. GAAP as defined in Financial Accounting Standards Board (“FASB”) Accounting Standards Codification 270 for interim financial information and with the instructions to Rule 10-01 of Securities and Exchange Commission Regulation S-X. Accordingly, they do not include all of the information and footnotes required by U.S. GAAP for complete financial statements as the interim information is an update of the information that was presented in Veeco’s most recent annual financial statements. For further information, refer to Veeco’s Consolidated Financial Statements and Notes thereto included in the Annual Report on Form 10-K for the year ended December 31, 2023 (“2023 Form 10-K”). In the opinion of management, all adjustments considered necessary for a fair presentation have been included. All such adjustments are of a normal, recurring nature.

Veeco reports interim quarters on a 13-week basis ending on the last Sunday of each quarter. The fourth quarter always ends on the last day of the calendar year, December 31. The 2024 interim quarters end on March 31, June 30, and September 29, and the 2023 interim quarters ended on April 2, July 2, and October 1. These interim quarters are reported as March 31, June 30, and September 30 in Veeco’s interim consolidated financial statements.

The preparation of financial statements in conformity with U.S. GAAP requires the Company’s management to make estimates and assumptions that affect the amounts reported in the financial statements and accompanying notes. Although these estimates are based on management’s knowledge of current events and actions it may undertake in the future, actual results may differ from these estimates.

Revenue Recognition

Revenue is recognized upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration the Company expects to receive in exchange for such product or service. The Company’s contracts with customers generally do not contain variable consideration. In the rare instances where variable consideration is included, the Company estimates the amount of variable consideration and determines what portion of that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. The Company’s contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, maintenance, and service plans. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. The Company also evaluates whether multiple transactions with the same customer or related parties should be considered part of a single contract based on an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another.

   

When there are separate units of accounting, the Company allocates revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which the Company separately sells the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, the Company estimates stand-alone selling prices generally using an expected cost plus margin approach.

   

Most of the Company’s revenue is recognized at a point in time when the performance obligation is satisfied. The Company considers many facts when evaluating each of its sales arrangements to determine the timing of revenue recognition, including its contractual obligations and the nature of the customer’s post-delivery acceptance provisions. The Company’s system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. For many of these arrangements, a customer source inspection of the system is performed in the Company’s facility, test data is sent to the customer documenting that the system is functioning to the agreed upon specifications prior to delivery, or other quality assurance testing is performed

internally to ensure system functionality prior to shipment. Historically, such source inspection or test data replicates the field acceptance provisions that are performed at the customer’s site prior to final acceptance of the system. When the Company objectively demonstrates that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or the Company’s historical experience of its tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where the Company cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. The Company recognizes such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met.

   

In certain cases the Company’s contracts with customers contain a billing retention, which is billed by the Company and payable by the customer when field acceptance provisions are completed. Revenue recognized in advance of the amount that has been billed is recorded as a contract asset on the Consolidated Balance Sheets.

   

The Company recognizes revenue related to maintenance and service contracts over time based upon the respective contract term. Installation revenue is recognized over time as the installation services are performed. The Company recognizes revenue from the sales of components, spare parts, and specified service engagements at a point in time, which is typically consistent with the time of delivery in accordance with the terms of the applicable sales arrangement.

   

The Company may receive advanced payments on system transactions. The timing of the transfer of goods or services related to the advanced payments is either at the discretion of the customer or generally expected to be within one year from the advanced receipt. As such, the Company does not adjust transaction prices for the time value of money. Incremental direct costs incurred related to the acquisition of a customer contract, such as sales commissions, are expensed as incurred since the expected amortization period is one year or less.

The Company has elected to treat shipping and handling costs as a fulfillment activity, and the Company includes such costs in cost of sales when the Company recognizes revenue for the related goods. Taxes assessed by governmental authorities that are collected by the Company from a customer are excluded from revenue.

Inventories

Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter the Company assesses the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods; and evaluation inventory at customer facilities. Obsolete inventory or inventory in excess of management’s estimated usage requirement is written down to its estimated net realizable value if less than cost. The Company evaluates usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for the Company’s products may require a write down of inventory, which would be reflected in cost of sales in the period the revision is made. Inventory acquired as part of a business combination is recorded at fair value on the date of acquisition.

Recent Accounting Standards Not Yet Adopted

In November 2023, the FASB issued ASU 2023-07: Segment Reporting (Topic 280) – Improvements to Reportable Segment Disclosures. This standard primarily enhances disclosures about significant segment expenses. The standard requires interim and annual disclosure of significant segment expenses that are regularly provided to the chief operating decision-maker (“CODM”) and included within the reported measure of a segment’s profit or loss, requires interim disclosures about a reportable segment’s profit and loss and assets that are currently required annually, requires disclosure of the position and title of the CODM, clarifies circumstances in which an entity can disclose multiple

segment measures of profit or loss and contains other disclosure requirements. This authoritative guidance is effective for fiscal years beginning after December 15, 2023, and interim periods within fiscal years beginning after December 15, 2024, with early adoption permitted. The Company is evaluating the effect of this new guidance on its consolidated financial statements.

XML 23 R8.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Income Per Common Share
3 Months Ended
Mar. 31, 2024
Income Per Common Share  
Income Per Common Share

Note 2 — Income Per Common Share

Basic income per share is calculated by dividing net income by the weighted average number of shares outstanding during the period. Diluted income per share is calculated by dividing net income available to common shareholders by the weighted average number of shares used to calculate basic income per share plus the weighted average number of common share equivalents outstanding during the period. The dilutive effect of outstanding options to purchase common stock and share-based awards is considered in diluted income per share by application of the treasury stock method. The dilutive effect of performance share units is included in diluted income per common share if the performance targets have been achieved, or would have been achieved if the reporting date was the end of the contingency period. Finally, the Company includes the dilutive effect of shares issuable upon conversion of its Notes in the calculation of diluted income per share using the if-converted method. The Company has the option for the 2025 and 2027 Notes to settle the conversion value in any combination of cash or shares, and as such, the maximum number of shares issuable are included in the dilutive share count if the effect would be dilutive. The Company must settle the principal amount of the 2029 Notes in cash, and has the option to settle any excess of the conversion value over the principal amount in any combination of cash or shares. As such, the Company only includes the excess shares that may be issuable above the principal amount of the 2029 Notes in the dilutive share count, if the effect would be dilutive.

The computations of basic and diluted income per share for the three months ended March 31, 2024 and 2023 are as follows:

Three months ended March 31,

    

2024

    

2023

    

    

(in thousands, except per share amounts)

Numerator:

Net income

$

21,854

$

8,741

Interest expense associated with convertible notes

514

1,277

Net income available to common shareholders

$

22,368

$

10,018

Denominator:

Basic weighted average shares outstanding

 

55,968

 

50,559

Effect of potentially dilutive share-based awards

939

355

Dilutive effect of convertible notes

 

3,857

 

8,942

Diluted weighted average shares outstanding

 

60,764

 

59,856

Net income per common share:

Basic

$

0.39

$

0.17

Diluted

$

0.37

$

0.17

Potentially dilutive shares excluded from the diluted calculation as their effect would be antidilutive

213

1,140

Potential shares to be issued for settlement of the convertible notes excluded from the diluted calculation as their effect would be antidilutive

5,603

XML 24 R9.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Business Combination
3 Months Ended
Mar. 31, 2024
Business Combination  
Business Combination

Note 3 — Business Combination

Epiluvac

On January 31, 2023, the Company acquired Epiluvac AB, a privately held manufacturer of chemical vapor deposition (CVD) epitaxy systems that enable silicon carbide (SiC) applications in the electric vehicle market. This acquisition is expected to accelerate penetration into the emerging, high-growth SiC equipment market. The results of Epiluvac’s operations have been included in the consolidated financial statements since the date of acquisition. Acquisition date fair value totaled $56.4 million, which included $30.4 million of cash and $26.1 million of contingent consideration.

The purchase agreement included performance milestones that, if achieved, could trigger additional payments to the original selling shareholders. The contingent arrangements include payments up to $15.0 million based on the timely completion of certain defined milestones tied to strategic targets, and up to $20.0 million based on the percentage of orders received during the defined Earn-out period. The Earn-out period is four years after the closing date of the acquisition, or earlier if certain conditions are met.

The Company estimated the fair value of the contingent consideration by assigning probabilities and discount factors to each of the various defined performance milestones, while using a Monte-Carlo simulation model to determine the most likely outcome for payments to be based on value of orders received. These fair value measurements are based on significant inputs not observable in the market and thus represent a Level 3 measurement as defined in ASC 820. The discount rate used was 5.54% for the strategic target and order value related contingent payments. The rate was determined based on the nature of the milestone, the risks and uncertainties involved and the time period until the milestone was measured. The determination of the various probabilities and discount factors is highly subjective, requires significant judgment and is influenced by a number of factors, including the adoption of SiC technology. The aggregate fair value of the contingent consideration arrangement at the acquisition date was $26.1 million. While the use of SiC is expected to grow in the near future, it is difficult to predict the rate at which SiC will be adopted by the market and thus would impact the sales of our equipment.

The Company updates its estimate of fair value of the contingent consideration each reporting period, utilizing the same methodologies described above. The discount rate used was 5.6% for the strategic target and order value related contingent payments. During the three months ended March 31, 2024, the Company recognized approximately $0.6 million of a reduction to contingent consideration, included within “Other operating expense (income) net” in the Consolidated Statement of Operations. Additionally, during the three months ended March 31, 2024, the Company paid $1.8 million to the original selling shareholders in recognition of a performance milestone having been successfully completed. Total contingent consideration liability as of March 31, 2024 was $21.8 million included within “Other liabilities” on the Consolidated Balance Sheet.

XML 25 R10.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Assets
3 Months Ended
Mar. 31, 2024
Assets  
Assets

Note 4 — Assets

Investments

Short-term investments are generally classified as available-for-sale and reported at fair value, with unrealized gains and losses, net of tax, presented as a separate component of stockholders’ equity under the caption “Accumulated other comprehensive income” in the Consolidated Balance Sheets. These securities may include U.S. treasuries, government agency securities, corporate debt, and commercial paper, all with maturities of greater than three months when purchased. All realized gains and losses and unrealized losses resulting from declines in fair value that are other than temporary are included in “Other operating expense (income), net” in the Consolidated Statements of Operations.

Fair value is the price that would be received for an asset or the amount paid to transfer a liability in an orderly transaction between market participants. Veeco classifies certain assets based on the following fair value hierarchy:

Level 1: Quoted prices in active markets that are unadjusted and accessible at the measurement date for identical, unrestricted assets or liabilities;

Level 2: Quoted prices for identical assets and liabilities in markets that are not active, quoted prices for similar assets and liabilities in active markets or financial instruments for which significant inputs are observable, either directly or indirectly; and

Level 3: Prices or valuations that require inputs that are both significant to the fair value measurement and unobservable.

A financial instrument’s level within the fair value hierarchy is based on the lowest level of any input that is significant to the fair value measurement. Veeco has evaluated the estimated fair value of financial instruments using available market information and valuations as provided by third-party sources. The use of different market assumptions or estimation methodologies could have a significant effect on the estimated fair value amounts.

The following table presents the portion of Veeco’s assets that were measured at fair value on a recurring basis at March 31, 2024 and December 31, 2023:

    

Level 1

    

Level 2

    

Level 3

    

Total

(in thousands)

March 31, 2024

Cash equivalents

Certificate of deposits and time deposits

$

84,211

$

$

$

84,211

Corporate debt

2,655

2,655

U.S. treasuries

9,999

9,999

Money market cash

21,363

21,363

Total

$

115,573

$

2,655

$

$

118,228

Short-term investments

U.S. treasuries

$

46,464

$

$

$

46,464

Government agency securities

25,425

25,425

Corporate debt

50,997

50,997

Total

$

46,464

$

76,422

$

$

122,886

December 31, 2023

Cash equivalents

Certificate of deposits and time deposits

$

74,262

$

$

$

74,262

Corporate debt

1,988

1,988

Money market cash

21,587

21,587

Total

$

95,849

$

1,988

$

$

97,837

Short-term investments

U.S. treasuries

$

59,493

$

$

$

59,493

Government agency securities

41,818

41,818

Corporate debt

35,409

35,409

Commercial paper

9,944

9,944

Total

$

59,493

$

87,171

$

$

146,664

There were no transfers between fair value measurement levels during the three months ended March 31, 2024.

At March 31, 2024 and December 31, 2023, the amortized cost and fair value of available-for-sale securities consist of:

    

    

Gross

    

Gross

    

Amortized

Unrealized

Unrealized

Estimated

Cost

Gains

Losses

Fair Value

(in thousands)

March 31, 2024

U.S. treasuries

$

46,565

$

$

(101)

$

46,464

Government agency securities

25,455

(30)

25,425

Corporate debt

51,098

(101)

50,997

Total

$

123,118

$

$

(232)

$

122,886

December 31, 2023

U.S. treasuries

$

59,541

$

3

$

(51)

$

59,493

Government agency securities

41,843

6

(31)

41,818

Corporate debt

 

35,447

9

(47)

 

35,409

Commercial paper

9,944

9,944

Total

$

146,775

$

18

$

(129)

$

146,664

Available-for-sale securities in a loss position at March 31, 2024 and December 31, 2023 consist of:

Continuous Loss Position

Continuous Loss Position

for Less than 12 Months

for 12 Months or More

    

    

Gross

    

    

Gross

Estimated

Unrealized

Estimated

Unrealized

Fair Value

Losses

Fair Value

Losses

(in thousands)

March 31, 2024

U.S. treasuries

$

46,464

$

(101)

$

$

Government agency securities

25,425

(30)

Corporate debt

 

45,471

 

(98)

 

1,495

 

(3)

Total

$

117,360

$

(229)

$

1,495

$

(3)

December 31, 2023

U.S. treasuries

$

43,118

$

(50)

$

$

Government agency securities

34,885

(31)

Corporate debt

 

23,262

 

(33)

 

2,618

 

(15)

Total

$

101,265

$

(114)

$

2,618

$

(15)

The contractual maturities of securities classified as available-for-sale at March 31, 2024 were as follows:

March 31, 2024

Amortized

Estimated

Cost

Fair Value

(in thousands)

Due in one year or less

$

112,231

$

112,050

Due after one year through two years

10,887

 

10,836

Total

$

123,118

$

122,886

Actual maturities may differ from contractual maturities because borrowers may have the right to call or prepay obligations with or without call or prepayment penalties. There were no realized gains or losses, or unrealized losses from declines in fair value that are other than temporary, for the three months ended March 31, 2024 and 2023.

Accounts Receivable

Accounts receivable is presented net of an allowance for doubtful accounts of $1.0 million at March 31, 2024 and December 31, 2023. The Company considered its current expectations of future economic conditions when estimating its allowance for doubtful accounts.

Inventories

Inventories at March 31, 2024 and December 31, 2023 consist of the following:

March 31,

December 31,

    

2024

    

2023

(in thousands)

Materials

$

144,793

$

139,884

Work-in-process

 

75,344

 

71,278

Finished goods

 

3,670

 

6,183

Evaluation inventory

19,459

20,290

Total

$

243,266

$

237,635

Prepaid Expenses and Other Current Assets

Prepaid expenses and other current assets primarily consist of supplier deposits, prepaid value-added tax, lease deposits, prepaid insurance, prepaid software and maintenance, and other receivables. The Company had deposits with its suppliers of $17.0 million and $19.4 million at March 31, 2024 and December 31, 2023, respectively.

Property, Plant, and Equipment

Property, plant, and equipment at March 31, 2024 and December 31, 2023 consist of the following:

March 31,

December 31,

    

2024

    

2023

(in thousands)

Land

$

5,061

$

5,061

Building and improvements

 

61,292

 

61,679

Machinery and equipment (1)

 

182,811

 

181,180

Leasehold improvements

 

53,009

 

52,913

Gross property, plant, and equipment

 

302,173

 

300,833

Less: accumulated depreciation and amortization

 

186,876

 

182,374

Net property, plant, and equipment

$

115,297

$

118,459

(1)Machinery and equipment also includes software, furniture and fixtures

For the three months ended March 31, 2024 and 2023, depreciation expense was $4.5 million and $4.2 million, respectively.

Goodwill

Goodwill represents the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. There were no changes to goodwill during the three months ended March 31, 2024.

Intangible Assets

Intangible assets consist of purchased technology, customer relationships, patents, trademarks and tradenames, licenses, and backlog, and are initially recorded at fair value. Long-lived intangible assets are amortized over their estimated useful lives in a method reflecting the pattern in which the economic benefits are consumed or amortized on a straight-line basis if such pattern cannot be reliably determined.

The components of purchased intangible assets were as follows:

March 31, 2024

December 31, 2023

Accumulated

Accumulated

    

Gross

    

Amortization

    

    

Gross

    

Amortization

    

Carrying

and

Net

Carrying

and

Net

Amount

Impairment

Amount

Amount

Impairment

Amount

(in thousands)

Technology

$

355,928

$

322,997

$

32,931

$

355,928

$

321,923

$

34,005

Customer relationships

146,925

138,154

8,771

146,925

137,649

9,276

Trademarks and tradenames

30,910

30,571

339

30,910

30,269

641

Other

 

3,746

 

3,733

 

13

 

3,746

 

3,723

 

23

Total

$

537,509

$

495,455

$

42,054

$

537,509

$

493,564

$

43,945

Other intangible assets primarily consist of patents, licenses, and backlog.

XML 26 R11.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Liabilities
3 Months Ended
Mar. 31, 2024
Liabilities  
Liabilities

Note 5 — Liabilities

Accrued Expenses and Other Current Liabilities

The components of accrued expenses and other current liabilities at March 31, 2024 and December 31, 2023 consist of:

March 31,

December 31,

    

2024

    

2023

(in thousands)

Payroll and related benefits

$

35,059

$

28,321

Warranty

8,667

8,864

Operating lease liabilities

3,955

4,025

Interest

2,804

1,149

Professional fees

2,237

1,834

Sales, use, and other taxes

 

3,217

 

1,825

Contingent consideration

1,814

Other

 

3,320

 

9,792

Total

$

59,259

$

57,624

Warranty

Warranties are typically valid for one year from the date of system final acceptance. The Company estimates the costs that may be incurred under the warranty which are determined by analyzing specific product and historical configuration

statistics and regional warranty support costs and are affected by product failure rates, material usage, and labor costs incurred in correcting product failures during the warranty period. Unforeseen component failures or exceptional component performance can also result in changes to warranty costs. Changes in product warranty reserves for the three months ended March 31, 2024 include:

(in thousands)

Balance - December 31, 2023

$

8,864

Warranties issued

 

1,545

Consumption of reserves

 

(1,542)

Changes in estimate

 

(200)

Balance - March 31, 2024

$

8,667

Contract Liabilities and Performance Obligations

Contract liabilities consist of unsatisfied performance obligations related to advanced payments received and billing in excess of revenue recognized. The contract liability balance as of December 31, 2023 was approximately $118.0 million, of which the Company recognized approximately $35.6 million in revenue during the three months ended March 31, 2024.

This reduction in contract liabilities was offset in part by new billings for products and services which were unsatisfied performance obligations to customers and revenue had not yet been recognized as of March 31, 2024.

As of March 31, 2024, the Company has approximately $139.8 million of remaining performance obligations on contracts with an original estimated duration of one year or more, of which approximately 82% is expected to be recognized within one year, with the remaining amounts expected to be recognized between one to three years. The Company has elected to exclude disclosures regarding remaining performance obligations that have an original expected duration of one year or less.

Convertible Senior Notes

2023 Notes

On January 10, 2017, the Company issued $345.0 million of 2.70% convertible senior unsecured notes due 2023 (the “2023 Notes”). The 2023 Notes had a maturity date of January 15, 2023, unless earlier purchased by the Company, redeemed, or converted. The Company repurchased and retired approximately $111.5 million and $213.3 million of aggregate principal amount of its outstanding 2023 Notes during the years ended December 31, 2021 and December 31, 2020, respectively.

The 2023 notes that remained outstanding matured on January 15, 2023 and were paid in cash and settled by the Company at that time.

2025 Notes

On November 17, 2020, as part of the privately negotiated exchange agreement, the Company issued $132.5 million of 3.50% convertible senior notes due 2025 (the “2025 Notes”). The 2025 Notes bear interest at a rate of 3.50% per year, payable semiannually in arrears on January 15 and July 15 of each year, commencing on July 15, 2021. The 2025 Notes mature on January 15, 2025, unless earlier purchased by the Company, redeemed, or converted.

On May 19, 2023, in connection with the completion of a private offering of $230.0 million aggregate principal amount of 2.875% convertible senior notes due 2029 described below, the Company repurchased and retired approximately

$106.0 million in aggregate principal amount of its outstanding 2025 Notes, with a carrying amount of $105.4 million, for approximately $106.0 million of cash and 0.7 million shares of the Company’s common stock. The Company accounted for the partial settlement of the 2025 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $16.5 million for the year ended December 31, 2023.

2027 Notes

On May 18, 2020, the Company completed a private offering of $125.0 million of 3.75% convertible senior notes due 2027 (the “2027 Notes”). The Company received net proceeds of approximately $121.9 million, after deducting underwriting discounts and fees and expenses payable by the Company. Additionally, the Company used approximately $10.3 million of cash to purchase capped calls, discussed below. The 2027 Notes bear interest at a rate of 3.75% per year, payable semiannually in arrears on June 1 and December 1 of each year, commencing on December 1, 2020. The 2027 Notes mature on June 1, 2027, unless earlier purchased by the Company, redeemed, or converted.

On May 19, 2023, in connection with the completion of a private offering of $230.0 million aggregate principal amount of 2.875% convertible senior notes due 2029 described below, the Company repurchased and retired approximately $100.0 million in aggregate principal amount of its outstanding 2027 Notes, with a carrying amount of $98.5 million, for approximately $92.8 million of cash and 3.8 million shares of the Company’s common stock. The Company accounted for the partial settlement of the 2027 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $80.6 million for the year ended December 31, 2023.

2029 Notes

On May 19, 2023, the Company completed a private offering of $230.0 million of 2.875% convertible senior notes due 2029 (the “2029 Notes”). The Company received net proceeds of approximately $223.2 million, after deducting underwriting discounts and fees and expenses payable by the Company. Additionally, the Company used approximately $198.8 million of net proceeds from the offering to fund the cash portion of the 2025 Notes and 2027 Notes extinguishments described above and the remainder for general corporate purposes. The 2029 Notes bear interest at a rate of 2.875% per year, payable semiannually in arrears on June 1 and December 1 of each year, commencing on December 1, 2023. The 2029 Notes mature on June 1, 2029, unless earlier purchased by the Company, redeemed, or converted. The Company will settle any conversions of the 2029 Notes by paying cash up to the aggregate principal amount of the 2029 Notes to be converted, and paying or delivering either cash, shares of Company’s common stock, or a combination of cash and shares of common stock at the Company’s election, in respect of the remainder, if any, of the conversion obligation in excess of the aggregate principal amount of the 2029 Notes being converted.

The 2025 Notes, 2027 Notes, and 2029 Notes (collectively, the “Notes”) are unsecured senior obligations of Veeco and rank senior in right of payment to any of Veeco’s subordinated indebtedness; equal in right of payment to all of Veeco’s unsecured indebtedness that is not subordinated; effectively subordinated in right of payment to any of Veeco’s secured indebtedness to the extent of the value of the assets securing such indebtedness; and structurally subordinated to all indebtedness and other liabilities (including trade payables) of Veeco’s subsidiaries.

The Company may redeem for cash, at its option, all or any portion of (i) the outstanding 2025 Notes at any time on or after January 15, 2023, (ii) the outstanding 2027 Notes at any time on or after June 6, 2024 and/or (iii) the outstanding 2029 Notes at any time on or after June 8, 2026, in each case, at a redemption price equal to 100% of the principal amount of such Notes to be redeemed plus accrued and unpaid interest to, but excluding, the redemption date, if the last reported sale price of the common stock has been at least 130% of the conversion price for the applicable series of Notes then in effect for at least 20 trading days (whether or not consecutive) during any 30 consecutive trading day period (including the last trading day of such period) ending on, and including, the trading day immediately preceding the date

on which the Company provides the redemption notice. Upon the Company’s notice of redemption, holders may elect to convert their Notes based on the conversion rates and criteria outlined below.

The Notes are convertible at the option of the holders upon the satisfaction of specified conditions and during certain periods as described below. The initial conversion rates are 41.6667, 71.5372, and 34.21852 shares of the Company’s common stock per $1,000 principal amount of the 2025 Notes, 2027 Notes, and 2029 Notes, respectively, representing initial effective conversion prices of $24.00, $13.98, and $29.22 per share of common stock, respectively. The conversion rates may be subject to adjustment upon the occurrence of certain specified events.

Holders may convert all or any portion of their Notes, in multiples of one thousand dollar principal amount, at their option at any time prior to the close of business on the business day immediately preceding October 15, 2024, with respect to the 2025 Notes, October 1, 2026, with respect to the 2027 Notes, and February 1, 2029 with respect to the 2029 Notes, only under the following circumstances:

(i)During any calendar quarter (and only during such calendar quarter), if the last reported sale price of the common stock for at least 20 trading days (whether or not consecutive) during a period of 30 consecutive trading days ending on the last trading day of the immediately preceding calendar quarter is greater than or equal to 130% of the conversion price on each applicable trading day;

(ii)During the five consecutive business day period after any five consecutive trading day period (the “measurement period”) in which the trading price per one thousand dollar principal amount of Notes for each trading day of the measurement period was less than 98% of the product of the last reported sale price of Veeco’s common stock and the conversion rate on each such trading day;

(iii)If the Company calls any or all of applicable series of the Notes for redemption at any time prior to the close of business on the scheduled trading day immediately preceding the redemption date; or

(iv)Upon the occurrence of specified corporate events.

For the calendar quarter ended March 31, 2024, the last reported sales price of the common stock during the 30 consecutive trading days, based on the criteria outlined in (i) above, was greater than 130% of the conversion price of the 2025 Notes and 2027 Notes, and as such are convertible by the holders until June 30, 2024.

Holders may convert their Notes at any time, regardless of the foregoing circumstances, on October 15, 2024 with respect to the 2025 Notes, October 1, 2026 with respect to the 2027 Notes, and February 1, 2029 with respect to the 2029 Notes, until the close of business on the business day immediately preceding the respective maturity date.

The Notes are recorded as a single unit within liabilities in the consolidated balance sheets as the conversion features within the Notes are not derivatives that require bifurcation and the Notes do not involve a substantial premium. Transaction costs of $1.9 million, $3.1 million, and $6.8 million incurred in connection with the issuance of the 2025 Notes, 2027 Notes, and 2029 Notes, respectively, were recorded as direct deductions from the related debt liabilities and recognized as non-cash interest expense using the effective interest method over the expected terms of the Notes.

The carrying value of the 2025 Notes, 2027 Notes, and 2029 Notes are as follows:

March 31, 2024

December 31, 2023

  

Principal Amount

  

Unamortized
transaction costs

  

Net carrying value

  

Principal Amount

  

Unamortized
transaction costs

  

Net carrying value

(in thousands)

2025 Notes

$

26,500

$

(75)

$

26,425

$

26,500

$

(102)

$

26,398

2027 Notes

25,000

(293)

24,707

25,000

(313)

24,687

2029 Notes

230,000

(5,896)

224,104

230,000

(6,144)

223,856

Net carrying value

$

281,500

$

(6,264)

$

275,236

$

281,500

$

(6,559)

$

274,941

Total interest expense related to the 2023 Notes, 2025 Notes, 2027 Notes, and 2029 Notes is as follows:

Three months ended March 31,

    

2024

    

2023

    

 

(in thousands)

Cash Interest Expense

 

  

  

Coupon interest expense - 2023 Notes

$

$

23

Coupon interest expense - 2025 Notes

232

1,159

Coupon interest expense - 2027 Notes

234

1,172

Coupon interest expense - 2029 Notes

1,653

Non-cash Interest Expense

 

 

  

Amortization of debt discount/transaction costs- 2023 Notes

 

 

4

Amortization of debt discount/transaction costs- 2025 Notes

28

117

Amortization of debt discount/transaction costs- 2027 Notes

20

105

Amortization of debt discount/transaction costs- 2029 Notes

248

Total Interest Expense

$

2,415

$

2,580

The Company determined the 2025 Notes, 2027 Notes, and 2029 Notes are Level 2 liabilities in the fair value hierarchy and had an estimated fair value at March 31, 2024 of $36.8 million, $62.1 million, and $342.5 million, respectively.

Capped Call Transactions

In connection with the offering of the 2027 Notes, on May 13, 2020, the Company entered into privately negotiated capped call transactions (the “Capped Call Transactions”), pursuant to capped call confirmations, covering the total principal amount of the 2027 Notes for an aggregate premium of $10.3 million. The Capped Call Transactions are expected generally to reduce the potential dilution to the Company’s common stock upon any conversion of the 2027 Notes and/or offset any cash payments the Company is required to make in excess of the aggregate principal amount of converted 2027 Notes, as the case may be, with such reduction and/or offset subject to a cap based on the capped price of the Capped Call Transactions. The Capped Call Transactions exercise price is equal to the initial conversion price of the 2027 Notes, and the capped price of the Capped Call Transactions is approximately $18.46 per share and is subject to certain adjustments under the terms of the capped call confirmations.

The Capped Call Transactions are separate transactions entered into by the Company with the capped call counterparties, are not part of the terms of the 2027 Notes and do not change the holders’ rights under the 2027 Notes. Holders of the 2027 Notes do not have any rights with respect to the Capped Call Transactions. The cost of the Capped Call Transactions is not expected to be tax-deductible as the Company did not elect to integrate the Capped Call Transactions into the 2027 Notes for tax purposes. The Company used a portion of the net proceeds from the offering of the 2027 Notes to pay for the Capped Call Transactions, and the cost of the Capped Call Transactions was recorded as a reduction of the Company’s additional paid-in capital in the accompanying consolidated financial statements.

Revolving Credit Facility

On December 16, 2021, the Company entered into a loan and security agreement providing for a senior secured revolving credit facility in an aggregate principal amount of $150 million (the “Credit Facility”), including a $15 million letter of credit sublimit. The Credit Facility is guaranteed by the Company’s direct material U.S. subsidiaries, subject to customary exceptions. Borrowings under the Credit Facility are secured by a first-priority lien on substantially all of the assets of the Company, subject to customary exceptions. The Credit Facility has a term of five years, maturing on December 16, 2026, or earlier if certain liquidity measures are not met prior to the 2025 Notes maturing. Subject to certain conditions and the receipt of commitments from the lenders, the Loan and Security Agreement allows for revolving commitments under the Credit Facility to be increased by up to $75 million. The existing lenders under the Credit Facility are entitled, but not obligated, to provide such incremental commitments.

Borrowings will bear interest at a floating rate which can be, at the Company’s option, either (a) an alternate base rate plus an applicable rate ranging from 0.50% to 1.25% or (b) a Secured Overnight Financing Rate (“SOFR”) (with a floor of 0.00%) for the specified interest period plus an applicable rate ranging from 1.50% to 2.25%, in each case, depending on the Company’s Secured Net Leverage Ratio (as defined in the Loan and Security Agreement). The Company will pay an unused commitment fee ranging from 0.25% to 0.35% based on unused capacity under the Credit Facility and the Company’s Secured Net Leverage Ratio. The Company may use the proceeds of borrowings under the Credit Facility to pay transaction fees and expenses, provide for its working capital needs and reimburse drawings under letters of credit and for other general corporate purposes.

The Loan and Security Agreement contains customary affirmative covenants for transactions of this type, including, among others, the provision of financial and other information to the administrative agent, notice to the administrative agent upon the occurrence of certain material events, preservation of existence, maintenance of properties and insurance, compliance with laws, including environmental laws, the provision of additional guarantees, and an affiliate transactions covenant, subject to certain exceptions. The Loan and Security Agreement contains customary negative covenants, including, among others, restrictions on the ability to merge and consolidate with other companies, incur indebtedness, refinance our existing convertible notes, grant liens or security interests on assets, make investments, acquisitions, loans, or advances, pay dividends, and sell or otherwise transfer assets.

The Loan and Security Agreement contains financial maintenance covenants that require the Borrower to maintain an Interest Coverage Ratio (as defined in the Loan and Security Agreement) of not less than 3.00 to 1.00, a Total Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than 4.50 to 1.00, and a Secured Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than 2.50 to 1.00, in each case, tested at the end of each fiscal quarter commencing with the fiscal quarter ending September 30, 2022. The Loan and Security Agreement also provides for a number of customary events of default, including, among others: payment defaults to the lenders; voluntary and involuntary bankruptcy proceedings; covenant defaults; material inaccuracies of representations and warranties; certain change of control events; material money judgments; and other customary events of default. The occurrence of an event of default could result in the acceleration of obligations and the termination of lending commitments under the Loan and Security Agreement.

No amounts were outstanding under the Credit Facility as of March 31, 2024 or December 31, 2023.

Other Liabilities

Other liabilities at March 31, 2024 and December 31, 2023 were approximately $25.2 million and $25.5 million, respectively; which primarily included contingent consideration of $21.8 million and $22.4 million, respectively; medical and dental benefits from former executives of $1.9 million; and asset retirement obligations of $0.9 million.

XML 27 R12.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Commitments and Contingencies
3 Months Ended
Mar. 31, 2024
Commitments and Contingencies  
Commitments and Contingencies

Note 6 — Commitments and Contingencies

Leases

The Company’s operating leases primarily include real estate leases for properties used for manufacturing, R&D activities, sales and service, and administration, as well as certain equipment leases. Some leases may include options to renew for a period of up to 5 years, while others may include options to terminate the lease. The weighted average remaining lease term of the Company’s operating leases as of March 31, 2024 was 11 years, and the weighted average discount rate used in determining the present value of future lease payments was 5.6%.

The following table provides the maturities of lease liabilities at March 31, 2024:

Operating

    

Leases

(in thousands)

Payments due by period:

2024

$

2,557

2025

4,138

2026

4,097

2027

3,640

2028

3,422

Thereafter

30,824

Total future minimum lease payments

48,678

Less: Imputed interest

(13,774)

Total

$

34,904

Reported as of March 31, 2024

Accrued expenses and other current liabilities

$

3,955

Long-term operating lease liabilities

30,949

Total

$

34,904

Operating lease costs for the three months ended March 31, 2024 and 2023 were $1.2 million and $1.4 million, respectively. Variable lease costs for the three months ended March 31, 2024 and 2023 were $0.4 million and $0.3 million, respectively. Additionally, the Company has an immaterial amount of short-term leases. Operating cash outflows from operating leases for the three months ended March 31, 2024 and 2023 were $1.6 million and $1.4 million, respectively.

Receivable Purchase Agreement

The Company entered into a receivable purchase agreement with a financial institution to sell certain of its trade receivables from customers without recourse, up to $30.0 million at any point in time. Pursuant to this agreement, the Company did not sell any receivables during the three months ended March 31, 2024, and $18.9 million was available under the agreement for additional sales of receivables as of March 31, 2024. The Company sold $8.3 million of receivables under this agreement for the three months ended March 31, 2023. The net sale of accounts receivable under the agreement is reflected as a reduction of accounts receivable in the Company’s Consolidated Balance Sheet at the time of sale and any fees for the sale of trade receivables were not material for the periods presented.

Purchase Commitments

Veeco has purchase commitments of $200.8 million at March 31, 2024, substantially all of which become due within one year.

Bank Guarantees

Veeco has bank guarantees and letters of credit issued by a financial institution on its behalf as needed. At March 31, 2024, outstanding bank guarantees and standby letters of credit totaled $23.7 million, and unused bank guarantees and letters of credit of $17.0 million were available to be drawn upon.

Legal Proceedings

The Company is involved in various legal proceedings arising in the normal course of business. The Company does not believe that the ultimate resolution of these matters will have a material adverse effect on its consolidated financial position, results of operations, or cash flows.

XML 28 R13.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Equity
3 Months Ended
Mar. 31, 2024
Equity  
Equity

Note 7 — Equity

Statement of Stockholders’ Equity

The following tables present the changes in Stockholders’ Equity:

    

    

    

    

    

Accumulated

    

Additional

Other

Common Stock

Paid-in

Accumulated

Comprehensive

Shares

Amount

Capital

Deficit

Income

Total

(in thousands)

Balance at December 31, 2023

 

56,364

$

564

$

1,202,440

$

(532,169)

$

1,607

$

672,442

Net income

 

 

 

 

21,854

 

 

21,854

Other comprehensive income (loss), net of tax

 

 

 

 

 

(128)

 

(128)

Share-based compensation expense

 

 

 

8,082

 

 

 

8,082

Net issuance under employee stock plans

273

2

(14,342)

(14,340)

Balance at March 31, 2024

 

56,637

$

566

$

1,196,180

$

(510,315)

$

1,479

$

687,910

    

    

    

    

    

Accumulated

    

Additional

Other

Common Stock

Paid-in

Accumulated

Comprehensive

Shares

Amount

Capital

Deficit

Income

Total

(in thousands)

Balance at December 31, 2022

 

51,660

$

517

$

1,078,180

$

(501,801)

$

928

$

577,824

Net income

 

 

 

 

8,741

 

 

8,741

Other comprehensive income (loss), net of tax

 

 

 

 

 

476

 

476

Share-based compensation expense

 

 

 

7,027

 

 

 

7,027

Net issuance under employee stock plans

33

(8,509)

(8,509)

Balance at March 31, 2023

 

51,693

$

517

$

1,076,698

$

(493,060)

$

1,404

$

585,559

Accumulated Other Comprehensive Income (“AOCI”)

The following table presents the changes in the balances of each component of AOCI, net of tax:

Unrealized

Gains (Losses)

Foreign

on Available

Currency

for Sale 

    

Translation

    

Securities

    

Total

(in thousands)

Balance - December 31, 2023

$

1,761

$

(154)

$

1,607

Other comprehensive income (loss)

 

(33)

 

(95)

 

(128)

Balance - March 31, 2024

$

1,728

$

(249)

$

1,479

There were minimal reclassifications from AOCI into net income for the three months ended March 31, 2024 and 2023.

XML 29 R14.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Share-based Compensation
3 Months Ended
Mar. 31, 2024
Share-based Compensation  
Share-based compensation

Note 8 — Share-based Compensation

Restricted share awards are issued to employees and to members of our board of directors that are subject to specified restrictions and a risk of forfeiture. The restrictions typically lapse over one to four years and may entitle holders to dividends and voting rights. Other types of share-based compensation include performance share awards, performance share units, and restricted share units (collectively with restricted share awards, “restricted shares”), as well as options to purchase common stock.

Share-based compensation expense was recognized in the following line items in the Consolidated Statements of Operations for the three months ended March 31, 2024 and 2023:

Three months ended March 31,

    

2024

    

2023

    

    

(in thousands)

Cost of sales

 

$

1,730

 

$

1,451

 

 

Research and development

2,318

2,089

Selling, general, and administrative

4,034

3,487

Total

$

8,082

$

7,027

For the three months ended March 31, 2024, equity activity related to non-vested restricted shares and performance shares was as follows:

    

    

Weighted

Average

Number of

Grant Date

Shares

Fair Value

(in thousands)

Balance - December 31, 2023

2,464

$

26.19

Granted

1,019

37.72

Performance award adjustments

200

27.81

Vested

(1,040)

25.93

Forfeited

(13)

23.06

Balance - March 31, 2024

2,630

$

31.13

XML 30 R15.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Income Taxes
3 Months Ended
Mar. 31, 2024
Income Taxes  
Income Taxes

Note 9 — Income Taxes

Income taxes are estimated for each of the jurisdictions in which the Company operates. Deferred income taxes reflect the net tax effect of temporary differences between the carrying amount of assets and liabilities for financial reporting purposes and the amounts used for income tax purposes, as well as the tax effect of carryforwards. Realization of net deferred tax assets is dependent on future taxable income.

At the end of each interim reporting period, the effective tax rate is aligned with expectations for the full year. This estimate is used to determine the income tax provision on a year-to-date basis and may change in subsequent interim periods.

Income before income taxes and income tax expense for the three months ended March 31, 2024 and 2023 were as follows:

Three months ended March 31,

 

    

2024

    

2023

 

(in thousands, except percentages)

 

Income before income taxes

$

22,750

$

9,004

Income tax expense

 

$

896

 

$

263

Effective tax rate

 

3.94%

 

2.93%

The Company’s income tax expense for the three months ended March 31, 2024 was $0.9 million, compared to $0.3 million for the comparable prior period. For the three months ended March 31, 2024 and March 31, 2023, the effective tax rate was lower than the U.S. statutory tax rate primarily relating to a discrete income tax benefit for share-based compensation windfall. Additionally, the effective tax rate was also favorably impacted by the tax benefits related to Foreign-Derived Intangible Income and research and development tax credits.

XML 31 R16.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Segment Reporting and Geographic Information
3 Months Ended
Mar. 31, 2024
Segment Reporting and Geographic Information  
Segment Reporting and Geographic Information

Note 10 — Segment Reporting and Geographic Information

Veeco operates and measures its results in one operating segment and therefore has one reportable segment: the development, manufacture, sales, and support of semiconductor and thin film process equipment primarily sold to make electronic devices.

Veeco serves the following four end-markets:

Semiconductor

The Semiconductor market refers to early process steps in logic and memory applications where silicon wafers are processed. There are many different process steps in forming patterned wafers, such as deposition, etching, masking, and doping, where the microchips are created but remain on the silicon wafer. This market includes mask blank production for extreme ultraviolet (“EUV”) lithography, as well as Advanced Packaging, which refers to a portfolio of wafer-level assembly technologies that enable improved performance of electronic products, such as smartphones, high-end servers, and graphical processors.

Compound Semiconductor

The Compound Semiconductor market includes Photonics, Power Electronics, RF Filters and Amplifiers, and Solar applications. Photonics refers to light source technologies and laser-based solutions for 3D sensing, datacom and telecom applications. This includes micro-LED, laser diodes, edge emitting lasers and vertical cavity surface emitting lasers (“VCSELs”). Power Electronics refers to semiconductor devices such as rectifiers, inverters and converters for the

control and conversion of electric power in applications such as fast or wireless charging of consumer electronics and automotive applications. RF power amplifiers and filters (including surface acoustic wave (“SAW”) and bulk acoustic wave (“BAW”) filters) are used in 5G communications infrastructure, smartphones, tablets, and mobile devices. They make use of radio waves for wireless broadcasting and/or communications. Solar refers to power obtained by harnessing the energy of the sun through the use of compound semiconductor devices such as photovoltaics.

Data Storage

Data Storage refers to the Hard Disk Drive (“HDD”) market, for which our systems enable customers to manufacture thin film magnetic heads for hard disk drives as part of large capacity storage applications.

Scientific & Other

Scientific & Other refers to advanced materials research and a range of manufacturing applications including optical coatings (laser mirrors, optical filters, and anti-reflective coatings).

Sales by end-market and geographic region for the three months ended March 31, 2024 and 2023 were as follows:

Three months ended March 31,

    

2024

2023

    

(in thousands)

Sales by end-market

Semiconductor

$

120,384

$

93,107

Compound Semiconductor

21,002

21,159

Data Storage

 

18,017

 

21,514

Scientific & Other

 

15,081

 

17,724

Total

$

174,484

$

153,504

Sales by geographic region

United States

$

27,868

$

31,011

EMEA(1)

8,488

22,947

China

64,308

60,747

Rest of APAC

73,220

38,744

Rest of World

 

600

 

54

Total

$

174,484

$

153,504

(1)EMEA consists of Europe, the Middle East, and Africa

For geographic reporting, sales are attributed to the location in which the customer facility is located.

XML 32 R17.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Basis of Presentation (Policies)
3 Months Ended
Mar. 31, 2024
Significant Accounting Policies  
Basis of Presentation

The accompanying unaudited Consolidated Financial Statements of Veeco have been prepared in accordance with U.S. GAAP as defined in Financial Accounting Standards Board (“FASB”) Accounting Standards Codification 270 for interim financial information and with the instructions to Rule 10-01 of Securities and Exchange Commission Regulation S-X. Accordingly, they do not include all of the information and footnotes required by U.S. GAAP for complete financial statements as the interim information is an update of the information that was presented in Veeco’s most recent annual financial statements. For further information, refer to Veeco’s Consolidated Financial Statements and Notes thereto included in the Annual Report on Form 10-K for the year ended December 31, 2023 (“2023 Form 10-K”). In the opinion of management, all adjustments considered necessary for a fair presentation have been included. All such adjustments are of a normal, recurring nature.

Fiscal Period

Veeco reports interim quarters on a 13-week basis ending on the last Sunday of each quarter. The fourth quarter always ends on the last day of the calendar year, December 31. The 2024 interim quarters end on March 31, June 30, and September 29, and the 2023 interim quarters ended on April 2, July 2, and October 1. These interim quarters are reported as March 31, June 30, and September 30 in Veeco’s interim consolidated financial statements.

Use of Estimates

The preparation of financial statements in conformity with U.S. GAAP requires the Company’s management to make estimates and assumptions that affect the amounts reported in the financial statements and accompanying notes. Although these estimates are based on management’s knowledge of current events and actions it may undertake in the future, actual results may differ from these estimates.

Revenue Recognition

Revenue Recognition

Revenue is recognized upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration the Company expects to receive in exchange for such product or service. The Company’s contracts with customers generally do not contain variable consideration. In the rare instances where variable consideration is included, the Company estimates the amount of variable consideration and determines what portion of that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. The Company’s contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, maintenance, and service plans. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. The Company also evaluates whether multiple transactions with the same customer or related parties should be considered part of a single contract based on an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another.

   

When there are separate units of accounting, the Company allocates revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which the Company separately sells the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, the Company estimates stand-alone selling prices generally using an expected cost plus margin approach.

   

Most of the Company’s revenue is recognized at a point in time when the performance obligation is satisfied. The Company considers many facts when evaluating each of its sales arrangements to determine the timing of revenue recognition, including its contractual obligations and the nature of the customer’s post-delivery acceptance provisions. The Company’s system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. For many of these arrangements, a customer source inspection of the system is performed in the Company’s facility, test data is sent to the customer documenting that the system is functioning to the agreed upon specifications prior to delivery, or other quality assurance testing is performed

internally to ensure system functionality prior to shipment. Historically, such source inspection or test data replicates the field acceptance provisions that are performed at the customer’s site prior to final acceptance of the system. When the Company objectively demonstrates that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or the Company’s historical experience of its tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where the Company cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. The Company recognizes such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met.

   

In certain cases the Company’s contracts with customers contain a billing retention, which is billed by the Company and payable by the customer when field acceptance provisions are completed. Revenue recognized in advance of the amount that has been billed is recorded as a contract asset on the Consolidated Balance Sheets.

   

The Company recognizes revenue related to maintenance and service contracts over time based upon the respective contract term. Installation revenue is recognized over time as the installation services are performed. The Company recognizes revenue from the sales of components, spare parts, and specified service engagements at a point in time, which is typically consistent with the time of delivery in accordance with the terms of the applicable sales arrangement.

   

The Company may receive advanced payments on system transactions. The timing of the transfer of goods or services related to the advanced payments is either at the discretion of the customer or generally expected to be within one year from the advanced receipt. As such, the Company does not adjust transaction prices for the time value of money. Incremental direct costs incurred related to the acquisition of a customer contract, such as sales commissions, are expensed as incurred since the expected amortization period is one year or less.

The Company has elected to treat shipping and handling costs as a fulfillment activity, and the Company includes such costs in cost of sales when the Company recognizes revenue for the related goods. Taxes assessed by governmental authorities that are collected by the Company from a customer are excluded from revenue.

Inventories

Inventories

Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter the Company assesses the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods; and evaluation inventory at customer facilities. Obsolete inventory or inventory in excess of management’s estimated usage requirement is written down to its estimated net realizable value if less than cost. The Company evaluates usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for the Company’s products may require a write down of inventory, which would be reflected in cost of sales in the period the revision is made. Inventory acquired as part of a business combination is recorded at fair value on the date of acquisition.

Recent Accounting Standards Not Yet Adopted

Recent Accounting Standards Not Yet Adopted

In November 2023, the FASB issued ASU 2023-07: Segment Reporting (Topic 280) – Improvements to Reportable Segment Disclosures. This standard primarily enhances disclosures about significant segment expenses. The standard requires interim and annual disclosure of significant segment expenses that are regularly provided to the chief operating decision-maker (“CODM”) and included within the reported measure of a segment’s profit or loss, requires interim disclosures about a reportable segment’s profit and loss and assets that are currently required annually, requires disclosure of the position and title of the CODM, clarifies circumstances in which an entity can disclose multiple

segment measures of profit or loss and contains other disclosure requirements. This authoritative guidance is effective for fiscal years beginning after December 15, 2023, and interim periods within fiscal years beginning after December 15, 2024, with early adoption permitted. The Company is evaluating the effect of this new guidance on its consolidated financial statements.

XML 33 R18.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Income Per Common Share (Tables)
3 Months Ended
Mar. 31, 2024
Income Per Common Share  
Schedule of computations of basic and diluted income per share

Three months ended March 31,

    

2024

    

2023

    

    

(in thousands, except per share amounts)

Numerator:

Net income

$

21,854

$

8,741

Interest expense associated with convertible notes

514

1,277

Net income available to common shareholders

$

22,368

$

10,018

Denominator:

Basic weighted average shares outstanding

 

55,968

 

50,559

Effect of potentially dilutive share-based awards

939

355

Dilutive effect of convertible notes

 

3,857

 

8,942

Diluted weighted average shares outstanding

 

60,764

 

59,856

Net income per common share:

Basic

$

0.39

$

0.17

Diluted

$

0.37

$

0.17

Potentially dilutive shares excluded from the diluted calculation as their effect would be antidilutive

213

1,140

Potential shares to be issued for settlement of the convertible notes excluded from the diluted calculation as their effect would be antidilutive

5,603

XML 34 R19.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Assets (Tables)
3 Months Ended
Mar. 31, 2024
Assets  
Schedule of portion of Veeco's assets (excluding cash balances) that are measured at fair value on a recurring basis

    

Level 1

    

Level 2

    

Level 3

    

Total

(in thousands)

March 31, 2024

Cash equivalents

Certificate of deposits and time deposits

$

84,211

$

$

$

84,211

Corporate debt

2,655

2,655

U.S. treasuries

9,999

9,999

Money market cash

21,363

21,363

Total

$

115,573

$

2,655

$

$

118,228

Short-term investments

U.S. treasuries

$

46,464

$

$

$

46,464

Government agency securities

25,425

25,425

Corporate debt

50,997

50,997

Total

$

46,464

$

76,422

$

$

122,886

December 31, 2023

Cash equivalents

Certificate of deposits and time deposits

$

74,262

$

$

$

74,262

Corporate debt

1,988

1,988

Money market cash

21,587

21,587

Total

$

95,849

$

1,988

$

$

97,837

Short-term investments

U.S. treasuries

$

59,493

$

$

$

59,493

Government agency securities

41,818

41,818

Corporate debt

35,409

35,409

Commercial paper

9,944

9,944

Total

$

59,493

$

87,171

$

$

146,664

Schedule of amortized cost and fair value of available-for-sale securities

    

    

Gross

    

Gross

    

Amortized

Unrealized

Unrealized

Estimated

Cost

Gains

Losses

Fair Value

(in thousands)

March 31, 2024

U.S. treasuries

$

46,565

$

$

(101)

$

46,464

Government agency securities

25,455

(30)

25,425

Corporate debt

51,098

(101)

50,997

Total

$

123,118

$

$

(232)

$

122,886

December 31, 2023

U.S. treasuries

$

59,541

$

3

$

(51)

$

59,493

Government agency securities

41,843

6

(31)

41,818

Corporate debt

 

35,447

9

(47)

 

35,409

Commercial paper

9,944

9,944

Total

$

146,775

$

18

$

(129)

$

146,664

Schedule of fair value and unrealized losses of available-for-sale securities in a loss position

Continuous Loss Position

Continuous Loss Position

for Less than 12 Months

for 12 Months or More

    

    

Gross

    

    

Gross

Estimated

Unrealized

Estimated

Unrealized

Fair Value

Losses

Fair Value

Losses

(in thousands)

March 31, 2024

U.S. treasuries

$

46,464

$

(101)

$

$

Government agency securities

25,425

(30)

Corporate debt

 

45,471

 

(98)

 

1,495

 

(3)

Total

$

117,360

$

(229)

$

1,495

$

(3)

December 31, 2023

U.S. treasuries

$

43,118

$

(50)

$

$

Government agency securities

34,885

(31)

Corporate debt

 

23,262

 

(33)

 

2,618

 

(15)

Total

$

101,265

$

(114)

$

2,618

$

(15)

Schedule of contractual maturities of securities classified as available-for-sale

March 31, 2024

Amortized

Estimated

Cost

Fair Value

(in thousands)

Due in one year or less

$

112,231

$

112,050

Due after one year through two years

10,887

 

10,836

Total

$

123,118

$

122,886

Schedule of inventories

March 31,

December 31,

    

2024

    

2023

(in thousands)

Materials

$

144,793

$

139,884

Work-in-process

 

75,344

 

71,278

Finished goods

 

3,670

 

6,183

Evaluation inventory

19,459

20,290

Total

$

243,266

$

237,635

Schedule of property, plant, and equipment

March 31,

December 31,

    

2024

    

2023

(in thousands)

Land

$

5,061

$

5,061

Building and improvements

 

61,292

 

61,679

Machinery and equipment (1)

 

182,811

 

181,180

Leasehold improvements

 

53,009

 

52,913

Gross property, plant, and equipment

 

302,173

 

300,833

Less: accumulated depreciation and amortization

 

186,876

 

182,374

Net property, plant, and equipment

$

115,297

$

118,459

(1)Machinery and equipment also includes software, furniture and fixtures

Schedule of intangible assets excluding goodwill

March 31, 2024

December 31, 2023

Accumulated

Accumulated

    

Gross

    

Amortization

    

    

Gross

    

Amortization

    

Carrying

and

Net

Carrying

and

Net

Amount

Impairment

Amount

Amount

Impairment

Amount

(in thousands)

Technology

$

355,928

$

322,997

$

32,931

$

355,928

$

321,923

$

34,005

Customer relationships

146,925

138,154

8,771

146,925

137,649

9,276

Trademarks and tradenames

30,910

30,571

339

30,910

30,269

641

Other

 

3,746

 

3,733

 

13

 

3,746

 

3,723

 

23

Total

$

537,509

$

495,455

$

42,054

$

537,509

$

493,564

$

43,945

XML 35 R20.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Liabilities (Tables)
3 Months Ended
Mar. 31, 2024
Liabilities  
Schedule of accrued expenses and other current liabilities

March 31,

December 31,

    

2024

    

2023

(in thousands)

Payroll and related benefits

$

35,059

$

28,321

Warranty

8,667

8,864

Operating lease liabilities

3,955

4,025

Interest

2,804

1,149

Professional fees

2,237

1,834

Sales, use, and other taxes

 

3,217

 

1,825

Contingent consideration

1,814

Other

 

3,320

 

9,792

Total

$

59,259

$

57,624

Schedule of changes in product warranty reserves

(in thousands)

Balance - December 31, 2023

$

8,864

Warranties issued

 

1,545

Consumption of reserves

 

(1,542)

Changes in estimate

 

(200)

Balance - March 31, 2024

$

8,667

Schedule of carrying value of Convertible Senior Notes

March 31, 2024

December 31, 2023

  

Principal Amount

  

Unamortized
transaction costs

  

Net carrying value

  

Principal Amount

  

Unamortized
transaction costs

  

Net carrying value

(in thousands)

2025 Notes

$

26,500

$

(75)

$

26,425

$

26,500

$

(102)

$

26,398

2027 Notes

25,000

(293)

24,707

25,000

(313)

24,687

2029 Notes

230,000

(5,896)

224,104

230,000

(6,144)

223,856

Net carrying value

$

281,500

$

(6,264)

$

275,236

$

281,500

$

(6,559)

$

274,941

Schedule of interest expense related to Convertible Senior Notes

Three months ended March 31,

    

2024

    

2023

    

 

(in thousands)

Cash Interest Expense

 

  

  

Coupon interest expense - 2023 Notes

$

$

23

Coupon interest expense - 2025 Notes

232

1,159

Coupon interest expense - 2027 Notes

234

1,172

Coupon interest expense - 2029 Notes

1,653

Non-cash Interest Expense

 

 

  

Amortization of debt discount/transaction costs- 2023 Notes

 

 

4

Amortization of debt discount/transaction costs- 2025 Notes

28

117

Amortization of debt discount/transaction costs- 2027 Notes

20

105

Amortization of debt discount/transaction costs- 2029 Notes

248

Total Interest Expense

$

2,415

$

2,580

XML 36 R21.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Commitments and Contingencies (Tables)
3 Months Ended
Mar. 31, 2024
Commitments and Contingencies  
Schedule of maturities of lease liabilities 2020

The following table provides the maturities of lease liabilities at March 31, 2024:

Operating

    

Leases

(in thousands)

Payments due by period:

2024

$

2,557

2025

4,138

2026

4,097

2027

3,640

2028

3,422

Thereafter

30,824

Total future minimum lease payments

48,678

Less: Imputed interest

(13,774)

Total

$

34,904

Reported as of March 31, 2024

Accrued expenses and other current liabilities

$

3,955

Long-term operating lease liabilities

30,949

Total

$

34,904

XML 37 R22.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Equity (Tables)
3 Months Ended
Mar. 31, 2024
Equity  
Schedule of Stockholders' Equity

    

    

    

    

    

Accumulated

    

Additional

Other

Common Stock

Paid-in

Accumulated

Comprehensive

Shares

Amount

Capital

Deficit

Income

Total

(in thousands)

Balance at December 31, 2023

 

56,364

$

564

$

1,202,440

$

(532,169)

$

1,607

$

672,442

Net income

 

 

 

 

21,854

 

 

21,854

Other comprehensive income (loss), net of tax

 

 

 

 

 

(128)

 

(128)

Share-based compensation expense

 

 

 

8,082

 

 

 

8,082

Net issuance under employee stock plans

273

2

(14,342)

(14,340)

Balance at March 31, 2024

 

56,637

$

566

$

1,196,180

$

(510,315)

$

1,479

$

687,910

    

    

    

    

    

Accumulated

    

Additional

Other

Common Stock

Paid-in

Accumulated

Comprehensive

Shares

Amount

Capital

Deficit

Income

Total

(in thousands)

Balance at December 31, 2022

 

51,660

$

517

$

1,078,180

$

(501,801)

$

928

$

577,824

Net income

 

 

 

 

8,741

 

 

8,741

Other comprehensive income (loss), net of tax

 

 

 

 

 

476

 

476

Share-based compensation expense

 

 

 

7,027

 

 

 

7,027

Net issuance under employee stock plans

33

(8,509)

(8,509)

Balance at March 31, 2023

 

51,693

$

517

$

1,076,698

$

(493,060)

$

1,404

$

585,559

Schedule of the changes in the balances of each component of AOCI, net of tax

Unrealized

Gains (Losses)

Foreign

on Available

Currency

for Sale 

    

Translation

    

Securities

    

Total

(in thousands)

Balance - December 31, 2023

$

1,761

$

(154)

$

1,607

Other comprehensive income (loss)

 

(33)

 

(95)

 

(128)

Balance - March 31, 2024

$

1,728

$

(249)

$

1,479

XML 38 R23.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Share-based Compensation (Tables)
3 Months Ended
Mar. 31, 2024
Share-based Compensation  
Schedule of share-based compensation expense

Three months ended March 31,

    

2024

    

2023

    

    

(in thousands)

Cost of sales

 

$

1,730

 

$

1,451

 

 

Research and development

2,318

2,089

Selling, general, and administrative

4,034

3,487

Total

$

8,082

$

7,027

Summary of non-vested restricted and performance shares activity

    

    

Weighted

Average

Number of

Grant Date

Shares

Fair Value

(in thousands)

Balance - December 31, 2023

2,464

$

26.19

Granted

1,019

37.72

Performance award adjustments

200

27.81

Vested

(1,040)

25.93

Forfeited

(13)

23.06

Balance - March 31, 2024

2,630

$

31.13

XML 39 R24.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Income Taxes (Tables)
3 Months Ended
Mar. 31, 2024
Income Taxes  
Schedule of income before income taxes and income tax expense

Three months ended March 31,

 

    

2024

    

2023

 

(in thousands, except percentages)

 

Income before income taxes

$

22,750

$

9,004

Income tax expense

 

$

896

 

$

263

Effective tax rate

 

3.94%

 

2.93%

XML 40 R25.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Segment Reporting and Geographic Information (Tables)
3 Months Ended
Mar. 31, 2024
Segment Reporting and Geographic Information  
Schedule of sales by end-market

Three months ended March 31,

    

2024

2023

    

(in thousands)

Sales by end-market

Semiconductor

$

120,384

$

93,107

Compound Semiconductor

21,002

21,159

Data Storage

 

18,017

 

21,514

Scientific & Other

 

15,081

 

17,724

Total

$

174,484

$

153,504

Sales by geographic region

United States

$

27,868

$

31,011

EMEA(1)

8,488

22,947

China

64,308

60,747

Rest of APAC

73,220

38,744

Rest of World

 

600

 

54

Total

$

174,484

$

153,504

(1)EMEA consists of Europe, the Middle East, and Africa
Schedule of sales by geographic region

Three months ended March 31,

    

2024

2023

    

(in thousands)

Sales by end-market

Semiconductor

$

120,384

$

93,107

Compound Semiconductor

21,002

21,159

Data Storage

 

18,017

 

21,514

Scientific & Other

 

15,081

 

17,724

Total

$

174,484

$

153,504

Sales by geographic region

United States

$

27,868

$

31,011

EMEA(1)

8,488

22,947

China

64,308

60,747

Rest of APAC

73,220

38,744

Rest of World

 

600

 

54

Total

$

174,484

$

153,504

(1)EMEA consists of Europe, the Middle East, and Africa
XML 41 R26.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Basis of Presentation - Fiscal Period (Details)
3 Months Ended
Mar. 31, 2024
Significant Accounting Policies  
Fiscal period duration (in days) 91 days
XML 42 R27.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Basis of Presentation - Revenue Recognition (Details)
3 Months Ended
Mar. 31, 2024
Significant Accounting Policies  
Revenue, practical expedient, incremental cost of obtaining contract true
XML 43 R28.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Income Per Common Share - Basic and Diluted (Details) - USD ($)
$ / shares in Units, shares in Thousands, $ in Thousands
3 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Numerator:    
Net income $ 21,854 $ 8,741
Interest expense associated with convertible notes 514 1,277
Net income available to common shareholders $ 22,368 $ 10,018
Denominator:    
Basic weighted average shares outstanding 55,968 50,559
Effect of potentially dilutive share-based awards 939 355
Dilutive effect of convertible notes 3,857 8,942
Diluted weighted average shares outstanding 60,764 59,856
Net income (loss) per common share:    
Basic (in dollars per share) $ 0.39 $ 0.17
Diluted (in dollars per share) $ 0.37 $ 0.17
XML 44 R29.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Income Per Common Share - Shares Excluded from EPS (Details) - shares
shares in Thousands
3 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Potentially dilutive shares    
Antidilutive securities    
Securities excluded from the diluted calculation as their effect would be antidilutive 213 1,140
Convertible Notes    
Antidilutive securities    
Securities excluded from the diluted calculation as their effect would be antidilutive   5,603
XML 45 R30.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Business Combination - Consideration (Details)
$ in Thousands
1 Months Ended 3 Months Ended
Jan. 31, 2023
USD ($)
Jan. 31, 2023
USD ($)
Mar. 31, 2024
USD ($)
Business Combination      
Increase (decrease) in contingent consideration     $ (625)
Contingent consideration payment     $ 1,818
Epiluvac AB      
Business Combination      
Acquisition date fair value   $ 56,400  
Cash paid, net of cash acquired   30,400  
Contingent consideration   $ 26,100  
Business Combination, Contingent Consideration, Liability, Measurement Input us-gaap:MeasurementInputDiscountRateMember us-gaap:MeasurementInputDiscountRateMember us-gaap:MeasurementInputDiscountRateMember
Contingent consideration measurement input 0.0554 0.0554 0.056
Contingent consideration $ 26,100 $ 26,100  
Increase (decrease) in contingent consideration     $ (600)
Contingent consideration payment     1,800
Epiluvac AB | Other liabilities.      
Business Combination      
Contingent consideration     $ 21,800
Epiluvac AB | Completion of certain defined milestones      
Business Combination      
Contingent consideration payments, High end of range 15,000 15,000  
Epiluvac AB | Percentage of orders received during defined Earn-out period      
Business Combination      
Contingent consideration payments, High end of range $ 20,000 $ 20,000  
Maximum earn-out period 4 years    
XML 46 R31.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Assets - Fair Value (Details) - USD ($)
$ in Thousands
Mar. 31, 2024
Dec. 31, 2023
Short-term investments    
Transfer of assets from Level 1 to Level 2 $ 0  
Transfer of assets from Level 2 to Level 1 0  
Measured on a recurring basis    
Cash equivalents    
Total Cash equivalents 118,228 $ 97,837
Short-term investments    
Total Short-term investments 122,886 146,664
Measured on a recurring basis | U.S. treasuries    
Short-term investments    
Total Short-term investments 46,464 59,493
Measured on a recurring basis | Government agency securities    
Short-term investments    
Total Short-term investments 25,425 41,818
Measured on a recurring basis | Corporate debt    
Short-term investments    
Total Short-term investments 50,997 35,409
Measured on a recurring basis | Commercial paper    
Short-term investments    
Total Short-term investments   9,944
Measured on a recurring basis | Certificate of deposits and time deposits    
Cash equivalents    
Total Cash equivalents 84,211 74,262
Measured on a recurring basis | Corporate debt    
Cash equivalents    
Total Cash equivalents 2,655 1,988
Measured on a recurring basis | U.S. treasuries    
Cash equivalents    
Total Cash equivalents 9,999  
Measured on a recurring basis | Money market cash    
Cash equivalents    
Total Cash equivalents 21,363 21,587
Measured on a recurring basis | Level 1    
Cash equivalents    
Total Cash equivalents 115,573 95,849
Short-term investments    
Total Short-term investments 46,464 59,493
Measured on a recurring basis | Level 1 | U.S. treasuries    
Short-term investments    
Total Short-term investments 46,464 59,493
Measured on a recurring basis | Level 1 | Certificate of deposits and time deposits    
Cash equivalents    
Total Cash equivalents 84,211 74,262
Measured on a recurring basis | Level 1 | U.S. treasuries    
Cash equivalents    
Total Cash equivalents 9,999  
Measured on a recurring basis | Level 1 | Money market cash    
Cash equivalents    
Total Cash equivalents 21,363 21,587
Measured on a recurring basis | Level 2    
Cash equivalents    
Total Cash equivalents 2,655 1,988
Short-term investments    
Total Short-term investments 76,422 87,171
Measured on a recurring basis | Level 2 | Government agency securities    
Short-term investments    
Total Short-term investments 25,425 41,818
Measured on a recurring basis | Level 2 | Corporate debt    
Short-term investments    
Total Short-term investments 50,997 35,409
Measured on a recurring basis | Level 2 | Commercial paper    
Short-term investments    
Total Short-term investments   9,944
Measured on a recurring basis | Level 2 | Corporate debt    
Cash equivalents    
Total Cash equivalents $ 2,655 $ 1,988
XML 47 R32.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Assets - Available-For-Sale Securities (Details) - USD ($)
$ in Thousands
3 Months Ended
Mar. 31, 2024
Dec. 31, 2023
Total available-for-sale securities    
Amortized Cost $ 123,118 $ 146,775
Gross Unrealized Gains   18
Gross Unrealized Losses (232) (129)
Estimated Fair Value 122,886 146,664
Available-for-sale securities in a loss position    
Investments, Continuous loss position for less than 12 months, Estimated Fair Value 117,360 101,265
Investments, Continuous loss position for less than 12 months, Gross Unrealized Losses (229) (114)
Investments, Continuous loss position for 12 months or more, Estimated Fair Value 1,495 2,618
Investments, Continuous loss position for 12 months or more, Gross Unrealized Losses (3) (15)
Contractual maturities - Amortized Cost    
Amortized Cost, Due in one year or less 112,231  
Amortized Cost, Due after one year through two years 10,887  
Amortized Cost 123,118 146,775
Contractual maturities - Estimated Fair Value    
Estimated Fair Value, Due in one year or less 112,050  
Estimated Fair Value, Due after one year through two years 10,836  
Available-for-sale Securities, Debt Securities, Total 122,886 146,664
Realized gains or losses    
Realized gains or losses 0  
Unrealized losses 0  
U.S. treasuries    
Total available-for-sale securities    
Amortized Cost 46,565 59,541
Gross Unrealized Gains   3
Gross Unrealized Losses (101) (51)
Estimated Fair Value 46,464 59,493
Available-for-sale securities in a loss position    
Investments, Continuous loss position for less than 12 months, Estimated Fair Value 46,464 43,118
Investments, Continuous loss position for less than 12 months, Gross Unrealized Losses (101) (50)
Contractual maturities - Amortized Cost    
Amortized Cost 46,565 59,541
Contractual maturities - Estimated Fair Value    
Available-for-sale Securities, Debt Securities, Total 46,464 59,493
Government agency securities    
Total available-for-sale securities    
Amortized Cost 25,455 41,843
Gross Unrealized Gains   6
Gross Unrealized Losses (30) (31)
Estimated Fair Value 25,425 41,818
Available-for-sale securities in a loss position    
Investments, Continuous loss position for less than 12 months, Estimated Fair Value 25,425 34,885
Investments, Continuous loss position for less than 12 months, Gross Unrealized Losses (30) (31)
Contractual maturities - Amortized Cost    
Amortized Cost 25,455 41,843
Contractual maturities - Estimated Fair Value    
Available-for-sale Securities, Debt Securities, Total 25,425 41,818
Corporate debt    
Total available-for-sale securities    
Amortized Cost 51,098 35,447
Gross Unrealized Gains   9
Gross Unrealized Losses (101) (47)
Estimated Fair Value 50,997 35,409
Available-for-sale securities in a loss position    
Investments, Continuous loss position for less than 12 months, Estimated Fair Value 45,471 23,262
Investments, Continuous loss position for less than 12 months, Gross Unrealized Losses (98) (33)
Investments, Continuous loss position for 12 months or more, Estimated Fair Value 1,495 2,618
Investments, Continuous loss position for 12 months or more, Gross Unrealized Losses (3) (15)
Contractual maturities - Amortized Cost    
Amortized Cost 51,098 35,447
Contractual maturities - Estimated Fair Value    
Available-for-sale Securities, Debt Securities, Total $ 50,997 35,409
Commercial paper    
Total available-for-sale securities    
Amortized Cost   9,944
Estimated Fair Value   9,944
Contractual maturities - Amortized Cost    
Amortized Cost   9,944
Contractual maturities - Estimated Fair Value    
Available-for-sale Securities, Debt Securities, Total   $ 9,944
XML 48 R33.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Assets - Accounts Receivable (Details) - USD ($)
$ in Millions
Mar. 31, 2024
Dec. 31, 2023
Assets    
Allowance for doubtful accounts receivable $ 1.0 $ 1.0
XML 49 R34.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Assets - Inventories (Details) - USD ($)
$ in Thousands
Mar. 31, 2024
Dec. 31, 2023
Inventories    
Materials $ 144,793 $ 139,884
Work-in-process 75,344 71,278
Finished goods 3,670 6,183
Evaluation inventory 19,459 20,290
Total $ 243,266 $ 237,635
XML 50 R35.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Assets - Prepaid Expenses and Other Current Assets (Details) - USD ($)
$ in Millions
Mar. 31, 2024
Dec. 31, 2023
Prepaid expenses and other current assets    
Deposits with suppliers $ 17.0 $ 19.4
XML 51 R36.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Assets - Property, Plant, and Equipment (Details) - USD ($)
$ in Thousands
3 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Dec. 31, 2023
Property, plant, and equipment      
Gross property, plant and equipment $ 302,173   $ 300,833
Less: accumulated depreciation and amortization 186,876   182,374
Net property, plant, and equipment 115,297   118,459
Depreciation expense 4,500 $ 4,200  
Land      
Property, plant, and equipment      
Gross property, plant and equipment 5,061   5,061
Building and improvements      
Property, plant, and equipment      
Gross property, plant and equipment 61,292   61,679
Machinery and equipment      
Property, plant, and equipment      
Gross property, plant and equipment 182,811   181,180
Leaseholds improvements      
Property, plant, and equipment      
Gross property, plant and equipment $ 53,009   $ 52,913
XML 52 R37.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Assets - Goodwill (Details)
$ in Millions
3 Months Ended
Mar. 31, 2024
USD ($)
Changes in goodwill balances  
Increase (decrease) in goodwill $ 0.0
XML 53 R38.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Assets - Intangible Assets (Details) - USD ($)
$ in Thousands
Mar. 31, 2024
Dec. 31, 2023
Intangible assets    
Gross Carrying Amount, Intangible assets $ 537,509 $ 537,509
Accumulated Amortization and Impairment, Intangible assets 495,455 493,564
Total Net Intangible Assets 42,054 43,945
Technology    
Intangible assets    
Gross Carrying Amount, Intangible assets 355,928 355,928
Accumulated Amortization and Impairment, Intangible assets 322,997 321,923
Total Net Intangible Assets 32,931 34,005
Customer relationship    
Intangible assets    
Gross Carrying Amount, Intangible assets 146,925 146,925
Accumulated Amortization and Impairment, Intangible assets 138,154 137,649
Total Net Intangible Assets 8,771 9,276
Trademarks and tradenames    
Intangible assets    
Gross Carrying Amount, Intangible assets 30,910 30,910
Accumulated Amortization and Impairment, Intangible assets 30,571 30,269
Total Net Intangible Assets 339 641
Other Intangible Assets    
Intangible assets    
Gross Carrying Amount, Intangible assets 3,746 3,746
Accumulated Amortization and Impairment, Intangible assets 3,733 3,723
Total Net Intangible Assets $ 13 $ 23
XML 54 R39.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Liabilities - Accrued Expenses and Other Current Liabilities (Details) - USD ($)
$ in Thousands
Mar. 31, 2024
Dec. 31, 2023
Accrued expenses and other current liabilities    
Payroll and related benefits $ 35,059 $ 28,321
Warranty 8,667 8,864
Operating lease liabilities 3,955 4,025
Interest 2,804 1,149
Professional fees 2,237 1,834
Sales, use, and other taxes 3,217 1,825
Contingent consideration   1,814
Other 3,320 9,792
Total accrued expenses and other current liabilities $ 59,259 $ 57,624
XML 55 R40.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Liabilities - Warranty (Details)
$ in Thousands
3 Months Ended
Mar. 31, 2024
USD ($)
Warranty  
Warranty period 1 year
Balance, beginning of the period $ 8,864
Warranties issued 1,545
Consumption of reserves (1,542)
Changes in estimate (200)
Balance, end of the period $ 8,667
XML 56 R41.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Liabilities - Contract Liabilities (Details) - USD ($)
$ in Millions
3 Months Ended
Mar. 31, 2024
Dec. 31, 2023
Changes in deferred revenue    
Contract liability   $ 118.0
Amount of contract liability recognized into revenue $ 35.6  
XML 57 R42.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Liabilities - Performance Obligations Timing (Details)
$ in Millions
3 Months Ended
Mar. 31, 2024
USD ($)
Performance obligations  
Remaining performance obligations $ 139.8
Revenue, Practical Expedient, Remaining Performance Obligation true
Minimum  
Performance obligations  
Performance obligation at time of contract origination 1 year
Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Start Date [Axis]: 2024-04-01  
Performance obligations  
Percentage of remaining performance obligation expected to be recognized 82.00%
Remaining performance obligations, expected timing of satisfaction 1 year
Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Start Date [Axis]: 2024-04-01 | Minimum  
Performance obligations  
Remaining performance obligations, expected timing of satisfaction 1 year
Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Start Date [Axis]: 2024-04-01 | Maximum  
Performance obligations  
Remaining performance obligations, expected timing of satisfaction 3 years
XML 58 R43.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Liabilities - 2023, 2025, 2027 and 2029 Convertible Senior Notes (Details) - USD ($)
$ in Thousands, shares in Millions
3 Months Ended 12 Months Ended
May 19, 2023
May 18, 2020
Mar. 31, 2023
Dec. 31, 2023
Dec. 31, 2021
Dec. 31, 2020
Mar. 31, 2024
Nov. 17, 2020
Jan. 10, 2017
Debt                  
Principal amount       $ 281,500     $ 281,500    
Cash paid for repurchase of notes     $ 20,173            
2023 Notes                  
Debt                  
Principal amount                 $ 345,000
Interest rate (as a percent)                 2.70%
Repurchased and retired amount         $ 111,500 $ 213,300      
2025 Notes and 2027 Notes                  
Debt                  
Repurchased and retired amount $ 198,800                
2025 Notes                  
Debt                  
Principal amount       26,500     26,500 $ 132,500  
Interest rate (as a percent)               3.50%  
Repurchased and retired amount 106,000                
Carrying amount of debt extinguished 105,400                
Cash paid for repurchase of notes $ 106,000                
Number of shares of common stock used for repurchase of notes 0.7                
2025 Notes | Other income (expense), net                  
Debt                  
Loss on extinguishment of debt       16,500          
2027 Notes                  
Debt                  
Principal amount   $ 125,000   25,000     25,000    
Interest rate (as a percent)   3.75%              
Proceeds from issuance of Notes, net of issuance cost   $ 121,900              
Repurchased and retired amount $ 100,000                
Carrying amount of debt extinguished 98,500                
Cash paid for repurchase of notes $ 92,800                
Number of shares of common stock used for repurchase of notes 3.8                
Purchase of capped calls   $ 10,300              
2027 Notes | Other income (expense), net                  
Debt                  
Loss on extinguishment of debt       80,600          
2029 Notes                  
Debt                  
Principal amount $ 230,000     $ 230,000     $ 230,000    
Interest rate (as a percent) 2.875%                
Proceeds from issuance of Notes, net of issuance cost $ 223,200                
XML 59 R44.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Liabilities - Convertible Senior Notes (Details)
3 Months Ended
May 19, 2023
USD ($)
$ / shares
Nov. 17, 2020
USD ($)
$ / shares
May 18, 2020
USD ($)
$ / shares
Mar. 31, 2024
USD ($)
D
2029 Notes        
Debt        
Conversion rate 0.03421852      
Conversion price (in dollars per share) | $ / shares $ 29.22      
Transaction costs | $ $ 6,800,000      
2025 Notes and 2027 Notes        
Debt        
Stock price conversion trigger (as a percent)       130.00%
Number of consecutive trading days, scenario one       30
2025 Notes        
Debt        
Conversion rate   0.0416667    
Conversion price (in dollars per share) | $ / shares   $ 24.00    
Transaction costs | $   $ 1,900,000    
2027 Notes        
Debt        
Conversion rate     0.0715372  
Conversion price (in dollars per share) | $ / shares     $ 13.98  
Transaction costs | $     $ 3,100,000  
2025 Notes, 2027 Notes, and 2029 Notes        
Debt        
Redemption price as a percent of principal amount       100.00%
Stock price conversion trigger (as a percent)       130.00%
Trading days threshold       20
Number of consecutive trading days, scenario one       30
Multiples of principal holders may convert | $       1,000
Number of consecutive business days       5
Number of consecutive trading days, scenario two       5
Trading price conversion trigger (as a percent)       98.00%
XML 60 R45.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Liabilities - Convertible Senior Notes Carrying Value (Details) - USD ($)
$ in Thousands
Mar. 31, 2024
Dec. 31, 2023
May 19, 2023
Nov. 17, 2020
May 18, 2020
Debt          
Principal amount $ 281,500 $ 281,500      
Unamortized transaction costs (6,264) (6,559)      
Net carrying value 275,236 274,941      
2025 Notes          
Debt          
Principal amount 26,500 26,500   $ 132,500  
Unamortized transaction costs (75) (102)      
Net carrying value 26,425 26,398      
2027 Notes          
Debt          
Principal amount 25,000 25,000     $ 125,000
Unamortized transaction costs (293) (313)      
Net carrying value 24,707 24,687      
2029 Notes          
Debt          
Principal amount 230,000 230,000 $ 230,000    
Unamortized transaction costs (5,896) (6,144)      
Net carrying value $ 224,104 $ 223,856      
XML 61 R46.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Liabilities - Convertible Senior Notes - Interest Expense (Details) - USD ($)
$ in Thousands
3 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Non-Cash Interest Expense    
Amortization of debt discount/transaction costs $ 296 $ 226
Total Interest Expense 2,415 2,580
2023 Notes    
Cash Interest Expense    
Coupon interest expense   23
Non-Cash Interest Expense    
Amortization of debt discount/transaction costs   4
2025 Notes    
Cash Interest Expense    
Coupon interest expense 232 1,159
Non-Cash Interest Expense    
Amortization of debt discount/transaction costs $ 28 117
Convertible Debt, Fair Value by Fair Value Hierarchy Level Level 2  
Estimated fair value $ 36,800  
2027 Notes    
Cash Interest Expense    
Coupon interest expense 234 1,172
Non-Cash Interest Expense    
Amortization of debt discount/transaction costs $ 20 $ 105
Convertible Debt, Fair Value by Fair Value Hierarchy Level Level 2  
Estimated fair value $ 62,100  
2029 Notes    
Cash Interest Expense    
Coupon interest expense 1,653  
Non-Cash Interest Expense    
Amortization of debt discount/transaction costs $ 248  
Convertible Debt, Fair Value by Fair Value Hierarchy Level Level 2  
Estimated fair value $ 342,500  
XML 62 R47.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Liabilities - Capped Call Transactions (Details) - Capped Call Transactions
$ / shares in Units, $ in Millions
May 13, 2020
USD ($)
$ / shares
Debt  
Aggregate price of capped call transaction | $ $ 10.3
Cap price of the capped call transactions (in dollars per share) | $ / shares $ 18.46
XML 63 R48.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Liabilities - Revolving Credit Facility (Details) - USD ($)
$ in Millions
3 Months Ended 12 Months Ended
Dec. 16, 2021
Mar. 31, 2024
Dec. 31, 2023
Credit Facility      
Debt      
Borrowing capacity $ 150    
Debt instrument term 5 years    
Additional increase in borrowing subject to certain conditions $ 75    
Outstanding amount   $ 0 $ 0
Credit Facility | Minimum      
Debt      
Unused commitment fee percentage (as a percent) 0.25%    
Interest coverage ratio 3.00    
Credit Facility | Maximum      
Debt      
Unused commitment fee percentage (as a percent) 0.35%    
Total net leverage ratio 4.50    
Secured net leverage ratio 2.50    
Credit Facility | Base rate | Minimum      
Debt      
Basis spread on base rate (as a percent) 0.50%    
Credit Facility | Base rate | Maximum      
Debt      
Basis spread on base rate (as a percent) 1.25%    
Credit Facility | SOFR      
Debt      
Floor rate on debt instrument (as a percent) 0.00%    
Credit Facility | SOFR | Minimum      
Debt      
Basis spread on base rate (as a percent) 1.50%    
Credit Facility | SOFR | Maximum      
Debt      
Basis spread on base rate (as a percent) 2.25%    
Credit Facility, Letter of Credit      
Debt      
Borrowing capacity $ 15    
XML 64 R49.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Liabilities - Other Liabilities (Details) - USD ($)
$ in Thousands
Mar. 31, 2024
Dec. 31, 2023
Other liabilities    
Other liabilities $ 25,168 $ 25,544
Contingent consideration 21,800 22,400
Medical and dental benefits 1,900 1,900
Asset retirement obligations $ 900 $ 900
XML 65 R50.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Commitments and Contingencies - Lease terms (Details)
Mar. 31, 2024
Leases  
Lease renewal term 5 years
Remaining lease term 11 years
Weighted average discount rate (as a percent) 5.60%
XML 66 R51.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Commitments and Contingencies - Minimum lease commitments (Details) - USD ($)
$ in Thousands
Mar. 31, 2024
Dec. 31, 2023
Minimum lease commitments, Payments due by period:    
2024 $ 2,557  
2025 4,138  
2026 4,097  
2027 3,640  
2028 3,422  
Thereafter 30,824  
Total future minimum lease payments 48,678  
Less: Imputed interest (13,774)  
Total operating lease liabilities 34,904  
Operating lease liability, current $ 3,955 $ 4,025
Operating Lease, Liability, Current, Statement of Financial Position Accrued expenses and other current liabilities  
Long-term operating lease liabilities $ 30,949 $ 31,529
Total operating lease liabilities $ 34,904  
Operating Lease, Liability, Statement of Financial Position Long-term operating lease liabilities, Accrued expenses and other current liabilities  
XML 67 R52.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Commitments and Contingencies - Lease costs (Details) - USD ($)
$ in Millions
3 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Lease cost    
Operating lease costs $ 1.2 $ 1.4
Variable lease costs 0.4 0.3
Operating cash flows from operating leases $ 1.6 $ 1.4
XML 68 R53.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Commitments and Contingencies - Receivable Purchase Agreement (Details) - USD ($)
$ in Millions
3 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Commitments and Contingencies    
Maximum amount of trade receivables to be sold under agreement $ 30.0  
Receivables sold 0.0 $ 8.3
Amount of trade receivables available to be sold under agreement $ 18.9  
XML 69 R54.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details)
$ in Millions
Mar. 31, 2024
USD ($)
Purchase commitments  
Purchase commitments due within one year $ 200.8
Bank guarantees  
Bank guarantees and letters of credit outstanding 23.7
Unused bank guarantees and letters of credit $ 17.0
XML 70 R55.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Equity - Statement of Stockholders' Equity (Details) - USD ($)
shares in Thousands, $ in Thousands
3 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Increase (Decrease) in Stockholders' Equity    
Balance at the beginning of the period $ 672,442 $ 577,824
Net Income (Loss) 21,854 8,741
Other comprehensive income (loss), net of tax (128) 476
Share-based compensation expense 8,082 7,027
Net issuance under employee stock plans (14,340) (8,509)
Balance at the end of the period 687,910 585,559
Common Stock    
Increase (Decrease) in Stockholders' Equity    
Balance at the beginning of the period $ 564 $ 517
Balance (in shares) 56,364 51,660
Net issuance under employee stock plans $ 2  
Net issuance under employee stock plans (in shares) 273 33
Balance at the end of the period $ 566 $ 517
Balance (in shares) 56,637 51,693
Additional Paid-in Capital    
Increase (Decrease) in Stockholders' Equity    
Balance at the beginning of the period $ 1,202,440 $ 1,078,180
Share-based compensation expense 8,082 7,027
Net issuance under employee stock plans (14,342) (8,509)
Balance at the end of the period 1,196,180 1,076,698
Accumulated Deficit    
Increase (Decrease) in Stockholders' Equity    
Balance at the beginning of the period (532,169) (501,801)
Net Income (Loss) 21,854 8,741
Balance at the end of the period (510,315) (493,060)
Accumulated Other Comprehensive Income    
Increase (Decrease) in Stockholders' Equity    
Balance at the beginning of the period 1,607 928
Other comprehensive income (loss), net of tax (128) 476
Balance at the end of the period $ 1,479 $ 1,404
XML 71 R56.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Equity - AOCI Rollforward (Details) - USD ($)
$ in Thousands
3 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Changes in the balances of each component of AOCI    
Balance at the beginning of the period $ 672,442 $ 577,824
Other comprehensive income (loss) (128) 476
Balance at the end of the period 687,910 585,559
Accumulated Other Comprehensive Income    
Changes in the balances of each component of AOCI    
Balance at the beginning of the period 1,607 928
Other comprehensive income (loss) (128)  
Balance at the end of the period 1,479 $ 1,404
Foreign Currency Translation    
Changes in the balances of each component of AOCI    
Balance at the beginning of the period 1,761  
Other comprehensive income (loss) (33)  
Balance at the end of the period 1,728  
Unrealized Gains (Losses) on Available for Sale Securities    
Changes in the balances of each component of AOCI    
Balance at the beginning of the period (154)  
Other comprehensive income (loss) (95)  
Balance at the end of the period $ (249)  
XML 72 R57.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Share-based Compensation - Recognized Share-based Compensation (Details) - USD ($)
$ in Thousands
3 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Recognized share-based compensation    
Total share-based compensation expense $ 8,082 $ 7,027
Restricted stock | Minimum    
Share-based compensation    
Expiration term 1 year  
Restricted stock | Maximum    
Share-based compensation    
Expiration term 4 years  
Cost of Sales    
Recognized share-based compensation    
Total share-based compensation expense $ 1,730 1,451
Research and development    
Recognized share-based compensation    
Total share-based compensation expense 2,318 2,089
Selling, general and administrative    
Recognized share-based compensation    
Total share-based compensation expense $ 4,034 $ 3,487
XML 73 R58.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Share-based Compensation - Restricted shares and performance shares (Details) - Non-vested restricted shares and performance shares
shares in Thousands
3 Months Ended
Mar. 31, 2024
$ / shares
shares
Number of Shares  
Outstanding at the beginning of the period (in shares) | shares 2,464
Granted (in shares) | shares 1,019
Performance award adjustments (in shares) | shares 200
Vested (in shares) | shares (1,040)
Forfeited (in shares) | shares (13)
Outstanding at the end of the period (in shares) | shares 2,630
Weighted Average Grant Date Fair Value  
Outstanding at the beginning of the period (in dollars per share) | $ / shares $ 26.19
Granted (in dollars per share) | $ / shares 37.72
Performance award adjustments (in dollars per share) | $ / shares 27.81
Vested (in dollars per share) | $ / shares 25.93
Forfeited (in dollars per share) | $ / shares 23.06
Outstanding at the end of the period (in dollars per share) | $ / shares $ 31.13
XML 74 R59.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Income Taxes (Details) - USD ($)
$ in Thousands
3 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Tax reconciliation disclosures    
Income before income taxes $ 22,750 $ 9,004
Income tax expense $ 896 $ 263
Effective tax rate (as a percent) 3.94% 2.93%
XML 75 R60.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Segment Reporting and Geographic Information (Details)
$ in Thousands
3 Months Ended
Mar. 31, 2024
USD ($)
segment
item
Mar. 31, 2023
USD ($)
Revenue reporting by end-market and geographic region    
Number of operating segments | segment 1  
Number of reportable segments | segment 1  
Number of end-markets | item 4  
Sales $ 174,484 $ 153,504
UNITED STATES    
Revenue reporting by end-market and geographic region    
Sales 27,868 31,011
EMEA    
Revenue reporting by end-market and geographic region    
Sales 8,488 22,947
China    
Revenue reporting by end-market and geographic region    
Sales 64,308 60,747
Rest of APAC    
Revenue reporting by end-market and geographic region    
Sales 73,220 38,744
Rest Of World    
Revenue reporting by end-market and geographic region    
Sales 600 54
Semiconductor    
Revenue reporting by end-market and geographic region    
Sales 120,384 93,107
Compound Semiconductor    
Revenue reporting by end-market and geographic region    
Sales 21,002 21,159
Data Storage    
Revenue reporting by end-market and geographic region    
Sales 18,017 21,514
Scientific & Other    
Revenue reporting by end-market and geographic region    
Sales $ 15,081 $ 17,724
XML 76 R61.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Pay vs Performance Disclosure - USD ($)
$ in Thousands
3 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Pay vs Performance Disclosure    
Net Income (Loss) $ 21,854 $ 8,741
XML 77 R62.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Insider Trading Arrangements
3 Months Ended
Mar. 31, 2024
shares
Trading Arrangements, by Individual  
Material Terms of Trading Arrangement

Item 5. Other Information

During the fiscal quarter ended March 31, 2024, the following directors and Section 16 officers, as applicable, adopted, modified or terminated “Rule 10b5-1 trading arrangements” (as defined in Item 408 of Regulation S-K):

●  On February 29, 2024, John Kiernan, our Chief Financial Officer, entered into a trading plan intended to satisfy the affirmative defense conditions of Rule 10b5-1(c).  Mr. Kiernan’s plan covers the sale of 30,000 shares of our common stock, between June 10, 2024 and May 30, 2025. Transactions under the plan are based upon pre-established dates.

There were no “non-Rule 10b5-1 trading arrangements” (as defined in Item 408 of Regulation S-K) adopted, modified or terminated during the fiscal quarter ended March 31, 2024 by our directors and Section 16 officers. Each of the Rule 10b5-1 trading arrangements are in accordance with our Securities Trading Policy and actual sale transactions made pursuant to such trading arrangements will be disclosed publicly in Section 16 filings with the SEC in accordance with applicable securities laws, rules and regulations.

Non-Rule 10b5-1 Arrangement Adopted false
Non-Rule 10b5-1 Arrangement Terminated false
John Kiernan  
Trading Arrangements, by Individual  
Name John Kiernan
Title Chief Financial Officer
Rule 10b5-1 Arrangement Adopted true
Adoption Date February 29, 2024
Aggregate Available 30,000
EXCEL 78 Financial_Report.xlsx IDEA: XBRL DOCUMENT begin 644 Financial_Report.xlsx M4$L#!!0 ( -N#IU@'04UB@0 +$ 0 9&]C4')O<',O87!P+GAM M;$V./0L",1!$_\IQO;=!P4)B0-!2L+(/>QLOD&1#LD)^OCG!CVX>;QA&WPIG M*N*I#BV&5(_C(I(/ !47BK9.7:=N')=HI6-Y #OGDK7A.YNJQ<&4GPZ4A!0W_J=0U[R;UEA_6\#MI7E!+ P04 M " #;@Z=8[X$)QN\ K @ $0 &1O8U!R;W!S+V-O&ULS9++ M3L,P$$5_!7F?C)/P$%::#557("%1"<3.LJ>M1?R0/2CIW^.$-A6"#V#IF>LS M9Z1I51#*1WR./F D@^EJM+U+0H45.Q % 9#4 :U,94ZXW-SY:"7E9]Q#D.I# M[A%JSF_!(DDM2<($+,)"9%VKE5 1)?EXPFNUX,-G[&>85H ]6G24H"HK8-TT M,1S'OH4+8((11IN^"Z@7XES]$SMW@)V28S)+:AB&GQY=YW<*X M1-(IS+^2$70,N&+GR:_-PWJ[85W-Z^N"WQ3\;EMST7!1W[]/KC_\+L+6:[,S M_]CX+-BU\.LNNB]02P,$% @ VX.G6)E&UL[5I;<]HX%'[OK]!X9_9M"\8V@;:T$W-I=MNTF83M M3A^%$5B-;'EDD81_OTV23;J;/ 0LZ?O.14?GZ#AY\^XN8NB&B)3R M> +]O6N[!3+ MUES@6QHO(];JM-O=5H1I;*$81V1@?5XL:$#05%%:;U\@M.4?,_@5RU2-9:,! M$U=!)KF(M/+Y;,7\VMX^9<_I.ATR@6XP&U@@?\YOI^1.6HCA5,+$P&IG/U9K MQ]'22(""R7V4!;I)]J/3%0@R#3LZG5C.=GSVQ.V?C,K:=#1M&N#C\7@XMLO2 MBW A(5M>5 TR M6'!VULS2 Y9>*?IUE!K9';O=05SP6.XYB1'^QL4$UFG2&98T1G*=D 4. #?$ MT4Q0?*]!MHK@PI+27)#6SRFU4!H(FLB!]4>"(<7K;YH] M5Z%82=J$^!!&&N*<<^9ST6S[!Z5&T?95O-RCEU@5 9<8WS2J-2S%UGB5P/&M MG#P=$Q+-E L&08:7)"82J3E^34@3_BNEVOZKR2.FJW"$2M"/F(9 M-AIRM1:!MG&IA&!:$L;1>$[2M!'\6:PUDSY@R.S-D77.UI$.$9)>-T(^8LZ+ MD!&_'H8X2IKMHG%8!/V>7L-)P>B"RV;]N'Z&U3-L+([W1]072N0/)J<_Z3(T M!Z.:60F]A%9JGZJ'-#ZH'C(*!?&Y'C[E>G@*-Y;&O%"N@GL!_]':-\*K^(+ M.7\N?<^E[[GT/:'2MSAD6R4)RU3393>* M$IY"&V[I4_5*E=?EK[DHN#Q;Y.FOH70^+,_Y/%_GM,T+,T.WF)&Y M"M-2D&_#^>G%>!KB.=D$N7V85VWGV-'1^^?!4;"C[SR6'<>(\J(A[J&&F,_# M0X=Y>U^89Y7&4#04;6RL)"Q&MV"XU_$L%.!D8"V@!X.O40+R4E5@,5O& RN0 MHGQ,C$7H<.>77%_CT9+CVZ9EM6ZO*7<9;2)2.<)IF!-GJ\K>9;'!51W/55OR ML+YJ/;053L_^6:W(GPP13A8+$DACE!>F2J+S&5.^YRM)Q%4XOT4SMA*7&+SC MYL=Q3E.X$G:V#P(RN;LYJ7IE,6>F\M\M# DL6XA9$N)-7>W5YYNTB42%(JP# 4A M%W+C[^^3:G>,U_HL@6V$5#)DU1?*0XG!/3-R0]A4)?.NVB8+A=OB5,V[&KXF M8$O#>FZ=+2?_VU[4/;07/4;SHYG@'K.' MYA,L0Z1^P7V*BH 1JV*^NJ]/^26<.[1[\8$@F_S6VZ3VW> ,?-2K6J5D*Q$_ M2P=\'Y(&8XQ;]#1?CQ1BK::QK<;:,0QY@%CS#*%F.-^'19H:,]6+K#F-"F]! MU4#E/]O4#6CV#30,9FV-J/D3@H\W/[O#;#"Q([A[8N_ 5!+ P04 M" #;@Z=8.1QF?\(% #!'@ & 'AL+W=O,V81*]A$,6WK;64FYM.)W;7+*3Q M!=^P"+Y9D?M0:#M)G4S$<\$0&?L2F L5) M&%*QOV,!W]VV<.OXX,5?K:5ZT!D.-G3%9DQ^WDP%W'5R%<\/613[/$*"+6]; M(WSCV$0%I&]\\=DN/KE&"F7!^3=U,_%N6Y8J$0N8*Y4$A8\MWK:L6\MB2)H%\X;O?V &HI_1<'L3I M?[3+WNUV6\A-8LG#0S"4(/2C[).^'BKB)("4!9!# 'D7@.V2 /L08*>@6,_=!+(B$8T\-(ZD+_=H M$F7-0U5S&\5K*E@\Z$CX-173<0_*=YDR*5&VT2./Y#H&58]Y;^,[4,J\J.18 MU#MB%'RDX@+9^ ,B%NEJRN-4A>^1I8U^4QH[KS@[E;-+Y!R^90+]-5K$4D!; M_%M709E"5Z^@.NA-O*$NNVU!#XR9V++6\,P'9SV*Y)O6@E M\_V&Z4C-X=AJ?](A&:,:(O5RI%X]I$\)%9*)8(]>V(8+J<,S2TF1Z"K%,48U MQ.OG>/UZ>%,F?*ZZMH=@@- FSZR4=[O2?F>,;\AYF7->UFR9@L+Z,@0W1KG.T MZSIH+VSEJT$4DOA$0VT+->M\&8^=9S1YFLU?/C^.G^8SN'8N=+1&G8:TV"JF M6JL.[R1RN8 6FDZP']!,0K=$7""')Y$4>_CTM)50H7X_UA&;@YHBG[@+7 =Y M3E_1Q(-NZB]]-S,6Y6VY0A+C-KF^NNY;6,MK#&[*2PI>4H=WY'F@'G\X7J"/ M\!YZCO1Y-4O.F0#?1P-T+\#P:IF- DV9"R.$C=;C/\R.NH/V/.>[2,MKEIL& ML/C8@EW7HI[#!>'"!F&SD7F/FO?=J>!;/W+U^35K/GW5@I[#&^'"'&&SI7D/ M.N6QA";XI[\I'Y[,BAA?6;:6]!PV"1<^"9OM3=I:1[ "+@$ M"UN$S5[F(W@37 MP M.Z2P.Z26W9F%- C071+#U[&^W9IU2A?6YKBF?(7+(;5S*3 M@S=/]ZW1D#_!0.\)6B)5MS9K#FC(6 M%L@V&Y;WC(?-Z')*L]PG;1[-04T9"_MCF\W*" "]##*@VC&F0J!T5#7'_5^P MSLDAH9KPTK/3&+EJUS$[+\R?YN>SH_14LE.\GAWN/E(U7\8H8$L(M2XN8< 3 MV7EI=B/Y)CUR7' I>9A>KAGUF% OP/=+SN7Q1OU ?FH]_!=02P,$% @ MVX.G6+BQ1EW&!@ LAT !@ !X;"]W;W)KATR[XDDGQW?.Y(WO-0.G^0ZFNU%D*CQR(OJXO96NO-V6)1)6M1\.I4;D1I M?EE)57!M;M7]HMHHP=/:J<@7%.-@4?"LG"W/ZV MWHM:.5^)2YG]EJ5Y?S*(92L6*;W/]23[\+IJ$?!LOD7E5 M_T4/C2V>H61;:5DTS@9!D97[__RQ*43/@7@3#K1QH"]U8(T#JQ/=(ZO3NN*: M+\^5?$#*6IMH]J*N3>UMLLE*.XVW6IE?,^.GEY>RK&2>I5R+%+WG.2\3@6YM MN J=H"^W5^CG-[^@-R@KT>>UW%:\3*OSA38C6_]%THSR?C\*G1CE U>GB)$Y MHIAZ@/NEV_U*)*T[.W1?F'S;I&F;-*WCL:FDMTJ)4B->52;/,RB??0 /#F#W MUEFUX8FXF)G-4PFU$[/ECS^0 +^%LGNE8 >YLC97YHJ^O.35&IE90XF]$-^V MV8[G)GEP%O>A@CJ4;0"[)0E9'$?GBUT_'\#,C\*(M&8'2+T6J>=$^DE46F6) M78@6*X1O'\#O#+,!(7SA>!8]QH9U'%M1CX481A>UZ"(GNFLSQ:66 M*A,@L@@:DP9#:( 9"P/FP]CB%EOLQ':CQ(9G*1*/AL.+&W">YX!CN1?Y::YR\ V83ICQ^:[A)[ YB0'0YH.+$T M28\0R9$2&XVD]-,<;0P;ZGE=8MLW-W;73VZH)NK!5B$^C<,A;L@N\OR)%D4Z M3B-.&EE^-*BYSLI[E NC:Y"R N9$KDZVYL91;PHLU"#RA[ !,[/5P@G4'3L1 M-SU=EYJ7]YEI50W&Z0*S$0*/8G^T+@ S%GL3^XYTY$3<[/2;E.E#EN<@M#'G M4.+%P0C;4;M#,P'(Y6(V!E\$V ZVB)N'EIWZ,5/TZ;B+1BZ1KGO&[+,^T(2E0OQ(GQWVO@'VM:(=)=Z1'W*S7"IL-?[*J M!DQXS%N^APD9SLS8S*,L8O"\T([>J)O>#$2U%4YB[DT9>.(8$YH?TQXO-&<) MP"P,Z$0+H1WM43?MM9KL&,PQ?\4L(D/A")B91H-[:OT09^_HYJ:YZUZ'[T\:J;@#>9"."8X&'AVV M2/?0_S:UCBZIFRX/Y=ZQ-07PHI'[X[4/\6>$V=3N[?B3OA)_TC$O!H; AS@! M*[^W^ Y1=MQ)W=SYQ_&U,>9%ZD71J M"=J$73]$3[1B4NAFT@R@'P)W1ZO4?>;;RY)C&($SG4^"X=L1T,SWICITQX+4S8+[+74, M(T2#?A@-%0IDYP=^/%%)UA$APTZ!X%-,##\IM./Y5KQ%/L9SC#&JUEQ9>;#5:ZFR MOT7Z%I7R^6E6559$U-IAJRMS-$K-#CH%R^<$!">,P,K]]T"'1>NHG+FI_%(6 MA6&]J8H16E=LJFI^, ]8./="YJX>XAI]X"I9MR^@:POCS@)O3A@Y[GXE$E'< MF08!OX-N)F0L./S16R'0:*(SL-XK7K>.>)>FF140ICW8MT,G68D2OLE,NP"! MC@4$(7%@B'0(%C"T]?,F7K"Q3ATPMSHP:GE;;//ZHT,J5EF2@73&QGQ_XA-L M.OX0*63(* FFVEFG#)A;&?21-G)>%F8CK.V7K)UH! ,('GK)&PX)#;(*\,1) MEG52@;FEPIXK*J 7@U#'!S7[-=/TC_NLK(R461E/?!J:$JC]!\+]C9:;^AO;G=1: M%O7E6G #W!J8WU=2ZN<;^]FN_4R[_ =02P,$% @ VX.G6#:;0A'4 @ M^ D !@ !X;"]W;W)K8,"M-FK:%2!->*TH8+ 22=5EB\7 )E&]FEFL]-ER35:%,@YTF%5[!#:@? MU4+HFMVKY*0$)@EG2,!R9GUV+^:N8Q*:B)\$-G*KC(R56\[O3.5;/K,<0P04 M,F4DL'ZL80Z4&B7-\;L3M?H^3>)V^5']2V->F[G%$N:<_B*Y*F;6U$(Y+'%- MU37??(7.4&CT,DYE\X\V;6P86RBKI>)EEZP)2L+:)[[O!F(KP0U>2?"Z!._0 M!+]+\!NC+5ECZPHKG":";Y PT5K-%)JQ:;*U&\+,9[Q10K\E.D^E<\XDIR3' M"G)TB2EF&: ;(R?1R0(+8*H 13),3]%']![92!:Z52:VTKT;#3OK>KIL>_)> MZ>D[%A/DNV?(<[Q@)'V^._T*LC[='Z;;VG-OW.N->XV>?[SQ,6^M6# N9M;: MA:QP!C-++R8)8@U6^N&=&SF?QIS^)[&!;[_W[>]23Q=ZF8 0VK2>6]G=&:JP M0&M,:T GA*&<4XJ%1!6(]DN?CHU&VT7<=&$VBG7J3!PWL=?;+O<$#>B#GCXX MCKZ=C0C7JN""_(%\#+?5#+=(0L?\G@'O#1L@ASUR^"9D(F4]CAN^X'A.NBMB M !GUD-&;(/7&+Q5F.6&K,=)H+^FNB %IW)/&.TGGO"SU]O\/DS<^9/+N"1J@ M3WOTZ1'H3U-VQY8Z?3%\KN_YR$461'P>Q_PQX M+-"/ M=_991=Y^E(?JL6(.__ZRE_X%4$L#!!0 ( M -N#IU@/FKXTYP0 ,\3 8 >&PO=V]R:W-H965T&UL MK9AM;]LV$,>_"J$50PLDL4@]9[:!Q%FWO,@:).WZFK9H6ZA$>B1M9_OT(RE% MLB6*6+"\B27E[O2[(WE_BM,CXS_$EA )7JJ2BIFWE7)W/9F(U9946%RQ':'J M/VO&*RS5+=],Q(X3G!NGJIP@WX\G%2ZH-Y^:9X]\/F5[61:4/'(@]E6%^=^W MI&3'F0>]UP=/Q68K]8/)?+K#&_),Y+?=(U=WDS9*7E2$BH)1P,EZYMW ZP4* MM8.Q^+,@1W%R#70J2\9^Z)O[?.;YFHB49"5U"*Q^#F1!RE)'4AQ_-4&]]IW: M\?3Z-?IGD[Q*9HD%6;#R>Y'+[QF?)U7\+Y2?G"T8%*XL<2Y*#9ZE^U!A) =@:?-D1 MCG6M!;@$WY[OP,X==BAU=DYJDE+ @_$&_^\T\P]G^QY?Q.PFV5^'/7@+%8P3!,[6]RRQ4ZVWS@3 NPX6Q?2AA8/7II$(/Q MI")BOMH"U>:45AR4".[T2K8EG0ZJCK(X1+VQL5@E48SL8Y.UF)D3\UF)HAJ9 M"[ A5(U2>6%X<:[DHQ!2#]N!V)"S(4R8^'X/V6*%8C0RG:#?Z9#OA+ZI&)?% M/Z87ZO584(GIIEB6!& AB+3+BC^ @6D&>\06*P0A'"$^44[H)/XBMX0#UE\( MX&-!5ZPBG\R"L%+# <\E2J/^NK69I=D(->JHD9/Z*Y.X'%*+<5HTP(B"(.EW M9YL90J-5[J03.G7II-'49;4B!I8YZ8?]'FTQRU(_'B'LI VZM>V>2J)ZC70! MAH,W!P$:E'!HA?PD&.'K! ZZ%:[E:X;:"CC4KTL4#Z3$:I8FT0ABIW/0+73W MIG)@2=1W"6GJ""1^L2LR'"H:4FVSWZ@L9ID_MEV G?!!I\2\LBHZ9T&3PG4A!MTKIO99C*J:#;12":328BT.S- G'5G.G3#!S;AN:XJDU M#=1%I5J]^:"P;AN@4^7>NF]XKVCGWR.=O"&WO-UB4:RT-("CU6IL:X>J=7HAITZ^=7J]5[3S$G0JB=PJV4VO.F/[ M( WU+XJR..V/DL7,CZ*1G0?J=!*Y=?)T5KDHARH8^TG<;U 6LRA+H[Z:3TZ. M1BK"-^;$2*CFLZ>R/D]HG[:G4C?F+*;W_!9>+^JSI2Y,?=3U@/FFH *49*U" M^E>)8N+UZ5%](]G.', LF92L,I=;@G/"M8'Z_YHQ^7JC7]">X'5L9AMH]^MW M3D+&2XHZB2^)[=P]?IZ[V'>#M51/.@4PY#GC0@^=U)A%WW5UG$)&]:5<@, O M,ZDR:G"JYJY>**!)[I1QUVLV.VY&F7"B0;YVIZ*!7!K.!-PIHI=91M7+"+A< M#YV6LUFX9_/4V 4W&BSH'"9@'A=W"F=NA9*P#(1F4A %LZ%SU>J/>]8^-_C! M8*VWQL0JF4KY9")K!6/@W (AC=\EIE-M:1VWQQOTS[EV MU#*E&L:2_V2)28=.UR$)S.B2FWNY_@*EGK;%BR77^9.L"]O0=TB\U$9FI3,R MR)@HWO2YC,.6 ^+4.WBE@[?O$+SBX)<.?BZT8);+NJ:&1@,EUT19:T2S@SPV MN3>J8<)F<6(4?F7H9Z*Q%%IREE #"9D8?&&*C"9R1L8RPQ\CM1E; ;D1L1]7,\_S21K0M@L4%0 MOX$]WWV]H#$,'433H%;@1._?M3K-CW7J3P2V$XN@BD5P##WZAM=1^0.=?Y5: M?ZA36T!T<@A[^:PBK]5M8R97VS(.K;IAT*J,=NBU*WKMHZGZ;E)0)-[)"BOI MR>6@3A,WZ9(:5@O"H@G%* MQ=SF#Z]/I4#$+\0H*C2G1=U(?N&MFA_%.M+A(6G?WR-]:-.II]RM*'>/4GZ0 MAG(B_^/>3>\KI[Y ^-@O 5^KV*?N\-].N(U['LU1SST.OLT3RTZJ'9 M'D]WJ^YEH.9Y.Z"1R5*8HFY4JU7'<947VKWU$78B1>/P#Z9H8[ JS)G0A,,, M(9N7(49.%:U!,3%RD5?7J318J_-ABMT4*&N WV=2FLW$;E#U9]%?4$L#!!0 M ( -N#IUBXD<%(,P@ "(E 8 >&PO=V]R:W-H965T&ULM5I;;]LX%OXKA'>P:(&X%B^RI&QB('5;;!_:"9J=W6=:HF-N9=%#T;GL MKU]2DB5;O"0I/"^-K!Y2Y\;S?>=(5X]"_JPWC"GPM"VK^GJR46IW.9O5^89M M:?U![%BE_VS^J=9+1H%FW+&8JB^6Q+>3597#7W;N7B2NQ5R2MV M*T&]WVZI?/[(2O%X/8&3PXT?_'ZCS(W9XFI'[]D=4W_L;J7^->MW*?B65347 M%9!L?3VY@9=+@LV"1N+?G#W61]? F+(2XJ?Y\;6XGD1&(U:R7)DMJ/[SP):L M+,U.6H\_NTTG_3/-PN/KP^Y?&N.U,2M:LZ4H_\,+M;F>I!-0L#7=E^J'>/PG MZPR*S7ZY*.OF7_#8R483D.]K);;=8JW!EE?M7_K4.>)H@=['O0!U"]!X ?$L MP-V"QG.S5K/&K$]4T<65%(] &FF]F[EH?-.LUM;PRH3Q3DG]OURO4XNEJ&I1 M\H(J5H [I?_H&*D:B#58TGH#ON@XUV *_KC[!-[]]A[\!G@%_K41^YI617TU M4UH'L],L[Y[WL7T>\CP/@V^B4IL:?*X*5IRNGVG=>P/0P8"/*+CA-RH_ PO M (H0<>BS?/UR'% ']_[$S7[8Y\_!:6LIMN#W'9-4\>H>W)B$Y8HSI]?:78E[ M5W.6+^L=S=GU1!_6FLD'-EG\_6]P'OW#9?*9-CMQ .D=0$*[+[[KTL.K7&R9 MR\QV[;Q9:RK,PP+!--9Q>SC6WY9*$P)[H1.]XEZO.!B8F^*_^C2UR:V$KD"Y MJ')>,E#U"IO[YE=N8KB3XH'K% 6K9_!N7^L+7KT'H@\G[<-YZ3(T/F<\S[39 MB=_FO=_FP7A^8GK3G-.VZ%8%H%LA%?]?<\-E>;M=?!2\.8GB480=0BB9NR.< M])HFXYH2-%+0%H*9YYADO8)94,&[#95L:H"Q %I#X[\V] %?9I8: M:92.=;6%D@@E;F5A-*!7%%1WN:'5/3.8I(^S.9?Z?)O+6A]=Z4W1;M,3[\[1 M.$?#C_[%8P>/@!F&D:0QK3:V'56=NF:Z@)ES6'*ZXJ6_ G7;GZD$G6NW4V>@ MP1DH&.>;/!=[4[IU+6+\@:YTX39.,%&7NA1WCG'Z =G!AIBDT3CH3[4B*T[%R#C$4)W/L46] :QB&ZUO)=I07A^/= MII90&R8U^]25J@JZEM@NRZQC9 M-29+Z-!_P' 9A;TB)'7WN\X'FN=RSP1RG MUK%=-I,Y@F.]'6*88$]]A0.>PC"@+@\I>W2 G6K:&#E%!$'+O[9<'&/B47, M4QA&TZ]' #4^=9W'+PQ;ME#FTWJ 5QC&U]]-YOKU^DQ&MJ)%&?9&'E<8O.,>*@F&D 3 MO02:?^YYS1OZIOOYU;[6 KJ8U\T!,;>:=*1&3(Z;\'#8'%.,()YZC MA0:016&0O94B9ZSH.OS@ M;%W8BGTSEPN0!F3C*HJPY?&_HN=% TBC,$B_4*MY7_7"M1K9V(RBQ.HT'&)3 MS4@\01H@'"5OJM5?>$6K_!6U.L@,WGSHS[3;J1,&1H#"C."'#I3DN1EOUDKD M/PVC 8]<;3:B++0OW!YP, !(,+$JMZM-CR-?71BH @I3A:6GF37,R]0$I\XV MXD]A"L>=1/C)OQ@.// ''&[8^\+QKH.@<3C>M[DJ=MW4@BR(14W M-/J[4)Y!\%G;=NR@%BB"/L3% [? 86[Q0H%<]Z4F7""QJSDGJ7707'(H(=XH M'8WKP\SA\WK-\B8Z["EOATGZJ#&0=],7G8,M23+#!G/!-%EZT'CG 6;LZN?' MLS"'$(P\E@Q< K]J\"Z9.1'O"M9>O6]F8UKQ"TO]B\8H.=1'(^"TR281,$;1 M>&KO$-.Q1$GLL6P@&SA,-I:O5Q],P8K=\ZHRJ6<8"9-<.)DM=K3W<0:1E7DN MN9@D'G3& \7 +\P!WF05,V.9H#TVAX )P9QKMU.'#,P#AYG'U\-K"#-@ M<-Y]KMU.:!2I"WSQM,K2_W18.W9NSY:[/0 M[L''KUKC;)R"Q"81<11["B 9* 1YF4(H2:MZS>2AY363\F?S'E;3"EWKU/-% M0^Y42_]TF=SYZ&_X86\.N,TW"(X\IXX,;(.$V4;SE:*!W>Y8B5HEJL MB6//0=]\A%.#)@/; M[S;ZN_V'/C?-YRVC^Q_AY;+]7&?8IOUZZ!N5&L1K[8*UWC+ZD.A R/:#G/:' M$KOFFY:54$ILF\L-H[I-,@+Z_]="\^ONAWE _UG4XO]02P,$% @ VX.G M6$.@DO^!#@ *R@ !@ !X;"]W;W)KO=Y,V$S?MW4>(A"0T%,$ H&7EU]^SNP!( MR;+3SMQ]L2417.SKLP^6?+%U_D-8&Q/5W:9IP\N3=8S=\[.S4*W-1H>IZTR+ M*TOG-SKBJU^=A[;1MCUY]8)_>^M?O7!];&QKWGH5^LU& M^]VU:=SVY?ZY[XA>95K M O]56UE[,3]151^BVZ2;H<'&MO)?WR4_C&YX-GO@AGFZ84F>ERUN"^^NM;!!N66ZJTWP;11DZ]>G$6(I@5G M51)S+6+F#XBY4&]<&]=!?=_6IMZ__PPJ%;WF6:_K^:,"WV@_51?G$S6?S9\\ M(N^BV'G!\BX>D'=C5ZU=VDJW45U5E>O;:-N5>NL:6UD3CEDL I\<%TC%\CQT MNC(O3SIRG;\U)Z^^_.+\V]GE(^H^*>H^>4SZ7P_+XV)^<=&H<_7E%\_FY_-+ M=50J7YU=7*K?U@9%4KE-I]L=.:=O=5_;:&KUVK4!GJHU??G!MKJMK&[4#208 M5&ADH;\;4SFUUK=&+8QI%=S2:8\;;,MR?8W;#/([KM7[Z4/5S?7_/'\\NOCZU^[FH/.=LZ?SA10 M#-M$X^U&+MA5T8YAH:U$QPAVV#='WC!]!1:?>]0W\.3N=G9/!-Z;JO8U( M'[[K^[MJK=N5P:Z;C0T,6^_,JF]$\,WIOZ>LI:^A9+.;T X[53O5NHB=JJ:O M$8"F(=&R^;Y62^,-[!D M@^H["O$Q!>):1[6%@$Y21\+%(>?L>GH9U,:%"-TJ7(:PML?FQ]28*N"I6O8> M>_CQ)A-">?P$1^\+_GSZD7]^8=^04 ,)R:&L)AES)0J],YWS4<$B G6*Y;_8 M<;1D9[17A@!,?0S^S64I5;CE#]>16/< M%JR5=($[CU8_]H)4JC8;=XC3(@659N@3P>0 MNB[!)"&%7BY!NUB8WA NA\$UJ2"/(Q0)&_<@!CQ*][AV_8I1.>SM#J<3*^/ M#7H6U3^T;MN8>L6%0<5 1IC;T6:BM8VX>X>6AZ*,9LJ>ZF= Z@@]X"'0O M\%JT%D*KI7>;0[6&X+RCO7J#_Y4# ]EKN/F:)>?PY4^PH^]2?42OVT [D.9@ M5]Z5UM!A3TM&XT.-_J2 '$1!+/HK(L35Q-R1 9:07:(@P0'*$BF66&K'(,ZR#/),KG+$5HQ MW70>KU,(O8!DT2.?>R@D&M3(O]FZ8T0UJ) M\X2ZU=[J17.@9,%:3\&G%DV\ E()^1^XAWRIP>4$E(21A,9^?S\.2R]J(! Y AMDNP6C M@,T-$L"31\(D=9Z@PBZ@5.ZL%X9A'$+]VBL2LM M54T&4OX7FZ4%N"&$:@UBSLF47!^ ,PV8%5,Q5S'^PNF HD)#^ M9X#@5HXCNAP(]@L^AS64D",?6.WCP14NQ,$@""2TJ4]U0\H$TS34I+C8A"9) M)CRX2.PLV5DC]@]@WU/&4G9*HX$;*CI =$U/_=6O*, YH_V M4=(:T&P)0UK)TFW*F8EW2N..9"8.H"GR0NU3F9(KF_5)2 M &\.MJ=>*26U!SN,UW;#C'HYPOW"$B:I7]$*&P?4)A8RAKC,:87@%RZ=<*3X MJ(/_3A.([Z@VP$+9?#CXUH9[(%9NE!0[8L]8P8I(DVU':3B$.9]LX=2F/KZS MY!AQJK*X;QD?R5@@IR'. ?!H%+(KTIV5J6%N2E2.B5@>S(&2>L#4@"-)Q8RA M2S/!Y*UD(\*?$F-@J8?N0.2YB4]$$_!SS6F3N/$>\ZI=U9,6EIM'0KQAKVPC M7Y9;&8 3!20ER_""SMW6>*$/"-(BR,($PNBX9Y]2\IQYNR;A.QK.2@$ M>6V@A$GZ# XG066SL+8=F3!5/UE8Y2D&5/9, ([XTX_< L+?V*I0J\_&G[&J M*)L;Q&$B!Z#2H!\=(IJQT+V(#EVB%+);_&EX$$QLTZ"OA^B3BGE';^D(IG, MAEP8E^!Q.\@$@(!%.=?W(Z:,37W7\UFF)$J.5II#'.;H=);DRRUC"H. MS6!C#$O83YK)9\X03-OOG1?VIA,Q3?1GFO'F..!*UDHZ%9.!\95)?1K+ M6\=T%X[C9DHJ06W8LX,DZDED1"8^N2B.NSH=9NB$+"C0FFTV"I;3-[2/IA00 MD9,[*XX>EM$DROGR@]"Q/16S7XZK(8>.<8:!TU.G?"#1_C=Y-DR$'LZV20E3 M;A& !U<)O:).F[D(TL,?]KL2UB"E/A8E]W*TW2*FF!5ST1")FE7T[ M1K?Q89[.F.R$I%NJ25_+$&I\],$A(*IRR!_-EZYUP^)OZ#%2># 3AFB4^AS1 MR#T6.3I6W!+ $?L2JEO&&^C>74J9HB*Q(XKDP%0?P)I!:IEIC^Y)6H3]EO)9 MN\I!6L@.0^8#9)IM+76;K3;M2F>V=Y]^CO(H[CKII *U@3)M. FR7=B]@.B1 M!RB\#MX*)2<$ZR@'[W&U?LI!SDW%9C15LS5J9V0G"S[)LE MD(AG#?S(GM3(ISQNK'TPRFB"_U=DBL"H&6[L(F M("G)74:<1>>5'(7<"K=YHID>2>3!WQ@%;!G9$'JE42V3)XK'1M=F6DIK)^#J M!1F'V>B"9DT4 R#IPK9EVC,PI2C/71.XRY;Y6?@(L,9 '-3\V>QK>:GC'$(WQ":'&9.LYOS+ KY#9VT<'?=I4B&_;8R6'V @!"PM M@PY6A43RF0^'E"MUD;"7GY3)].9 @E/)I55OA:A0A^?G@)QA=-*"%"0OM1XB MK2O;\ME!+PF7RO/>\V\FR3O\\",]$)7XEY'^WQ+U).$F%H,_:(I*:H@;JN8# M9DAJ#T,][J?R-)-9"1UB<;0L1E(BI0?Z?^UY[;&W@\Y&+W !T%;\FAH)16K) MNUSEU_(FW)6\ #8LE]?HWO#D- !REKAU-GWZS8GR\FJ:?(FNX]?!%BX"/?GC MVJ"*/"W =7K-)'^A#]"+6U59*0IXT,Q4><[U[AZDVMX-HD'3\%&L,TL-P\5MR=?P M">S?Y8/&KV&+DHH<"B-4P32L[@8OHYO[,8UW _X1L#6==T:>+)7Z0A_OTKM! M2(1 0F()@>-C Z] 2@)"&E]KS$$[)1EVWQOTM\YW]&7)#;Q2\E^1VNQN,!^P M%%:\DO:CVOX%M3\3PDN4-.Z7;?W8>#Q@266LRFMC9)"+PC_Y8ZU#QV >GC&( M:X/8\?83.9:ON>6+6ZVV3--H1*,7YZJS1G*BH*!\LAI[!=K9Q;LB43FP!]#L MEZ#X#-"(O5>%S0Q[4Z20'MH/D53++&Z8W<<7 M =]S?<5&4<#B,!Y?P!NUGHXL'NN1$)$WY4B:., MZQ:&)5PFE>064K;";[B0?"F!6<42[Z,SSY1,09MO MIUD9["609DY:^*?4*65EGL+L,F'PM1(;+J&P3XKQ&=]3$@1W+0:K%6YC!->U M4B7M;(:HEI5.,MR=VNFL2KXP'.WG.24\2L;+ M4HJ$NST4YR>*%K=_4^E=/4L.-KO &-%<\2@2J%&K0EC' N>357J6PX%T8M7( MTZ)9KM> 2!FJSI8 M,EG C:0!DQIK >53$]T-E :2J6MDY]BO.4^EH"BU8ZB M2M0/1;)KX_)6%%S*7> &X%(J>;%K'/$ )S2H$TL84[D,K4KT"]$Q6TPM+$E" M:Y94\9/7V5?WGXU199K4$:OG'I/&=:/2T,QJ%WWB,!32?>(..W&Y@B^SF@3F ME %K:35Y(1JJF+X5$$<"1"I+U*/AF'"3D?+>W">.A-N+0^#PF( QG9PYE$KAY^E)OT7$*_:R*V#CD"KD4=;5+&H];<8M MJKTC2?;:+I'+=_A_3OO@:?&;LO+9*9*7E>5^K\*)_&9*LI[-Z28S;:8!L\:? M+(!.%@S/!4G6'@R:M!VYQ,$HK93$@Z:Y:1G\JN?G2]3.&3G*CNYQSQ].;U49 M= A7#D6SM!U%?)S,GZW!ARK'4F.5_G%7/^R+:-/T.XNC8#X9=QKFP6P<]6S? M%1:K"*XN>,0_"H9B8%0B7*'>"IO5Z\$*2L#"9=8QQ"0:]]JB()[-+A%]LMIW M/(F#T73>:8C"((SF/RS;N>=K*%1."_IGQ,:?RWKGBQ,'JE;.27#=<7<2!I/) M=0_WS;X^8U"PS%%1.UKMAZ>&8X3K41]U-)GTY>B7P_,Y,<*DV\=]'ER/X]. ME%[?(Z2_+@$Z>'I]C?E9&[+,YO.H$@CZC_L)I)#NPFCUE M];.>#V57Z%[%X8C;0O9VVZB_ST9!- [/,VSK MIVHJ)U&C:NSJ?0[[6ME/XE_I2_,_KK=Y!M.P[V7]//5_=-BY+, *LG97(L87 M=G]OT+:VMRXO_67#?KB_LL%ZMQ98TR6LT#2\FDT&3/MK$/]A5>FN'I;*6I6[ MUPPX;L\T /M7"G6K/VB"]BYJ\1]02P,$% @ VX.G6/P"1X,P!0 P L M !@ !X;"]W;W)KO1\C+N?7'+2]L&HVO^XLBW5:7<[H:-W5Z-YJ/]QE==E$$VILO+1A5\ MR^'/YHO#:CJ@Y+KBVFM;D^/UU>AZ_O[F5.['"]\T;_W1-XDGJ;5WLO@YOQK- MQ" VG 5!4/C;\(J-$2"8\;W'' TJ1?#X>X_^4_0=OJ3*\\J:OW0>RJO1NQ'E MO%:M"5_M]A/W_IP)7F:-C[^T[>XFT)BU/MBJ%\:ZTG7WK^Y['HX$WLV>$$AZ M@23:W2F*5GY002TOG=V2D]M DX_H:I2&<;J6H-P&AU,-N;"\:3UVO*>5K5)= M*Z'JYZ5"2)U 6]-G6H?3TLK)OD6<#/RDUH M,1]3,DM.G\%;#&XN(M[B?[K9H9P^CB(%\MXW*N.K$2K L]OP:/GRQ?Q\=O&, MC:>#C:?/H?]K&Y]'^J,"FQV5;'(D:-VN47"M8T=V M3=)*=*8,;51C':JFL5Y'4UZMOGUX3=SHH.YWY'<^<.6A4@7B6J6&R6NC,]S, ME$MUSO3J5J]>DVH:;$=W/.DZ&AE+W>F,-ESJ#*)H,W<<)O1'J7UG>J\52[YO M!(NC#+(.#A":'0?7T:1KG$7@BEVAZV),)8K\38' AI)@!S$P&_2H<*2+ MT:P\FH(7S_<\Q7B\OPZXWNU0;II19-&6F1>7L/8&_WAJ=*S%PC;#5F09[ M/F!#M'FP4F<<[\HET73DWX2NCYR-%]9*.[!O6@C9H QP3\[.)Z?H*<;@UIBV MX*P\6'*RF!U.8PR5+TG5.$G.)_,')ZA]L",LB.$(4N?A9,@K(:5I75:B?Y(J M'$, M@IQL%Z^ .87%G8!4U%F!$HP?^"8[A+/2ZIQ@90-RA4<_#@RW.M+ M9D_I U\9+,/4%$76B4_(NHPQX7+*6R<.Q^3H=7]4KGZ#F2R2VN:=_S]L2E6L M;>MHQPIP:AW <,Q&@VH%X#[39.\HV\8P@"!B-.[K@]^@MXL.L!SB*M5QG!#[ MG@)2=!4S78"/$K57]51Z48I^Y+TN:C&N<395*7H%N/61Q5Q[9 NDI!-9%S.# MD4E[W(V"UZT?.'H\"6-AH)>TD0(5!QV_6<%=A$]7K>ELJ6S.1C3D#-HPJ+OB MK*P/9/2=9 >81H+ 0]!UG*TI'X([./Y#3&/ _ -V*E8>_;6#$8('D$C)&MTQ MEEC3XKRV@6PJ$ROVU+[-=#TKDA7*5K3%L2;U0+^BW@P&R9$:L#V0!83KVQ4A MFETN#63'+OI8F-M&\@?5!7/V(1=/_T/ 8_1@I'4AACRF[9C:@+#_O4]YKZJ8 M;*7-K;&%9$/./G,ZA=DJM1M^Q.+'QO?TZ%4E R"^'3U%H>Z!->P.S]/K[E5V MN-Z];?&<03/R9'@-T=GD[=F(7/=>[!;!-O&-EMJ %U_\+/'$9B<7<+ZV&.O] M0A0,C_;E/U!+ P04 " #;@Z=8][7T#S@. !!.0 &0 'AL+W=OG 5GS<"O?+G2.'#]\GE)E^P] MT[^5[R0\7;=4,KYFA>*B()(M7IS=!L]>Q0AO '[G;*.<_PE*,A?B(S[\E+TX M\Y$AEK-4(P4*/_?LCN4Y$@(V/M4TS]HI$=']OZ'^O9$=9)E3Q>Y$_@?/].K% MV?2,9&Q!JUS_*C8_LEJ>!.FE(E?F+]E8V" Z(VFEM%C7R,#!FA?VEWZN]> @ M3/T]"&&-$!J^[42&R^^HIB^?2[$A$J&!&OYC1#78P!PO<%'>:PEO.>#IE[=* M,:V>7VN@A2/7:8WWRN*%>_ B\E84>J7(ZR)C61?_&GAH&0D;1EZ%!PF^I7)$ MHL CH1_&!^A%K6"1H1>=+)C%BX?QT F>J9*F[,496+EB\IZ=O?SVFV#LWQS@ M*FZYB@]1/\#58;R?A68D)M]^,PV#\(98,N;1CV[(3\4]4QI/Y TITKQ!6<9H?#NGO*<4\,%2](E4!H2#G_X'72P@!RF#D OA3'BD@J(@%T?2S1XPR"UW/ M1!0KJ:0@5"K6I2C@#4*"N:@48M#0.C0"A M?W.;IM6ZRBF2%O!>&I*2K3!RW#.0'IZ9 0YNX,G0N!.%$CG/#-8KFM,B9: R M\"(U(A]6P"IPF%:2:\X4^-L#DLFKC)'?1N]'1(/0"MZBD$MQSV2!VB40Q8KT MP<'T@!<)VD-!,S;7GE$/\+-F,N4T)R4MF831/+?JA##33 KJ6,(TVDA-D6W) M&%E;K]N =*2L9+J"B)2-R"T0V+L0YE]GH>I16! (7;Q8DH44:^ O1:M3J*+M M,N/ &.CGX'#J)E90T,J6U6 M/%T!S64!RY7"&@)$6=7Q4LPQ#6!@] CCQK0S#I:EP2)0N*)YNC%L=/41/2/O M+-?"+JTU9"NFQ.!F7,A,UHH^!V?K<(/FB9:RM0]WY:Q_;]G<>LGMH,QU:%4D M-RQBY*F=<,@ T;\Z]@K&"D91(X-[TN+!2F % /"C66\\!<(8858[, _"PPQ\ M;9X<3)AL> TKA>[3)K#&*7EARU93_X&2'/W#A*44]QP#UQP\>\5E=H5.#/%; M0&!E-A$ 93-MQA<0&E#9-6FPNVI=6EJPLC6[.-&:Z97(1"Z6QO%-*%I1L$3: MT0L#@JEN=#HHK@U03M#[T(D6VHA:)]8Z!D*F1AZ 8Z/8=J5K-['1$01I%F$G MJR,[%*-F)25. >L.RPD@;]$4VOK,*/,[B*WK.3A#/1IM(]5?_5M'QB8$-:Y' M/@@-AK(+?6&,750*I%"7NZ)]:5[OJ%J9H@84WJG8OMB$D'J,T6EKR5#.*5Z' M3# ZMAUI,,[)-/;"(' &FLKST$B-=-0;9,DDF$XW;<9^-*6MV]YSDD\]N)Q?)#W_DB-],.!@OMX)2=>')Y@;A;\B::=^&!! MDU/!=PV@I[,)#(3A80,(0V\Z'?]E@;B7$_X?3LU*060<'UZI_DB-]$2;"[S9 M='HB]%$A+ID>;\D'0AR2V;7P6>)-XYDST!5B2$FSB3>-)E]?@$MF7CR+#K+> M'ZF1_I0 %P?>-#C> &KP)QI;!.'1/S[1UN!W.^<@1^-#0HZ'"[7]T+NVUEN@ MZ<0+)H=+G@!"\-@)P5".0R5MRNEB>WZ@VJ.!/=LULW%2)*M,B8UE>^=LA^&) MZDY5ZNSHCJO%O>:$ X(5GOFD0ME]8GG7P>&7K>;L%[01_6U+)CSM>;IC3U-:Q[-N=3O1K^[1/[> M?K\.2P/-GQ\>^KG MD>$J M+ #?"H+#2>DBC,++#LX_O0H[F B3V VK;LR]2#I6]93\AXDK[@O85_9%-+#( MA],>YJFX7^WT$]U%/+GL8!V3W4[+8OO&A[,;9JK)Q/7ICLE>!.'L<@?<36RW M!],"GJV:2P1B"EUSN'9<5OJJ,LH=I%M>5!"/30PG[QIAC@9H?O$$^0U3RMZ. M!&%S-^J^WX["PULA^^FA32^#N6UXM)^QCDIK T#-[T#^>CS#[4#TW./K37S= M'?5NFNN']F;DY,PW<-@PF.$>\_\]H2J&*9SJ]6(VW9(.(*HFSJR7 V=+$R\: M^ZXFPIT(T:%Q;JC\58[Z-:6S>#?[7R3^%["8*(:"84?H?7WP41!2,/C$IS-\N4 M:[!!$'IA%.R,^(EO<.D"^PM:=-B'BFJY(GHCS$#?, ,?#'/2>8S&1Q3)NR7P M;6_9LC)O4.J/'0DA4TQ_E&.YO\G28+U'?=[ +_]GLLGMQ9 MX9FBX:BS 5-J85AT#@G2U-PXB1+8%CKSQ9%MMC+U@&I'7[>6\.<)% M_3_TPP_L$)/^_BOTO7#F]\)0&&..&[LCT<0;1]NL]0Y=GF?DM6U0LJ?XMGOI MKC;$G5Z[!H.Y&'7?68U1W[67$@Q2\OS!M0U5E67.L8.DOB7P;-CAMCF!7=$, M/=RTS.50?[ !0 @\E43;W@XIL= ;C"7(#?;B:E98B"U[6W]770][V'3&?HUOV?YP\A1*O:*:8AZ[W):U&URKS]5 MO#31N ]6;L%8"_;/=]4W;G_1.4D\?QSTGE]5/,],.PP \S5VN;#N=<@8G',6 MNH_CR0R835>0IK"KKZ/6"Z?F#*:0QIW&@& :@//ZL/L%4\7&S>$)D\CSG?N! M)/1F051O:R MX";+F8-Z_AG_=_;=)Q<$7E<731?F!FKC\WB4=/TY'H7-P*Z;_@#!>P.O6E;: M [27K."K8PZ5ARU7::-BU[J6E^R^QYTAQ;N#"AI&(]YX7EN-,+B'UV M]SRK3.>R[2BTVP+@OFDGAC<@KU@66(3MUFXI5%A+4"A4A\M&@-,N87XJ-) P M#92]%NSV32V>$V7:1EVH[])5@:UA8%NVN]\$YMS6.2M>8I@'.0J,]U#^9@QO M8^O+97PLZ!J+S9RG)OM8TYS3]"/0M ^V)1=*(Z,GU(;,=MN\1N2-*)97N6F- MY3W632)I-S&X;T4%<>ETJ4$)CO444J@/!&W;&WZH8;ZXJ)4*PD!U@2F][K$T MS6X#]F&V@ZI:XX32G1UI*Y ="_LKK*/KIC2.R10(-C.DM$ K,4V_V D*PF<, M;X0!)>NVT+4]YZJ[.GU-?/&MY)?^W;-5??J1BMMN_U2F3J%AD\3M4 @_\*JW MS:92/J!--@-N(L60?S)@*XMM(F_C )147';2Q [$R0A[:H$/;2AQTD^4)-XL M=#?>$6R\9YT4%<% YT!@""F $;?\CV+(X D4Q4,QJU^FQV/ [Y]?!='4"Y+^ MBI-X[#Y%D2/E?C!G:<)^IV "^DE\MX\FGG7O7F$$SX#B1Y B+^D< MC\-V:A9OJ5A9^D%S<./39K7!U#4:^K;JVOFL#6QN:3[>,QW5A;9?N+6C[?>! MM_:SN"VX_;@0PN 2SVMRM@!4?S1)SNQ14?.@16D^DIL+#09N_ETQL!R) /!^ M(81N'G""]JO)E_\%4$L#!!0 ( -N#IUA7W(&&$A@ !-7 9 >&PO M=V]R:W-H965T8621>L=)9A+W M,M>;MLDD[=UGB(0D-!2I$J0=]Z^_?0 @^)!L)VGG/MR7Q"+Q6.SCMXO%@B_N MBO*3WDE9!9_W6:Y?GNVJZO#\ZDHG.[D7>E0<9 YO-D6Y%Q7\++=7^E!*D5*G M?785C\?SJ[U0^=FK%_3L??GJ15%7FY7S_^*SX8/783D^TB$V'6*BFR@-Q*D>A?*Q*>*N@7_7J1R76*E.5DOK%504#XN.KQ'1^PYWC(YTGP4]%7NUT M\(\\E6F[_Q40XJB)+35OXI,#_B3*43")PB >Q],3XTW=I\.= MT1R>ZX-(Y,LST'5#&;!W_^V MC*/X.O#&HF?CR77P.DG*6J;!/SZ#_6IX(?(T>%?M9!G2_D %#928@3)O(%$%(,5DY\1([;^7B=ROH8MY.H%)P+!U M!3,\=Y-_J_\; NR3UOSV(5%'Q'0'N%!Y4.V*6@/M^C)X+^[+(LMH):7,1 7L M6,M<;E35<.X\F,S"\6SE/8B7X22.@O^(LA1Y==^;9AG.YXN!I\OY-'AWD*6H M5+X-,@FHT^)QM\N2ATKDB1R1[=V [8G\/@")*? Y,$%%%JDK_ N,:R_N0?<" ME9/QI4$-T%M2HSM+Y=U.@?HC8:D$X8/70'V]!UF([/X/5"E]D(G:J"0XE$5: M)Q6):0?F6)2X$&3_1FUKPWY=P?] 3Z*-!6Q9,=R$NCX6H[ST:HK(9W)2XM#'"%I8*AP-*V1ELRL0;V\5!NE6"/20%_)601G=%TD-8E M/F]Q >Q'%>DH^#4'<0!\R[P!MJ8G3"4_HPAX24T+Z$XA#T@F2 2$#YDN8.D: MO#U1LQ.@J2"3HIF1:!X%-^85M+*$NB;&CVA2$22WVI52!GMVHQ+=:!<^@0=9 MG&-99P!:(-);? UMQ?V>?"=HJX2(,R5J8(8,5117#OJF-?/I M5N:UQ);%-E=_R'1D''"'-#!YPQ=!'?L2NX,7X@#Z]IFX"E!T'D7+T1AB1IBX MR$/LQL!0>3#3S-SM/9F-YK8S4FUI]4SM0=T=>6&%0H:@,9CQ>FM$]M_1\C9: MDHT=!& *@$<.L;WA'QN.,2N6,ZJ:2K SK>X.O-VC9 (4[D09Y M40%ZP^P(&SZ3B/W'5OEZX&W8XO=N0$R3U6CI.$U:@9LIPKDCI!<-^V#9J@*P MAYZEVI)+L9:5HJR$M4GGCX!_>P!$3R':!"WC[\#(*=Q+C&ZO?16E"4$Z=L"0 M*!R8 )6__OR)VQ[4*DE&>(",#,3(%1 M'VI0((CYR'-Z2PG1@J3P#&'VB#ABPD&3Q+0:_L,V'Z"!/4>;>RCV00!6QZ-"%K6AP M;S#&=6*$@OOU[-X'$<->%@N%0ZQR,+9/";$-RZ EA^-9Z-I$XF@"S])!_1Q5CD>+=QSO1,4LV_\I=)F<'&M M285HMU(DG]J0")LLI$6F+NQ&D\1]!]L\6IP=U=,S]-48KN&>HU9ZQX9)VQL- M>YYD%Y)#*Q':1) 5FM2]W9Z4HK/6N6?$EB!RS<,H.6FASJ*/.J2G2PLXOA88 MY23Z!A4SBCM.<3)ZC/(MNHBR&$(4+\CD0#B'B I8D4B9ZB'&@*VO&C41&P @ MT'(*&H%>VNG>@2O%'ZG2"8<8* ]*4> ?+DEE<:EM]J/@=9HJWNME]VU>U7K( M/-H.D;020AEK6_#@<(!NN/D'$T"B:JVM13K@6CP&5Y'O3\/5&D*GC@N-3L)J MTXR5I4>@AZPT.#5;_!]5GXRJXZ]$U<4C4'6U;'!D$%17<7MCX3!UXCW_BS!U M\>=BZG+L[5:?C*FK(YCJM/1)F-I6RZ?H7@=45]\"5&-8:_R_!:J@N"V];*W MI4L=3P%O-T FXP*J,.8:3=>NQX9FGK*UU49[MBW6$*E3\V;?BGE45)VMS&5) MN< 29B*CK>$O8(##R]7#@&Z$_M!=*XFU M"?XM >K9D8K\DVV$7,*S=&QADJF48 7%LGT<;W6]!E^!,J)#@E2NX8\<^',= MR-_!Q(X.!@K;&ZPAUQ^)=_]*4T[0GP^FH!,.XD27DBGKDM"F1:/A0FO:YK3.S\I>\!$$87$I4FFA M3%\."D2K5(E2(5SZ^F7! @^P&%0(;=DLD<,8!1W84$@\)?'+ _L+=87 ' M2O +'3!/@WB'_'+):NQ-]E':=FSR8 M\6%5$0;KND*489&'!J<<+9C&)+3"YYG0F(-#(:&5BTP:6AV*>?B(R6]*J,/R M\%"["J))LQ /\'@(&\9!^)"IQ/A.U"OL85:WDXR)9(@< ]NQXS%I*\4UXAZT M^&XG2;4Y[J*C'C >--]+F[!$04W&_BM_#'.DV+('RP._F94 -[_$$)3=-8.I MZ\VL]7LJ\.VIXCCI@!&>FX23Q_G $0Y$3KX7!KLA2/!%!,R7/10\&IAC, M;8M]6#!&4LI6?&Q<:7'P SU+6FU7Q(<\(K&-S+$V;LB+G$-2IL2(-X'A!1XL MD6!H,]+9[G%P*5Y$H]ED$;-0)]-1'"UG\1/V4Q0; MGD?A>#P^Y;P?X93;"7/\105+5$WA%N.<5<_2-&];IJ/Q.,0D\VBU#,V)P&H4 MQT0G+:L;\703];\,:8(I6 #'\)O1)I'^5NN*G*(399%P,1$KI!54(U \FZL\ MC_)/3TVM=@Y[#4]G"6;W=58IV,%I>RIFS\2#%"(;4?9D$1IMA%&,/OJ0#JT1 MI]A?)[!AI06L:ZW(HYKEN=_'K?Q=4A44R<_LP2'M_6W :&;P%<+UL$[D2(>6 MUKR5ZY+=(6\%CG5RJE7D0&939;(!)A5W9$VJ3.J]IN(5_=PK,[@,OF_@- &? MD*? 5G!>)?J]"PHR<-#4BURZS2Z_S,5\O0>P((\YN:.>0#>8?M0%X/-A2?=8 M L$E1/%8"X/!)L4(C:\_Y2(+$S5X+M*CPB_]:(1"0C0PX-;6TD_# 0Y34(:] MYD-.T=L)[(']$-/N31T-O';; N6[,#L,+P9AYC'VV+A_E#:M?X#U?1JHNB S M$7T>K)9>#,5E.L7#&M>.=MO;/YNC:".@$Q+I^3'Q@'Q^:+D,SBGSEJ&T^Y7! M4*AR7A3YX44 3XD36.$=4I^P]+ 3Z/1B&M!HA#S**(6D8RU;/FV_#V2P6IG1 M7I!D4C4N+ )_G_&V8C+NEJ8,^4L_FO-T!;WZ5I1IYJ49L(1N6_10'[U#SW$] MU6_].6Z+N?&U3IF5W,8X[5J.8W%LD[^&WP%,LC:2LGK8#5JWYT;6!K#$SK6Z;.HG?:P4OUVI3EPDGDRQ@ MF9J-@GJJ_+;(,#=*6_D*J_X >8$C>U7O(<0K1:Y-Q,TUFG2,Z)_;G4]&D9=P MQCAR[B5\VS6=_:,?+'80^9!Q/"4$IA(/7Q*IPNI1F_G&C8'+--LJ/DR$M&O9 MZ8C'+_[*B_P9I0'=AMDDQP/4)=:7)M!VC?80=V!,<6N"J*8L2I;[-HBWM':R0S2..STF MJ^50W8$[/IO1!K9';KR:7/8;3\/%N']MX-@8DVAXC/ER,71LYUJ ^QL<;Q8N M5_.!$6'(:. NQ-%QYF$TG0Z-,PF7L_DIJ>*=D*C+\WD8SZTW#U31J\(-N.?2 RJM9-E@R\;#D,;BB]%\**[^<*C,^UNG1=WOLXQM$ M=7=9QMR:>C2--P5E,GK,?C94LGI.?_D76$!X?4)/CMDU_D9GX]ZS*(R\VRV/ M&OZHM4\&KPPM^I.>'/Z8Y4;A?-9G1)=;#CVM,_YBL;UFC'8G?!0!V%/PJQYN M#TJS2UV?05\RRU'Y+OM,B_J(^B53'I5Y'P&C13!I_UE'M,"AKFC M*@"F%4ZCEM,+9\O^DAJT:;;@WO6I1X5=\> MO1NN$;O!/;P7/C<-?A@.A/VB MDNZ6J# 5*I.AJC])O*!#G6*XX-@K6_.C$]W*XARCFUY'UYBT_RJ8?^[GR_K:3:%M!(DY(W^6)*+317<]K$^EE[%'$G M&<(\;^4RCLGA 2G)S[),E+:9-KR 8C.@U?")3#>#TC+'IU)',4VG3&DYFLZ] MLP\ZNM,^1^PI17.>H;U$>6MK=]0Z.F?DIY18RX.@3%G+8EO&WKFZT)13MJ;' MLKV2JO6(729EX-]2:-'>UF2;)S W%KP$E#$1KGSP.=$,,')YJ/[89MR=N.4B M(C/,4)[GM(ZA>WF,O'&VSOVD2GQ^9C($= K9MLU4\<4P=RR*PT;6;@^+]"4-:DG ?4Z'49,/PGC1@'!:65O!@W\X2?Y"8KL).-T"% MJH*W(N$;D[;%.[]*CHLWHA/^$HM.16XN!"6<[7/7=/M< ;OK)7 >AD:!)H[LKVKZ./HU:Y3]C"1KI:B0E;=[T:I/:F*$LZ M//3AH4L-8QTS%&^M@P:4NGI&)QCX/E-T;=#/3P)>FQ,2TB4NC6KKXB.H&V(- M7=@D/,3QZ"",;K2%)A?<+<.@S5N"6=09F.Z=8>G MP:-X]AWJUL4:1F2) 6_?05"44\'A6T9+Z/@!1[DP"/+QW=L/%C:""W.I -9% MD1X,/QY_=^G\1',ZY_A@3E ?16QDB8V1V&YI6RH/[;/S+NOLFC"+]J.$A0D( M,SY@M 1LQ(*=C3UV>T!Y+P>*E-$=0H J'']_K:[5\\?.E-!R6/])7Y! MBRL4V#GG-"J?JJ;W0]]3*(27W0'I MM(?;8F-B:*I,N)6@]96)JOQ8A7P N+?J_B ]=QFBUT451!(-#!(O[ ZN"3J: MDEB5\S?0O,VA2/>P,]%5R82(+=UF,85U)]H\5/?DG"P?BJ.@Z),:+KE"D(F] MT ^AE>;VR R6<9"E.[X"KM6EH(9T<451.P* 3-QI/X20^:TJB]R );_M,<:+ MY%S(8(^I$-@EP*\TF$U:50!BAE8G>,6#5?&6!/T*BZ;8)1&QHW'EJY*,E MU\?14NYPKTU"VF"1#\WT!0;9V(FOAHU!MLZ>D=OL;F7)R0V5\P8Z;_)W-\77 M0#Y=)RHJK\QG KZ-/2=6-PJ3+OQZYV)GPF]I\$Q3\'O>3&@1W]"9]>>+6_.U MO2PH&=U0X^A$YJF[1;11&K_P9(MIO.M$+EO0:6+<]4>P4G/.RM4E\^M5T9N9;E9SW>CFN0-DT'=$;'"STGS"QY3:BB8"OW-? M2[*CVDB=I]S\KLP64FO4_&>+=U;###"7'7)#/*,;PE.*$:#=;\7+BOQ5#1AG^- MXD1P-?"I'02W$Q<]^;MP0Q\]Y#=?\A5#HKA[XW+67+@T9=0S_Z:N7ZAR;;83 ML/$#>2JZ$4B?^R(7-/PU/"K6CKR*&IXC]C^QT)X#*YL2$\ND[-[=YPLIV,7 M!BW]LZF ZU7U7)M"-,P)\Z5GOHC;OL]U/FYZC(:^D7GE?:B4G"U^CE5S2I*_ M6>J>NB^^ON8/G3;-^7.Q()XM>J!,;J#K>+28G7'*T/ZHB@-]]G1=5& L].=. M"N B-H#WFP)W M8^<$DG2/ NTV2+K=S[1$640I424IN_GW^X;4E=A.4VR!();$.=[<(YUOM?EB M4R$<^Y:IW%[T4N>*T^'01JG(N!WH0N0X2;3)N,.M60]M802//5.FAI/1Z'B8 M<9GW+L_]LUMS>:Y+IV0N;@VS999Q\W ME-Y>],:]^L&=7*>.'@POSPN^%O?" M_5/<&MP-&RFQS$1NICTC>D_P68JM[5PSLF2E]1>Z>1=?]$8$ M2"@1.9+ \;,1-T(I$@087RN9O48E,7:O:^E_>-MARXI;<:/5OS)VZ45OV6.Q M2'BIW)W>_B4J>^8D+]+*^O]L&VBGHQZ+2NMT5C$#02;S\,N_57[H,"P/,4PJ MAHG''11YE&^YXY?G1F^9(6I(HPMOJN<&.)E34.Z=P:D$G[N\T5DF';SL+.-Y MS&YT[F2^%GDDA3T?.J@@PF%4B;L.XB8'Q$W9!PA(+?L]CT7\F'\(: V^28WO M>O*LP _<#-ATW&>3T63VC+QI8^_4RYO^+'N#N-E^<50RI[;@D;CHH2:L,!O1 MNWS]:GP\.GL&[*P!.WM.^H^#?5[OUI.QI,S]JQT3S6:GK'W CG? MWGY*!3$6/'_PLX$%1$:"@@ M)%Y'^DHK8O\LXWF9H%A+ XE]=O>:9\79VU"^DDC[S'(E F;RN(Q$W]_P& 4B MK2,P.L)5F<0*_A"RBG3.!\>_#!ZE3Z(51H$7Q5>*A.F- MC(&;)*//(O ^(R VR%.2KZ0*#[E[8MAI(_M'?S\V?CN0Z_7OK_" 2W5IX37[ MAMW6YL6P??50I<1A'-[]]!G,'T;)_O%C"9]:> MLG=943J?*]"".M_UX7C:7RQF;RI5K3NFL_[):/;=8-V)0AN?J/N2^Q#75129 M$DSB&Y886_4,7Z.8K<;X/M!)K@ZJ_LE\SM[K?/U;*+W'-;:7J^/3D]G)]PS] M^$1BI*T+39'*P*5&(!)AE@J:I4]-)DMP,44)(V9'X\$$@5/*;SHXPH-9_:"/ M=F(+X?7]%,VC5E'0/!I,#VF^BF-)W9 K]=#O-C.6<@H.DU@- MX7 )S_',]R$$VZ8(?8A#W;5;[T7 BN,W@G6__+J\8N]VF9J).3& M^_>VA'!R\=4:BOW8V3-'@82*QA>/QH@QK8"B%L ; 5OI4A EF",8U/"3S*V3 MKO0[+O@M3;QZW,%Y$K'%1/0SN)9;^2FLES2O2"A\2"2Z-!;S-$RWH^EH,&H] MX!C!+32 TE1PV,X'9*0M.9[0@$NE;;$^CG L8Y9K%P#2@RZ>V$_[EP6I7X5B M.3AIH-&DX1LNE7=;":X0\=9O?GPWZ5>M$/!/%\6^WC)X%"JK%50OVPQ_*J)6 MW?7#B_-O&I3E>!?KBM*@J?.: M)XQ16^\6(FY+JJFC[LI:'WX62%K?/YIJB3ID0'&$-]3!LIO&3Q/*EBOLIEA_ MJ3$Q_",V;'0@6D$ZS*593U5"194+OT:U^*YY_H7]67(#$4+L@[8BBG5+05Y3 MPCDJ/JB*$"Q)0;0TK;!3'"IP_%%!KT3*54)QSH6(R557NT:AH,FHF IKGWY_ M"%V[.!R-+@ Y0D8NVGY'3&7N=\*7V4.^'R\Z'<1'OZU3=(P57&OX-D?#T7GK MT?=B#PI0$(,1<=9AQ8X<;IPG]H6&F'N>(O4X$&8(@ YXG&"VAU0PJ:+T^7_P%02P,$% @ MVX.G6,EF!A#G! ?Q, !D !X;"]W;W)K&UL M[5C;;MPV$/T50BF"-2![=9?6EP5L)VD--(D1.^TS+O;3AHT: O$H><&1Z29X:7XR47WV0.H,A=653RQ,J56AR.QS+-H:3R@"^@ MPI89%R55*(KY6"X$T,P8E<78\5@6KX%(0695:#Q5?V#Q7NF(\/5[0.5R!^KJX%"B-.R\9*Z&2C%=$P.S$.G4/SP*M M;Q3^8+"4@S+1([GA_)L6+K(3R]& H(!4:0\4?[=P#D6A'2&,[ZU/J^M2&P[+ M#]X_F+'C6&ZHA'->_,DRE9]8B44RF-&Z4%_X\C=HQQ-J?RDOI/F29:/K^A9) M:ZEXV1HC@I)5S9_>M?,P,$B<1PR\UL SN)N.#,IW5-'IL>!+(K0V>M,%,U1C MC>!8I1?E2@EL96BGIN^_UTS='X\5^M(UX[2U.VOLO$?L?/*15RJ7Y'V50;9J M/T8,'1#O 1$BR=5/^,2B&<[/N=ER=MUZBHO M*44B=([+GF-I.E\T@53@R&^@QE+6=]^4:6\ M[#N[YFK+?(P0N,IY+6F5R3UR1@M:I4"H0GR'K..O2':7;+GVDD8/-7< MK'6ZLA1MAZ."2[EGDPI,7"MZ]V(,Z_+(]9*]-[C*# T%0LXO"G2X_ M/?#$=A+OV1 :;3.O4M9F86O<5P2!P B#9,7N.@]S;S8WZ")MU$S<@/; M#[R]C89MH';5-XZ<%>[AKI7FW;:EB1?Y0\J$4;1"*'<2V6ZR2CS7L7TW7"5> M$$^&Q$MB>^(Z6Y'^C/__4^U_)-5Z),0D&0WY'+I#_KNV$R<;C'GV-AVO/C9W3?:+TVQ_F:&?30] M)G;H3'Y FFW]/)9E?<.Y20]L&^H[V7+H?KA3"W7#]5:O&D&+37I@.*@-3-X MU9[B=1=#3OY[A^VOE0!:L+]>D:!_I0R)-OH= PWD=MIL^^-='&_:?6;%@#F] MI:PP4_OLG%T+ 57:7WYF7) K^@P/UP+#HV@"]0K26N"F@LOUHD2ZO^7(.J1E M'+D#>>2&P>:I],G/>CVJM!0I0IK#?N29K 3,T M=0[BT"*B>>YI!,47YHGEABO%2U/,@6)VU0K8/N-X56\%W4'WYC;]&U!+ P04 M " #;@Z=8&.$(A1L$ #J"@ &0 'AL+W=O=(%HX+$4E9Y[A3'U>1#HK,"2Z9&L ML:(_*ZE*9FBIUH&N%;+<&94BB,-P')2,5]YBYF0W:C&3C1&\PAL%NBE+IIZN M4,CMW(N\O>"6KPMC!<%B5K,U+M'\7=\H6@4=2LY+K#27%2AI#CBC7"W,KM'[CSY]3B95)H]X5MJQN?>I UVLAR M9TP,2EZU(WO@K#:AV8ESU5D3.5[9 M0UD:17\YV9G%LF *3ZQ?.5S+DLY:,QNN66 (W>H$V0[IJD6*#R E\%%6IM#P M6Y5C_M(^(%8=M7A/[2H^"OB1J1$DD0]Q&*='\)+.U<3A)3_!U18I?1W)%LJY MKEF&*8=S_08^@N>V0]X'D?Z) W"%-Z]F<91? &' M N 4PN0";E$;Q3-#_[75!;9E*M=@IUSKAN1& I:UD$^()*^262M=8\97G##5;ENBTF(R4%P_6 CJ.BOD MIE$X@L\%OE0U3S7/F!!/(%BM$>0&%<@*.W\.11+PT+4&&U#@!DN]_W=-&TO!_:E2L94:TG;8I%"*4 M;5V@K0N@K,Z*+JV=NS1)SCO2_]?X^1B70T:.H^4W^/.+"XAL-'F@?^W$UU(; M&PS-!"7(6XC\21*Z,3V-;(*AV].ZG>.&[H3:QF^XKY]$TU>DX?1L(%U22Z?# M\F&-%9V \-L&FZ?VIK(3A<+E&55+):N3#25_KUSV5=K6#"6?NZ*K#/=B MF]U,[])9_[P,^^*N.MK^1XJ75)!TLP_DGQK;,&R:["6_*T990#?84'G9.M.% MDW$%=TPT0\T#*?G]>,6$B]()O,?,M:[]$3QG>>RGX[1WQ/%X%)VU+'M^1WX8 M#?,QF8PF,=STSL.U4:URZXH/?^*%&MW2M+4\MM M*M,^13II]Y"[;-\OS^KM*Y HK3EU4($K,@U'$WHWJ?9EU2Z,K-UKYEX:>ANY M:4&/4516@?ZO)%UZNX7=H'O>+OX%4$L#!!0 ( -N#IUCI9Y]6F00 #H+ M 9 >&PO=V]R:W-H965TZJELO.H8*I.[FT5&T-=R+5>7(,%[,&KZ" M!W!?FSN#H_' 4H@:E!5:,0/E/+H\.K^:T'J_X%[1-!FV3?>Q_ MJVT_^A?M@$W9AW=GZ5%ZP7;)O#')!J/S1FZ @74",QD*AM>9 <\KIDOF*F"_ MMT;80OBK8IE0K*L$SM+4M:X;KC8,"X%!K(W9#91@#+*(W0WP.M%=\QB%Y02M M#,J23+0)U(TV>.]9(=!H0.6(68+K )3'Y-R8C5 KQFO=*@_BUH)#Z:I@4O"E MD,()1)'X4BBNY6?!P^(1[L(Z+ OT3Z"7 MNKTJA';<%.CZ/7 I_N"^HN L^5ELHT' 7K&P:,;"60 YHEC9NM9X:KZ4T,N( MAX.Z#%'#]43JST4H!T;4N][A6!>CL-+KPWKF-Z5CH2U1VDJAD$ZXBL%3@TMX M.%#RG7!EBWYN@&[98X6(;4(0V@?):12..V.I 8_8C9C1:^&K,9533W/H]&%! M>*R,(L2]YAN65URM"(O%?FGA>TMAV'H4_+#QCVFZ!%0)+W.*"'<4D$_*PN". MJPP JT,-HF@7#"L(1F];0CP!?F1XPLC-*1(2'R)[/NS^?_\_[M.T7>2U>5T_ MPG\2=!MT:U$YYB8\Y= XBEF.,<1GTOZ\+UY;E@.6IJ/3XV3',!TER>25TC $ M]8"=34\(>?*LZN-?\VP[E<73R?MGA^)I]OZ56 SEPQ>JTPO[WXZSPQ,\2.(I M/H528B:.6$[T)F0NSF3;F8$T+/#7KL'$,WW^Q>S3/TJB%Z;LS5M( C&_@*AY MJ&M?XX>86;R)K=-8_H:EJ ;[("$W>,!8'VUNP+VX>DM04 KGG;(5 M^GM(K4CAG<,0AGK4"5647,J871:%(!,.-GNEEINA M%/9;VZ R!!I#A^V..KS!4*[1=(NIJ5:"8MPG%H6,GDP?-1H4L,8.L*FI$A M MNH@:;?S:0SK>Z6=J,"O?M5ET%HMY:&T&Z] 87H9^Z'EYZ"KQV%8""Z"$$J%) M?'H<,1,ZM3!PNO'=T5([[+7\9X7-+1A:@/.EQH>V'] &0[N\^!-02P,$% M @ VX.G6$0>)_]L!P 4!, !D !X;"]W;W)K&ULM5AI;^.V%OTKA/LPF &46/(2>R8+X"2>3H&F#>)9/M,2;1&11)6D[/&_ M[[FD),OCQ'VO??UB4Q3O?NY"76V5?C:I$)9]S[/"7/=2:\L/_;Z)4Y%S#-2NF<6SSJ==^46O#$$>59?Q"&%_VY3BUM]&^N2KX6"V&_E(\:3_V62R)S41BI"J;%ZKHWBS[< MCNB\._!5BJWIK!E9LE3JF1Y^2:Y[(2DD,A%;XL#QMQ%W(LN($=3XH^;9:T42 M87?=9E*F/V2^$C#Q=> M]2TD$ET_KKG?>NZ#5[@/V8,J;&K8O$A$ W;,T?.G[#?\E\SWWT,G=*J ^FY+&X[B%CC- ;T;MY\U-T$5Z>T'W4 MZCXZQ?T?ZWZ:^V_*"A:%[,U/TT$TN&3_BS1'% XOV5K NF"E$?)-ZFED84-A7(5*4%2[GY@;7SJ:$C;*4R5!@B7JE* M,U$D9R@SS\*:#RW10N0R5D52Q5;I=O$(J.D*#NV*"ZVS'2JUB80PS M5I1.Z4RM8;DW*U=ZQWA99C)V3C!L2XHS(S/BS+;<,>/8JOF(Y)QD8X,V\W(:[ :@E)9>LUB%'8+ULN*K*>BCL"X@P=FD-[2-&Z219Q5B3!.%EMF MO'@F]J@K'7@?F*T=^=/UCJBQI";&/:BLTF[>* M8^OI(_LH,^OP!U:S'"A=R5;)A*5>XSF[Q+ZP/)#EI[3!% SWZ=WP=> %)$ M)>1OD:P%@T^L*QCNG=<#SK?.XS&09G>(EEZA!A^=;?#W]6XQ_]4T$#P_]E_' M ^8@"(G82,2TQ8.F4:/VJRQ(CT8GT#2/Y!!**&R!?]9Y[0:=%G.$.*<);]'A M"%8U<-[ZD+CJ7'L4@<2$ D6W'.P:?RYFW]I\)@;+*GM^Y>AMYV@MYYVK0Q6! M"(:/?X8E>5X5K?6R6&D8KA$!M)'@, ;Z>'FHQGF=,WMD>-^II47-I *Z0[="E3:$>A=O M40B]WI%<5TXK*JM:5>O4/=@GKA-V+U&T[[7LA.73_7T;%E]H N\@5W&INYH=^E)NFNKI!]6:,VIG!7A0 M>""%.I?,="W9AC>G(Y7.M_"-FV MK<<2+1.8C=D;H/>2_4XSPU^][G2.IKM@?!%:\LQ-)NCYY&W*&4"E6+L [8US MV.CFY3X_5%D7(.6F&>2.+UVYU%I1<6@.U)CW>.70\0Q*N0O+1K34[SJ&S!V=4,T8X>BR%Z+4TBIAZD.E/3 M__O_\RF=?CSL=.P\#(].H##!3)076(+R<3\, MHG#RWS;XUJXH",/!2]O1^/WI](ZF01A-NB3C:*_07V1&- [":;1_G 23CK<_ M*PN,=JR=C(+1@;71>!B,P]&QSX\!^7==_Z60-) NK+M![$4/)L'T8MK9 'C" M:&_+_&$^8V^C=T<,I[!A>NSJ0?!^U(D;ZA8_.G0Q"H;A,>U%&$PZM$_"N!(V M>YS='9V=# -4V*/MX10L1D\+Q/PD3N<7YAZ8$:7 !@ZQYI7'_ M"ES5>)!)@K(^1POTM6FVPCS"V4=@]R"T]5T0;=A%GEHWKB=:XOZ H-5M)E.^ M1%)#]RW$S3]US\ <$^-N@2*/L<\=Q;WHI>MQO_.5 W1K]RT'4P_RR_H/'NUN M^[EHYK^2[(_[;TT/;E"".+$":7@^&?>8]M]O_(-5I?MFLE062KHE]2VAZ0#> MKQ2NQ_4#"6@_HMW\"5!+ P04 " #;@Z=8DRAUK=D. ";*@ &0 'AL M+W=O*FW?U(S5 2F]%P0G(L*[]^S[V7Y(QD66D7W2^VI"$O[_/KI@VOCI8Q=L]/3D*U-"L=CEUG6CR9.[_2$5_]XB1TWNB:-ZV:D[/I M]/')2MOVZ/5+_NV#?_W2];&QK?G@5>A7*^TWEZ9QZU='IT?YAX]VL8STP\GK MEYU>F"L3/W4?/+Z=%"JU79DV6-?ZE='4V+(-*:*1$'CW[5Y8YJ&"(&-+XGF43F2-HX_9^KO6';(,M/!O''- M[[:.RU='3X]4;>:Z;^)'M_[1)'D>$;W*-8'_JK6L??CP2%5]B&Z5-H.#E6WE MO[Y)>AAM>#J]8\-9VG#&?,M!S.4/.NK7+[U;*T^K08T^L*B\&\S9EHQR%3V> M6NR+KR]UL$&YN?K@33!MU*RK>Q]<8RMKPOV7)Q>-J3*E&\%(IG=U \5^]= M&Y=!O6UK4V_O/P%WA<6SS.+EV4&"[[4_5N>G$W4V/7MX@-YY$?F_* M+EH[MY5NH[JH*M>WT;8+E47>)[$0?+B?(,7-\]#IRKPZZDB+_MHN/: .%K35_> MV5:WE=6-NL)1!O$7^?3?C*F<6NIKHV;&M J2=MIC@VV9KJ^QS]]_]_3L;/KBW<75)7\\?7%_ M__HWKF8[LLN>/9DJ8!2.B<;;E9J7LVPKV,4@T-;"8H0Z;!NB[QD=@HI.?>P; MHTZG#Z:G)/"5J7IO(SR"=[V]J9:Z71B#TR8N@5BY$\%;A M,8BU/0[?Q\:Q EJJ>>]QAA\?,B$,QT]0]#;A;[L?Z>=GU@T1-:"0%,ILDC 7 MPM!'TSD?%20BR"9;_HL51TLV1GME")/4#Y!B-0,O"57.B]/QE[(WN]^Q^DF. M<9UM25]0X4JW2%K$WX3-JNL_@-;";P6);&W(ABV."@'ICOG0:JZMSUH6W0\A ME86"(X%@Z*OE%E5$&QVLX5%0:4/ZA(=ZBHE6Q]Z;XP-H\ZB@S:.#,/'.A@J* M_ 7/U@;\YF2*?P2%B$)G"BXT7"R MJQX!OB%9C88.TNYC11 V=^19^3=H?JTW3"1LD4C[Z3O$,008[ "3L>V%(F65 MVYQB"Q%$[@$'Y";_[%NCSJ<3=L8KTT6AW@S52K<:SM#U_:,ST_E+D>%U]Z M?- 9/@5VV+NR;:4Q9.'6"$UWT&'7+9&<8,8;OE,Z)/"*L4] MZ7>B+/)?B^)J"2#4:HF6BY0TTS/;4.1C71A5]Z&?!00_Q85/'D'_?:#L2>>! M7'"3%-?"(*6DFU1<9/\7AY%XPGE_W0YS+VS $-D"*P2;134'F1LX@">-A$G* M^D&%30!PX(>^6WA=TR."#M=2>&,9U=X*?^@+&ZII4I5%G7@T!$!&A,SNVS40 MXAA9HUXPWME1J0E/A!X[X\$A3()*>[Z1>#">*SBJ[=VLL0LMH$("DO\7F24+ MNL&$:@E08&=*J@^ N095+9?!KN(4!*4#"0\;GOT*?LE59M'E MR$YAJ/.#7HVB%L'D3<.GD_ZHOA\X&U5N]%#JK4 5O1DD+:!,T1\"ZCO6)]9F MAE+X)V>@PF_AC1G*N-8L7+3, QZ:&Q1R]+DH%0SA<(0/P, 3][D6VIRY MU,)*(K6F-LCYE**VC]\Y4'(EG*MK2E*%6T$8)GZL?E^:=D0\2/HU2"!66D%= MFK'M@,]F#<7D\ =F>[]QI1QD8Q $$MK4#W1#S 33-)0C.=BD4A1/N'.1R%F\ MKQZL)+ N2]#E+&VUW&(["]ALF*+ U?\O_J@]LD0[P0Y9!\B,LJP>L7(7E!Z0 M?P#[GCR6O%,2#=104?/6-3VE=[\@'^L0[S#-L7I/CU+VVP4TOS>/$M> 9DL8 MTHJ7KI//W&5I$ CX%.:6VIMQ2.>(XU(,79+ )Y%+<4ZBB._/%3D@P)N-[2E7 M2DAMP0[CM5UQ4S$?X7ZI$B8I7]$*&P?4IB)H#'&YK)?FJK03"4>*CCKH[T$" M\0W%!@IQ%A\*OK;A%HB5C>)B>^09,UA1S6;;D1L.9LY3!2BUJ?>?+#Y&)5U9 MW+>,CR0LD--0S6&IY8-W1=I9F1KB)D=EFXCDP>PPJ0=,#>C**JX8NC1M3=I* M,L+\R3&&(GE7'; \)_&)<((61;/;I-)\J_*J7=43%Y:31T*\X:PL(S^6K0S MJ00D)LO@B&8>UGGQ(3'BA#0C2(LNC L+Z@(\ZY:88\_9%@G>U[)1"/+:0 Z3 M^!D43H3*86%I.Q+A6/UH(94G&U#80 5!KXHQZF&1/=LNB0)4H@N]D?AD?L5&T:Y/40?6(QG^@M=:$Z&V#PA7$( M[I>#1 (6(1S?=MBRMB4=SVW4L51LK72#&C7YY9%]0R5WIHDJ654<4@&*V.8 MPK;33+[10W#9?JM?V)H,Q31-=17W;C7CS7[ %:\5=RHB ^,KD_(TEK>.RUTH MCI,IL02V(<\&E"@GD1"Y\,E!L5_5J9FA(8&@0&O662A(3M^0/IH20%2ME/QO2=(P]##4]9WMTV*F7** #RX M2LHKRK2Y%H%[^-U\5\P:)-3'I&0O6]O-8K)9$1<)D4KS:B3I?AF@)ZZRDP 3 MF6%P24#S9XZ4/7EQT-N@A)6)W!3F-%2AJ-H_2+FS]\D-CU9HTAKQPDC839E8 MJC&X+SV3D?=61=E2';[A;C$]*E[#-<(AZ",;Y(DYC/!Q6^*OZ>JBOAZCV[B9 MIQZ3E9!X2S'I:YG#C5L?- %1E29_-&*[U V3OZ(+NG"G)PS6*/$Y*B.WJLA1 M6W%- $?5EY2Z9;R![-TEERDL4G5$EAPJU3NP9J!:[A-&>Q(783NE?%.NTDA+ ML<.0>4=K0";)<.+V Z)[+*UX' M;87B$X)UY(.W:K5MR:G.R@.=Y%CLO^D2K6#XN$T5"D/!NCN?6CA7A]$$*-P" M\5L'T0A#\F&"B=J&"D$WJLO&W?!04)9V :1G)K>CU&KPY4FQ8CF2A>V@A0M! ML^VNI78F<&\CMQBWIRBA7,ZP8:C>9_, T\V&O!5W M):3WHBO(!?K#.'W+3PA9^+V$Q+HW,!05A)WT;356M#5C94HG!#?SOID#B7C6 MP"\S<+&<4U"FG>K\E%VROJ0!I/$8B[W>+=[VQ6PR3=8Q.R*\5=]0"/#80P![ M09#1)COI/BY=NC8MM6?EFB3M#KZS1XW,)!883]\2-X>FSD_+U/GIP8'Q3RW- MQL'<_IN(/[VYF'3\&T]*HLRT).@:M\[58> 1;FMH#(DVX"MC"7O[)&5+6C*: M7?!@9&X].DN++"F?7!_S).3MZ%YL.V&*702Y4_^<9JMD8IXSEE$I50-VD.&Y MHA$#\C^JWGM>KX>O^R Z 7/>O[G_@M^_ ;\/N(D,X87<:Z.*"
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�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end XML 79 Show.js IDEA: XBRL DOCUMENT // Edgar(tm) Renderer was created by staff of the U.S. Securities and Exchange Commission. Data and content created by government employees within the scope of their employment are not subject to domestic copyright protection. 17 U.S.C. 105. var Show={};Show.LastAR=null,Show.showAR=function(a,r,w){if(Show.LastAR)Show.hideAR();var e=a;while(e&&e.nodeName!='TABLE')e=e.nextSibling;if(!e||e.nodeName!='TABLE'){var ref=((window)?w.document:document).getElementById(r);if(ref){e=ref.cloneNode(!0); e.removeAttribute('id');a.parentNode.appendChild(e)}} if(e)e.style.display='block';Show.LastAR=e};Show.hideAR=function(){Show.LastAR.style.display='none'};Show.toggleNext=function(a){var e=a;while(e.nodeName!='DIV')e=e.nextSibling;if(!e.style){}else if(!e.style.display){}else{var d,p_;if(e.style.display=='none'){d='block';p='-'}else{d='none';p='+'} e.style.display=d;if(a.textContent){a.textContent=p+a.textContent.substring(1)}else{a.innerText=p+a.innerText.substring(1)}}} XML 80 report.css IDEA: XBRL DOCUMENT /* Updated 2009-11-04 */ /* v2.2.0.24 */ /* DefRef Styles */ ..report table.authRefData{ background-color: #def; border: 2px solid #2F4497; font-size: 1em; position: absolute; } ..report table.authRefData a { display: block; font-weight: bold; } ..report table.authRefData p { margin-top: 0px; } ..report table.authRefData .hide { background-color: #2F4497; padding: 1px 3px 0px 0px; text-align: right; } ..report table.authRefData .hide a:hover { background-color: #2F4497; } ..report table.authRefData .body { height: 150px; overflow: auto; width: 400px; } ..report table.authRefData table{ font-size: 1em; } /* Report Styles */ ..pl a, .pl a:visited { color: black; text-decoration: none; } /* table */ ..report { background-color: white; border: 2px solid #acf; clear: both; color: black; font: normal 8pt Helvetica, Arial, san-serif; margin-bottom: 2em; } ..report hr { border: 1px solid #acf; } /* Top labels */ ..report th { background-color: #acf; color: black; font-weight: bold; text-align: center; } ..report th.void { background-color: transparent; color: #000000; font: bold 10pt Helvetica, Arial, san-serif; text-align: left; } ..report .pl { text-align: left; vertical-align: top; white-space: normal; width: 200px; white-space: normal; /* word-wrap: break-word; */ } ..report td.pl a.a { cursor: pointer; display: block; width: 200px; overflow: hidden; } ..report td.pl div.a { width: 200px; } ..report td.pl a:hover { background-color: #ffc; } /* Header rows... */ ..report tr.rh { background-color: #acf; color: black; font-weight: bold; } /* Calendars... */ ..report .rc { background-color: #f0f0f0; } /* Even rows... */ ..report .re, .report .reu { background-color: #def; } ..report .reu td { border-bottom: 1px solid black; } /* Odd rows... */ ..report .ro, .report .rou { background-color: white; } ..report .rou td { border-bottom: 1px solid black; } ..report .rou table td, .report .reu table td { border-bottom: 0px solid black; } /* styles for footnote marker */ ..report .fn { white-space: nowrap; } /* styles for numeric types */ ..report .num, .report .nump { text-align: right; white-space: nowrap; } ..report .nump { padding-left: 2em; } ..report .nump { padding: 0px 0.4em 0px 2em; } /* styles for text types */ ..report .text { text-align: left; white-space: normal; } ..report .text .big { margin-bottom: 1em; width: 17em; } ..report .text .more { display: none; } ..report .text .note { font-style: italic; font-weight: bold; } ..report .text .small { width: 10em; } ..report sup { font-style: italic; } ..report .outerFootnotes { font-size: 1em; } XML 82 FilingSummary.xml IDEA: XBRL DOCUMENT 3.24.1.u1 html 183 319 1 false 61 0 false 7 false false R1.htm 00090 - Document - Document and Entity Information Sheet http://www.veeco.com/role/DocumentDocumentAndEntityInformation Document and Entity Information Cover 1 false false R2.htm 00100 - Statement - Consolidated Balance Sheets Sheet http://www.veeco.com/role/StatementConsolidatedBalanceSheets Consolidated Balance Sheets Statements 2 false false R3.htm 00105 - Statement - Consolidated Balance Sheets (Parenthetical) Sheet http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical Consolidated Balance Sheets (Parenthetical) Statements 3 false false R4.htm 00200 - Statement - Consolidated Statements of Operations Sheet http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations Consolidated Statements of Operations Statements 4 false false R5.htm 00300 - Statement - Consolidated Statements of Comprehensive Income Sheet http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncome Consolidated Statements of Comprehensive Income Statements 5 false false R6.htm 00400 - Statement - Consolidated Statements of Cash Flows Sheet http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows Consolidated Statements of Cash Flows Statements 6 false false R7.htm 10101 - Disclosure - Basis of Presentation Sheet http://www.veeco.com/role/DisclosureBasisOfPresentation Basis of Presentation Notes 7 false false R8.htm 10201 - Disclosure - Income Per Common Share Sheet http://www.veeco.com/role/DisclosureIncomePerCommonShare Income Per Common Share Notes 8 false false R9.htm 10301 - Disclosure - Business Combination Sheet http://www.veeco.com/role/DisclosureBusinessCombination Business Combination Notes 9 false false R10.htm 10401 - Disclosure - Assets Sheet http://www.veeco.com/role/DisclosureAssets Assets Notes 10 false false R11.htm 10501 - Disclosure - Liabilities Sheet http://www.veeco.com/role/DisclosureLiabilities Liabilities Notes 11 false false R12.htm 10601 - Disclosure - Commitments and Contingencies Sheet http://www.veeco.com/role/DisclosureCommitmentsAndContingencies Commitments and Contingencies Notes 12 false false R13.htm 10701 - Disclosure - Equity Sheet http://www.veeco.com/role/DisclosureEquity Equity Notes 13 false false R14.htm 10801 - Disclosure - Share-based Compensation Sheet http://www.veeco.com/role/DisclosureShareBasedCompensation Share-based Compensation Notes 14 false false R15.htm 10901 - Disclosure - Income Taxes Sheet http://www.veeco.com/role/DisclosureIncomeTaxes Income Taxes Notes 15 false false R16.htm 11001 - Disclosure - Segment Reporting and Geographic Information Sheet http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformation Segment Reporting and Geographic Information Notes 16 false false R17.htm 20102 - Disclosure - Basis of Presentation (Policies) Sheet http://www.veeco.com/role/DisclosureBasisOfPresentationPolicies Basis of Presentation (Policies) Policies 17 false false R18.htm 30203 - Disclosure - Income Per Common Share (Tables) Sheet http://www.veeco.com/role/DisclosureIncomePerCommonShareTables Income Per Common Share (Tables) Tables http://www.veeco.com/role/DisclosureIncomePerCommonShare 18 false false R19.htm 30403 - Disclosure - Assets (Tables) Sheet http://www.veeco.com/role/DisclosureAssetsTables Assets (Tables) Tables http://www.veeco.com/role/DisclosureAssets 19 false false R20.htm 30503 - Disclosure - Liabilities (Tables) Sheet http://www.veeco.com/role/DisclosureLiabilitiesTables Liabilities (Tables) Tables http://www.veeco.com/role/DisclosureLiabilities 20 false false R21.htm 30603 - Disclosure - Commitments and Contingencies (Tables) Sheet http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesTables Commitments and Contingencies (Tables) Tables http://www.veeco.com/role/DisclosureCommitmentsAndContingencies 21 false false R22.htm 30703 - Disclosure - Equity (Tables) Sheet http://www.veeco.com/role/DisclosureEquityTables Equity (Tables) Tables http://www.veeco.com/role/DisclosureEquity 22 false false R23.htm 30803 - Disclosure - Share-based Compensation (Tables) Sheet http://www.veeco.com/role/DisclosureShareBasedCompensationTables Share-based Compensation (Tables) Tables http://www.veeco.com/role/DisclosureShareBasedCompensation 23 false false R24.htm 30903 - Disclosure - Income Taxes (Tables) Sheet http://www.veeco.com/role/DisclosureIncomeTaxesTables Income Taxes (Tables) Tables http://www.veeco.com/role/DisclosureIncomeTaxes 24 false false R25.htm 31003 - Disclosure - Segment Reporting and Geographic Information (Tables) Sheet http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables Segment Reporting and Geographic Information (Tables) Tables http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformation 25 false false R26.htm 40101 - Disclosure - Basis of Presentation - Fiscal Period (Details) Sheet http://www.veeco.com/role/DisclosureBasisOfPresentationFiscalPeriodDetails Basis of Presentation - Fiscal Period (Details) Details 26 false false R27.htm 40102 - Disclosure - Basis of Presentation - Revenue Recognition (Details) Sheet http://www.veeco.com/role/DisclosureBasisOfPresentationRevenueRecognitionDetails Basis of Presentation - Revenue Recognition (Details) Details 27 false false R28.htm 40201 - Disclosure - Income Per Common Share - Basic and Diluted (Details) Sheet http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails Income Per Common Share - Basic and Diluted (Details) Details 28 false false R29.htm 40202 - Disclosure - Income Per Common Share - Shares Excluded from EPS (Details) Sheet http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails Income Per Common Share - Shares Excluded from EPS (Details) Details 29 false false R30.htm 40301 - Disclosure - Business Combination - Consideration (Details) Sheet http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails Business Combination - Consideration (Details) Details 30 false false R31.htm 40401 - Disclosure - Assets - Fair Value (Details) Sheet http://www.veeco.com/role/DisclosureAssetsFairValueDetails Assets - Fair Value (Details) Details 31 false false R32.htm 40402 - Disclosure - Assets - Available-For-Sale Securities (Details) Sheet http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails Assets - Available-For-Sale Securities (Details) Details 32 false false R33.htm 40403 - Disclosure - Assets - Accounts Receivable (Details) Sheet http://www.veeco.com/role/DisclosureAssetsAccountsReceivableDetails Assets - Accounts Receivable (Details) Details 33 false false R34.htm 40404 - Disclosure - Assets - Inventories (Details) Sheet http://www.veeco.com/role/DisclosureAssetsInventoriesDetails Assets - Inventories (Details) Details 34 false false R35.htm 40405 - Disclosure - Assets - Prepaid Expenses and Other Current Assets (Details) Sheet http://www.veeco.com/role/DisclosureAssetsPrepaidExpensesAndOtherCurrentAssetsDetails Assets - Prepaid Expenses and Other Current Assets (Details) Details 35 false false R36.htm 40406 - Disclosure - Assets - Property, Plant, and Equipment (Details) Sheet http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails Assets - Property, Plant, and Equipment (Details) Details 36 false false R37.htm 40407 - Disclosure - Assets - Goodwill (Details) Sheet http://www.veeco.com/role/DisclosureAssetsGoodwillDetails Assets - Goodwill (Details) Details 37 false false R38.htm 40408 - Disclosure - Assets - Intangible Assets (Details) Sheet http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails Assets - Intangible Assets (Details) Details 38 false false R39.htm 40501 - Disclosure - Liabilities - Accrued Expenses and Other Current Liabilities (Details) Sheet http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails Liabilities - Accrued Expenses and Other Current Liabilities (Details) Details 39 false false R40.htm 40502 - Disclosure - Liabilities - Warranty (Details) Sheet http://www.veeco.com/role/DisclosureLiabilitiesWarrantyDetails Liabilities - Warranty (Details) Details 40 false false R41.htm 40503 - Disclosure - Liabilities - Contract Liabilities (Details) Sheet http://www.veeco.com/role/DisclosureLiabilitiesContractLiabilitiesDetails Liabilities - Contract Liabilities (Details) Details 41 false false R42.htm 40505 - Disclosure - Liabilities - Performance Obligations Timing (Details) Sheet http://www.veeco.com/role/DisclosureLiabilitiesPerformanceObligationsTimingDetails Liabilities - Performance Obligations Timing (Details) Details 42 false false R43.htm 40506 - Disclosure - Liabilities - 2023, 2025, 2027 and 2029 Convertible Senior Notes (Details) Notes http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails Liabilities - 2023, 2025, 2027 and 2029 Convertible Senior Notes (Details) Details 43 false false R44.htm 40507 - Disclosure - Liabilities - Convertible Senior Notes (Details) Notes http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails Liabilities - Convertible Senior Notes (Details) Details 44 false false R45.htm 40508 - Disclosure - Liabilities - Convertible Senior Notes Carrying Value (Details) Notes http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails Liabilities - Convertible Senior Notes Carrying Value (Details) Details 45 false false R46.htm 40509 - Disclosure - Liabilities - Convertible Senior Notes - Interest Expense (Details) Notes http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails Liabilities - Convertible Senior Notes - Interest Expense (Details) Details 46 false false R47.htm 40510 - Disclosure - Liabilities - Capped Call Transactions (Details) Sheet http://www.veeco.com/role/DisclosureLiabilitiesCappedCallTransactionsDetails Liabilities - Capped Call Transactions (Details) Details 47 false false R48.htm 40511 - Disclosure - Liabilities - Revolving Credit Facility (Details) Sheet http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails Liabilities - Revolving Credit Facility (Details) Details 48 false false R49.htm 40512 - Disclosure - Liabilities - Other Liabilities (Details) Sheet http://www.veeco.com/role/DisclosureLiabilitiesOtherLiabilitiesDetails Liabilities - Other Liabilities (Details) Details 49 false false R50.htm 40601 - Disclosure - Commitments and Contingencies - Lease terms (Details) Sheet http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails Commitments and Contingencies - Lease terms (Details) Details 50 false false R51.htm 40602 - Disclosure - Commitments and Contingencies - Minimum lease commitments (Details) Sheet http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails Commitments and Contingencies - Minimum lease commitments (Details) Details 51 false false R52.htm 40603 - Disclosure - Commitments and Contingencies - Lease costs (Details) Sheet http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails Commitments and Contingencies - Lease costs (Details) Details 52 false false R53.htm 40604 - Disclosure - Commitments and Contingencies - Receivable Purchase Agreement (Details) Sheet http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails Commitments and Contingencies - Receivable Purchase Agreement (Details) Details 53 false false R54.htm 40605 - Disclosure - Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details) Sheet http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details) Details 54 false false R55.htm 40701 - Disclosure - Equity - Statement of Stockholders' Equity (Details) Sheet http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails Equity - Statement of Stockholders' Equity (Details) Details 55 false false R56.htm 40702 - Disclosure - Equity - AOCI Rollforward (Details) Sheet http://www.veeco.com/role/DisclosureEquityAociRollforwardDetails Equity - AOCI Rollforward (Details) Details 56 false false R57.htm 40801 - Disclosure - Share-based Compensation - Recognized Share-based Compensation (Details) Sheet http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails Share-based Compensation - Recognized Share-based Compensation (Details) Details 57 false false R58.htm 40802 - Disclosure - Share-based Compensation - Restricted shares and performance shares (Details) Sheet http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails Share-based Compensation - Restricted shares and performance shares (Details) Details 58 false false R59.htm 40901 - Disclosure - Income Taxes (Details) Sheet http://www.veeco.com/role/DisclosureIncomeTaxesDetails Income Taxes (Details) Details http://www.veeco.com/role/DisclosureIncomeTaxesTables 59 false false R60.htm 41001 - Disclosure - Segment Reporting and Geographic Information (Details) Sheet http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails Segment Reporting and Geographic Information (Details) Details http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables 60 false false R61.htm 995410 - Disclosure - Pay vs Performance Disclosure Sheet http://xbrl.sec.gov/ecd/role/PvpDisclosure Pay vs Performance Disclosure Uncategorized 61 false false R62.htm 995445 - Disclosure - Insider Trading Arrangements Sheet http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements Insider Trading Arrangements Cover 62 false false All Reports Book All Reports [ix-0514-Hidden-Fact-Eligible-For-Transform] WARN: 2 fact(s) appearing in ix:hidden were eligible for transformation: us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1, us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod - veco-20240331x10q.htm 9 [dq-0712-Presentation-Base-Set-Order] Role '41001 - Disclosure - Segment Reporting and Geographic Information (Details)', a level 4, Detail role, appears before '995410 - Disclosure - Pay vs Performance Disclosure', a level 1, Note role. https://xbrl.sec.gov/ecd/2023/ecd-2023.xsd 30, veco-20240331.xsd 201 veco-20240331.xsd veco-20240331_cal.xml veco-20240331_def.xml veco-20240331_lab.xml veco-20240331_pre.xml veco-20240331x10q.htm http://fasb.org/us-gaap/2023 http://xbrl.sec.gov/dei/2023 http://xbrl.sec.gov/ecd/2023 true true JSON 85 MetaLinks.json IDEA: XBRL DOCUMENT { "version": "2.2", "instance": { "veco-20240331x10q.htm": { "nsprefix": "veco", "nsuri": "http://www.veeco.com/20240331", "dts": { "schema": { "local": [ "veco-20240331.xsd" ], "remote": [ "http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd", "http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd", "http://www.xbrl.org/2003/xl-2003-12-31.xsd", "http://www.xbrl.org/2003/xlink-2003-12-31.xsd", "http://www.xbrl.org/2005/xbrldt-2005.xsd", "http://www.xbrl.org/2006/ref-2006-02-27.xsd", "http://www.xbrl.org/lrr/arcrole/esma-arcrole-2018-11-21.xsd", "http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd", "http://www.xbrl.org/lrr/role/reference-2009-12-16.xsd", "https://www.xbrl.org/2020/extensible-enumerations-2.0.xsd", "https://www.xbrl.org/dtr/type/2020-01-21/types.xsd", "https://www.xbrl.org/dtr/type/2022-03-31/types.xsd", "https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd", "https://xbrl.fasb.org/srt/2023/elts/srt-roles-2023.xsd", "https://xbrl.fasb.org/srt/2023/elts/srt-types-2023.xsd", "https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd", "https://xbrl.fasb.org/us-gaap/2023/elts/us-roles-2023.xsd", "https://xbrl.fasb.org/us-gaap/2023/elts/us-types-2023.xsd", "https://xbrl.sec.gov/country/2023/country-2023.xsd", "https://xbrl.sec.gov/dei/2023/dei-2023.xsd", "https://xbrl.sec.gov/ecd/2023/ecd-2023.xsd", "https://xbrl.sec.gov/ecd/2023/ecd-sub-2023.xsd" ] }, "calculationLink": { "local": [ "veco-20240331_cal.xml" ] }, "definitionLink": { "local": [ "veco-20240331_def.xml" ] }, "labelLink": { "local": [ "veco-20240331_lab.xml" ] }, "presentationLink": { "local": [ "veco-20240331_pre.xml" ] }, "inline": { "local": [ "veco-20240331x10q.htm" ] } }, "keyStandard": 279, "keyCustom": 40, "axisStandard": 21, "axisCustom": 0, "memberStandard": 37, "memberCustom": 22, "hidden": { "total": 16, "http://fasb.org/us-gaap/2023": 11, "http://xbrl.sec.gov/dei/2023": 5 }, "contextCount": 183, "entityCount": 1, "segmentCount": 61, "elementCount": 581, "unitCount": 7, "baseTaxonomies": { "http://fasb.org/us-gaap/2023": 639, "http://xbrl.sec.gov/dei/2023": 29, "http://xbrl.sec.gov/ecd/2023": 8 }, "report": { "R1": { "role": "http://www.veeco.com/role/DocumentDocumentAndEntityInformation", "longName": "00090 - Document - Document and Entity Information", "shortName": "Document and Entity Information", "isDefault": "true", "groupType": "document", "subGroupType": "", "menuCat": "Cover", "order": "1", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "dei:DocumentType", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "p", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "dei:DocumentType", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "p", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R2": { "role": "http://www.veeco.com/role/StatementConsolidatedBalanceSheets", "longName": "00100 - Statement - Consolidated Balance Sheets", "shortName": "Consolidated Balance Sheets", "isDefault": "false", "groupType": "statement", "subGroupType": "", "menuCat": "Statements", "order": "2", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:CashAndCashEquivalentsAtCarryingValue", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R3": { "role": "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical", "longName": "00105 - Statement - Consolidated Balance Sheets (Parenthetical)", "shortName": "Consolidated Balance Sheets (Parenthetical)", "isDefault": "false", "groupType": "statement", "subGroupType": "parenthetical", "menuCat": "Statements", "order": "3", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:PreferredStockParOrStatedValuePerShare", "unitRef": "Unit_Divide_USD_shares_raqWLBcAdkSdzcdSwSuHzA", "xsiNil": "false", "lang": null, "decimals": "INF", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:PreferredStockParOrStatedValuePerShare", "unitRef": "Unit_Divide_USD_shares_raqWLBcAdkSdzcdSwSuHzA", "xsiNil": "false", "lang": null, "decimals": "INF", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R4": { "role": "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations", "longName": "00200 - Statement - Consolidated Statements of Operations", "shortName": "Consolidated Statements of Operations", "isDefault": "false", "groupType": "statement", "subGroupType": "", "menuCat": "Statements", "order": "4", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:CostOfGoodsAndServicesSold", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "unique": true } }, "R5": { "role": "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncome", "longName": "00300 - Statement - Consolidated Statements of Comprehensive Income", "shortName": "Consolidated Statements of Comprehensive Income", "isDefault": "false", "groupType": "statement", "subGroupType": "", "menuCat": "Statements", "order": "5", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:NetIncomeLoss", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "unique": true } }, "R6": { "role": "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows", "longName": "00400 - Statement - Consolidated Statements of Cash Flows", "shortName": "Consolidated Statements of Cash Flows", "isDefault": "false", "groupType": "statement", "subGroupType": "", "menuCat": "Statements", "order": "6", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:ProfitLoss", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:ProfitLoss", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R7": { "role": "http://www.veeco.com/role/DisclosureBasisOfPresentation", "longName": "10101 - Disclosure - Basis of Presentation", "shortName": "Basis of Presentation", "isDefault": "false", "groupType": "disclosure", "subGroupType": "", "menuCat": "Notes", "order": "7", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:BasisOfPresentationAndSignificantAccountingPoliciesTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:BasisOfPresentationAndSignificantAccountingPoliciesTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R8": { "role": "http://www.veeco.com/role/DisclosureIncomePerCommonShare", "longName": "10201 - Disclosure - Income Per Common Share", "shortName": "Income Per Common Share", "isDefault": "false", "groupType": "disclosure", "subGroupType": "", "menuCat": "Notes", "order": "8", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:EarningsPerShareTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:EarningsPerShareTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R9": { "role": "http://www.veeco.com/role/DisclosureBusinessCombination", "longName": "10301 - Disclosure - Business Combination", "shortName": "Business Combination", "isDefault": "false", "groupType": "disclosure", "subGroupType": "", "menuCat": "Notes", "order": "9", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:BusinessCombinationDisclosureTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:BusinessCombinationDisclosureTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R10": { "role": "http://www.veeco.com/role/DisclosureAssets", "longName": "10401 - Disclosure - Assets", "shortName": "Assets", "isDefault": "false", "groupType": "disclosure", "subGroupType": "", "menuCat": "Notes", "order": "10", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "veco:BalanceSheetRelatedAssetsDisclosuresTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "veco:BalanceSheetRelatedAssetsDisclosuresTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R11": { "role": "http://www.veeco.com/role/DisclosureLiabilities", "longName": "10501 - Disclosure - Liabilities", "shortName": "Liabilities", "isDefault": "false", "groupType": "disclosure", "subGroupType": "", "menuCat": "Notes", "order": "11", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "veco:BalanceSheetRelatedLiabilitiesDisclosuresTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "veco:BalanceSheetRelatedLiabilitiesDisclosuresTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R12": { "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingencies", "longName": "10601 - Disclosure - Commitments and Contingencies", "shortName": "Commitments and Contingencies", "isDefault": "false", "groupType": "disclosure", "subGroupType": "", "menuCat": "Notes", "order": "12", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R13": { "role": "http://www.veeco.com/role/DisclosureEquity", "longName": "10701 - Disclosure - Equity", "shortName": "Equity", "isDefault": "false", "groupType": "disclosure", "subGroupType": "", "menuCat": "Notes", "order": "13", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:StockholdersEquityNoteDisclosureTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:StockholdersEquityNoteDisclosureTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R14": { "role": "http://www.veeco.com/role/DisclosureShareBasedCompensation", "longName": "10801 - Disclosure - Share-based Compensation", "shortName": "Share-based Compensation", "isDefault": "false", "groupType": "disclosure", "subGroupType": "", "menuCat": "Notes", "order": "14", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R15": { "role": "http://www.veeco.com/role/DisclosureIncomeTaxes", "longName": "10901 - Disclosure - Income Taxes", "shortName": "Income Taxes", "isDefault": "false", "groupType": "disclosure", "subGroupType": "", "menuCat": "Notes", "order": "15", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:IncomeTaxDisclosureTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:IncomeTaxDisclosureTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R16": { "role": "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformation", "longName": "11001 - Disclosure - Segment Reporting and Geographic Information", "shortName": "Segment Reporting and Geographic Information", "isDefault": "false", "groupType": "disclosure", "subGroupType": "", "menuCat": "Notes", "order": "16", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:SegmentReportingDisclosureTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:SegmentReportingDisclosureTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R17": { "role": "http://www.veeco.com/role/DisclosureBasisOfPresentationPolicies", "longName": "20102 - Disclosure - Basis of Presentation (Policies)", "shortName": "Basis of Presentation (Policies)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "policies", "menuCat": "Policies", "order": "17", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:BasisOfAccountingPolicyPolicyTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "us-gaap:BasisOfPresentationAndSignificantAccountingPoliciesTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:BasisOfAccountingPolicyPolicyTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "us-gaap:BasisOfPresentationAndSignificantAccountingPoliciesTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R18": { "role": "http://www.veeco.com/role/DisclosureIncomePerCommonShareTables", "longName": "30203 - Disclosure - Income Per Common Share (Tables)", "shortName": "Income Per Common Share (Tables)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "tables", "menuCat": "Tables", "order": "18", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "us-gaap:EarningsPerShareTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "us-gaap:EarningsPerShareTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R19": { "role": "http://www.veeco.com/role/DisclosureAssetsTables", "longName": "30403 - Disclosure - Assets (Tables)", "shortName": "Assets (Tables)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "tables", "menuCat": "Tables", "order": "19", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:FairValueAssetsMeasuredOnRecurringBasisTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:FairValueAssetsMeasuredOnRecurringBasisTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R20": { "role": "http://www.veeco.com/role/DisclosureLiabilitiesTables", "longName": "30503 - Disclosure - Liabilities (Tables)", "shortName": "Liabilities (Tables)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "tables", "menuCat": "Tables", "order": "20", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:ScheduleOfAccruedLiabilitiesTableTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "veco:BalanceSheetRelatedLiabilitiesDisclosuresTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:ScheduleOfAccruedLiabilitiesTableTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "veco:BalanceSheetRelatedLiabilitiesDisclosuresTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R21": { "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesTables", "longName": "30603 - Disclosure - Commitments and Contingencies (Tables)", "shortName": "Commitments and Contingencies (Tables)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "tables", "menuCat": "Tables", "order": "21", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:LesseeOperatingLeaseLiabilityMaturityTableTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:LesseeOperatingLeaseLiabilityMaturityTableTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R22": { "role": "http://www.veeco.com/role/DisclosureEquityTables", "longName": "30703 - Disclosure - Equity (Tables)", "shortName": "Equity (Tables)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "tables", "menuCat": "Tables", "order": "22", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:ScheduleOfStockholdersEquityTableTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "us-gaap:StockholdersEquityNoteDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:ScheduleOfStockholdersEquityTableTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "us-gaap:StockholdersEquityNoteDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R23": { "role": "http://www.veeco.com/role/DisclosureShareBasedCompensationTables", "longName": "30803 - Disclosure - Share-based Compensation (Tables)", "shortName": "Share-based Compensation (Tables)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "tables", "menuCat": "Tables", "order": "23", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R24": { "role": "http://www.veeco.com/role/DisclosureIncomeTaxesTables", "longName": "30903 - Disclosure - Income Taxes (Tables)", "shortName": "Income Taxes (Tables)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "tables", "menuCat": "Tables", "order": "24", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "veco:PreTaxIncomeLossAndProvisionForIncomeTaxTableTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "us-gaap:IncomeTaxDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "veco:PreTaxIncomeLossAndProvisionForIncomeTaxTableTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "us-gaap:IncomeTaxDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R25": { "role": "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables", "longName": "31003 - Disclosure - Segment Reporting and Geographic Information (Tables)", "shortName": "Segment Reporting and Geographic Information (Tables)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "tables", "menuCat": "Tables", "order": "25", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "us-gaap:ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "us-gaap:ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R26": { "role": "http://www.veeco.com/role/DisclosureBasisOfPresentationFiscalPeriodDetails", "longName": "40101 - Disclosure - Basis of Presentation - Fiscal Period (Details)", "shortName": "Basis of Presentation - Fiscal Period (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "26", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:FiscalPeriodDuration", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "p", "us-gaap:FiscalPeriod", "us-gaap:BasisOfPresentationAndSignificantAccountingPoliciesTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:FiscalPeriodDuration", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "p", "us-gaap:FiscalPeriod", "us-gaap:BasisOfPresentationAndSignificantAccountingPoliciesTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R27": { "role": "http://www.veeco.com/role/DisclosureBasisOfPresentationRevenueRecognitionDetails", "longName": "40102 - Disclosure - Basis of Presentation - Revenue Recognition (Details)", "shortName": "Basis of Presentation - Revenue Recognition (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "27", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:RevenuePracticalExpedientIncrementalCostOfObtainingContract", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "p", "ix:continuation", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:RevenuePracticalExpedientIncrementalCostOfObtainingContract", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "p", "ix:continuation", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R28": { "role": "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails", "longName": "40201 - Disclosure - Income Per Common Share - Basic and Diluted (Details)", "shortName": "Income Per Common Share - Basic and Diluted (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "28", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock", "us-gaap:EarningsPerShareTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock", "us-gaap:EarningsPerShareTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R29": { "role": "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails", "longName": "40202 - Disclosure - Income Per Common Share - Shares Excluded from EPS (Details)", "shortName": "Income Per Common Share - Shares Excluded from EPS (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "29", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_PotentiallyDilutiveSharesMember_ebIgxBkgmUugAUOO8C43JQ", "name": "us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount", "unitRef": "Unit_Standard_shares_dyEbf8XVbk66TRrOGOw33Q", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock", "us-gaap:EarningsPerShareTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_PotentiallyDilutiveSharesMember_ebIgxBkgmUugAUOO8C43JQ", "name": "us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount", "unitRef": "Unit_Standard_shares_dyEbf8XVbk66TRrOGOw33Q", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock", "us-gaap:EarningsPerShareTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R30": { "role": "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails", "longName": "40301 - Disclosure - Business Combination - Consideration (Details)", "shortName": "Business Combination - Consideration (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "30", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:BusinessCombinationContingentConsiderationArrangementsChangeInAmountOfContingentConsiderationLiability1", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2023_To_1_31_2023_us-gaap_BusinessAcquisitionAxis_veco_EpiluvacAbMember_XZWwSLQssUOxA9hk6ysR5Q", "name": "us-gaap:BusinessCombinationConsiderationTransferred1", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "us-gaap:BusinessCombinationDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "unique": true } }, "R31": { "role": "http://www.veeco.com/role/DisclosureAssetsFairValueDetails", "longName": "40401 - Disclosure - Assets - Fair Value (Details)", "shortName": "Assets - Fair Value (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "31", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "veco:FairValueAssetsLevel1ToLevel2TransfersAmount1", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "veco:FairValueAssetsLevel2ToLevel1TransfersAmount1", "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "veco:FairValueAssetsLevel1ToLevel2TransfersAmount1", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "veco:FairValueAssetsLevel2ToLevel1TransfersAmount1", "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R32": { "role": "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails", "longName": "40402 - Disclosure - Assets - Available-For-Sale Securities (Details)", "shortName": "Assets - Available-For-Sale Securities (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "32", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true }, "uniqueAnchor": { "contextRef": "As_Of_12_31_2023_tv4sX6pEQEqpflLIRyhpYw", "name": "us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedGainBeforeTax", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "unique": true } }, "R33": { "role": "http://www.veeco.com/role/DisclosureAssetsAccountsReceivableDetails", "longName": "40403 - Disclosure - Assets - Accounts Receivable (Details)", "shortName": "Assets - Accounts Receivable (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "33", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R34": { "role": "http://www.veeco.com/role/DisclosureAssetsInventoriesDetails", "longName": "40404 - Disclosure - Assets - Inventories (Details)", "shortName": "Assets - Inventories (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "34", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:InventoryRawMaterialsNetOfReserves", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfInventoryCurrentTableTextBlock", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:InventoryRawMaterialsNetOfReserves", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfInventoryCurrentTableTextBlock", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R35": { "role": "http://www.veeco.com/role/DisclosureAssetsPrepaidExpensesAndOtherCurrentAssetsDetails", "longName": "40405 - Disclosure - Assets - Prepaid Expenses and Other Current Assets (Details)", "shortName": "Assets - Prepaid Expenses and Other Current Assets (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "35", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:DepositAssets", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:DepositAssets", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R36": { "role": "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails", "longName": "40406 - Disclosure - Assets - Property, Plant, and Equipment (Details)", "shortName": "Assets - Property, Plant, and Equipment (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "36", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:PropertyPlantAndEquipmentGross", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:PropertyPlantAndEquipmentTextBlock", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:PropertyPlantAndEquipmentGross", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:PropertyPlantAndEquipmentTextBlock", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R37": { "role": "http://www.veeco.com/role/DisclosureAssetsGoodwillDetails", "longName": "40407 - Disclosure - Assets - Goodwill (Details)", "shortName": "Assets - Goodwill (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "37", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:GoodwillPeriodIncreaseDecrease", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:GoodwillPeriodIncreaseDecrease", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R38": { "role": "http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails", "longName": "40408 - Disclosure - Assets - Intangible Assets (Details)", "shortName": "Assets - Intangible Assets (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "38", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:FiniteLivedIntangibleAssetsGross", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "veco:ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:FiniteLivedIntangibleAssetsGross", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "veco:ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R39": { "role": "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails", "longName": "40501 - Disclosure - Liabilities - Accrued Expenses and Other Current Liabilities (Details)", "shortName": "Liabilities - Accrued Expenses and Other Current Liabilities (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "39", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:EmployeeRelatedLiabilitiesCurrent", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfAccruedLiabilitiesTableTextBlock", "veco:BalanceSheetRelatedLiabilitiesDisclosuresTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:EmployeeRelatedLiabilitiesCurrent", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfAccruedLiabilitiesTableTextBlock", "veco:BalanceSheetRelatedLiabilitiesDisclosuresTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R40": { "role": "http://www.veeco.com/role/DisclosureLiabilitiesWarrantyDetails", "longName": "40502 - Disclosure - Liabilities - Warranty (Details)", "shortName": "Liabilities - Warranty (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "40", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "veco:ProductWarrantyPeriod", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "p", "veco:BalanceSheetRelatedLiabilitiesDisclosuresTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "veco:ProductWarrantyPeriod", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "p", "veco:BalanceSheetRelatedLiabilitiesDisclosuresTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R41": { "role": "http://www.veeco.com/role/DisclosureLiabilitiesContractLiabilitiesDetails", "longName": "40503 - Disclosure - Liabilities - Contract Liabilities (Details)", "shortName": "Liabilities - Contract Liabilities (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "41", "firstAnchor": { "contextRef": "As_Of_12_31_2023_tv4sX6pEQEqpflLIRyhpYw", "name": "us-gaap:ContractWithCustomerLiability", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_12_31_2023_tv4sX6pEQEqpflLIRyhpYw", "name": "us-gaap:ContractWithCustomerLiability", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R42": { "role": "http://www.veeco.com/role/DisclosureLiabilitiesPerformanceObligationsTimingDetails", "longName": "40505 - Disclosure - Liabilities - Performance Obligations Timing (Details)", "shortName": "Liabilities - Performance Obligations Timing (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "42", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:RevenueRemainingPerformanceObligation", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:RevenueRemainingPerformanceObligation", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R43": { "role": "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "longName": "40506 - Disclosure - Liabilities - 2023, 2025, 2027 and 2029 Convertible Senior Notes (Details)", "shortName": "Liabilities - 2023, 2025, 2027 and 2029 Convertible Senior Notes (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "43", "firstAnchor": { "contextRef": "As_Of_12_31_2023_tv4sX6pEQEqpflLIRyhpYw", "name": "us-gaap:DebtInstrumentFaceAmount", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ConvertibleDebtTableTextBlock", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true }, "uniqueAnchor": { "contextRef": "As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_LQ1tSx1aA06qglajaRxFgQ", "name": "us-gaap:DebtInstrumentFaceAmount", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "unique": true } }, "R44": { "role": "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails", "longName": "40507 - Disclosure - Liabilities - Convertible Senior Notes (Details)", "shortName": "Liabilities - Convertible Senior Notes (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "44", "firstAnchor": { "contextRef": "Duration_5_19_2023_To_5_19_2023_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2029Member_ygO7ZAzh6EO3dpK1CAGiEg", "name": "us-gaap:DebtInstrumentConvertibleConversionRatio1", "unitRef": "Unit_Standard_pure_iPiJ3PQQr0OuA4yx2ZyksQ", "xsiNil": "false", "lang": null, "decimals": "8", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_5_19_2023_To_5_19_2023_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2029Member_ygO7ZAzh6EO3dpK1CAGiEg", "name": "us-gaap:DebtInstrumentConvertibleConversionRatio1", "unitRef": "Unit_Standard_pure_iPiJ3PQQr0OuA4yx2ZyksQ", "xsiNil": "false", "lang": null, "decimals": "8", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R45": { "role": "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails", "longName": "40508 - Disclosure - Liabilities - Convertible Senior Notes Carrying Value (Details)", "shortName": "Liabilities - Convertible Senior Notes Carrying Value (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "45", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:DebtInstrumentFaceAmount", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ConvertibleDebtTableTextBlock", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ConvertibleDebtTableTextBlock", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "unique": true } }, "R46": { "role": "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails", "longName": "40509 - Disclosure - Liabilities - Convertible Senior Notes - Interest Expense (Details)", "shortName": "Liabilities - Convertible Senior Notes - Interest Expense (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "46", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:AmortizationOfFinancingCostsAndDiscounts", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:InterestExpenseDebt", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:InterestIncomeAndInterestExpenseDisclosureTableTextBlock", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "unique": true } }, "R47": { "role": "http://www.veeco.com/role/DisclosureLiabilitiesCappedCallTransactionsDetails", "longName": "40510 - Disclosure - Liabilities - Capped Call Transactions (Details)", "shortName": "Liabilities - Capped Call Transactions (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "47", "firstAnchor": { "contextRef": "As_Of_5_13_2020_us-gaap_DerivativeInstrumentRiskAxis_veco_DerivativeContractCappedCallMember_Z2fliEpuGkeaGTthOu1VCQ", "name": "veco:CappedCallTransactionsPrice", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_5_13_2020_us-gaap_DerivativeInstrumentRiskAxis_veco_DerivativeContractCappedCallMember_Z2fliEpuGkeaGTthOu1VCQ", "name": "veco:CappedCallTransactionsPrice", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R48": { "role": "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails", "longName": "40511 - Disclosure - Liabilities - Revolving Credit Facility (Details)", "shortName": "Liabilities - Revolving Credit Facility (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "48", "firstAnchor": { "contextRef": "As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_8CvHgCT6vE2eNz-rcobcow", "name": "us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-6", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_8CvHgCT6vE2eNz-rcobcow", "name": "us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-6", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R49": { "role": "http://www.veeco.com/role/DisclosureLiabilitiesOtherLiabilitiesDetails", "longName": "40512 - Disclosure - Liabilities - Other Liabilities (Details)", "shortName": "Liabilities - Other Liabilities (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "49", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:OtherLiabilitiesNoncurrent", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:BusinessCombinationContingentConsiderationLiabilityNoncurrent", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "unique": true } }, "R50": { "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails", "longName": "40601 - Disclosure - Commitments and Contingencies - Lease terms (Details)", "shortName": "Commitments and Contingencies - Lease terms (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "50", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:LesseeOperatingLeaseRenewalTerm", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "p", "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:LesseeOperatingLeaseRenewalTerm", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "p", "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R51": { "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails", "longName": "40602 - Disclosure - Commitments and Contingencies - Minimum lease commitments (Details)", "shortName": "Commitments and Contingencies - Minimum lease commitments (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "51", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:LesseeOperatingLeaseLiabilityMaturityTableTextBlock", "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:LesseeOperatingLeaseLiabilityMaturityTableTextBlock", "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R52": { "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails", "longName": "40603 - Disclosure - Commitments and Contingencies - Lease costs (Details)", "shortName": "Commitments and Contingencies - Lease costs (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "52", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:OperatingLeaseCost", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:OperatingLeaseCost", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R53": { "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails", "longName": "40604 - Disclosure - Commitments and Contingencies - Receivable Purchase Agreement (Details)", "shortName": "Commitments and Contingencies - Receivable Purchase Agreement (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "53", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "veco:ReceivablePurchaseAgreementMaximumAmount", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "veco:ReceivablePurchaseAgreementMaximumAmount", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R54": { "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails", "longName": "40605 - Disclosure - Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details)", "shortName": "Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "54", "firstAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_3_31_2024_0ZXkG8lhdEuAA0kXqDiozA", "name": "us-gaap:UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-5", "ancestors": [ "p", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R55": { "role": "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails", "longName": "40701 - Disclosure - Equity - Statement of Stockholders' Equity (Details)", "shortName": "Equity - Statement of Stockholders' Equity (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "55", "firstAnchor": { "contextRef": "As_Of_12_31_2023_tv4sX6pEQEqpflLIRyhpYw", "name": "us-gaap:StockholdersEquity", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfStockholdersEquityTableTextBlock", "us-gaap:StockholdersEquityNoteDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "unique": true } }, "R56": { "role": "http://www.veeco.com/role/DisclosureEquityAociRollforwardDetails", "longName": "40702 - Disclosure - Equity - AOCI Rollforward (Details)", "shortName": "Equity - AOCI Rollforward (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "56", "firstAnchor": { "contextRef": "As_Of_12_31_2023_tv4sX6pEQEqpflLIRyhpYw", "name": "us-gaap:StockholdersEquity", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_excNgX9Iy0u7ziUqSGgqqg", "name": "us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock", "ix:continuation", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "unique": true } }, "R57": { "role": "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails", "longName": "40801 - Disclosure - Share-based Compensation - Recognized Share-based Compensation (Details)", "shortName": "Share-based Compensation - Recognized Share-based Compensation (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "57", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:AllocatedShareBasedCompensationExpense", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock", "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:AllocatedShareBasedCompensationExpense", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock", "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R58": { "role": "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails", "longName": "40802 - Disclosure - Share-based Compensation - Restricted shares and performance shares (Details)", "shortName": "Share-based Compensation - Restricted shares and performance shares (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "58", "firstAnchor": { "contextRef": "As_Of_12_31_2023_us-gaap_AwardTypeAxis_veco_RestrictedAndPerformanceSharesMember_IGk08O_f5E6T2ICLW-wDUA", "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber", "unitRef": "Unit_Standard_shares_dyEbf8XVbk66TRrOGOw33Q", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock", "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "As_Of_12_31_2023_us-gaap_AwardTypeAxis_veco_RestrictedAndPerformanceSharesMember_IGk08O_f5E6T2ICLW-wDUA", "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber", "unitRef": "Unit_Standard_shares_dyEbf8XVbk66TRrOGOw33Q", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock", "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R59": { "role": "http://www.veeco.com/role/DisclosureIncomeTaxesDetails", "longName": "40901 - Disclosure - Income Taxes (Details)", "shortName": "Income Taxes (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "59", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:EffectiveIncomeTaxRateContinuingOperations", "unitRef": "Unit_Standard_pure_iPiJ3PQQr0OuA4yx2ZyksQ", "xsiNil": "false", "lang": null, "decimals": "4", "ancestors": [ "p", "td", "tr", "table", "veco:PreTaxIncomeLossAndProvisionForIncomeTaxTableTextBlock", "us-gaap:IncomeTaxDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "unique": true } }, "R60": { "role": "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails", "longName": "41001 - Disclosure - Segment Reporting and Geographic Information (Details)", "shortName": "Segment Reporting and Geographic Information (Details)", "isDefault": "false", "groupType": "disclosure", "subGroupType": "details", "menuCat": "Details", "order": "60", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:NumberOfOperatingSegments", "unitRef": "Unit_Standard_segment_rz1On3iCME20St72j3yLsw", "xsiNil": "false", "lang": null, "decimals": "INF", "ancestors": [ "p", "us-gaap:SegmentReportingDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:NumberOfOperatingSegments", "unitRef": "Unit_Standard_segment_rz1On3iCME20St72j3yLsw", "xsiNil": "false", "lang": null, "decimals": "INF", "ancestors": [ "p", "us-gaap:SegmentReportingDisclosureTextBlock", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } }, "R61": { "role": "http://xbrl.sec.gov/ecd/role/PvpDisclosure", "longName": "995410 - Disclosure - Pay vs Performance Disclosure", "shortName": "Pay vs Performance Disclosure", "isDefault": "false", "groupType": "disclosure", "subGroupType": "", "menuCat": "Uncategorized", "order": "61", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "us-gaap:NetIncomeLoss", "unitRef": "Unit_Standard_USD_rWEr-ASbakOsCL5VEqPZpA", "xsiNil": "false", "lang": null, "decimals": "-3", "ancestors": [ "p", "td", "tr", "table", "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true }, "uniqueAnchor": null }, "R62": { "role": "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements", "longName": "995445 - Disclosure - Insider Trading Arrangements", "shortName": "Insider Trading Arrangements", "isDefault": "false", "groupType": "disclosure", "subGroupType": "", "menuCat": "Cover", "order": "62", "firstAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "ecd:MtrlTermsOfTrdArrTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "Duration_1_1_2024_To_3_31_2024_Q8nvTUNu9kykrZPMebn9zA", "name": "ecd:MtrlTermsOfTrdArrTextBlock", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "div", "div", "body", "html" ], "reportCount": 1, "baseRef": "veco-20240331x10q.htm", "first": true, "unique": true } } }, "tag": { "us-gaap_AOCIAttributableToParentNetOfTaxRollForward": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AOCIAttributableToParentNetOfTaxRollForward", "presentation": [ "http://www.veeco.com/role/DisclosureEquityAociRollforwardDetails" ], "lang": { "en-us": { "role": { "label": "Accumulated Other Comprehensive Income (Loss), Net of Tax [Roll Forward]", "terseLabel": "Changes in the balances of each component of AOCI", "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period." } } }, "auth_ref": [] }, "us-gaap_AccountsPayableCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AccountsPayableCurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_LiabilitiesCurrent", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Accounts Payable, Current", "terseLabel": "Accounts payable", "documentation": "Carrying value as of the balance sheet date of liabilities incurred (and for which invoices have typically been received) and payable to vendors for goods and services received that are used in an entity's business. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer)." } } }, "auth_ref": [ "r23", "r724" ] }, "us-gaap_AccountsReceivableNetCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AccountsReceivableNetCurrent", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_AssetsCurrent", "weight": 1.0, "order": 4.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Accounts Receivable, Net, Current", "terseLabel": "Accounts receivable, net", "documentation": "Amount, after allowance for credit loss, of right to consideration from customer for product sold and service rendered in normal course of business, classified as current." } } }, "auth_ref": [ "r272", "r273" ] }, "veco_AccruedAndOtherLiabilitiesCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "AccruedAndOtherLiabilitiesCurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_LiabilitiesCurrent", "weight": 1.0, "order": 2.0 }, "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails", "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "documentation": "Carrying value as of the balance sheet date of obligations incurred and payable, pertaining to costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered. Examples include taxes, interest, rent and utilities. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer). Also includes amount of liabilities classified as other, due within one year or the normal operating cycle, if longer.", "label": "Accrued and Other Liabilities, Current", "terseLabel": "Accrued expenses and other current liabilities", "totalLabel": "Total accrued expenses and other current liabilities" } } }, "auth_ref": [] }, "us-gaap_AccruedIncomeTaxesCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AccruedIncomeTaxesCurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_LiabilitiesCurrent", "weight": 1.0, "order": 4.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Accrued Income Taxes, Current", "terseLabel": "Income taxes payable", "documentation": "Carrying amount as of the balance sheet date of the unpaid sum of the known and estimated amounts payable to satisfy all currently due domestic and foreign income tax obligations." } } }, "auth_ref": [ "r94", "r140" ] }, "us-gaap_AccruedLiabilitiesCurrentAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AccruedLiabilitiesCurrentAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails" ], "lang": { "en-us": { "role": { "label": "Accrued Liabilities, Current [Abstract]", "terseLabel": "Accrued expenses and other current liabilities" } } }, "auth_ref": [] }, "us-gaap_AccruedProfessionalFeesCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AccruedProfessionalFeesCurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails": { "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent", "weight": 1.0, "order": 5.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails" ], "lang": { "en-us": { "role": { "label": "Accrued Professional Fees, Current", "terseLabel": "Professional fees", "documentation": "Carrying value as of the balance sheet date of obligations incurred through that date and payable for professional fees, such as for legal and accounting services received. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer)." } } }, "auth_ref": [ "r27" ] }, "us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails": { "parentTag": "us-gaap_PropertyPlantAndEquipmentNet", "weight": -1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails" ], "lang": { "en-us": { "role": { "label": "Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment", "terseLabel": "Less: accumulated depreciation and amortization", "documentation": "Amount of accumulated depreciation, depletion and amortization for physical assets used in the normal conduct of business to produce goods and services." } } }, "auth_ref": [ "r62", "r166", "r574" ] }, "us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AccumulatedNetUnrealizedInvestmentGainLossMember", "presentation": [ "http://www.veeco.com/role/DisclosureEquityAociRollforwardDetails" ], "lang": { "en-us": { "role": { "label": "AOCI, Accumulated Gain (Loss), Debt Securities, Available-for-Sale, Parent [Member]", "terseLabel": "Unrealized Gains (Losses) on Available for Sale Securities", "documentation": "Accumulated unrealized gain (loss) on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), attributable to parent." } } }, "auth_ref": [ "r177", "r178", "r179", "r180", "r187", "r188", "r825" ] }, "us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AccumulatedOtherComprehensiveIncomeLossLineItems", "presentation": [ "http://www.veeco.com/role/DisclosureEquityAociRollforwardDetails" ], "lang": { "en-us": { "role": { "label": "Accumulated Other Comprehensive Income (Loss) [Line Items]", "terseLabel": "Accumulated Other Comprehensive Income", "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table." } } }, "auth_ref": [ "r186", "r187", "r503", "r504", "r505", "r506", "r507", "r508" ] }, "us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AccumulatedOtherComprehensiveIncomeLossNetOfTax", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_StockholdersEquity", "weight": 1.0, "order": 5.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Accumulated Other Comprehensive Income (Loss), Net of Tax", "terseLabel": "Accumulated other comprehensive income", "documentation": "Amount, after tax, of accumulated increase (decrease) in equity from transaction and other event and circumstance from nonowner source." } } }, "auth_ref": [ "r34", "r35", "r105", "r172", "r571", "r594", "r595" ] }, "us-gaap_AccumulatedOtherComprehensiveIncomeLossTable": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AccumulatedOtherComprehensiveIncomeLossTable", "presentation": [ "http://www.veeco.com/role/DisclosureEquityAociRollforwardDetails" ], "lang": { "en-us": { "role": { "label": "Accumulated Other Comprehensive Income (Loss) [Table]", "documentation": "Disclosure of information about components of accumulated other comprehensive income (loss)." } } }, "auth_ref": [ "r186", "r187", "r503", "r504", "r505", "r506", "r507", "r508" ] }, "us-gaap_AccumulatedOtherComprehensiveIncomeMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AccumulatedOtherComprehensiveIncomeMember", "presentation": [ "http://www.veeco.com/role/DisclosureEquityAociRollforwardDetails", "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails" ], "lang": { "en-us": { "role": { "label": "AOCI Attributable to Parent [Member]", "terseLabel": "Accumulated Other Comprehensive Income", "documentation": "Accumulated increase (decrease) in equity from transactions and other events and circumstances from non-owner sources, attributable to the parent. Excludes net income (loss), and accumulated changes in equity from transactions resulting from investments by owners and distributions to owners." } } }, "auth_ref": [ "r6", "r16", "r35", "r485", "r488", "r522", "r590", "r591", "r825", "r826", "r827", "r833", "r834", "r835" ] }, "us-gaap_AccumulatedTranslationAdjustmentMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AccumulatedTranslationAdjustmentMember", "presentation": [ "http://www.veeco.com/role/DisclosureEquityAociRollforwardDetails" ], "lang": { "en-us": { "role": { "label": "Accumulated Foreign Currency Adjustment Attributable to Parent [Member]", "terseLabel": "Foreign Currency Translation", "documentation": "Accumulated other comprehensive income (loss) resulting from foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature, attributable to the parent." } } }, "auth_ref": [ "r7", "r16", "r35", "r187", "r188", "r504", "r505", "r506", "r507", "r508", "r825" ] }, "ecd_Additional402vDisclosureTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "Additional402vDisclosureTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Additional 402(v) Disclosure [Text Block]", "terseLabel": "Additional 402(v) Disclosure" } } }, "auth_ref": [ "r775" ] }, "us-gaap_AdditionalPaidInCapitalCommonStock": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AdditionalPaidInCapitalCommonStock", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_StockholdersEquity", "weight": 1.0, "order": 3.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Additional Paid in Capital, Common Stock", "terseLabel": "Additional paid-in capital", "documentation": "Value received from shareholders in common stock-related transactions that are in excess of par value or stated value and amounts received from other stock-related transactions. Includes only common stock transactions (excludes preferred stock transactions). May be called contributed capital, capital in excess of par, capital surplus, or paid-in capital." } } }, "auth_ref": [ "r97" ] }, "us-gaap_AdditionalPaidInCapitalMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AdditionalPaidInCapitalMember", "presentation": [ "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails" ], "lang": { "en-us": { "role": { "label": "Additional Paid-in Capital [Member]", "terseLabel": "Additional Paid-in Capital", "documentation": "Excess of issue price over par or stated value of the entity's capital stock and amounts received from other transactions involving the entity's stock or stockholders." } } }, "auth_ref": [ "r449", "r450", "r451", "r600", "r833", "r834", "r835", "r865", "r887" ] }, "ecd_AdjToCompAmt": { "xbrltype": "monetaryItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AdjToCompAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Adjustment to Compensation Amount", "terseLabel": "Adjustment to Compensation, Amount" } } }, "auth_ref": [ "r781" ] }, "ecd_AdjToCompAxis": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AdjToCompAxis", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Adjustment to Compensation [Axis]", "terseLabel": "Adjustment to Compensation:" } } }, "auth_ref": [ "r781" ] }, "ecd_AdjToNonPeoNeoCompFnTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AdjToNonPeoNeoCompFnTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Adjustment to Non-PEO NEO Compensation Footnote [Text Block]", "terseLabel": "Adjustment to Non-PEO NEO Compensation Footnote" } } }, "auth_ref": [ "r781" ] }, "ecd_AdjToPeoCompFnTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AdjToPeoCompFnTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Adjustment To PEO Compensation, Footnote [Text Block]", "terseLabel": "Adjustment To PEO Compensation, Footnote" } } }, "auth_ref": [ "r781" ] }, "us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails" ], "lang": { "en-us": { "role": { "label": "Adjustments to Additional Paid in Capital, Share-based Compensation, Requisite Service Period Recognition", "terseLabel": "Share-based compensation expense", "documentation": "Amount of increase to additional paid-in capital (APIC) for recognition of cost for award under share-based payment arrangement." } } }, "auth_ref": [ "r69", "r70", "r415" ] }, "us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]", "terseLabel": "Adjustments to reconcile net income to net cash provided by (used in) operating activities:" } } }, "auth_ref": [] }, "ecd_AggtErrCompAmt": { "xbrltype": "monetaryItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AggtErrCompAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Aggregate Erroneous Compensation Amount", "terseLabel": "Aggregate Erroneous Compensation Amount" } } }, "auth_ref": [ "r746", "r757", "r767", "r792" ] }, "ecd_AggtErrCompNotYetDeterminedTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AggtErrCompNotYetDeterminedTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Aggregate Erroneous Compensation Not Yet Determined [Text Block]", "terseLabel": "Aggregate Erroneous Compensation Not Yet Determined" } } }, "auth_ref": [ "r749", "r760", "r770", "r795" ] }, "ecd_AllAdjToCompMember": { "xbrltype": "domainItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AllAdjToCompMember", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "All Adjustments to Compensation [Member]", "terseLabel": "All Adjustments to Compensation" } } }, "auth_ref": [ "r781" ] }, "ecd_AllExecutiveCategoriesMember": { "xbrltype": "domainItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AllExecutiveCategoriesMember", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "All Executive Categories [Member]", "terseLabel": "All Executive Categories" } } }, "auth_ref": [ "r788" ] }, "ecd_AllIndividualsMember": { "xbrltype": "domainItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AllIndividualsMember", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure", "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure", "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements", "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "All Individuals [Member]", "terseLabel": "All Individuals" } } }, "auth_ref": [ "r753", "r761", "r771", "r788", "r796", "r800", "r808" ] }, "ecd_AllTradingArrangementsMember": { "xbrltype": "domainItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AllTradingArrangementsMember", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements" ], "lang": { "en-us": { "role": { "label": "All Trading Arrangements [Member]", "terseLabel": "All Trading Arrangements" } } }, "auth_ref": [ "r806" ] }, "us-gaap_AllocatedShareBasedCompensationExpense": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AllocatedShareBasedCompensationExpense", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails" ], "lang": { "en-us": { "role": { "label": "Allocated Share-based Compensation Expense", "verboseLabel": "Total share-based compensation expense", "documentation": "Amount of expense for award under share-based payment arrangement. Excludes amount capitalized." } } }, "auth_ref": [ "r445", "r452" ] }, "us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AllowanceForDoubtfulAccountsReceivableCurrent", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAccountsReceivableDetails" ], "lang": { "en-us": { "role": { "label": "Allowance for Doubtful Accounts Receivable, Current", "terseLabel": "Allowance for doubtful accounts receivable", "documentation": "Amount of allowance for credit loss on accounts receivable, classified as current." } } }, "auth_ref": [ "r173", "r274", "r310" ] }, "dei_AmendmentFlag": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "AmendmentFlag", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Amendment Flag", "documentation": "Boolean flag that is true when the XBRL content amends previously-filed or accepted submission." } } }, "auth_ref": [] }, "us-gaap_AmortizationOfFinancingCostsAndDiscounts": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AmortizationOfFinancingCostsAndDiscounts", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails": { "parentTag": "us-gaap_InterestExpenseDebt", "weight": 1.0, "order": 2.0 }, "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities", "weight": 1.0, "order": 3.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails", "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Amortization of Debt Issuance Costs and Discounts", "terseLabel": "Amortization of debt discount/transaction costs", "verboseLabel": "Non-cash interest expense", "documentation": "Amount of amortization expense attributable to debt discount (premium) and debt issuance costs." } } }, "auth_ref": [ "r369", "r510", "r707", "r708", "r829" ] }, "us-gaap_AmortizationOfIntangibleAssets": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AmortizationOfIntangibleAssets", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": { "parentTag": "us-gaap_OperatingExpenses", "weight": 1.0, "order": 3.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Amortization of Intangible Assets", "terseLabel": "Amortization of intangible assets", "documentation": "The aggregate expense charged against earnings to allocate the cost of intangible assets (nonphysical assets not used in production) in a systematic and rational manner to the periods expected to benefit from such assets. As a noncash expense, this element is added back to net income when calculating cash provided by or used in operations using the indirect method." } } }, "auth_ref": [ "r12", "r57", "r60" ] }, "us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount", "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails" ], "lang": { "en-us": { "role": { "label": "Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount", "terseLabel": "Securities excluded from the diluted calculation as their effect would be antidilutive", "documentation": "Securities (including those issuable pursuant to contingent stock agreements) that could potentially dilute basic earnings per share (EPS) or earnings per unit (EPU) in the future that were not included in the computation of diluted EPS or EPU because to do so would increase EPS or EPU amounts or decrease loss per share or unit amounts for the period presented." } } }, "auth_ref": [ "r239" ] }, "us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis", "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails" ], "lang": { "en-us": { "role": { "label": "Antidilutive Securities [Axis]", "documentation": "Information by type of antidilutive security." } } }, "auth_ref": [ "r47" ] }, "us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems", "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails" ], "lang": { "en-us": { "role": { "label": "Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]", "terseLabel": "Antidilutive securities", "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table." } } }, "auth_ref": [] }, "us-gaap_AntidilutiveSecuritiesNameDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AntidilutiveSecuritiesNameDomain", "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails" ], "lang": { "en-us": { "role": { "label": "Antidilutive Securities, Name [Domain]", "documentation": "Incremental common shares attributable to securities that were not included in diluted earnings per share (EPS) because to do so would increase EPS amounts or decrease loss per share amounts for the period presented." } } }, "auth_ref": [ "r47" ] }, "veco_AsiaPacificExcludingChinaMember": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "AsiaPacificExcludingChinaMember", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "documentation": "Region of Asia Pacific, excluding China.", "label": "Asia Pacific Excluding China [Member]", "terseLabel": "Rest of APAC" } } }, "auth_ref": [] }, "us-gaap_AssetRetirementObligationsNoncurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AssetRetirementObligationsNoncurrent", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesOtherLiabilitiesDetails" ], "lang": { "en-us": { "role": { "label": "Asset Retirement Obligations, Noncurrent", "terseLabel": "Asset retirement obligations", "documentation": "Noncurrent portion of the carrying amount of a liability for an asset retirement obligation. An asset retirement obligation is a legal obligation associated with the disposal or retirement of a tangible long-lived asset that results from the acquisition, construction or development, or the normal operations of a long-lived asset, except for certain obligations of lessees." } } }, "auth_ref": [ "r851" ] }, "us-gaap_Assets": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "Assets", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Assets.", "totalLabel": "Total assets", "documentation": "Sum of the carrying amounts as of the balance sheet date of all assets that are recognized. Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events." } } }, "auth_ref": [ "r138", "r169", "r204", "r248", "r258", "r263", "r307", "r345", "r346", "r347", "r348", "r349", "r350", "r351", "r352", "r353", "r478", "r482", "r502", "r567", "r627", "r724", "r737", "r858", "r859", "r872" ] }, "us-gaap_AssetsAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AssetsAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Assets [ Abstract ]", "terseLabel": "Assets" } } }, "auth_ref": [] }, "us-gaap_AssetsCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AssetsCurrent", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_Assets", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Assets, Current", "totalLabel": "Total current assets", "documentation": "Sum of the carrying amounts as of the balance sheet date of all assets that are expected to be realized in cash, sold, or consumed within one year (or the normal operating cycle, if longer). Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events." } } }, "auth_ref": [ "r161", "r176", "r204", "r307", "r345", "r346", "r347", "r348", "r349", "r350", "r351", "r352", "r353", "r478", "r482", "r502", "r724", "r858", "r859", "r872" ] }, "us-gaap_AssetsCurrentAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AssetsCurrentAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Assets, Current [Abstract]", "terseLabel": "Current assets:" } } }, "auth_ref": [] }, "us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedGainBeforeTax": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedGainBeforeTax", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Available-for-sale Debt Securities, Accumulated Gross Unrealized Gain, before Tax", "terseLabel": "Gross Unrealized Gains", "documentation": "Amount, before tax, of unrealized gain in accumulated other comprehensive income (AOCI) on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale)." } } }, "auth_ref": [ "r281" ] }, "us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Available-for-sale Debt Securities, Accumulated Gross Unrealized Loss, before Tax", "negatedLabel": "Gross Unrealized Losses", "documentation": "Amount, before tax, of unrealized loss in accumulated other comprehensive income (AOCI) on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale)." } } }, "auth_ref": [ "r282" ] }, "us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AvailableForSaleDebtSecuritiesAmortizedCostBasis", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Available-for-sale Debt Securities, Amortized Cost Basis", "totalLabel": "Amortized Cost", "documentation": "Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale)." } } }, "auth_ref": [ "r278", "r316", "r566" ] }, "us-gaap_AvailableForSaleDebtSecuritiesGrossUnrealizedLoss": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AvailableForSaleDebtSecuritiesGrossUnrealizedLoss", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Securities, Available-for-Sale, Unrealized Loss", "terseLabel": "Unrealized losses", "documentation": "Amount of unrealized loss on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale)." } } }, "auth_ref": [ "r840" ] }, "us-gaap_AvailableForSaleSecuritiesAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AvailableForSaleSecuritiesAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Securities, Available-for-sale [Abstract]", "terseLabel": "Available-for-sale securities in a loss position" } } }, "auth_ref": [] }, "us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails": { "parentTag": "us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling within One Year, Amortized Cost", "terseLabel": "Amortized Cost, Due in one year or less", "documentation": "Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date." } } }, "auth_ref": [ "r841" ] }, "us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails": { "parentTag": "us-gaap_AvailableForSaleSecuritiesDebtSecurities", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling within One Year, Fair Value", "terseLabel": "Estimated Fair Value, Due in one year or less", "documentation": "Fair value of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date." } } }, "auth_ref": [ "r841" ] }, "us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Amortized Cost, Rolling Maturity [Abstract]", "terseLabel": "Contractual maturities - Amortized Cost" } } }, "auth_ref": [] }, "us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling Maturity, Fair Value [Abstract]", "terseLabel": "Contractual maturities - Estimated Fair Value" } } }, "auth_ref": [] }, "us-gaap_AvailableForSaleSecuritiesDebtSecurities": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AvailableForSaleSecuritiesDebtSecurities", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Available-for-sale Securities, Debt Securities", "terseLabel": "Estimated Fair Value", "totalLabel": "Available-for-sale Securities, Debt Securities, Total", "documentation": "Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale)." } } }, "auth_ref": [ "r279", "r316", "r561", "r838" ] }, "us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AvailableForSaleSecuritiesDebtSecuritiesCurrent", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_AssetsCurrent", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Available-for-sale Securities, Debt Securities, Current", "terseLabel": "Short-term investments", "documentation": "Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), classified as current." } } }, "auth_ref": [ "r276", "r316" ] }, "us-gaap_AvailableForSaleSecuritiesGrossRealizedGainLossAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AvailableForSaleSecuritiesGrossRealizedGainLossAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Securities, Available-for-sale, Realized Gain (Loss) [Abstract]", "terseLabel": "Realized gains or losses" } } }, "auth_ref": [] }, "ecd_AwardExrcPrice": { "xbrltype": "perShareItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AwardExrcPrice", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "Award Exercise Price", "terseLabel": "Exercise Price" } } }, "auth_ref": [ "r803" ] }, "ecd_AwardGrantDateFairValue": { "xbrltype": "monetaryItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AwardGrantDateFairValue", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "Award Grant Date Fair Value", "terseLabel": "Fair Value as of Grant Date" } } }, "auth_ref": [ "r804" ] }, "ecd_AwardTmgDiscLineItems": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AwardTmgDiscLineItems", "lang": { "en-us": { "role": { "label": "Award Timing Disclosures [Line Items]", "terseLabel": "Award Timing Disclosures" } } }, "auth_ref": [ "r799" ] }, "ecd_AwardTmgHowMnpiCnsdrdTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AwardTmgHowMnpiCnsdrdTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "Award Timing, How MNPI Considered [Text Block]", "terseLabel": "Award Timing, How MNPI Considered" } } }, "auth_ref": [ "r799" ] }, "ecd_AwardTmgMethodTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AwardTmgMethodTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "Award Timing Method [Text Block]", "terseLabel": "Award Timing Method" } } }, "auth_ref": [ "r799" ] }, "ecd_AwardTmgMnpiCnsdrdFlag": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AwardTmgMnpiCnsdrdFlag", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "Award Timing MNPI Considered [Flag]", "terseLabel": "Award Timing MNPI Considered" } } }, "auth_ref": [ "r799" ] }, "ecd_AwardTmgMnpiDiscTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AwardTmgMnpiDiscTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "Award Timing MNPI Disclosure [Text Block]", "terseLabel": "Award Timing MNPI Disclosure" } } }, "auth_ref": [ "r799" ] }, "ecd_AwardTmgPredtrmndFlag": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AwardTmgPredtrmndFlag", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "Award Timing Predetermined [Flag]", "terseLabel": "Award Timing Predetermined" } } }, "auth_ref": [ "r799" ] }, "us-gaap_AwardTypeAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "AwardTypeAxis", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails", "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails", "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "Award Type [Axis]", "terseLabel": "Award Type", "documentation": "Information by type of award under share-based payment arrangement." } } }, "auth_ref": [ "r419", "r420", "r421", "r422", "r423", "r424", "r425", "r426", "r427", "r428", "r429", "r430", "r431", "r432", "r433", "r434", "r435", "r436", "r437", "r438", "r439", "r440", "r441", "r442", "r443", "r444" ] }, "ecd_AwardUndrlygSecuritiesAmt": { "xbrltype": "decimalItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AwardUndrlygSecuritiesAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "Award Underlying Securities Amount", "terseLabel": "Underlying Securities" } } }, "auth_ref": [ "r802" ] }, "ecd_AwardsCloseToMnpiDiscIndName": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AwardsCloseToMnpiDiscIndName", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "Awards Close in Time to MNPI Disclosures, Individual Name", "terseLabel": "Name" } } }, "auth_ref": [ "r801" ] }, "ecd_AwardsCloseToMnpiDiscTable": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AwardsCloseToMnpiDiscTable", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "Awards Close in Time to MNPI Disclosures [Table]", "terseLabel": "Awards Close in Time to MNPI Disclosures" } } }, "auth_ref": [ "r800" ] }, "ecd_AwardsCloseToMnpiDiscTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "AwardsCloseToMnpiDiscTableTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "Awards Close in Time to MNPI Disclosures [Table Text Block]", "terseLabel": "Awards Close in Time to MNPI Disclosures, Table" } } }, "auth_ref": [ "r800" ] }, "us-gaap_BalanceSheetLocationAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BalanceSheetLocationAxis", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Balance Sheet Location [Axis]", "documentation": "Information by location on balance sheet (statement of financial position)." } } }, "auth_ref": [] }, "us-gaap_BalanceSheetLocationDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BalanceSheetLocationDomain", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Balance Sheet Location [Domain]", "documentation": "Location in the balance sheet (statement of financial position)." } } }, "auth_ref": [ "r79", "r82" ] }, "veco_BalanceSheetRelatedAssetsDisclosuresAbstract": { "xbrltype": "stringItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "BalanceSheetRelatedAssetsDisclosuresAbstract", "lang": { "en-us": { "role": { "documentation": "No definition available.", "label": "Assets" } } }, "auth_ref": [] }, "veco_BalanceSheetRelatedAssetsDisclosuresTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "BalanceSheetRelatedAssetsDisclosuresTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureAssets" ], "lang": { "en-us": { "role": { "documentation": "The entire disclosure for balance sheet assets.", "label": "Balance Sheet Related Assets Disclosures [Text Block]", "terseLabel": "Assets" } } }, "auth_ref": [] }, "veco_BalanceSheetRelatedLiabilitiesDisclosuresAbstract": { "xbrltype": "stringItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "BalanceSheetRelatedLiabilitiesDisclosuresAbstract", "lang": { "en-us": { "role": { "documentation": "No definition available.", "label": "Liabilities" } } }, "auth_ref": [] }, "veco_BalanceSheetRelatedLiabilitiesDisclosuresTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "BalanceSheetRelatedLiabilitiesDisclosuresTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities" ], "lang": { "en-us": { "role": { "documentation": "The entire disclosure for balance sheet liabilities.", "label": "Balance Sheet Related Liabilities Disclosures [Text Block]", "terseLabel": "Liabilities" } } }, "auth_ref": [] }, "us-gaap_BaseRateMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BaseRateMember", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "label": "Base Rate [Member]", "terseLabel": "Base rate", "documentation": "Minimum rate investor will accept." } } }, "auth_ref": [] }, "us-gaap_BasisOfAccountingPolicyPolicyTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BasisOfAccountingPolicyPolicyTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureBasisOfPresentationPolicies" ], "lang": { "en-us": { "role": { "label": "Basis of Accounting, Policy [Policy Text Block]", "terseLabel": "Basis of Presentation", "documentation": "Disclosure of accounting policy for basis of accounting, or basis of presentation, used to prepare the financial statements (for example, US Generally Accepted Accounting Principles, Other Comprehensive Basis of Accounting, IFRS)." } } }, "auth_ref": [] }, "us-gaap_BasisOfPresentationAndSignificantAccountingPoliciesTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BasisOfPresentationAndSignificantAccountingPoliciesTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureBasisOfPresentation" ], "lang": { "en-us": { "role": { "label": "Basis of Presentation and Significant Accounting Policies [Text Block]", "terseLabel": "Basis of Presentation", "documentation": "The entire disclosure for the basis of presentation and significant accounting policies concepts. Basis of presentation describes the underlying basis used to prepare the financial statements (for example, US Generally Accepted Accounting Principles, Other Comprehensive Basis of Accounting, IFRS). Accounting policies describe all significant accounting policies of the reporting entity." } } }, "auth_ref": [ "r120" ] }, "us-gaap_BuildingAndBuildingImprovementsMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BuildingAndBuildingImprovementsMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails" ], "lang": { "en-us": { "role": { "label": "Building and Building Improvements [Member]", "terseLabel": "Building and improvements", "documentation": "Facility held for productive use including, but not limited to, office, production, storage and distribution facilities and any addition, improvement, or renovation to the structure, for example, but not limited to, interior masonry, interior flooring, electrical, and plumbing." } } }, "auth_ref": [] }, "us-gaap_BusinessAcquisitionAcquireeDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BusinessAcquisitionAcquireeDomain", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Business Acquisition, Acquiree [Domain]", "documentation": "Identification of the acquiree in a material business combination (or series of individually immaterial business combinations), which may include the name or other type of identification of the acquiree." } } }, "auth_ref": [ "r471", "r715", "r716" ] }, "us-gaap_BusinessAcquisitionAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BusinessAcquisitionAxis", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Business Acquisition [Axis]", "documentation": "Information by business combination or series of individually immaterial business combinations." } } }, "auth_ref": [ "r71", "r72", "r471", "r715", "r716" ] }, "us-gaap_BusinessAcquisitionLineItems": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BusinessAcquisitionLineItems", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Business Acquisition [Line Items]", "terseLabel": "Business Combination", "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table." } } }, "auth_ref": [ "r471" ] }, "us-gaap_BusinessCombinationConsiderationTransferred1": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BusinessCombinationConsiderationTransferred1", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Business Combination, Consideration Transferred", "totalLabel": "Acquisition date fair value", "documentation": "Amount of consideration transferred, consisting of acquisition-date fair value of assets transferred by the acquirer, liabilities incurred by the acquirer, and equity interest issued by the acquirer." } } }, "auth_ref": [ "r1", "r2", "r14" ] }, "us-gaap_BusinessCombinationConsiderationTransferredLiabilitiesIncurred": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BusinessCombinationConsiderationTransferredLiabilitiesIncurred", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails": { "parentTag": "us-gaap_BusinessCombinationConsiderationTransferred1", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Business Combination, Consideration Transferred, Liabilities Incurred", "terseLabel": "Contingent consideration", "documentation": "Amount of liabilities incurred by the acquirer as part of consideration transferred in a business combination." } } }, "auth_ref": [ "r1", "r2", "r75", "r474" ] }, "us-gaap_BusinessCombinationContingentConsiderationArrangementsChangeInAmountOfContingentConsiderationLiability1": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BusinessCombinationContingentConsiderationArrangementsChangeInAmountOfContingentConsiderationLiability1", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities", "weight": 1.0, "order": 6.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails", "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Business Combination, Contingent Consideration Arrangements, Change in Amount of Contingent Consideration, Liability", "terseLabel": "Increase (decrease) in contingent consideration", "verboseLabel": "Change in contingent consideration", "documentation": "Amount of increase (decrease) in the value of a contingent consideration liability, including, but not limited to, differences arising upon settlement." } } }, "auth_ref": [ "r476", "r828" ] }, "veco_BusinessCombinationContingentConsiderationArrangementsEarnOutPeriod": { "xbrltype": "durationItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "BusinessCombinationContingentConsiderationArrangementsEarnOutPeriod", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "documentation": "For contingent consideration arrangements recognized in connection with a business combination, this element represents maximum earn-out period for determining contingent consideration, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.", "label": "Business Combination, Contingent Consideration Arrangements, Earn-Out Period", "terseLabel": "Maximum earn-out period" } } }, "auth_ref": [] }, "us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Business Combination, Contingent Consideration Arrangements, Range of Outcomes, Value, High", "terseLabel": "Contingent consideration payments, High end of range", "documentation": "For contingent consideration arrangements recognized in connection with a business combination, this element represents an estimate of the high-end of the potential range (undiscounted) of the consideration which may be paid." } } }, "auth_ref": [ "r77" ] }, "us-gaap_BusinessCombinationContingentConsiderationLiability": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BusinessCombinationContingentConsiderationLiability", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Business Combination, Contingent Consideration, Liability", "terseLabel": "Contingent consideration", "documentation": "Amount of liability recognized arising from contingent consideration in a business combination." } } }, "auth_ref": [ "r3", "r76", "r475" ] }, "us-gaap_BusinessCombinationContingentConsiderationLiabilityCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BusinessCombinationContingentConsiderationLiabilityCurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails": { "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails" ], "lang": { "en-us": { "role": { "label": "Business Combination, Contingent Consideration, Liability, Current", "verboseLabel": "Contingent consideration", "documentation": "Amount of liability recognized arising from contingent consideration in a business combination, expected to be settled within one year or the normal operating cycle, if longer." } } }, "auth_ref": [ "r4", "r76" ] }, "us-gaap_BusinessCombinationContingentConsiderationLiabilityMeasurementInput": { "xbrltype": "decimalItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BusinessCombinationContingentConsiderationLiabilityMeasurementInput", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Business Combination, Contingent Consideration, Liability, Measurement Input", "terseLabel": "Contingent consideration measurement input", "documentation": "Value of input used to measure contingent consideration liability from business combination." } } }, "auth_ref": [ "r499" ] }, "us-gaap_BusinessCombinationContingentConsiderationLiabilityMeasurementInputExtensibleList": { "xbrltype": "enumerationSetItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BusinessCombinationContingentConsiderationLiabilityMeasurementInputExtensibleList", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Business Combination, Contingent Consideration, Liability, Measurement Input [Extensible Enumeration]", "terseLabel": "Business Combination, Contingent Consideration, Liability, Measurement Input", "documentation": "Indicates measurement input for business combination contingent consideration liability." } } }, "auth_ref": [ "r498" ] }, "us-gaap_BusinessCombinationContingentConsiderationLiabilityNoncurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BusinessCombinationContingentConsiderationLiabilityNoncurrent", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesOtherLiabilitiesDetails" ], "lang": { "en-us": { "role": { "label": "Business Combination, Contingent Consideration, Liability, Noncurrent", "terseLabel": "Contingent consideration", "documentation": "Amount of liability recognized arising from contingent consideration in a business combination, expected to be settled beyond one year or the normal operating cycle, if longer." } } }, "auth_ref": [ "r4", "r76" ] }, "us-gaap_BusinessCombinationDisclosureTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BusinessCombinationDisclosureTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombination" ], "lang": { "en-us": { "role": { "label": "Business Combination Disclosure [Text Block]", "terseLabel": "Business Combination", "documentation": "The entire disclosure for a business combination (or series of individually immaterial business combinations) completed during the period, including background, timing, and recognized assets and liabilities. The disclosure may include leverage buyout transactions (as applicable)." } } }, "auth_ref": [ "r135", "r472" ] }, "us-gaap_BusinessCombinationsAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "BusinessCombinationsAbstract", "lang": { "en-us": { "role": { "label": "Business Combination" } } }, "auth_ref": [] }, "country_CN": { "xbrltype": "domainItemType", "nsuri": "http://xbrl.sec.gov/country/2023", "localname": "CN", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "label": "CHINA", "terseLabel": "China" } } }, "auth_ref": [] }, "us-gaap_CapitalExpendituresIncurredButNotYetPaid": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CapitalExpendituresIncurredButNotYetPaid", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Capital Expenditures Incurred but Not yet Paid", "terseLabel": "Capital expenditures included in accounts payable and accrued expenses", "documentation": "Future cash outflow to pay for purchases of fixed assets that have occurred." } } }, "auth_ref": [ "r44", "r45", "r46" ] }, "veco_CappedCallTransactionsCapPrice": { "xbrltype": "perShareItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "CappedCallTransactionsCapPrice", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesCappedCallTransactionsDetails" ], "lang": { "en-us": { "role": { "documentation": "Cap price of the capped call transactions.", "label": "Capped Call Transactions, Cap Price", "terseLabel": "Cap price of the capped call transactions (in dollars per share)" } } }, "auth_ref": [] }, "veco_CappedCallTransactionsPrice": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "CappedCallTransactionsPrice", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesCappedCallTransactionsDetails" ], "lang": { "en-us": { "role": { "documentation": "Aggregate price of capped call transaction.", "label": "Capped Call Transactions, Price", "terseLabel": "Aggregate price of capped call transaction" } } }, "auth_ref": [] }, "us-gaap_CashAndCashEquivalentsAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CashAndCashEquivalentsAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Cash and Cash Equivalents [Abstract]", "terseLabel": "Cash equivalents" } } }, "auth_ref": [] }, "us-gaap_CashAndCashEquivalentsAtCarryingValue": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CashAndCashEquivalentsAtCarryingValue", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_AssetsCurrent", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Cash and Cash Equivalents, at Carrying Value", "terseLabel": "Cash and cash equivalents", "documentation": "Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation." } } }, "auth_ref": [ "r42", "r164", "r689" ] }, "us-gaap_CashAndCashEquivalentsAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CashAndCashEquivalentsAxis", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Cash and Cash Equivalents [Axis]", "documentation": "Information by type of cash and cash equivalent balance." } } }, "auth_ref": [ "r164" ] }, "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents", "periodEndLabel": "Cash, cash equivalents, and restricted cash - end of period", "periodStartLabel": "Cash, cash equivalents, and restricted cash - beginning of period", "documentation": "Amount of cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage. Excludes amount for disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates." } } }, "auth_ref": [ "r42", "r117", "r202" ] }, "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents, Period Increase (Decrease), Including Exchange Rate Effect", "totalLabel": "Net increase (decrease) in cash, cash equivalents, and restricted cash", "documentation": "Amount of increase (decrease) in cash, cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; including effect from exchange rate change. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates." } } }, "auth_ref": [ "r5", "r117" ] }, "veco_CashEquivalentsFairValueDisclosure": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "CashEquivalentsFairValueDisclosure", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "documentation": "Fair value portion of short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.", "label": "Cash Equivalents, Fair Value Disclosure", "terseLabel": "Total Cash equivalents" } } }, "auth_ref": [] }, "veco_CashInterestExpenseAbstract": { "xbrltype": "stringItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "CashInterestExpenseAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails" ], "lang": { "en-us": { "role": { "documentation": "No definition available.", "label": "Cash Interest Expense" } } }, "auth_ref": [] }, "veco_CertificateOfDepositsAndTimeDepositsMember": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "CertificateOfDepositsAndTimeDepositsMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "documentation": "Represents the information pertaining to certificate of deposits and time deposits.", "label": "Certificate Of Deposits And Time Deposits [Member]", "terseLabel": "Certificate of deposits and time deposits" } } }, "auth_ref": [] }, "ecd_ChangedPeerGroupFnTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "ChangedPeerGroupFnTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Changed Peer Group, Footnote [Text Block]", "terseLabel": "Changed Peer Group, Footnote" } } }, "auth_ref": [ "r779" ] }, "dei_CityAreaCode": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "CityAreaCode", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "City Area Code", "documentation": "Area code of city" } } }, "auth_ref": [] }, "ecd_CoSelectedMeasureAmt": { "xbrltype": "decimalItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "CoSelectedMeasureAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Company Selected Measure Amount", "terseLabel": "Company Selected Measure Amount" } } }, "auth_ref": [ "r780" ] }, "ecd_CoSelectedMeasureName": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "CoSelectedMeasureName", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Company Selected Measure Name", "terseLabel": "Company Selected Measure Name" } } }, "auth_ref": [ "r780" ] }, "us-gaap_CommercialPaperMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CommercialPaperMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails", "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Commercial Paper [Member]", "terseLabel": "Commercial paper", "documentation": "Unsecured promissory note (generally negotiable) that provides institutions with short-term funds." } } }, "auth_ref": [ "r126", "r731", "r732", "r733", "r734" ] }, "us-gaap_CommitmentsAndContingenciesDisclosureAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CommitmentsAndContingenciesDisclosureAbstract", "lang": { "en-us": { "role": { "label": "Commitments and Contingencies" } } }, "auth_ref": [] }, "us-gaap_CommitmentsAndContingenciesDisclosureTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CommitmentsAndContingenciesDisclosureTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingencies" ], "lang": { "en-us": { "role": { "label": "Commitments and Contingencies Disclosure [Text Block]", "terseLabel": "Commitments and Contingencies", "documentation": "The entire disclosure for commitments and contingencies." } } }, "auth_ref": [ "r125", "r332", "r333", "r674", "r853" ] }, "us-gaap_CommonStockMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CommonStockMember", "presentation": [ "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails" ], "lang": { "en-us": { "role": { "label": "Common Stock [Member]", "terseLabel": "Common Stock", "documentation": "Stock that is subordinate to all other stock of the issuer." } } }, "auth_ref": [ "r727", "r728", "r729", "r731", "r732", "r733", "r734", "r833", "r834", "r865", "r885", "r887" ] }, "us-gaap_CommonStockParOrStatedValuePerShare": { "xbrltype": "perShareItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CommonStockParOrStatedValuePerShare", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical" ], "lang": { "en-us": { "role": { "label": "Common Stock, Par or Stated Value Per Share", "terseLabel": "Common stock, par value (in dollars per share)", "documentation": "Face amount or stated value per share of common stock." } } }, "auth_ref": [ "r96" ] }, "us-gaap_CommonStockSharesAuthorized": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CommonStockSharesAuthorized", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical" ], "lang": { "en-us": { "role": { "label": "Common Stock, Shares Authorized", "terseLabel": "Common stock, authorized shares", "documentation": "The maximum number of common shares permitted to be issued by an entity's charter and bylaws." } } }, "auth_ref": [ "r96", "r615" ] }, "us-gaap_CommonStockSharesIssued": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CommonStockSharesIssued", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical" ], "lang": { "en-us": { "role": { "label": "Common Stock, Shares, Issued", "terseLabel": "Common stock, shares issued", "documentation": "Total number of common shares of an entity that have been sold or granted to shareholders (includes common shares that were issued, repurchased and remain in the treasury). These shares represent capital invested by the firm's shareholders and owners, and may be all or only a portion of the number of shares authorized. Shares issued include shares outstanding and shares held in the treasury." } } }, "auth_ref": [ "r96" ] }, "us-gaap_CommonStockSharesOutstanding": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CommonStockSharesOutstanding", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical" ], "lang": { "en-us": { "role": { "label": "Common Stock, Shares, Outstanding", "terseLabel": "Common stock, shares outstanding", "documentation": "Number of shares of common stock outstanding. Common stock represent the ownership interest in a corporation." } } }, "auth_ref": [ "r17", "r96", "r615", "r633", "r887", "r888" ] }, "us-gaap_CommonStockValue": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CommonStockValue", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_StockholdersEquity", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Common Stock, Value, Issued", "verboseLabel": "Common stock, $0.01 par value; 120,000,000 shares authorized; 56,637,473 shares issued and outstanding at March 31, 2024 and 56,364,131 shares issued and outstanding at December 31, 2023", "documentation": "Aggregate par or stated value of issued nonredeemable common stock (or common stock redeemable solely at the option of the issuer). This item includes treasury stock repurchased by the entity. Note: elements for number of nonredeemable common shares, par value and other disclosure concepts are in another section within stockholders' equity." } } }, "auth_ref": [ "r96", "r570", "r724" ] }, "ecd_CompActuallyPaidVsCoSelectedMeasureTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "CompActuallyPaidVsCoSelectedMeasureTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Compensation Actually Paid vs. Company Selected Measure [Text Block]", "terseLabel": "Compensation Actually Paid vs. Company Selected Measure" } } }, "auth_ref": [ "r785" ] }, "ecd_CompActuallyPaidVsNetIncomeTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "CompActuallyPaidVsNetIncomeTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Compensation Actually Paid vs. Net Income [Text Block]", "terseLabel": "Compensation Actually Paid vs. Net Income" } } }, "auth_ref": [ "r784" ] }, "ecd_CompActuallyPaidVsOtherMeasureTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "CompActuallyPaidVsOtherMeasureTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Compensation Actually Paid vs. Other Measure [Text Block]", "terseLabel": "Compensation Actually Paid vs. Other Measure" } } }, "auth_ref": [ "r786" ] }, "ecd_CompActuallyPaidVsTotalShareholderRtnTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "CompActuallyPaidVsTotalShareholderRtnTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Compensation Actually Paid vs. Total Shareholder Return [Text Block]", "terseLabel": "Compensation Actually Paid vs. Total Shareholder Return" } } }, "auth_ref": [ "r783" ] }, "veco_CompletionOfMilestonesMember": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "CompletionOfMilestonesMember", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "documentation": "Completion of certain defined milestones.", "label": "Completion of Milestones [Member]", "terseLabel": "Completion of certain defined milestones" } } }, "auth_ref": [] }, "veco_CompoundSemiconductorMember": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "CompoundSemiconductorMember", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "documentation": "Represents the entity's Compound Semiconductor reporting segment.", "label": "Compound Semiconductor [Member]", "terseLabel": "Compound Semiconductor" } } }, "auth_ref": [] }, "us-gaap_ComprehensiveIncomeNetOfTax": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ComprehensiveIncomeNetOfTax", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncome": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" ], "lang": { "en-us": { "role": { "label": "Comprehensive Income (Loss), Net of Tax, Attributable to Parent", "totalLabel": "Total comprehensive income", "documentation": "Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income and other comprehensive income, attributable to parent entity. Excludes changes in equity resulting from investments by owners and distributions to owners." } } }, "auth_ref": [ "r36", "r183", "r185", "r190", "r562", "r580" ] }, "us-gaap_ContingentConsiderationByTypeAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ContingentConsiderationByTypeAxis", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Contingent Consideration by Type [Axis]", "documentation": "Information by type of contingent consideration." } } }, "auth_ref": [] }, "us-gaap_ContingentConsiderationTypeDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ContingentConsiderationTypeDomain", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Contingent Consideration Type [Domain]", "documentation": "Description of contingent payment arrangement." } } }, "auth_ref": [] }, "us-gaap_ContractWithCustomerLiability": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ContractWithCustomerLiability", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesContractLiabilitiesDetails" ], "lang": { "en-us": { "role": { "label": "Contract with Customer, Liability", "terseLabel": "Contract liability", "documentation": "Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable." } } }, "auth_ref": [ "r389", "r390", "r403" ] }, "us-gaap_ContractWithCustomerLiabilityRevenueRecognized": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ContractWithCustomerLiabilityRevenueRecognized", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesContractLiabilitiesDetails" ], "lang": { "en-us": { "role": { "label": "Contract with Customer, Liability, Revenue Recognized", "terseLabel": "Amount of contract liability recognized into revenue", "documentation": "Amount of revenue recognized that was previously included in balance of obligation to transfer good or service to customer for which consideration from customer has been received or is due." } } }, "auth_ref": [ "r404" ] }, "us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList": { "xbrltype": "enumerationSetItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails" ], "lang": { "en-us": { "role": { "label": "Debt Instrument, Convertible, Fair Value by Fair Value Hierarchy Level [Extensible Enumeration]", "terseLabel": "Convertible Debt, Fair Value by Fair Value Hierarchy Level", "documentation": "Indicates level within fair value hierarchy of convertible debt." } } }, "auth_ref": [ "r362", "r497" ] }, "us-gaap_ConvertibleDebtFairValueDisclosures": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ConvertibleDebtFairValueDisclosures", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails" ], "lang": { "en-us": { "role": { "label": "Convertible Debt, Fair Value Disclosures", "terseLabel": "Estimated fair value", "documentation": "Fair value portion of borrowing which can be exchanged for a specified number of another security at the option of the issuer or the holder, for example, but not limited to, the entity's common stock." } } }, "auth_ref": [] }, "us-gaap_ConvertibleDebtMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ConvertibleDebtMember", "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails", "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails" ], "lang": { "en-us": { "role": { "label": "Convertible Debt [Member]", "terseLabel": "Convertible Notes", "documentation": "Borrowing which can be exchanged for a specified number of another security at the option of the issuer or the holder, for example, but not limited to, the entity's common stock." } } }, "auth_ref": [ "r127", "r354", "r355", "r360", "r361", "r362", "r365", "r366", "r367", "r368", "r369", "r704", "r705", "r706", "r707", "r708" ] }, "us-gaap_ConvertibleDebtTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ConvertibleDebtTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesTables" ], "lang": { "en-us": { "role": { "label": "Convertible Debt [Table Text Block]", "terseLabel": "Schedule of carrying value of Convertible Senior Notes", "documentation": "Tabular disclosure of convertible debt instrument. Includes, but is not limited to, principal amount and amortized premium or discount." } } }, "auth_ref": [] }, "veco_ConvertibleSeniorUnsecuredNotesDue2023Member": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "ConvertibleSeniorUnsecuredNotesDue2023Member", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails" ], "lang": { "en-us": { "role": { "documentation": "Convertible Senior Unsecured Notes, Due 2023 (2023 Notes).", "label": "Convertible Senior Unsecured Notes Due 2023 [Member]", "terseLabel": "2023 Notes" } } }, "auth_ref": [] }, "veco_ConvertibleSeniorUnsecuredNotesDue2025AndDue2027Member": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "ConvertibleSeniorUnsecuredNotesDue2025AndDue2027Member", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "documentation": "Convertible Senior Unsecured Notes, due 2025 and due 2027 (2025 Notes and 2027 Notes).", "label": "Convertible Senior Unsecured Notes, Due 2025 and Due 2027 [Member]", "terseLabel": "2025 Notes and 2027 Notes" } } }, "auth_ref": [] }, "veco_ConvertibleSeniorUnsecuredNotesDue2025Due2027AndDue2029Member": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "ConvertibleSeniorUnsecuredNotesDue2025Due2027AndDue2029Member", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "documentation": "Convertible Senior Unsecured Notes, due 2025, due 2027, and due 2029 (2025 Notes, 2027 Notes, and 2029 Notes).", "label": "Convertible Senior Unsecured Notes, Due 2025, Due 2027 and Due 2029 [Member]", "terseLabel": "2025 Notes, 2027 Notes, and 2029 Notes" } } }, "auth_ref": [] }, "veco_ConvertibleSeniorUnsecuredNotesDue2025Member": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "ConvertibleSeniorUnsecuredNotesDue2025Member", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails" ], "lang": { "en-us": { "role": { "documentation": "Convertible Senior Unsecured Notes, Due 2025 (2025 Notes).", "label": "Convertible Senior Unsecured Notes, Due 2025 [Member]", "terseLabel": "2025 Notes" } } }, "auth_ref": [] }, "veco_ConvertibleSeniorUnsecuredNotesDue2027Member": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "ConvertibleSeniorUnsecuredNotesDue2027Member", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails" ], "lang": { "en-us": { "role": { "documentation": "Convertible Senior Unsecured Notes, Due 2027 (2027 Notes).", "label": "Convertible Senior Unsecured Notes, Due 2027 [Member]", "terseLabel": "2027 Notes" } } }, "auth_ref": [] }, "veco_ConvertibleSeniorUnsecuredNotesDue2029Member": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "ConvertibleSeniorUnsecuredNotesDue2029Member", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails" ], "lang": { "en-us": { "role": { "documentation": "Convertible Senior Unsecured Notes, Due 2029 (2029 Notes).", "label": "Convertible Senior Unsecured Notes, Due 2029 [Member]", "terseLabel": "2029 Notes" } } }, "auth_ref": [] }, "us-gaap_CorporateDebtSecuritiesMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CorporateDebtSecuritiesMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails", "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Corporate Debt Securities [Member]", "terseLabel": "Corporate debt", "documentation": "Debt securities issued by domestic or foreign corporate business, banks and other entities with a promise of repayment." } } }, "auth_ref": [ "r712", "r714", "r884" ] }, "us-gaap_CostOfGoodsAndServicesSold": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CostOfGoodsAndServicesSold", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": { "parentTag": "us-gaap_GrossProfit", "weight": -1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Cost of Goods and Services Sold", "terseLabel": "Cost of sales", "documentation": "The aggregate costs related to goods produced and sold and services rendered by an entity during the reporting period. This excludes costs incurred during the reporting period related to financial services rendered and other revenue generating activities." } } }, "auth_ref": [ "r110", "r557" ] }, "us-gaap_CostOfSalesMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CostOfSalesMember", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails" ], "lang": { "en-us": { "role": { "label": "Cost of Sales [Member]", "terseLabel": "Cost of Sales", "documentation": "Primary financial statement caption encompassing cost of sales." } } }, "auth_ref": [] }, "dei_CoverAbstract": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "CoverAbstract", "lang": { "en-us": { "role": { "label": "Cover [Abstract]", "documentation": "Cover page." } } }, "auth_ref": [] }, "dei_CurrentFiscalYearEndDate": { "xbrltype": "gMonthDayItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "CurrentFiscalYearEndDate", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Current Fiscal Year End Date", "documentation": "End date of current fiscal year in the format --MM-DD." } } }, "auth_ref": [] }, "us-gaap_CustomerRelationshipsMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "CustomerRelationshipsMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails" ], "lang": { "en-us": { "role": { "label": "Customer Relationships [Member]", "terseLabel": "Customer relationship", "documentation": "Customer relationship that exists between an entity and its customer, for example, but not limited to, tenant relationships." } } }, "auth_ref": [ "r74" ] }, "veco_DataStorageMember": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "DataStorageMember", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "documentation": "Represents the entity's Data Storage reporting segment. Data Storage segment consists of ion beam etch, ion beam deposition, diamond-like carbon, physical vapor deposition and dicing and slicing products sold primarily to customers in the data storage industry.", "label": "Data Storage [Member]", "terseLabel": "Data Storage" } } }, "auth_ref": [] }, "us-gaap_DebtInstrumentAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtInstrumentAxis", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails", "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "label": "Debt Instrument [Axis]", "documentation": "Information by type of debt instrument, including, but not limited to, draws against credit facilities." } } }, "auth_ref": [ "r21", "r93", "r94", "r139", "r141", "r206", "r354", "r355", "r356", "r357", "r358", "r359", "r360", "r361", "r362", "r363", "r364", "r365", "r366", "r367", "r368", "r369", "r511", "r704", "r705", "r706", "r707", "r708", "r830" ] }, "us-gaap_DebtInstrumentBasisSpreadOnVariableRate1": { "xbrltype": "percentItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtInstrumentBasisSpreadOnVariableRate1", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "label": "Debt Instrument, Basis Spread on Variable Rate", "terseLabel": "Basis spread on base rate (as a percent)", "documentation": "Percentage points added to the reference rate to compute the variable rate on the debt instrument." } } }, "auth_ref": [] }, "veco_DebtInstrumentCarryingAmountDebtExtinguished": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "DebtInstrumentCarryingAmountDebtExtinguished", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "documentation": "Carrying amount of debt extinguished (decrease in carrying amount of debt).", "label": "Debt Instrument Carrying Amount, Debt Extinguished", "terseLabel": "Carrying amount of debt extinguished" } } }, "auth_ref": [] }, "veco_DebtInstrumentConversionNumberOfBusinessDays": { "xbrltype": "integerItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "DebtInstrumentConversionNumberOfBusinessDays", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "documentation": "Number of consecutive business days used in determining if holder has met conversion requirements.", "label": "Debt Instrument, Conversion, Number of Business Days", "terseLabel": "Number of consecutive business days" } } }, "auth_ref": [] }, "us-gaap_DebtInstrumentConvertibleConversionPrice1": { "xbrltype": "perShareItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtInstrumentConvertibleConversionPrice1", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Instrument, Convertible, Conversion Price", "verboseLabel": "Conversion price (in dollars per share)", "documentation": "The price per share of the conversion feature embedded in the debt instrument." } } }, "auth_ref": [ "r128", "r356" ] }, "us-gaap_DebtInstrumentConvertibleConversionRatio1": { "xbrltype": "pureItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtInstrumentConvertibleConversionRatio1", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Instrument, Convertible, Conversion Ratio", "verboseLabel": "Conversion rate", "documentation": "Ratio applied to the conversion of debt instrument into equity with equity shares divided by debt principal amount." } } }, "auth_ref": [ "r30", "r65", "r131", "r132", "r356" ] }, "us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1": { "xbrltype": "integerItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtInstrumentConvertibleThresholdConsecutiveTradingDays1", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Instrument, Convertible, Threshold Consecutive Trading Days", "verboseLabel": "Number of consecutive trading days, scenario one", "documentation": "Threshold period of specified consecutive trading days within which common stock price to conversion price of convertible debt instrument must exceed threshold percentage for specified number of trading days to trigger conversion feature." } } }, "auth_ref": [] }, "veco_DebtInstrumentConvertibleThresholdConsecutiveTradingDays2": { "xbrltype": "integerItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "DebtInstrumentConvertibleThresholdConsecutiveTradingDays2", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "documentation": "Threshold period of specified consecutive trading days within which trading price as a percentage of product of last reported sale price of common stock and conversion rate on each specified trading day must be less than threshold percentage for specified number of trading days to trigger conversion feature.", "label": "Debt Instrument, Convertible, Threshold Consecutive Trading Days, 2", "terseLabel": "Number of consecutive trading days, scenario two" } } }, "auth_ref": [] }, "us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger": { "xbrltype": "percentItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Instrument, Convertible, Threshold Percentage of Stock Price Trigger", "terseLabel": "Stock price conversion trigger (as a percent)", "documentation": "Minimum percentage of common stock price to conversion price of convertible debt instruments to determine eligibility of conversion." } } }, "auth_ref": [] }, "us-gaap_DebtInstrumentConvertibleThresholdTradingDays": { "xbrltype": "integerItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtInstrumentConvertibleThresholdTradingDays", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Instrument, Convertible, Threshold Trading Days", "verboseLabel": "Trading days threshold", "documentation": "Threshold number of specified trading days that common stock price to conversion price of convertible debt instruments must exceed threshold percentage within a specified consecutive trading period to trigger conversion feature." } } }, "auth_ref": [] }, "us-gaap_DebtInstrumentFaceAmount": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtInstrumentFaceAmount", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails": { "parentTag": "us-gaap_LongTermDebt", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails" ], "lang": { "en-us": { "role": { "label": "Debt Instrument, Face Amount", "terseLabel": "Principal amount", "documentation": "Face (par) amount of debt instrument at time of issuance." } } }, "auth_ref": [ "r87", "r89", "r354", "r511", "r705", "r706" ] }, "veco_DebtInstrumentFloorRate": { "xbrltype": "percentItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "DebtInstrumentFloorRate", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "documentation": "Floor rate on debt instrument.", "label": "Debt Instrument Floor Rate", "terseLabel": "Floor rate on debt instrument (as a percent)" } } }, "auth_ref": [] }, "veco_DebtInstrumentInterestCoverageRatio": { "xbrltype": "pureItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "DebtInstrumentInterestCoverageRatio", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "documentation": "Interest coverage ratio, as defined by the agreement.", "label": "Debt Instrument, Interest Coverage Ratio", "terseLabel": "Interest coverage ratio" } } }, "auth_ref": [] }, "us-gaap_DebtInstrumentInterestRateStatedPercentage": { "xbrltype": "percentItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtInstrumentInterestRateStatedPercentage", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Instrument, Interest Rate, Stated Percentage", "terseLabel": "Interest rate (as a percent)", "documentation": "Contractual interest rate for funds borrowed, under the debt agreement." } } }, "auth_ref": [ "r29", "r355" ] }, "us-gaap_DebtInstrumentLineItems": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtInstrumentLineItems", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesCappedCallTransactionsDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails", "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "label": "Debt Instrument [Line Items]", "terseLabel": "Debt", "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table." } } }, "auth_ref": [ "r206", "r354", "r355", "r356", "r357", "r358", "r359", "r360", "r361", "r362", "r363", "r364", "r365", "r366", "r367", "r368", "r369", "r370", "r511", "r704", "r705", "r706", "r707", "r708", "r830" ] }, "us-gaap_DebtInstrumentNameDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtInstrumentNameDomain", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails", "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "label": "Debt Instrument, Name [Domain]", "documentation": "The name for the particular debt instrument or borrowing that distinguishes it from other debt instruments or borrowings, including draws against credit facilities." } } }, "auth_ref": [ "r31", "r206", "r354", "r355", "r356", "r357", "r358", "r359", "r360", "r361", "r362", "r363", "r364", "r365", "r366", "r367", "r368", "r369", "r511", "r704", "r705", "r706", "r707", "r708", "r830" ] }, "veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock": { "xbrltype": "decimalItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "documentation": "Represents the multiples of the principal amount of debt that holders may convert at their option under circumstances specified under the agreement.", "label": "Debt Instrument Principal Amount Denomination For Conversion Into Common Stock", "terseLabel": "Multiples of principal holders may convert" } } }, "auth_ref": [] }, "us-gaap_DebtInstrumentRedemptionPricePercentage": { "xbrltype": "percentItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtInstrumentRedemptionPricePercentage", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Instrument, Redemption Price, Percentage", "terseLabel": "Redemption price as a percent of principal amount", "documentation": "Percentage price of original principal amount of debt at which debt can be redeemed by the issuer." } } }, "auth_ref": [ "r19" ] }, "veco_DebtInstrumentSecuredNetLeverageRatio": { "xbrltype": "pureItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "DebtInstrumentSecuredNetLeverageRatio", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "documentation": "Secured net leverage ratio, as defined by the agreement.", "label": "Debt Instrument, Secured Net Leverage Ratio", "terseLabel": "Secured net leverage ratio" } } }, "auth_ref": [] }, "us-gaap_DebtInstrumentTable": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtInstrumentTable", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesCappedCallTransactionsDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails", "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "label": "Schedule of Long-term Debt Instruments [Table]", "documentation": "A table or schedule providing information pertaining to long-term debt instruments or arrangements, including identification, terms, features, collateral requirements and other information necessary to a fair presentation. These are debt arrangements that originally required repayment more than twelve months after issuance or greater than the normal operating cycle of the company, if longer." } } }, "auth_ref": [ "r31", "r65", "r66", "r86", "r87", "r89", "r91", "r130", "r132", "r206", "r354", "r355", "r356", "r357", "r358", "r359", "r360", "r361", "r362", "r363", "r364", "r365", "r366", "r367", "r368", "r369", "r370", "r511", "r704", "r705", "r706", "r707", "r708", "r830" ] }, "us-gaap_DebtInstrumentTerm": { "xbrltype": "durationItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtInstrumentTerm", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "label": "Debt Instrument, Term", "terseLabel": "Debt instrument term", "documentation": "Period of time between issuance and maturity of debt instrument, in PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days." } } }, "auth_ref": [] }, "veco_DebtInstrumentTotalNetLeverageRatio": { "xbrltype": "pureItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "DebtInstrumentTotalNetLeverageRatio", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "documentation": "Total net leverage ratio, as defined by the agreement.", "label": "Debt Instrument, Total Net Leverage Ratio", "terseLabel": "Total net leverage ratio" } } }, "auth_ref": [] }, "us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails": { "parentTag": "us-gaap_LongTermDebt", "weight": -1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails" ], "lang": { "en-us": { "role": { "label": "Debt Instrument, Unamortized Discount (Premium) and Debt Issuance Costs, Net", "negatedLabel": "Unamortized transaction costs", "documentation": "Amount of unamortized debt discount (premium) and debt issuance costs." } } }, "auth_ref": [ "r88", "r360", "r371", "r705", "r706" ] }, "veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted": { "xbrltype": "percentItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "documentation": "Maximum trading price as a percentage of product of the last reported sale price of common stock and the conversion rate on each specified trading day to determine eligibility of conversion of note.", "label": "Debt Instruments, Convertible Features , Maximum Percentage of Common Stock could be Converted", "terseLabel": "Trading price conversion trigger (as a percent)" } } }, "auth_ref": [] }, "us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Securities Available For Sale Continuous Unrealized Loss Position 12 Months Or Longer", "terseLabel": "Investments, Continuous loss position for 12 months or more, Estimated Fair Value", "documentation": "Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in continuous unrealized loss position for more than 12 months, without allowance for credit loss. Includes beneficial interest in securitized financial asset." } } }, "auth_ref": [ "r147", "r318", "r702" ] }, "us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, 12 Months or Longer, Accumulated Loss", "negatedLabel": "Investments, Continuous loss position for 12 months or more, Gross Unrealized Losses", "documentation": "Amount of accumulated unrealized loss on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in continuous unrealized loss position for 12 months or longer, without allowance for credit loss. Includes beneficial interest in securitized financial asset." } } }, "auth_ref": [ "r147", "r318" ] }, "us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, Less than 12 Months", "terseLabel": "Investments, Continuous loss position for less than 12 months, Estimated Fair Value", "documentation": "Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in continuous unrealized loss position for less than 12 months, without allowance for credit loss. Includes beneficial interest in securitized financial asset." } } }, "auth_ref": [ "r147", "r318", "r702" ] }, "us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, Less than 12 Months, Accumulated Loss", "negatedLabel": "Investments, Continuous loss position for less than 12 months, Gross Unrealized Losses", "documentation": "Amount of accumulated unrealized loss on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in continuous unrealized loss position for less than 12 months, without allowance for credit loss. Includes beneficial interest in securitized financial asset." } } }, "auth_ref": [ "r147", "r318" ] }, "veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails": { "parentTag": "us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "documentation": "Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year through second year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.", "label": "Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling after One Through Two Years, Amortized Cost", "terseLabel": "Amortized Cost, Due after one year through two years" } } }, "auth_ref": [] }, "veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails": { "parentTag": "us-gaap_AvailableForSaleSecuritiesDebtSecurities", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "documentation": "Fair value of investment in debt security, measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in rolling second through third year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.", "label": "Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling after One Through Two Years, Fair Value", "terseLabel": "Estimated Fair Value, Due after one year through two years" } } }, "auth_ref": [] }, "us-gaap_DebtSecuritiesAvailableForSaleRealizedGainLoss": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtSecuritiesAvailableForSaleRealizedGainLoss", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Securities, Available-for-sale, Realized Gain (Loss)", "terseLabel": "Realized gains or losses", "documentation": "Amount of realized gain (loss) on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale)." } } }, "auth_ref": [ "r842" ] }, "us-gaap_DebtSecuritiesAvailableForSaleTable": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtSecuritiesAvailableForSaleTable", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Securities, Available-for-sale [Table]", "documentation": "Disclosure of information about investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale)." } } }, "auth_ref": [ "r277", "r278", "r279", "r280", "r281", "r282", "r283", "r284", "r285", "r286", "r287", "r288" ] }, "us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsTables" ], "lang": { "en-us": { "role": { "label": "Debt Securities Available For Sale Unrealized Loss Position Fair Value Table Text Block", "terseLabel": "Schedule of fair value and unrealized losses of available-for-sale securities in a loss position", "documentation": "Tabular disclosure of fair value of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in unrealized loss position, without allowance for credit loss. Includes beneficial interest in securitized financial asset." } } }, "auth_ref": [ "r146", "r702", "r847" ] }, "us-gaap_DeferredIncomeTaxAssetsNet": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DeferredIncomeTaxAssetsNet", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_Assets", "weight": 1.0, "order": 6.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Deferred Income Tax Assets, Net", "terseLabel": "Deferred income taxes", "documentation": "Amount, after allocation of valuation allowances and deferred tax liability, of deferred tax asset attributable to deductible differences and carryforwards, with jurisdictional netting." } } }, "auth_ref": [ "r455", "r456" ] }, "us-gaap_DeferredIncomeTaxExpenseBenefit": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DeferredIncomeTaxExpenseBenefit", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities", "weight": 1.0, "order": 4.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Deferred Income Tax Expense (Benefit)", "verboseLabel": "Deferred income taxes", "documentation": "Amount of deferred income tax expense (benefit) pertaining to income (loss) from continuing operations." } } }, "auth_ref": [ "r12", "r134", "r156", "r466", "r467", "r832" ] }, "us-gaap_DeferredIncomeTaxLiabilitiesNet": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DeferredIncomeTaxLiabilitiesNet", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_Liabilities", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Deferred Income Tax Liabilities, Net", "terseLabel": "Deferred income taxes", "documentation": "Amount, after deferred tax asset, of deferred tax liability attributable to taxable differences with jurisdictional netting." } } }, "auth_ref": [ "r455", "r456", "r568" ] }, "us-gaap_DeferredRevenueCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DeferredRevenueCurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_LiabilitiesCurrent", "weight": 1.0, "order": 3.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Deferred Revenue, Current", "terseLabel": "Contract liabilities", "documentation": "Amount of deferred income and obligation to transfer product and service to customer for which consideration has been received or is receivable, classified as current." } } }, "auth_ref": [ "r823" ] }, "us-gaap_DepositAssets": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DepositAssets", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsPrepaidExpensesAndOtherCurrentAssetsDetails" ], "lang": { "en-us": { "role": { "label": "Deposit Assets", "terseLabel": "Deposits with suppliers", "documentation": "The carrying amount of the asset transferred to a third party to serve as a deposit, which typically serves as security against failure by the transferor to perform under terms of an agreement." } } }, "auth_ref": [ "r822" ] }, "us-gaap_Depreciation": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "Depreciation", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails" ], "lang": { "en-us": { "role": { "label": "Depreciation", "terseLabel": "Depreciation expense", "documentation": "The amount of expense recognized in the current period that reflects the allocation of the cost of tangible assets over the assets' useful lives. Includes production and non-production related depreciation." } } }, "auth_ref": [ "r12", "r61" ] }, "us-gaap_DepreciationDepletionAndAmortization": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DepreciationDepletionAndAmortization", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Depreciation, Depletion and Amortization", "terseLabel": "Depreciation and amortization", "documentation": "The aggregate expense recognized in the current period that allocates the cost of tangible assets, intangible assets, or depleting assets to periods that benefit from use of the assets." } } }, "auth_ref": [ "r12", "r253" ] }, "veco_DerivativeContractCappedCallMember": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "DerivativeContractCappedCallMember", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesCappedCallTransactionsDetails" ], "lang": { "en-us": { "role": { "documentation": "Capped call contract.", "label": "Derivative Contract Capped Call [Member]", "terseLabel": "Capped Call Transactions" } } }, "auth_ref": [] }, "us-gaap_DerivativeContractTypeDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DerivativeContractTypeDomain", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesCappedCallTransactionsDetails" ], "lang": { "en-us": { "role": { "label": "Derivative Contract [Domain]", "documentation": "Financial instrument or contract with one or more underlyings, notional amount or payment provision or both, and the contract can be net settled by means outside the contract or delivery of an asset." } } }, "auth_ref": [ "r605", "r607", "r620", "r621", "r622", "r623", "r624", "r625", "r626", "r628", "r629", "r630", "r631", "r642", "r643", "r644", "r645", "r648", "r649", "r650", "r651", "r666", "r667", "r668", "r669", "r727", "r729" ] }, "us-gaap_DerivativeInstrumentRiskAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DerivativeInstrumentRiskAxis", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesCappedCallTransactionsDetails" ], "lang": { "en-us": { "role": { "label": "Derivative Instrument [Axis]", "documentation": "Information by type of derivative contract." } } }, "auth_ref": [ "r80", "r81", "r83", "r84", "r605", "r607", "r620", "r621", "r622", "r623", "r624", "r625", "r626", "r628", "r629", "r630", "r631", "r642", "r643", "r644", "r645", "r648", "r649", "r650", "r651", "r666", "r667", "r668", "r669", "r694", "r727", "r729" ] }, "us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensation" ], "lang": { "en-us": { "role": { "label": "Disclosure of Compensation Related Costs, Share-based Payments [Text Block]", "terseLabel": "Share-based compensation", "documentation": "The entire disclosure for share-based payment arrangement." } } }, "auth_ref": [ "r413", "r418", "r446", "r447", "r448", "r718" ] }, "us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract", "lang": { "en-us": { "role": { "label": "Share-based Compensation" } } }, "auth_ref": [] }, "dei_DocumentFiscalPeriodFocus": { "xbrltype": "fiscalPeriodItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentFiscalPeriodFocus", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Document Fiscal Period Focus", "documentation": "Fiscal period values are FY, Q1, Q2, and Q3. 1st, 2nd and 3rd quarter 10-Q or 10-QT statements have value Q1, Q2, and Q3 respectively, with 10-K, 10-KT or other fiscal year statements having FY." } } }, "auth_ref": [] }, "dei_DocumentFiscalYearFocus": { "xbrltype": "gYearItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentFiscalYearFocus", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Document Fiscal Year Focus", "documentation": "This is focus fiscal year of the document report in YYYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006." } } }, "auth_ref": [] }, "dei_DocumentPeriodEndDate": { "xbrltype": "dateItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentPeriodEndDate", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Document Period End Date", "documentation": "For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period. The format of the date is YYYY-MM-DD." } } }, "auth_ref": [] }, "dei_DocumentQuarterlyReport": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentQuarterlyReport", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Document Quarterly Report", "documentation": "Boolean flag that is true only for a form used as an quarterly report." } } }, "auth_ref": [ "r741" ] }, "dei_DocumentTransitionReport": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentTransitionReport", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Document Transition Report", "documentation": "Boolean flag that is true only for a form used as a transition report." } } }, "auth_ref": [ "r774" ] }, "dei_DocumentType": { "xbrltype": "submissionTypeItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentType", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Document Type", "documentation": "The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'." } } }, "auth_ref": [] }, "us-gaap_EMEAMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "EMEAMember", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "label": "EMEA [Member]", "terseLabel": "EMEA", "documentation": "Regions of Europe, Middle East and Africa." } } }, "auth_ref": [ "r889", "r890", "r891", "r892" ] }, "us-gaap_EarningsPerShareAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "EarningsPerShareAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Income Per Common Share", "terseLabel": "Income per common share:" } } }, "auth_ref": [] }, "us-gaap_EarningsPerShareBasic": { "xbrltype": "perShareItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "EarningsPerShareBasic", "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails", "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Earnings Per Share, Basic", "terseLabel": "Basic (in dollars per share)", "documentation": "The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period." } } }, "auth_ref": [ "r191", "r212", "r213", "r214", "r215", "r216", "r221", "r224", "r236", "r237", "r238", "r242", "r493", "r494", "r563", "r581", "r698" ] }, "us-gaap_EarningsPerShareDiluted": { "xbrltype": "perShareItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "EarningsPerShareDiluted", "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails", "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Earnings Per Share, Diluted", "terseLabel": "Diluted (in dollars per share)", "documentation": "The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period." } } }, "auth_ref": [ "r191", "r212", "r213", "r214", "r215", "r216", "r224", "r236", "r237", "r238", "r242", "r493", "r494", "r563", "r581", "r698" ] }, "veco_EarningsPerShareDisclosureAbstract": { "xbrltype": "stringItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "EarningsPerShareDisclosureAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails" ], "lang": { "en-us": { "role": { "documentation": "No definition available.", "label": "Earnings Per Share, Disclosure [Abstract]", "terseLabel": "Net income (loss) per common share:" } } }, "auth_ref": [] }, "us-gaap_EarningsPerShareTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "EarningsPerShareTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShare" ], "lang": { "en-us": { "role": { "label": "Earnings Per Share [Text Block]", "terseLabel": "Income Per Common Share", "documentation": "The entire disclosure for earnings per share." } } }, "auth_ref": [ "r220", "r239", "r240", "r241" ] }, "us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect", "weight": 1.0, "order": 4.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Effect of Exchange Rate on Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents, Including Disposal Group and Discontinued Operations", "terseLabel": "Effect of exchange rate changes on cash and cash equivalents", "documentation": "Amount of increase (decrease) from effect of exchange rate changes on cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; held in foreign currencies; including, but not limited to, disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates." } } }, "auth_ref": [ "r867" ] }, "us-gaap_EffectiveIncomeTaxRateContinuingOperations": { "xbrltype": "percentItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "EffectiveIncomeTaxRateContinuingOperations", "presentation": [ "http://www.veeco.com/role/DisclosureIncomeTaxesDetails" ], "lang": { "en-us": { "role": { "label": "Effective Income Tax Rate Reconciliation, Percent", "terseLabel": "Effective tax rate (as a percent)", "documentation": "Percentage of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations." } } }, "auth_ref": [ "r458" ] }, "us-gaap_EmployeeRelatedLiabilitiesCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "EmployeeRelatedLiabilitiesCurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails": { "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails" ], "lang": { "en-us": { "role": { "label": "Employee-related Liabilities, Current", "terseLabel": "Payroll and related benefits", "documentation": "Total of the carrying values as of the balance sheet date of obligations incurred through that date and payable for obligations related to services received from employees, such as accrued salaries and bonuses, payroll taxes and fringe benefits. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer)." } } }, "auth_ref": [ "r27" ] }, "us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails" ], "lang": { "en-us": { "role": { "label": "Employee Service Share-based Compensation, Aggregate Disclosures [Abstract]", "verboseLabel": "Recognized share-based compensation" } } }, "auth_ref": [] }, "us-gaap_EmployeeStockOptionMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "EmployeeStockOptionMember", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "Employee Stock Option [Member]", "terseLabel": "Employee Stock Option", "documentation": "Share-based payment arrangement granting right, subject to vesting and other restrictions, to purchase or sell certain number of shares at predetermined price for specified period of time." } } }, "auth_ref": [] }, "dei_EntityAddressAddressLine1": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressAddressLine1", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Address, Address Line One", "documentation": "Address Line 1 such as Attn, Building Name, Street Name" } } }, "auth_ref": [] }, "dei_EntityAddressCityOrTown": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressCityOrTown", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Address, City or Town", "documentation": "Name of the City or Town" } } }, "auth_ref": [] }, "dei_EntityAddressPostalZipCode": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressPostalZipCode", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Address, Postal Zip Code", "documentation": "Code for the postal or zip code" } } }, "auth_ref": [] }, "dei_EntityAddressStateOrProvince": { "xbrltype": "stateOrProvinceItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressStateOrProvince", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Address, State or Province", "documentation": "Name of the state or province." } } }, "auth_ref": [] }, "dei_EntityCentralIndexKey": { "xbrltype": "centralIndexKeyItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityCentralIndexKey", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Central Index Key", "documentation": "A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK." } } }, "auth_ref": [ "r739" ] }, "dei_EntityCommonStockSharesOutstanding": { "xbrltype": "sharesItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityCommonStockSharesOutstanding", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Common Stock, Shares Outstanding", "documentation": "Indicate number of shares or other units outstanding of each of registrant's classes of capital or common stock or other ownership interests, if and as stated on cover of related periodic report. Where multiple classes or units exist define each class/interest by adding class of stock items such as Common Class A [Member], Common Class B [Member] or Partnership Interest [Member] onto the Instrument [Domain] of the Entity Listings, Instrument." } } }, "auth_ref": [] }, "dei_EntityCurrentReportingStatus": { "xbrltype": "yesNoItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityCurrentReportingStatus", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Current Reporting Status", "documentation": "Indicate 'Yes' or 'No' whether registrants (1) have filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that registrants were required to file such reports), and (2) have been subject to such filing requirements for the past 90 days. This information should be based on the registrant's current or most recent filing containing the related disclosure." } } }, "auth_ref": [] }, "dei_EntityEmergingGrowthCompany": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityEmergingGrowthCompany", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Emerging Growth Company", "documentation": "Indicate if registrant meets the emerging growth company criteria." } } }, "auth_ref": [ "r739" ] }, "dei_EntityFileNumber": { "xbrltype": "fileNumberItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityFileNumber", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity File Number", "documentation": "Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen." } } }, "auth_ref": [] }, "dei_EntityFilerCategory": { "xbrltype": "filerCategoryItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityFilerCategory", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Filer Category", "documentation": "Indicate whether the registrant is one of the following: Large Accelerated Filer, Accelerated Filer, Non-accelerated Filer. Definitions of these categories are stated in Rule 12b-2 of the Exchange Act. This information should be based on the registrant's current or most recent filing containing the related disclosure." } } }, "auth_ref": [ "r739" ] }, "dei_EntityIncorporationStateCountryCode": { "xbrltype": "edgarStateCountryItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityIncorporationStateCountryCode", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Incorporation, State or Country Code", "documentation": "Two-character EDGAR code representing the state or country of incorporation." } } }, "auth_ref": [] }, "dei_EntityInteractiveDataCurrent": { "xbrltype": "yesNoItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityInteractiveDataCurrent", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Interactive Data Current", "documentation": "Boolean flag that is true when the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files)." } } }, "auth_ref": [ "r813" ] }, "dei_EntityRegistrantName": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityRegistrantName", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Registrant Name", "documentation": "The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC." } } }, "auth_ref": [ "r739" ] }, "dei_EntityShellCompany": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityShellCompany", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Shell Company", "documentation": "Boolean flag that is true when the registrant is a shell company as defined in Rule 12b-2 of the Exchange Act." } } }, "auth_ref": [ "r739" ] }, "dei_EntitySmallBusiness": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntitySmallBusiness", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Small Business", "documentation": "Indicates that the company is a Smaller Reporting Company (SRC)." } } }, "auth_ref": [ "r739" ] }, "dei_EntityTaxIdentificationNumber": { "xbrltype": "employerIdItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityTaxIdentificationNumber", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Entity Tax Identification Number", "documentation": "The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS." } } }, "auth_ref": [ "r739" ] }, "veco_EpiluvacAbMember": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "EpiluvacAbMember", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "documentation": "Represents the information pertaining to Epiluvac AB.", "label": "Epiluvac AB [Member]", "terseLabel": "Epiluvac AB" } } }, "auth_ref": [] }, "us-gaap_EquityComponentDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "EquityComponentDomain", "presentation": [ "http://www.veeco.com/role/DisclosureEquityAociRollforwardDetails", "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails" ], "lang": { "en-us": { "role": { "label": "Equity Component [Domain]", "documentation": "Components of equity are the parts of the total Equity balance including that which is allocated to common, preferred, treasury stock, retained earnings, etc." } } }, "auth_ref": [ "r17", "r159", "r186", "r187", "r188", "r207", "r208", "r209", "r211", "r217", "r219", "r243", "r308", "r309", "r388", "r449", "r450", "r451", "r462", "r463", "r484", "r485", "r486", "r487", "r488", "r489", "r492", "r503", "r504", "r505", "r506", "r507", "r508", "r522", "r590", "r591", "r592", "r600", "r654" ] }, "ecd_EquityValuationAssumptionDifferenceFnTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "EquityValuationAssumptionDifferenceFnTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Equity Valuation Assumption Difference, Footnote [Text Block]", "terseLabel": "Equity Valuation Assumption Difference, Footnote" } } }, "auth_ref": [ "r782" ] }, "ecd_ErrCompAnalysisTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "ErrCompAnalysisTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Erroneous Compensation Analysis [Text Block]", "terseLabel": "Erroneous Compensation Analysis" } } }, "auth_ref": [ "r746", "r757", "r767", "r792" ] }, "ecd_ErrCompRecoveryTable": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "ErrCompRecoveryTable", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Erroneously Awarded Compensation Recovery [Table]", "terseLabel": "Erroneously Awarded Compensation Recovery" } } }, "auth_ref": [ "r743", "r754", "r764", "r789" ] }, "ecd_ExecutiveCategoryAxis": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "ExecutiveCategoryAxis", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Executive Category [Axis]", "terseLabel": "Executive Category:" } } }, "auth_ref": [ "r788" ] }, "us-gaap_ExtinguishmentOfDebtAmount": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ExtinguishmentOfDebtAmount", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "label": "Extinguishment of Debt, Amount", "terseLabel": "Repurchased and retired amount", "documentation": "Gross amount of debt extinguished." } } }, "auth_ref": [] }, "us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]", "terseLabel": "Major categories of assets and liabilities measured on a recurring basis, at fair value", "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table." } } }, "auth_ref": [ "r496", "r497", "r500" ] }, "us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Fair Value Measurements, Recurring and Nonrecurring [Table]", "documentation": "Disclosure of information about asset and liability measured at fair value on recurring and nonrecurring basis." } } }, "auth_ref": [ "r496", "r497", "r500" ] }, "veco_FairValueAssetsLevel1ToLevel2TransfersAmount1": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "FairValueAssetsLevel1ToLevel2TransfersAmount1", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "documentation": "Amount of transfers of assets measured on a recurring basis out of Level 1 of the fair value hierarchy into Level 2.", "label": "Fair Value, Assets, Level 1 to Level 2 Transfers, Amount 1", "terseLabel": "Transfer of assets from Level 1 to Level 2" } } }, "auth_ref": [] }, "veco_FairValueAssetsLevel2ToLevel1TransfersAmount1": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "FairValueAssetsLevel2ToLevel1TransfersAmount1", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "documentation": "Amount of transfers of assets measured on a recurring basis out of Level 2 of the fair value hierarchy into Level 1.", "label": "Fair Value, Assets, Level 2 to Level 1 Transfers, Amount 1", "terseLabel": "Transfer of assets from Level 2 to Level 1" } } }, "auth_ref": [] }, "us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FairValueAssetsMeasuredOnRecurringBasisTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsTables" ], "lang": { "en-us": { "role": { "label": "Fair Value, Assets Measured on Recurring Basis [Table Text Block]", "terseLabel": "Schedule of portion of Veeco's assets (excluding cash balances) that are measured at fair value on a recurring basis", "documentation": "Tabular disclosure of assets, including [financial] instruments measured at fair value that are classified in stockholders' equity, if any, by class that are measured at fair value on a recurring basis. The disclosures contemplated herein include the fair value measurements at the reporting date by the level within the fair value hierarchy in which the fair value measurements in their entirety fall, segregating fair value measurements using quoted prices in active markets for identical assets (Level 1), significant other observable inputs (Level 2), and significant unobservable inputs (Level 3)." } } }, "auth_ref": [ "r85", "r137" ] }, "us-gaap_FairValueByFairValueHierarchyLevelAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FairValueByFairValueHierarchyLevelAxis", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Fair Value, Hierarchy [Axis]", "documentation": "Information by level within fair value hierarchy and fair value measured at net asset value per share as practical expedient." } } }, "auth_ref": [ "r362", "r406", "r407", "r408", "r409", "r410", "r411", "r497", "r526", "r527", "r528", "r705", "r706", "r712", "r713", "r714" ] }, "us-gaap_FairValueByMeasurementFrequencyAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FairValueByMeasurementFrequencyAxis", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Measurement Frequency [Axis]", "documentation": "Information by measurement frequency." } } }, "auth_ref": [ "r496", "r497", "r498", "r499", "r501" ] }, "us-gaap_FairValueInputsLevel1Member": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FairValueInputsLevel1Member", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Fair Value, Inputs, Level 1 [Member]", "terseLabel": "Level 1", "documentation": "Quoted prices in active markets for identical assets or liabilities that the reporting entity can access at the measurement date." } } }, "auth_ref": [ "r362", "r406", "r411", "r497", "r526", "r712", "r713", "r714" ] }, "us-gaap_FairValueInputsLevel2Member": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FairValueInputsLevel2Member", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Fair Value, Inputs, Level 2 [Member]", "terseLabel": "Level 2", "documentation": "Inputs other than quoted prices included within level 1 that are observable for an asset or liability, either directly or indirectly, including, but not limited to, quoted prices for similar assets or liabilities in active markets, or quoted prices for identical or similar assets or liabilities in inactive markets." } } }, "auth_ref": [ "r362", "r406", "r411", "r497", "r527", "r705", "r706", "r712", "r713", "r714" ] }, "us-gaap_FairValueMeasurementFrequencyDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FairValueMeasurementFrequencyDomain", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Fair Value, Measurement Frequency [Domain]", "documentation": "Measurement frequency." } } }, "auth_ref": [] }, "us-gaap_FairValueMeasurementsFairValueHierarchyDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FairValueMeasurementsFairValueHierarchyDomain", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Fair Value Hierarchy and NAV [Domain]", "documentation": "Categories used to prioritize the inputs to valuation techniques to measure fair value." } } }, "auth_ref": [ "r362", "r406", "r407", "r408", "r409", "r410", "r411", "r526", "r527", "r528", "r705", "r706", "r712", "r713", "r714" ] }, "us-gaap_FairValueMeasurementsRecurringMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FairValueMeasurementsRecurringMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Fair Value, Recurring [Member]", "terseLabel": "Measured on a recurring basis", "documentation": "Frequent fair value measurement. Includes, but is not limited to, fair value adjustment for impairment of asset, liability or equity, frequently measured at fair value." } } }, "auth_ref": [ "r495", "r501" ] }, "us-gaap_FinancialInstrumentAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FinancialInstrumentAxis", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails", "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Financial Instrument [Axis]", "documentation": "Information by type of financial instrument." } } }, "auth_ref": [ "r277", "r278", "r279", "r280", "r281", "r282", "r283", "r284", "r285", "r286", "r287", "r288", "r289", "r290", "r291", "r292", "r293", "r294", "r295", "r296", "r297", "r298", "r299", "r300", "r301", "r302", "r303", "r304", "r305", "r306", "r311", "r312", "r313", "r314", "r315", "r317", "r319", "r320", "r370", "r386", "r490", "r523", "r524", "r525", "r526", "r527", "r528", "r529", "r530", "r531", "r532", "r533", "r534", "r535", "r536", "r537", "r538", "r539", "r540", "r541", "r542", "r543", "r544", "r545", "r546", "r547", "r548", "r549", "r550", "r551", "r552", "r579", "r702", "r815", "r816", "r817", "r818", "r819", "r820", "r821", "r842", "r843", "r844", "r845" ] }, "veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems": { "xbrltype": "stringItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails" ], "lang": { "en-us": { "role": { "documentation": "No definition available.", "label": "Finite Lived and Indefinite Lived Intangible Assets By Major Class [Line Items]", "terseLabel": "Intangible assets" } } }, "auth_ref": [] }, "veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable": { "xbrltype": "stringItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails" ], "lang": { "en-us": { "role": { "documentation": "Disclosure of finite-lived and indefinite-lived intangible assets, excluding goodwill, in total and by major class.", "label": "Finite Lived and Indefinite Lived Intangible Assets by Major Class [Table]" } } }, "auth_ref": [] }, "veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails": { "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet", "weight": -1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails" ], "lang": { "en-us": { "role": { "documentation": "Accumulated amount of amortization and impairment of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.", "label": "Finite-Lived Intangible Assets, Accumulated Amortization and Impairment", "terseLabel": "Accumulated Amortization and Impairment, Intangible assets" } } }, "auth_ref": [] }, "us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FiniteLivedIntangibleAssetsByMajorClassAxis", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails" ], "lang": { "en-us": { "role": { "label": "Finite-Lived Intangible Assets by Major Class [Axis]", "documentation": "Information by major type or class of finite-lived intangible assets." } } }, "auth_ref": [ "r326", "r327", "r328", "r329", "r558", "r559" ] }, "us-gaap_FiniteLivedIntangibleAssetsGross": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FiniteLivedIntangibleAssetsGross", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails": { "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails" ], "lang": { "en-us": { "role": { "label": "Finite-Lived Intangible Assets, Gross", "terseLabel": "Gross Carrying Amount, Intangible assets", "documentation": "Amount before amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life." } } }, "auth_ref": [ "r123", "r559" ] }, "us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FiniteLivedIntangibleAssetsMajorClassNameDomain", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails" ], "lang": { "en-us": { "role": { "label": "Finite-Lived Intangible Assets, Major Class Name [Domain]", "documentation": "The major class of finite-lived intangible asset (for example, patents, trademarks, copyrights, etc.) A major class is composed of intangible assets that can be grouped together because they are similar, either by their nature or by their use in the operations of a company." } } }, "auth_ref": [ "r58", "r59" ] }, "us-gaap_FiniteLivedIntangibleAssetsNet": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FiniteLivedIntangibleAssetsNet", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_Assets", "weight": 1.0, "order": 4.0 }, "http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails", "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Finite-Lived Intangible Assets, Net", "totalLabel": "Total Net Intangible Assets", "verboseLabel": "Intangible assets, net", "documentation": "Amount after amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life." } } }, "auth_ref": [ "r123", "r558" ] }, "us-gaap_FiscalPeriod": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FiscalPeriod", "presentation": [ "http://www.veeco.com/role/DisclosureBasisOfPresentationPolicies" ], "lang": { "en-us": { "role": { "label": "Fiscal Period, Policy [Policy Text Block]", "verboseLabel": "Fiscal Period", "documentation": "Disclosure of accounting policy for determining an entity's fiscal year or other fiscal period. This disclosure may include identification of the fiscal period end-date, the length of the fiscal period, any reporting period lag between the entity and its subsidiaries, or equity investees. If a reporting lag exists, the closing date of the entity having a different period end is generally noted, along with an explanation of the necessity for using different closing dates. Any intervening events that materially affect the entity's financial position or results of operations are generally also disclosed." } } }, "auth_ref": [ "r78" ] }, "us-gaap_FiscalPeriodDuration": { "xbrltype": "durationItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "FiscalPeriodDuration", "presentation": [ "http://www.veeco.com/role/DisclosureBasisOfPresentationFiscalPeriodDetails" ], "lang": { "en-us": { "role": { "label": "Fiscal Period Duration", "terseLabel": "Fiscal period duration (in days)", "documentation": "Duration of a fiscal period, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Includes, but not limited to, weeks in a year or quarter." } } }, "auth_ref": [] }, "ecd_ForgoneRecoveryDueToDisqualificationOfTaxBenefitsAmt": { "xbrltype": "monetaryItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "ForgoneRecoveryDueToDisqualificationOfTaxBenefitsAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Forgone Recovery due to Disqualification of Tax Benefits, Amount", "terseLabel": "Forgone Recovery due to Disqualification of Tax Benefits, Amount" } } }, "auth_ref": [ "r750", "r761", "r771", "r796" ] }, "ecd_ForgoneRecoveryDueToExpenseOfEnforcementAmt": { "xbrltype": "monetaryItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "ForgoneRecoveryDueToExpenseOfEnforcementAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Forgone Recovery due to Expense of Enforcement, Amount", "terseLabel": "Forgone Recovery due to Expense of Enforcement, Amount" } } }, "auth_ref": [ "r750", "r761", "r771", "r796" ] }, "ecd_ForgoneRecoveryDueToViolationOfHomeCountryLawAmt": { "xbrltype": "monetaryItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "ForgoneRecoveryDueToViolationOfHomeCountryLawAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Forgone Recovery due to Violation of Home Country Law, Amount", "terseLabel": "Forgone Recovery due to Violation of Home Country Law, Amount" } } }, "auth_ref": [ "r750", "r761", "r771", "r796" ] }, "ecd_ForgoneRecoveryExplanationOfImpracticabilityTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "ForgoneRecoveryExplanationOfImpracticabilityTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Forgone Recovery, Explanation of Impracticability [Text Block]", "terseLabel": "Forgone Recovery, Explanation of Impracticability" } } }, "auth_ref": [ "r750", "r761", "r771", "r796" ] }, "ecd_ForgoneRecoveryIndName": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "ForgoneRecoveryIndName", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Forgone Recovery, Individual Name", "terseLabel": "Name" } } }, "auth_ref": [ "r750", "r761", "r771", "r796" ] }, "us-gaap_GainsLossesOnExtinguishmentOfDebtBeforeWriteOffOfDeferredDebtIssuanceCost": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "GainsLossesOnExtinguishmentOfDebtBeforeWriteOffOfDeferredDebtIssuanceCost", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "label": "Gain (Loss) on Extinguishment of Debt, before Debt Issuance Cost Writeoff", "terseLabel": "Loss on extinguishment of debt", "documentation": "Reflects the difference between the fair value of payments made to legally extinguish a debt and its carrying value at that time. This item excludes the write-off of amounts previously capitalized as debt issuance costs." } } }, "auth_ref": [ "r63", "r64" ] }, "us-gaap_Goodwill": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "Goodwill", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_Assets", "weight": 1.0, "order": 5.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Goodwill", "terseLabel": "Goodwill", "documentation": "Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized." } } }, "auth_ref": [ "r167", "r325", "r560", "r703", "r724", "r849", "r850" ] }, "us-gaap_GoodwillPeriodIncreaseDecrease": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "GoodwillPeriodIncreaseDecrease", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsGoodwillDetails" ], "lang": { "en-us": { "role": { "label": "Goodwill, Period Increase (Decrease)", "terseLabel": "Increase (decrease) in goodwill", "documentation": "Amount of increase (decrease) of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized." } } }, "auth_ref": [ "r848" ] }, "us-gaap_GoodwillRollForward": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "GoodwillRollForward", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsGoodwillDetails" ], "lang": { "en-us": { "role": { "label": "Goodwill [Roll Forward]", "verboseLabel": "Changes in goodwill balances", "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period." } } }, "auth_ref": [] }, "us-gaap_GrossProfit": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "GrossProfit", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": { "parentTag": "us-gaap_OperatingIncomeLoss", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Gross Profit", "totalLabel": "Gross profit", "documentation": "Aggregate revenue less cost of goods and services sold or operating expenses directly attributable to the revenue generation activity." } } }, "auth_ref": [ "r109", "r204", "r248", "r257", "r262", "r265", "r307", "r345", "r346", "r347", "r348", "r349", "r350", "r351", "r352", "r353", "r502", "r700", "r858" ] }, "us-gaap_GuaranteeObligationsCurrentCarryingValue": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "GuaranteeObligationsCurrentCarryingValue", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails" ], "lang": { "en-us": { "role": { "label": "Guarantor Obligations, Current Carrying Value", "terseLabel": "Bank guarantees and letters of credit outstanding", "documentation": "The current carrying amount of the liability for the freestanding or embedded guarantor's obligations under the guarantee or each group of similar guarantees." } } }, "auth_ref": [ "r338" ] }, "us-gaap_GuaranteesAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "GuaranteesAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails" ], "lang": { "en-us": { "role": { "label": "Guarantees [Abstract]", "terseLabel": "Bank guarantees" } } }, "auth_ref": [] }, "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": { "parentTag": "us-gaap_NetIncomeLoss", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureIncomeTaxesDetails", "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Income (Loss) from Continuing Operations before Income Taxes, Noncontrolling Interest", "totalLabel": "Income before income taxes", "verboseLabel": "Income before income taxes", "documentation": "Amount of income (loss) from continuing operations, including income (loss) from equity method investments, before deduction of income tax expense (benefit), and income (loss) attributable to noncontrolling interest." } } }, "auth_ref": [ "r0", "r106", "r143", "r248", "r257", "r262", "r265", "r564", "r576", "r700" ] }, "us-gaap_IncomeStatementAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncomeStatementAbstract", "lang": { "en-us": { "role": { "label": "Consolidated Statements of Operations" } } }, "auth_ref": [] }, "us-gaap_IncomeStatementLocationAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncomeStatementLocationAxis", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails" ], "lang": { "en-us": { "role": { "label": "Income Statement Location [Axis]", "documentation": "Information by location in the income statement." } } }, "auth_ref": [ "r330", "r331", "r638" ] }, "us-gaap_IncomeStatementLocationDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncomeStatementLocationDomain", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails" ], "lang": { "en-us": { "role": { "label": "Income Statement Location [Domain]", "documentation": "Location in the income statement." } } }, "auth_ref": [ "r331", "r638" ] }, "us-gaap_IncomeTaxDisclosureAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncomeTaxDisclosureAbstract", "lang": { "en-us": { "role": { "label": "Income Taxes" } } }, "auth_ref": [] }, "us-gaap_IncomeTaxDisclosureTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncomeTaxDisclosureTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureIncomeTaxes" ], "lang": { "en-us": { "role": { "label": "Income Tax Disclosure [Text Block]", "terseLabel": "Income Taxes", "documentation": "The entire disclosure for income taxes. Disclosures may include net deferred tax liability or asset recognized in an enterprise's statement of financial position, net change during the year in the total valuation allowance, approximate tax effect of each type of temporary difference and carryforward that gives rise to a significant portion of deferred tax liabilities and deferred tax assets, utilization of a tax carryback, and tax uncertainties information." } } }, "auth_ref": [ "r205", "r454", "r459", "r460", "r461", "r464", "r468", "r469", "r470", "r598" ] }, "us-gaap_IncomeTaxExpenseBenefit": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncomeTaxExpenseBenefit", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": { "parentTag": "us-gaap_NetIncomeLoss", "weight": -1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureIncomeTaxesDetails", "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Income Tax Expense (Benefit)", "terseLabel": "Income tax expense", "verboseLabel": "Income tax expense", "documentation": "Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations." } } }, "auth_ref": [ "r148", "r157", "r218", "r219", "r254", "r457", "r465", "r582" ] }, "us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureIncomeTaxesDetails" ], "lang": { "en-us": { "role": { "label": "Effective Income Tax Rate Reconciliation, Amount [Abstract]", "terseLabel": "Tax reconciliation disclosures" } } }, "auth_ref": [] }, "us-gaap_IncomeTaxesPaidNet": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncomeTaxesPaidNet", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Income Taxes Paid, Net", "terseLabel": "Income taxes paid, net of refunds received", "documentation": "The amount of cash paid during the current period to foreign, federal, state, and local authorities as taxes on income, net of any cash received during the current period as refunds for the overpayment of taxes." } } }, "auth_ref": [ "r43" ] }, "us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncreaseDecreaseInAccountsPayableAndAccruedLiabilities", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities", "weight": 1.0, "order": 10.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Increase (Decrease) in Accounts Payable and Accrued Liabilities", "terseLabel": "Accounts payable and accrued expenses", "documentation": "The increase (decrease) during the reporting period in the amounts payable to vendors for goods and services received and the amount of obligations and expenses incurred but not paid." } } }, "auth_ref": [ "r11" ] }, "veco_IncreaseDecreaseInAccountsReceivableAndContractAssets": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "IncreaseDecreaseInAccountsReceivableAndContractAssets", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities", "weight": -1.0, "order": 7.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "documentation": "The increase (decrease) during the reporting period in amount due within one year (or one business cycle) from customers for the credit sale of goods and services and contract assets.", "label": "Increase Decrease in Accounts Receivable and Contract Assets", "negatedLabel": "Accounts receivable and contract assets" } } }, "auth_ref": [] }, "us-gaap_IncreaseDecreaseInContractWithCustomerLiability": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncreaseDecreaseInContractWithCustomerLiability", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities", "weight": 1.0, "order": 11.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Increase Decrease in Contract with Customer Liability", "terseLabel": "Contract liabilities", "documentation": "Amount of increase (decrease) in obligation to transfer good or service to customer for which consideration has been received or is receivable." } } }, "auth_ref": [ "r554", "r828" ] }, "us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities", "weight": 1.0, "order": 12.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Increase (Decrease) in Income Taxes Payable, Net of Income Taxes Receivable", "terseLabel": "Income taxes receivable and payable, net", "documentation": "The increase (decrease) during the reporting period in the amounts payable to taxing authorities for taxes that are based on the reporting entity's earnings, net of amounts receivable from taxing authorities for refunds of overpayments or recoveries of income taxes." } } }, "auth_ref": [ "r828" ] }, "us-gaap_IncreaseDecreaseInInventories": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncreaseDecreaseInInventories", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities", "weight": -1.0, "order": 8.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Increase (Decrease) in Inventories", "negatedLabel": "Inventories", "documentation": "The increase (decrease) during the reporting period in the aggregate value of all inventory held by the reporting entity, associated with underlying transactions that are classified as operating activities." } } }, "auth_ref": [ "r11" ] }, "us-gaap_IncreaseDecreaseInOperatingCapitalAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncreaseDecreaseInOperatingCapitalAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Increase (Decrease) in Operating Capital [Abstract]", "terseLabel": "Changes in operating assets and liabilities:" } } }, "auth_ref": [] }, "us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncreaseDecreaseInOtherOperatingCapitalNet", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities", "weight": -1.0, "order": 13.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Increase (Decrease) in Other Operating Assets and Liabilities, Net", "negatedLabel": "Other, net", "documentation": "Amount of increase (decrease) in operating assets after deduction of operating liabilities classified as other." } } }, "auth_ref": [ "r11" ] }, "us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities", "weight": -1.0, "order": 9.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Increase (Decrease) in Prepaid Expense and Other Assets", "negatedLabel": "Prepaid expenses and other current assets", "documentation": "Amount of increase (decrease) in prepaid expenses, and assets classified as other." } } }, "auth_ref": [ "r11" ] }, "us-gaap_IncreaseDecreaseInStockholdersEquityRollForward": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncreaseDecreaseInStockholdersEquityRollForward", "presentation": [ "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails" ], "lang": { "en-us": { "role": { "label": "Increase (Decrease) in Stockholders' Equity [Roll Forward]", "terseLabel": "Increase (Decrease) in Stockholders' Equity", "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period." } } }, "auth_ref": [] }, "us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncrementalCommonSharesAttributableToConversionOfDebtSecurities", "calculation": { "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails": { "parentTag": "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails" ], "lang": { "en-us": { "role": { "label": "Incremental Common Shares Attributable to Dilutive Effect of Conversion of Debt Securities", "verboseLabel": "Dilutive effect of convertible notes", "documentation": "Additional shares included in the calculation of diluted EPS as a result of the potentially dilutive effect of convertible debt securities using the if-converted method." } } }, "auth_ref": [ "r232", "r233", "r238" ] }, "us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "IncrementalCommonSharesAttributableToShareBasedPaymentArrangements", "calculation": { "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails": { "parentTag": "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding", "weight": 1.0, "order": 3.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails" ], "lang": { "en-us": { "role": { "label": "Incremental Common Shares Attributable to Dilutive Effect of Share-based Payment Arrangements", "terseLabel": "Effect of potentially dilutive share-based awards", "documentation": "Additional shares included in the calculation of diluted EPS as a result of the potentially dilutive effect of share based payment arrangements using the treasury stock method." } } }, "auth_ref": [ "r225", "r226", "r227", "r238", "r417" ] }, "ecd_IndividualAxis": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "IndividualAxis", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure", "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure", "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements", "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Individual [Axis]", "terseLabel": "Individual:" } } }, "auth_ref": [ "r753", "r761", "r771", "r788", "r796", "r800", "r808" ] }, "ecd_InsiderTradingArrLineItems": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "InsiderTradingArrLineItems", "lang": { "en-us": { "role": { "label": "Insider Trading Arrangements [Line Items]", "terseLabel": "Insider Trading Arrangements:" } } }, "auth_ref": [ "r806" ] }, "ecd_InsiderTradingPoliciesProcLineItems": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "InsiderTradingPoliciesProcLineItems", "lang": { "en-us": { "role": { "label": "Insider Trading Policies and Procedures [Line Items]", "terseLabel": "Insider Trading Policies and Procedures:" } } }, "auth_ref": [ "r742", "r812" ] }, "ecd_InsiderTrdPoliciesProcAdoptedFlag": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "InsiderTrdPoliciesProcAdoptedFlag", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingPoliciesProc" ], "lang": { "en-us": { "role": { "label": "Insider Trading Policies and Procedures Adopted [Flag]", "terseLabel": "Insider Trading Policies and Procedures Adopted" } } }, "auth_ref": [ "r742", "r812" ] }, "ecd_InsiderTrdPoliciesProcNotAdoptedTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "InsiderTrdPoliciesProcNotAdoptedTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingPoliciesProc" ], "lang": { "en-us": { "role": { "label": "Insider Trading Policies and Procedures Not Adopted [Text Block]", "terseLabel": "Insider Trading Policies and Procedures Not Adopted" } } }, "auth_ref": [ "r742", "r812" ] }, "us-gaap_InterestExpense": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InterestExpense", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": { "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest", "weight": -1.0, "order": 3.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Interest Expense", "negatedLabel": "Interest expense", "documentation": "Amount of the cost of borrowed funds accounted for as interest expense." } } }, "auth_ref": [ "r88", "r145", "r189", "r252", "r509", "r639", "r735", "r886" ] }, "us-gaap_InterestExpenseDebt": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InterestExpenseDebt", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails" ], "lang": { "en-us": { "role": { "label": "Interest Expense, Debt", "totalLabel": "Total Interest Expense", "documentation": "Amount of the cost of borrowed funds accounted for as interest expense for debt." } } }, "auth_ref": [ "r113", "r367", "r373", "r707", "r708" ] }, "us-gaap_InterestExpenseDebtExcludingAmortization": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InterestExpenseDebtExcludingAmortization", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails": { "parentTag": "us-gaap_InterestExpenseDebt", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails" ], "lang": { "en-us": { "role": { "label": "Interest Expense, Debt, Excluding Amortization", "terseLabel": "Coupon interest expense", "documentation": "Represents the portion of interest incurred in the period on debt arrangements that was charged against earnings, excluding amortization of debt discount (premium) and financing costs." } } }, "auth_ref": [ "r114", "r368", "r707", "r708" ] }, "us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InterestIncomeAndInterestExpenseDisclosureTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesTables" ], "lang": { "en-us": { "role": { "label": "Interest Income and Interest Expense Disclosure [Table Text Block]", "terseLabel": "Schedule of interest expense related to Convertible Senior Notes", "documentation": "Tabular disclosure of interest income and expense, including, but not limited to, interest income and expense from investments, loans, and securities." } } }, "auth_ref": [] }, "us-gaap_InterestOnConvertibleDebtNetOfTax": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InterestOnConvertibleDebtNetOfTax", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails": { "parentTag": "us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails" ], "lang": { "en-us": { "role": { "label": "Interest on Convertible Debt, Net of Tax", "terseLabel": "Interest expense associated with convertible notes", "documentation": "Amount, after tax, of interest recognized on convertible debt instrument excluding interest on principal required to be paid in cash." } } }, "auth_ref": [ "r223", "r229", "r238" ] }, "us-gaap_InterestPaidNet": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InterestPaidNet", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Interest Paid", "terseLabel": "Interest paid", "documentation": "Amount of cash paid for interest, excluding capitalized interest, classified as operating activity. Includes, but is not limited to, payment to settle zero-coupon bond for accreted interest of debt discount and debt instrument with insignificant coupon interest rate in relation to effective interest rate of borrowing attributable to accreted interest of debt discount." } } }, "auth_ref": [ "r197", "r200", "r201" ] }, "us-gaap_InterestPayableCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InterestPayableCurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails": { "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent", "weight": 1.0, "order": 7.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails" ], "lang": { "en-us": { "role": { "label": "Interest Payable, Current", "terseLabel": "Interest", "documentation": "Carrying value as of the balance sheet date of [accrued] interest payable on all forms of debt, including trade payables, that has been incurred and is unpaid. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer)." } } }, "auth_ref": [ "r27" ] }, "veco_InventoryEvaluationInventoryNetOfReserves": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "InventoryEvaluationInventoryNetOfReserves", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureAssetsInventoriesDetails": { "parentTag": "us-gaap_InventoryNet", "weight": 1.0, "order": 4.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsInventoriesDetails" ], "lang": { "en-us": { "role": { "documentation": "Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date for elements of evaluation inventory.", "label": "Inventory, Evaluation Inventory, Net of Reserves", "terseLabel": "Evaluation inventory" } } }, "auth_ref": [] }, "us-gaap_InventoryFinishedGoodsNetOfReserves": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InventoryFinishedGoodsNetOfReserves", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureAssetsInventoriesDetails": { "parentTag": "us-gaap_InventoryNet", "weight": 1.0, "order": 3.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsInventoriesDetails" ], "lang": { "en-us": { "role": { "label": "Inventory, Finished Goods, Net of Reserves", "terseLabel": "Finished goods", "documentation": "Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of merchandise or goods held by the company that are readily available for sale." } } }, "auth_ref": [ "r122", "r691" ] }, "us-gaap_InventoryNet": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InventoryNet", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_AssetsCurrent", "weight": 1.0, "order": 6.0 }, "http://www.veeco.com/role/DisclosureAssetsInventoriesDetails": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsInventoriesDetails", "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Inventory, Net", "terseLabel": "Inventories", "totalLabel": "Total", "documentation": "Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer." } } }, "auth_ref": [ "r175", "r690", "r724" ] }, "us-gaap_InventoryNetAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InventoryNetAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsInventoriesDetails" ], "lang": { "en-us": { "role": { "label": "Inventory, Net [Abstract]", "terseLabel": "Inventories" } } }, "auth_ref": [] }, "us-gaap_InventoryPolicyTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InventoryPolicyTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureBasisOfPresentationPolicies" ], "lang": { "en-us": { "role": { "label": "Inventory, Policy [Policy Text Block]", "terseLabel": "Inventories", "documentation": "Disclosure of inventory accounting policy for inventory classes, including, but not limited to, basis for determining inventory amounts, methods by which amounts are added and removed from inventory classes, loss recognition on impairment of inventories, and situations in which inventories are stated above cost." } } }, "auth_ref": [ "r149", "r163", "r174", "r321", "r322", "r323", "r556", "r696" ] }, "us-gaap_InventoryRawMaterialsNetOfReserves": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InventoryRawMaterialsNetOfReserves", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureAssetsInventoriesDetails": { "parentTag": "us-gaap_InventoryNet", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsInventoriesDetails" ], "lang": { "en-us": { "role": { "label": "Inventory, Raw Materials, Net of Reserves", "terseLabel": "Materials", "documentation": "Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of unprocessed items to be consumed in the manufacturing or production process." } } }, "auth_ref": [ "r122", "r693" ] }, "us-gaap_InventoryWorkInProcessNetOfReserves": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InventoryWorkInProcessNetOfReserves", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureAssetsInventoriesDetails": { "parentTag": "us-gaap_InventoryNet", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsInventoriesDetails" ], "lang": { "en-us": { "role": { "label": "Inventory, Work in Process, Net of Reserves", "terseLabel": "Work-in-process", "documentation": "Carrying amount, net of reserves and adjustments, as of the balance sheet date of merchandise or goods which are partially completed. This inventory is generally comprised of raw materials, labor and factory overhead costs, which require further materials, labor and overhead to be converted into finished goods, and which generally require the use of estimates to determine percentage complete and pricing." } } }, "auth_ref": [ "r122", "r692" ] }, "us-gaap_InvestmentIncomeInterest": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InvestmentIncomeInterest", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": { "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Investment Income, Interest", "terseLabel": "Interest income", "documentation": "Amount before accretion (amortization) of purchase discount (premium) of interest income on nonoperating securities." } } }, "auth_ref": [ "r112", "r251" ] }, "us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InvestmentsClassifiedByContractualMaturityDateTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsTables" ], "lang": { "en-us": { "role": { "label": "Investments Classified by Contractual Maturity Date [Table Text Block]", "terseLabel": "Schedule of contractual maturities of securities classified as available-for-sale", "documentation": "Tabular disclosure of maturities of an entity's investments as well as any other information pertinent to the investments." } } }, "auth_ref": [] }, "us-gaap_InvestmentsFairValueDisclosure": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "InvestmentsFairValueDisclosure", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Investments, Fair Value Disclosure", "terseLabel": "Total Short-term investments", "documentation": "Fair value portion of investment securities, including, but not limited to, marketable securities, derivative financial instruments, and investments accounted for under the equity method." } } }, "auth_ref": [ "r496" ] }, "veco_JohnKiernanMember": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "JohnKiernanMember", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements" ], "lang": { "en-us": { "role": { "documentation": "Represents information pertaining to John Kiernan,", "label": "John Kiernan [Member]", "terseLabel": "John Kiernan" } } }, "auth_ref": [] }, "us-gaap_LandMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LandMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails" ], "lang": { "en-us": { "role": { "label": "Land [Member]", "terseLabel": "Land", "documentation": "Part of earth's surface not covered by water." } } }, "auth_ref": [ "r862" ] }, "us-gaap_LeaseCostAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LeaseCostAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails" ], "lang": { "en-us": { "role": { "label": "Lease, Cost [Abstract]", "terseLabel": "Lease cost" } } }, "auth_ref": [] }, "us-gaap_LeaseholdImprovementsMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LeaseholdImprovementsMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails" ], "lang": { "en-us": { "role": { "label": "Leasehold Improvements [Member]", "terseLabel": "Leaseholds improvements", "documentation": "Additions or improvements to assets held under a lease arrangement." } } }, "auth_ref": [ "r124" ] }, "us-gaap_LesseeOperatingLeaseDescriptionAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LesseeOperatingLeaseDescriptionAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails" ], "lang": { "en-us": { "role": { "label": "Lessee, Operating Lease, Description [Abstract]", "terseLabel": "Leases" } } }, "auth_ref": [] }, "us-gaap_LesseeOperatingLeaseDiscountRate": { "xbrltype": "percentItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LesseeOperatingLeaseDiscountRate", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails" ], "lang": { "en-us": { "role": { "label": "Lessee, Operating Lease, Discount Rate", "terseLabel": "Weighted average discount rate (as a percent)", "documentation": "Discount rate used by lessee to determine present value of operating lease payments." } } }, "auth_ref": [ "r722" ] }, "us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LesseeOperatingLeaseLiabilityMaturityTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesTables" ], "lang": { "en-us": { "role": { "label": "Lessee, Operating Lease, Liability, Maturity [Table Text Block]", "terseLabel": "Schedule of maturities of lease liabilities 2020", "documentation": "Tabular disclosure of undiscounted cash flows of lessee's operating lease liability. Includes, but is not limited to, reconciliation of undiscounted cash flows to operating lease liability recognized in statement of financial position." } } }, "auth_ref": [ "r871" ] }, "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LesseeOperatingLeaseLiabilityPaymentsDue", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": { "parentTag": null, "weight": null, "order": null, "root": true }, "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetailsCalc2": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" ], "lang": { "en-us": { "role": { "label": "Lessee, Operating Lease, Liability, Payments, Due", "totalLabel": "Total future minimum lease payments", "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease." } } }, "auth_ref": [ "r521" ] }, "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": { "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" ], "lang": { "en-us": { "role": { "label": "Lessee, Operating Lease, Liability, Payments, Due Next Twelve Months", "terseLabel": "2025", "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)." } } }, "auth_ref": [ "r521" ] }, "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearFour", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": { "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue", "weight": 1.0, "order": 5.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" ], "lang": { "en-us": { "role": { "label": "Lessee, Operating Lease, Liability, Payments, Due Year Four", "terseLabel": "2028", "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)." } } }, "auth_ref": [ "r521" ] }, "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearThree", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": { "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue", "weight": 1.0, "order": 4.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" ], "lang": { "en-us": { "role": { "label": "Lessee, Operating Lease, Liability, Payments, Due Year Three", "terseLabel": "2027", "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)." } } }, "auth_ref": [ "r521" ] }, "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearTwo", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": { "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue", "weight": 1.0, "order": 3.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" ], "lang": { "en-us": { "role": { "label": "Lessee, Operating Lease, Liability, Payments, Due Year Two", "terseLabel": "2026", "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)." } } }, "auth_ref": [ "r521" ] }, "us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": { "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" ], "lang": { "en-us": { "role": { "label": "Lessee, Operating Lease, Liability, Payments, Remainder of Fiscal Year", "terseLabel": "2024", "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease having initial or remaining lease term in excess of one year to be paid in remainder of current fiscal year." } } }, "auth_ref": [ "r871" ] }, "veco_LesseeOperatingLeaseLiabilityToBePaidAfterYearFour": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "LesseeOperatingLeaseLiabilityToBePaidAfterYearFour", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": { "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue", "weight": 1.0, "order": 6.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" ], "lang": { "en-us": { "role": { "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease due after fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).", "label": "Lessee, Operating Lease, Liability, to be Paid, after Year Four", "terseLabel": "Thereafter" } } }, "auth_ref": [] }, "us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LesseeOperatingLeaseLiabilityUndiscountedExcessAmount", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetailsCalc2": { "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" ], "lang": { "en-us": { "role": { "label": "Lessee, Operating Lease, Liability, Undiscounted Excess Amount", "negatedLabel": "Less: Imputed interest", "documentation": "Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for operating lease." } } }, "auth_ref": [ "r521" ] }, "us-gaap_LesseeOperatingLeaseRenewalTerm": { "xbrltype": "durationItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LesseeOperatingLeaseRenewalTerm", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails" ], "lang": { "en-us": { "role": { "label": "Lessee, Operating Lease, Renewal Term", "terseLabel": "Lease renewal term", "documentation": "Term of lessee's operating lease renewal, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days." } } }, "auth_ref": [ "r870" ] }, "us-gaap_Liabilities": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "Liabilities", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_LiabilitiesAndStockholdersEquity", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Liabilities.", "totalLabel": "Total liabilities", "documentation": "Sum of the carrying amounts as of the balance sheet date of all liabilities that are recognized. Liabilities are probable future sacrifices of economic benefits arising from present obligations of an entity to transfer assets or provide services to other entities in the future." } } }, "auth_ref": [ "r26", "r204", "r307", "r345", "r346", "r347", "r348", "r349", "r350", "r351", "r352", "r353", "r479", "r482", "r483", "r502", "r614", "r699", "r737", "r858", "r872", "r873" ] }, "us-gaap_LiabilitiesAndStockholdersEquity": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LiabilitiesAndStockholdersEquity", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Liabilities and Equity", "totalLabel": "Total liabilities and stockholders' equity", "documentation": "Amount of liabilities and equity items, including the portion of equity attributable to noncontrolling interests, if any." } } }, "auth_ref": [ "r101", "r142", "r573", "r724", "r831", "r846", "r866" ] }, "us-gaap_LiabilitiesAndStockholdersEquityAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LiabilitiesAndStockholdersEquityAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Liabilities and Equity [Abstract]", "terseLabel": "Liabilities and stockholders' equity" } } }, "auth_ref": [] }, "us-gaap_LiabilitiesCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LiabilitiesCurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_Liabilities", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Liabilities, Current", "totalLabel": "Total current liabilities", "documentation": "Total obligations incurred as part of normal operations that are expected to be paid during the following twelve months or within one business cycle, if longer." } } }, "auth_ref": [ "r28", "r162", "r204", "r307", "r345", "r346", "r347", "r348", "r349", "r350", "r351", "r352", "r353", "r479", "r482", "r483", "r502", "r724", "r858", "r872", "r873" ] }, "us-gaap_LiabilitiesCurrentAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LiabilitiesCurrentAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Liabilities, Current [Abstract]", "terseLabel": "Current liabilities:" } } }, "auth_ref": [] }, "veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "documentation": "The contingent increase above the maximum borrowing capacity under the credit facility, if any one or more of the existing banks or new banks agree to provide such increased commitment amount.", "label": "Line of Credit Facility Contingent Increase, Additional Borrowing Capacity", "terseLabel": "Additional increase in borrowing subject to certain conditions" } } }, "auth_ref": [] }, "us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "label": "Line of Credit Facility, Maximum Amount Outstanding During Period", "terseLabel": "Outstanding amount", "documentation": "Maximum amount borrowed under the credit facility at any time during the period." } } }, "auth_ref": [] }, "us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LineOfCreditFacilityMaximumBorrowingCapacity", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "label": "Line of Credit Facility, Maximum Borrowing Capacity", "terseLabel": "Borrowing capacity", "documentation": "Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility." } } }, "auth_ref": [ "r24" ] }, "us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LineOfCreditFacilityRemainingBorrowingCapacity", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails" ], "lang": { "en-us": { "role": { "label": "Line of Credit Facility, Remaining Borrowing Capacity", "verboseLabel": "Unused bank guarantees and letters of credit", "documentation": "Amount of borrowing capacity currently available under the credit facility (current borrowing capacity less the amount of borrowings outstanding)." } } }, "auth_ref": [ "r24" ] }, "us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage": { "xbrltype": "percentItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "label": "Line of Credit Facility, Unused Capacity, Commitment Fee Percentage", "terseLabel": "Unused commitment fee percentage (as a percent)", "documentation": "The fee, expressed as a percentage of the line of credit facility, for available but unused credit capacity under the credit facility." } } }, "auth_ref": [] }, "dei_LocalPhoneNumber": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "LocalPhoneNumber", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Local Phone Number", "documentation": "Local phone number for entity." } } }, "auth_ref": [] }, "us-gaap_LongTermDebt": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LongTermDebt", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesCarryingValueDetails" ], "lang": { "en-us": { "role": { "label": "Long-term Debt", "totalLabel": "Net carrying value", "documentation": "Amount, after deduction of unamortized premium (discount) and debt issuance cost, of long-term debt. Excludes lease obligation." } } }, "auth_ref": [ "r21", "r141", "r361", "r372", "r705", "r706", "r882" ] }, "us-gaap_LongTermDebtCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LongTermDebtCurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_LiabilitiesCurrent", "weight": 1.0, "order": 5.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Long-term Debt, Current Maturities", "terseLabel": "Current portion of long-term debt", "documentation": "Amount, after deduction of unamortized premium (discount) and debt issuance cost, of long-term debt classified as current. Excludes lease obligation." } } }, "auth_ref": [ "r170" ] }, "us-gaap_LongTermDebtNoncurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "LongTermDebtNoncurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_Liabilities", "weight": 1.0, "order": 3.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Long-term Debt, Excluding Current Maturities", "terseLabel": "Long-term debt", "documentation": "Amount, after deduction of unamortized premium (discount) and debt issuance cost, of long-term debt classified as noncurrent. Excludes lease obligation." } } }, "auth_ref": [ "r171" ] }, "us-gaap_MachineryAndEquipmentMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "MachineryAndEquipmentMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails" ], "lang": { "en-us": { "role": { "label": "Machinery and Equipment [Member]", "terseLabel": "Machinery and equipment", "documentation": "Tangible personal property used to produce goods and services, including, but is not limited to, tools, dies and molds, computer and office equipment." } } }, "auth_ref": [] }, "srt_MaximumMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/srt/2023", "localname": "MaximumMember", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesPerformanceObligationsTimingDetails", "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails", "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails" ], "lang": { "en-us": { "role": { "label": "Maximum [Member]", "terseLabel": "Maximum" } } }, "auth_ref": [ "r334", "r335", "r336", "r337", "r412", "r553", "r589", "r606", "r607", "r659", "r661", "r663", "r664", "r670", "r684", "r685", "r701", "r709", "r717", "r726", "r860", "r874", "r875", "r876", "r877", "r878", "r879" ] }, "ecd_MeasureAxis": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "MeasureAxis", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Measure [Axis]", "terseLabel": "Measure:" } } }, "auth_ref": [ "r780" ] }, "ecd_MeasureName": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "MeasureName", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Measure Name", "terseLabel": "Name" } } }, "auth_ref": [ "r780" ] }, "veco_MedicalAndDentalBenefitLiabilitiesNoncurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "MedicalAndDentalBenefitLiabilitiesNoncurrent", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesOtherLiabilitiesDetails" ], "lang": { "en-us": { "role": { "documentation": "Amount of liabilities for medical and dental benefits classified as other, due after one year or the normal operating cycle, if longer", "label": "Medical and Dental Benefit Liabilities, Noncurrent", "terseLabel": "Medical and dental benefits" } } }, "auth_ref": [] }, "srt_MinimumMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/srt/2023", "localname": "MinimumMember", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesPerformanceObligationsTimingDetails", "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails", "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails" ], "lang": { "en-us": { "role": { "label": "Minimum [Member]", "terseLabel": "Minimum" } } }, "auth_ref": [ "r334", "r335", "r336", "r337", "r412", "r553", "r589", "r606", "r607", "r659", "r661", "r663", "r664", "r670", "r684", "r685", "r701", "r709", "r717", "r726", "r860", "r874", "r875", "r876", "r877", "r878", "r879" ] }, "ecd_MnpiDiscTimedForCompValFlag": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "MnpiDiscTimedForCompValFlag", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "MNPI Disclosure Timed for Compensation Value [Flag]", "terseLabel": "MNPI Disclosure Timed for Compensation Value" } } }, "auth_ref": [ "r799" ] }, "us-gaap_MoneyMarketFundsMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "MoneyMarketFundsMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Money Market Funds [Member]", "terseLabel": "Money market cash", "documentation": "Fund that invests in short-term money-market instruments, for example, but not limited to, commercial paper, banker's acceptances, repurchase agreements, government securities, certificates of deposit, and other highly liquid securities." } } }, "auth_ref": [ "r863" ] }, "us-gaap_MovementInDeferredRevenueRollForward": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "MovementInDeferredRevenueRollForward", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesContractLiabilitiesDetails" ], "lang": { "en-us": { "role": { "label": "Movement in Deferred Revenue [Roll Forward]", "terseLabel": "Changes in deferred revenue", "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period." } } }, "auth_ref": [] }, "ecd_MtrlTermsOfTrdArrTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "MtrlTermsOfTrdArrTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements" ], "lang": { "en-us": { "role": { "label": "Material Terms of Trading Arrangement [Text Block]", "terseLabel": "Material Terms of Trading Arrangement" } } }, "auth_ref": [ "r807" ] }, "ecd_NamedExecutiveOfficersFnTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "NamedExecutiveOfficersFnTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Named Executive Officers, Footnote [Text Block]", "terseLabel": "Named Executive Officers, Footnote" } } }, "auth_ref": [ "r781" ] }, "us-gaap_NetCashProvidedByUsedInFinancingActivities": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "NetCashProvidedByUsedInFinancingActivities", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect", "weight": 1.0, "order": 3.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Net Cash Provided by (Used in) Financing Activities, Continuing Operations", "totalLabel": "Net cash provided by (used in) financing activities", "documentation": "Amount of cash inflow (outflow) from financing activities, including discontinued operations. Financing activity cash flows include obtaining resources from owners and providing them with a return on, and a return of, their investment; borrowing money and repaying amounts borrowed, or settling the obligation; and obtaining and paying for other resources obtained from creditors on long-term credit." } } }, "auth_ref": [ "r199" ] }, "us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Net Cash Provided by (Used in) Financing Activities, Continuing Operations [Abstract]", "terseLabel": "Cash Flows from Financing Activities" } } }, "auth_ref": [] }, "us-gaap_NetCashProvidedByUsedInInvestingActivities": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "NetCashProvidedByUsedInInvestingActivities", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Net Cash Provided by (Used in) Investing Activities, Continuing Operations", "totalLabel": "Net cash provided by (used in) investing activities", "documentation": "Amount of cash inflow (outflow) from investing activities, including discontinued operations. Investing activity cash flows include making and collecting loans and acquiring and disposing of debt or equity instruments and property, plant, and equipment and other productive assets." } } }, "auth_ref": [ "r199" ] }, "us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Net Cash Provided by (Used in) Investing Activities, Continuing Operations [Abstract]", "terseLabel": "Cash Flows from Investing Activities" } } }, "auth_ref": [] }, "us-gaap_NetCashProvidedByUsedInOperatingActivities": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "NetCashProvidedByUsedInOperatingActivities", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Net Cash Provided by (Used in) Operating Activities, Continuing Operations", "totalLabel": "Net cash provided by (used in) operating activities", "documentation": "Amount of cash inflow (outflow) from operating activities, including discontinued operations. Operating activity cash flows include transactions, adjustments, and changes in value not defined as investing or financing activities." } } }, "auth_ref": [ "r117", "r118", "r119" ] }, "us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Net Cash Provided by (Used in) Operating Activities, Continuing Operations [Abstract]", "terseLabel": "Cash Flows from Operating Activities" } } }, "auth_ref": [] }, "us-gaap_NetIncomeLoss": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "NetIncomeLoss", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncome": { "parentTag": "us-gaap_ComprehensiveIncomeNetOfTax", "weight": 1.0, "order": 1.0 }, "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails", "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncome", "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations", "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "totalLabel": "Net income", "label": "Net Income (Loss)", "terseLabel": "Net Income (Loss)", "documentation": "The portion of profit or loss for the period, net of income taxes, which is attributable to the parent." } } }, "auth_ref": [ "r107", "r119", "r144", "r160", "r181", "r184", "r188", "r204", "r210", "r212", "r213", "r214", "r215", "r218", "r219", "r234", "r248", "r257", "r262", "r265", "r307", "r345", "r346", "r347", "r348", "r349", "r350", "r351", "r352", "r353", "r494", "r502", "r578", "r635", "r652", "r653", "r700", "r735", "r858" ] }, "veco_NetIncomeLossAvailableToCommonStockholdersAbstract": { "xbrltype": "stringItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "NetIncomeLossAvailableToCommonStockholdersAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails" ], "lang": { "en-us": { "role": { "documentation": "No definition available.", "label": "Net Income (Loss) Available to Common Stockholders [Abstract]", "terseLabel": "Numerator:" } } }, "auth_ref": [] }, "us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "NetIncomeLossAvailableToCommonStockholdersBasic", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails": { "parentTag": "us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails" ], "lang": { "en-us": { "role": { "label": "Net Income (Loss) Available to Common Stockholders, Basic", "verboseLabel": "Net income", "documentation": "Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities; of income (loss) available to common shareholders." } } }, "auth_ref": [ "r192", "r212", "r213", "r214", "r215", "r221", "r222", "r235", "r238", "r248", "r257", "r262", "r265", "r700" ] }, "us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "NetIncomeLossAvailableToCommonStockholdersDiluted", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails" ], "lang": { "en-us": { "role": { "label": "Net Income (Loss) Available to Common Stockholders, Diluted", "totalLabel": "Net income available to common shareholders", "documentation": "Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities, and addition from assumption of issuance of common shares for dilutive potential common shares; of income (loss) available to common shareholders." } } }, "auth_ref": [ "r192", "r223", "r228", "r229", "r230", "r231", "r235", "r238" ] }, "us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "NewAccountingPronouncementsPolicyPolicyTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureBasisOfPresentationPolicies" ], "lang": { "en-us": { "role": { "label": "New Accounting Pronouncements, Policy [Policy Text Block]", "terseLabel": "Recent Accounting Standards Not Yet Adopted", "documentation": "Disclosure of accounting policy pertaining to new accounting pronouncements that may impact the entity's financial reporting. Includes, but is not limited to, quantification of the expected or actual impact." } } }, "auth_ref": [] }, "veco_NonCashInterestExpenseAbstract": { "xbrltype": "stringItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "NonCashInterestExpenseAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesInterestExpenseDetails" ], "lang": { "en-us": { "role": { "documentation": "No definition available.", "label": "Non-Cash Interest Expense", "terseLabel": "Non-Cash Interest Expense" } } }, "auth_ref": [] }, "veco_NonCashOperatingAndFinancingActivitiesAbstract": { "xbrltype": "stringItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "NonCashOperatingAndFinancingActivitiesAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "documentation": "No definition available.", "label": "Non Cash Operating and Financing Activities [Abstract]", "verboseLabel": "Non-cash activities" } } }, "auth_ref": [] }, "ecd_NonGaapMeasureDescriptionTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "NonGaapMeasureDescriptionTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Non-GAAP Measure Description [Text Block]", "terseLabel": "Non-GAAP Measure Description" } } }, "auth_ref": [ "r780" ] }, "ecd_NonNeosMember": { "xbrltype": "domainItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "NonNeosMember", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Non-NEOs [Member]", "terseLabel": "Non-NEOs" } } }, "auth_ref": [ "r750", "r761", "r771", "r788", "r796" ] }, "ecd_NonPeoNeoAvgCompActuallyPaidAmt": { "xbrltype": "monetaryItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "NonPeoNeoAvgCompActuallyPaidAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Non-PEO NEO Average Compensation Actually Paid Amount", "terseLabel": "Non-PEO NEO Average Compensation Actually Paid Amount" } } }, "auth_ref": [ "r778" ] }, "ecd_NonPeoNeoAvgTotalCompAmt": { "xbrltype": "monetaryItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "NonPeoNeoAvgTotalCompAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Non-PEO NEO Average Total Compensation Amount", "terseLabel": "Non-PEO NEO Average Total Compensation Amount" } } }, "auth_ref": [ "r777" ] }, "ecd_NonPeoNeoMember": { "xbrltype": "domainItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "NonPeoNeoMember", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Non-PEO NEO [Member]", "terseLabel": "Non-PEO NEO" } } }, "auth_ref": [ "r788" ] }, "ecd_NonRule10b51ArrAdoptedFlag": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "NonRule10b51ArrAdoptedFlag", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements" ], "lang": { "en-us": { "role": { "label": "Non-Rule 10b5-1 Arrangement Adopted [Flag]", "terseLabel": "Non-Rule 10b5-1 Arrangement Adopted" } } }, "auth_ref": [ "r807" ] }, "ecd_NonRule10b51ArrTrmntdFlag": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "NonRule10b51ArrTrmntdFlag", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements" ], "lang": { "en-us": { "role": { "label": "Non-Rule 10b5-1 Arrangement Terminated [Flag]", "terseLabel": "Non-Rule 10b5-1 Arrangement Terminated" } } }, "auth_ref": [ "r807" ] }, "us-gaap_NumberOfOperatingSegments": { "xbrltype": "integerItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "NumberOfOperatingSegments", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "label": "Number of Operating Segments", "terseLabel": "Number of operating segments", "documentation": "Number of operating segments. An operating segment is a component of an enterprise: (a) that engages in business activities from which it may earn revenues and incur expenses (including revenues and expenses relating to transactions with other components of the same enterprise), (b) whose operating results are regularly reviewed by the enterprise's chief operating decision maker to make decisions about resources to be allocated to the segment and assess its performance, and (c) for which discrete financial information is available. An operating segment may engage in business activities for which it has yet to earn revenues, for example, start-up operations may be operating segments before earning revenues." } } }, "auth_ref": [ "r837" ] }, "us-gaap_NumberOfReportableSegments": { "xbrltype": "integerItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "NumberOfReportableSegments", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "label": "Number of Reportable Segments", "terseLabel": "Number of reportable segments", "documentation": "Number of segments reported by the entity. A reportable segment is a component of an entity for which there is an accounting requirement to report separate financial information on that component in the entity's financial statements." } } }, "auth_ref": [ "r837" ] }, "veco_NumberOfSalesMarkets": { "xbrltype": "integerItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "NumberOfSalesMarkets", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "documentation": "Represents the number of primary or end-markets the entity sells into.", "label": "Number of Sales Markets", "terseLabel": "Number of end-markets" } } }, "auth_ref": [] }, "us-gaap_OperatingExpenses": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OperatingExpenses", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": { "parentTag": "us-gaap_OperatingIncomeLoss", "weight": -1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Operating Expenses", "totalLabel": "Total operating expenses, net", "documentation": "Generally recurring costs associated with normal operations except for the portion of these expenses which can be clearly related to production and included in cost of sales or services. Includes selling, general and administrative expense." } } }, "auth_ref": [] }, "us-gaap_OperatingExpensesAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OperatingExpensesAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Operating Expenses [Abstract]", "terseLabel": "Operating expenses, net:" } } }, "auth_ref": [] }, "us-gaap_OperatingIncomeLoss": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OperatingIncomeLoss", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": { "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Operating Income (Loss)", "totalLabel": "Operating income", "documentation": "The net result for the period of deducting operating expenses from operating revenues." } } }, "auth_ref": [ "r248", "r257", "r262", "r265", "r700" ] }, "us-gaap_OperatingLeaseCost": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OperatingLeaseCost", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails" ], "lang": { "en-us": { "role": { "label": "Operating Lease, Cost", "terseLabel": "Operating lease costs", "documentation": "Amount of single lease cost, calculated by allocation of remaining cost of lease over remaining lease term. Includes, but is not limited to, single lease cost, after impairment of right-of-use asset, calculated by amortization of remaining right-of-use asset and accretion of lease liability." } } }, "auth_ref": [ "r516", "r723" ] }, "us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OperatingLeaseLiabilitiesPaymentsDueAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" ], "lang": { "en-us": { "role": { "label": "Lessee, Operating Lease, Liability, to be Paid, Fiscal Year Maturity [Abstract]", "terseLabel": "Minimum lease commitments, Payments due by period:" } } }, "auth_ref": [] }, "us-gaap_OperatingLeaseLiability": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OperatingLeaseLiability", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetailsCalc2": { "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue", "weight": 1.0, "order": 2.0 }, "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" ], "lang": { "en-us": { "role": { "label": "Operating Lease, Liability", "totalLabel": "Total operating lease liabilities", "verboseLabel": "Total operating lease liabilities", "documentation": "Present value of lessee's discounted obligation for lease payments from operating lease." } } }, "auth_ref": [ "r513" ] }, "us-gaap_OperatingLeaseLiabilityCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OperatingLeaseLiabilityCurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": { "parentTag": "us-gaap_OperatingLeaseLiability", "weight": 1.0, "order": 1.0 }, "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails": { "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent", "weight": 1.0, "order": 4.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails", "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails" ], "lang": { "en-us": { "role": { "label": "Operating Lease, Liability, Current", "terseLabel": "Operating lease liability, current", "verboseLabel": "Operating lease liabilities", "documentation": "Present value of lessee's discounted obligation for lease payments from operating lease, classified as current." } } }, "auth_ref": [ "r513" ] }, "us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList": { "xbrltype": "enumerationSetItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" ], "lang": { "en-us": { "role": { "label": "Operating Lease, Liability, Current, Statement of Financial Position [Extensible Enumeration]", "terseLabel": "Operating Lease, Liability, Current, Statement of Financial Position", "documentation": "Indicates line item in statement of financial position that includes current operating lease liability." } } }, "auth_ref": [ "r514" ] }, "us-gaap_OperatingLeaseLiabilityNoncurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OperatingLeaseLiabilityNoncurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": { "parentTag": "us-gaap_OperatingLeaseLiability", "weight": 1.0, "order": 2.0 }, "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_Liabilities", "weight": 1.0, "order": 4.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails", "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Operating Lease, Liability, Noncurrent", "terseLabel": "Long-term operating lease liabilities", "documentation": "Present value of lessee's discounted obligation for lease payments from operating lease, classified as noncurrent." } } }, "auth_ref": [ "r513" ] }, "us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList": { "xbrltype": "enumerationSetItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" ], "lang": { "en-us": { "role": { "label": "Operating Lease, Liability, Statement of Financial Position [Extensible Enumeration]", "terseLabel": "Operating Lease, Liability, Statement of Financial Position", "documentation": "Indicates line item in statement of financial position that includes operating lease liability." } } }, "auth_ref": [ "r514" ] }, "us-gaap_OperatingLeasePayments": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OperatingLeasePayments", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails" ], "lang": { "en-us": { "role": { "label": "Operating Lease, Payments", "terseLabel": "Operating cash flows from operating leases", "documentation": "Amount of cash outflow from operating lease, excluding payments to bring another asset to condition and location necessary for its intended use." } } }, "auth_ref": [ "r515", "r518" ] }, "us-gaap_OperatingLeaseRightOfUseAsset": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OperatingLeaseRightOfUseAsset", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_Assets", "weight": 1.0, "order": 3.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Operating Lease, Right-of-Use Asset", "terseLabel": "Operating lease right-of-use assets", "documentation": "Amount of lessee's right to use underlying asset under operating lease." } } }, "auth_ref": [ "r512" ] }, "us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1": { "xbrltype": "durationItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OperatingLeaseWeightedAverageRemainingLeaseTerm1", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails" ], "lang": { "en-us": { "role": { "label": "Operating Lease, Weighted Average Remaining Lease Term", "terseLabel": "Remaining lease term", "documentation": "Weighted average remaining lease term for operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days." } } }, "auth_ref": [ "r520", "r723" ] }, "us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract", "lang": { "en-us": { "role": { "label": "Significant Accounting Policies" } } }, "auth_ref": [] }, "us-gaap_OtherAccruedLiabilitiesCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OtherAccruedLiabilitiesCurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails": { "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent", "weight": 1.0, "order": 8.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails" ], "lang": { "en-us": { "role": { "label": "Other Accrued Liabilities, Current", "terseLabel": "Other", "documentation": "Amount of expenses incurred but not yet paid classified as other, due within one year or the normal operating cycle, if longer." } } }, "auth_ref": [ "r27" ] }, "us-gaap_OtherAssetsNoncurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OtherAssetsNoncurrent", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_Assets", "weight": 1.0, "order": 7.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Other Assets, Noncurrent", "terseLabel": "Other assets", "documentation": "Amount of noncurrent assets classified as other." } } }, "auth_ref": [ "r168" ] }, "us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncome": { "parentTag": "us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" ], "lang": { "en-us": { "role": { "label": "Other Comprehensive Income (Loss), Available-for-sale Securities Adjustment, Net of Tax, Portion Attributable to Parent", "terseLabel": "Unrealized gain (loss) on available-for-sale securities", "documentation": "Amount, after tax and reclassification adjustment, of gain (loss) in value of unsold investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), attributable to parent." } } }, "auth_ref": [ "r10", "r15", "r136" ] }, "us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncome": { "parentTag": "us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" ], "lang": { "en-us": { "role": { "label": "Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent", "terseLabel": "Change in currency translation adjustments", "documentation": "Amount after tax and reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature, attributable to parent entity." } } }, "auth_ref": [ "r10", "r15", "r136" ] }, "veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails" ], "lang": { "en-us": { "role": { "documentation": "Amount after tax and reclassification adjustments of other comprehensive income (loss). Includes foreign currency gains (losses) on transactions included in operating results.", "label": "Other Comprehensive Income (Loss) Including Foreign Currency Gains (Losses) on Transactions Included in Operating Results, Net of Tax", "terseLabel": "Other comprehensive income (loss), net of tax" } } }, "auth_ref": [] }, "us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncome": { "parentTag": "us-gaap_ComprehensiveIncomeNetOfTax", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureEquityAociRollforwardDetails", "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" ], "lang": { "en-us": { "role": { "label": "Other Comprehensive Income (Loss), Net of Tax, Portion Attributable to Parent", "terseLabel": "Other comprehensive income (loss)", "totalLabel": "Total other comprehensive income (loss), net of tax", "documentation": "Amount after tax of other comprehensive income (loss) attributable to parent entity." } } }, "auth_ref": [ "r10", "r15", "r136", "r182", "r185" ] }, "us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" ], "lang": { "en-us": { "role": { "label": "Other Comprehensive Income (Loss), Net of Tax [Abstract]", "terseLabel": "Other comprehensive income (loss), net of tax:" } } }, "auth_ref": [] }, "us-gaap_OtherIntangibleAssetsMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OtherIntangibleAssetsMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails" ], "lang": { "en-us": { "role": { "label": "Other Intangible Assets [Member]", "terseLabel": "Other Intangible Assets", "documentation": "Intangible assets classified as other." } } }, "auth_ref": [] }, "us-gaap_OtherLiabilitiesAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OtherLiabilitiesAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesOtherLiabilitiesDetails" ], "lang": { "en-us": { "role": { "label": "Other Liabilities [Abstract]", "terseLabel": "Other liabilities" } } }, "auth_ref": [] }, "us-gaap_OtherLiabilitiesNoncurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OtherLiabilitiesNoncurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_Liabilities", "weight": 1.0, "order": 5.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesOtherLiabilitiesDetails", "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Other Liabilities, Noncurrent", "terseLabel": "Other liabilities", "documentation": "Amount of liabilities classified as other, due after one year or the normal operating cycle, if longer." } } }, "auth_ref": [ "r32" ] }, "us-gaap_OtherNoncurrentLiabilitiesMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OtherNoncurrentLiabilitiesMember", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Other Noncurrent Liabilities [Member]", "terseLabel": "Other liabilities.", "documentation": "Primary financial statement caption encompassing other noncurrent liabilities." } } }, "auth_ref": [] }, "us-gaap_OtherNonoperatingIncomeExpenseMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OtherNonoperatingIncomeExpenseMember", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "label": "Other Nonoperating Income (Expense) [Member]", "terseLabel": "Other income (expense), net", "documentation": "Primary financial statement caption encompassing other nonoperating income (expense)." } } }, "auth_ref": [] }, "us-gaap_OtherOperatingIncomeExpenseNet": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "OtherOperatingIncomeExpenseNet", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": { "parentTag": "us-gaap_OperatingExpenses", "weight": -1.0, "order": 4.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Other Operating Income (Expense), Net", "negatedLabel": "Other operating expense (income), net", "documentation": "The net amount of other operating income and expenses, the components of which are not separately disclosed on the income statement, from items that are associated with the entity's normal revenue producing operations." } } }, "auth_ref": [] }, "ecd_OtherPerfMeasureAmt": { "xbrltype": "decimalItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "OtherPerfMeasureAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Other Performance Measure, Amount", "terseLabel": "Other Performance Measure, Amount" } } }, "auth_ref": [ "r780" ] }, "ecd_OutstandingAggtErrCompAmt": { "xbrltype": "monetaryItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "OutstandingAggtErrCompAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Outstanding Aggregate Erroneous Compensation Amount", "terseLabel": "Outstanding Aggregate Erroneous Compensation Amount" } } }, "auth_ref": [ "r748", "r759", "r769", "r794" ] }, "ecd_OutstandingRecoveryCompAmt": { "xbrltype": "monetaryItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "OutstandingRecoveryCompAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Outstanding Recovery Compensation Amount", "terseLabel": "Compensation Amount" } } }, "auth_ref": [ "r751", "r762", "r772", "r797" ] }, "ecd_OutstandingRecoveryIndName": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "OutstandingRecoveryIndName", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Outstanding Recovery, Individual Name", "terseLabel": "Name" } } }, "auth_ref": [ "r751", "r762", "r772", "r797" ] }, "ecd_PayVsPerformanceDisclosureLineItems": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "PayVsPerformanceDisclosureLineItems", "lang": { "en-us": { "role": { "label": "Pay vs Performance Disclosure [Line Items]", "terseLabel": "Pay vs Performance Disclosure" } } }, "auth_ref": [ "r776" ] }, "us-gaap_PaymentForContingentConsiderationLiabilityFinancingActivities": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PaymentForContingentConsiderationLiabilityFinancingActivities", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities", "weight": -1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails", "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Payment for Contingent Consideration Liability, Financing Activities", "negatedLabel": "Contingent consideration payment", "terseLabel": "Contingent consideration payment", "documentation": "Amount of cash outflow, not made soon after acquisition date of business combination, to settle contingent consideration liability up to amount recognized at acquisition date, including, but not limited to, measurement period adjustment and less amount paid soon after acquisition date." } } }, "auth_ref": [ "r9" ] }, "us-gaap_PaymentsForDerivativeInstrumentFinancingActivities": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PaymentsForDerivativeInstrumentFinancingActivities", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "label": "Payments for Derivative Instrument, Financing Activities", "terseLabel": "Purchase of capped calls", "documentation": "The cash outflow for derivative instruments during the period, which are classified as financing activities, excluding those designated as hedging instruments." } } }, "auth_ref": [ "r196", "r695" ] }, "us-gaap_PaymentsOfDebtIssuanceCosts": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PaymentsOfDebtIssuanceCosts", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities", "weight": -1.0, "order": 6.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesConvertibleSeniorNotesDetails", "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Payments of Debt Issuance Costs", "negatedLabel": "Debt issuance costs", "terseLabel": "Transaction costs", "documentation": "The cash outflow paid to third parties in connection with debt origination, which will be amortized over the remaining maturity period of the associated long-term debt." } } }, "auth_ref": [ "r41" ] }, "us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PaymentsRelatedToTaxWithholdingForShareBasedCompensation", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities", "weight": -1.0, "order": 4.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Payments Related to Tax Withholding for Share-based Compensation", "negatedTerseLabel": "Restricted stock tax withholdings", "documentation": "Amount of cash outflow to satisfy grantee's tax withholding obligation for award under share-based payment arrangement." } } }, "auth_ref": [ "r195" ] }, "us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PaymentsToAcquireAvailableForSaleSecuritiesDebt", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities", "weight": -1.0, "order": 4.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Payments to Acquire Available-for-sale Securities, Debt", "negatedLabel": "Payments for purchases of investments", "documentation": "Amount of cash outflow to acquire investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale)." } } }, "auth_ref": [ "r37", "r193", "r275" ] }, "us-gaap_PaymentsToAcquireBusinessesGross": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PaymentsToAcquireBusinessesGross", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails": { "parentTag": "us-gaap_BusinessCombinationConsiderationTransferred1", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Payments to Acquire Businesses, Gross", "terseLabel": "Cash paid, net of cash acquired", "documentation": "The cash outflow associated with the acquisition of business during the period. The cash portion only of the acquisition price." } } }, "auth_ref": [ "r38", "r473" ] }, "us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PaymentsToAcquireBusinessesNetOfCashAcquired", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities", "weight": -1.0, "order": 3.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Payments to Acquire Businesses, Net of Cash Acquired", "negatedLabel": "Acquisition of businesses, net of cash acquired", "documentation": "The cash outflow associated with the acquisition of a business, net of the cash acquired from the purchase." } } }, "auth_ref": [ "r38" ] }, "us-gaap_PaymentsToAcquirePropertyPlantAndEquipment": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PaymentsToAcquirePropertyPlantAndEquipment", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities", "weight": -1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Payments to Acquire Property, Plant, and Equipment", "negatedLabel": "Capital expenditures", "documentation": "The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets." } } }, "auth_ref": [ "r116" ] }, "ecd_PeerGroupIssuersFnTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "PeerGroupIssuersFnTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Peer Group Issuers, Footnote [Text Block]", "terseLabel": "Peer Group Issuers, Footnote" } } }, "auth_ref": [ "r779" ] }, "ecd_PeerGroupTotalShareholderRtnAmt": { "xbrltype": "monetaryItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "PeerGroupTotalShareholderRtnAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Peer Group Total Shareholder Return Amount", "terseLabel": "Peer Group Total Shareholder Return Amount" } } }, "auth_ref": [ "r779" ] }, "ecd_PeoActuallyPaidCompAmt": { "xbrltype": "monetaryItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "PeoActuallyPaidCompAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "PEO Actually Paid Compensation Amount", "terseLabel": "PEO Actually Paid Compensation Amount" } } }, "auth_ref": [ "r778" ] }, "ecd_PeoMember": { "xbrltype": "domainItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "PeoMember", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "PEO [Member]", "terseLabel": "PEO" } } }, "auth_ref": [ "r788" ] }, "ecd_PeoName": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "PeoName", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "PEO Name", "terseLabel": "PEO Name" } } }, "auth_ref": [ "r781" ] }, "ecd_PeoTotalCompAmt": { "xbrltype": "monetaryItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "PeoTotalCompAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "PEO Total Compensation Amount", "terseLabel": "PEO Total Compensation Amount" } } }, "auth_ref": [ "r777" ] }, "veco_PercentageOfOrdersReceivedDuringEarnOutPeriodMember": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "PercentageOfOrdersReceivedDuringEarnOutPeriodMember", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "documentation": "Percentage of orders received during the defined Earn-out period.", "label": "Percentage of Orders Received During Earn-out Period [Member]", "terseLabel": "Percentage of orders received during defined Earn-out period" } } }, "auth_ref": [] }, "veco_PotentiallyDilutiveSharesMember": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "PotentiallyDilutiveSharesMember", "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails" ], "lang": { "en-us": { "role": { "documentation": "Represents information pertaining to potentially dilutive shares not otherwise specified.", "label": "Potentially Dilutive Shares [Member]", "terseLabel": "Potentially dilutive shares" } } }, "auth_ref": [] }, "veco_PreTaxIncomeLossAndProvisionForIncomeTaxTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "PreTaxIncomeLossAndProvisionForIncomeTaxTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureIncomeTaxesTables" ], "lang": { "en-us": { "role": { "documentation": "Tabular disclosure of pre-tax income (loss) and provision for income tax.", "label": "Pre-tax Income (Loss) and Provision for Income Tax [Table Text Block]", "verboseLabel": "Schedule of income before income taxes and income tax expense" } } }, "auth_ref": [] }, "us-gaap_PreferredStockParOrStatedValuePerShare": { "xbrltype": "perShareItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PreferredStockParOrStatedValuePerShare", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical" ], "lang": { "en-us": { "role": { "label": "Preferred Stock, Par or Stated Value Per Share", "terseLabel": "Preferred stock, par value (in dollars per share)", "documentation": "Face amount or stated value per share of preferred stock nonredeemable or redeemable solely at the option of the issuer." } } }, "auth_ref": [ "r95", "r375" ] }, "us-gaap_PreferredStockSharesAuthorized": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PreferredStockSharesAuthorized", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical" ], "lang": { "en-us": { "role": { "label": "Preferred Stock, Shares Authorized", "terseLabel": "Preferred stock, shares authorized", "documentation": "The maximum number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) permitted to be issued by an entity's charter and bylaws." } } }, "auth_ref": [ "r95", "r615" ] }, "us-gaap_PreferredStockSharesIssued": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PreferredStockSharesIssued", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical" ], "lang": { "en-us": { "role": { "label": "Preferred Stock, Shares Issued", "terseLabel": "Preferred stock, shares issued", "documentation": "Total number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) issued to shareholders (includes related preferred shares that were issued, repurchased, and remain in the treasury). May be all or portion of the number of preferred shares authorized. Excludes preferred shares that are classified as debt." } } }, "auth_ref": [ "r95", "r375" ] }, "us-gaap_PreferredStockSharesOutstanding": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PreferredStockSharesOutstanding", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical" ], "lang": { "en-us": { "role": { "label": "Preferred Stock, Shares Outstanding", "terseLabel": "Preferred stock, shares outstanding", "documentation": "Aggregate share number for all nonredeemable preferred stock (or preferred stock redeemable solely at the option of the issuer) held by stockholders. Does not include preferred shares that have been repurchased." } } }, "auth_ref": [ "r95", "r615", "r633", "r887", "r888" ] }, "us-gaap_PreferredStockValue": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PreferredStockValue", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_StockholdersEquity", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Preferred Stock, Value, Issued", "verboseLabel": "Preferred stock, $0.01 par value; 500,000 shares authorized; no shares issued and outstanding.", "documentation": "Aggregate par or stated value of issued nonredeemable preferred stock (or preferred stock redeemable solely at the option of the issuer). This item includes treasury stock repurchased by the entity. Note: elements for number of nonredeemable preferred shares, par value and other disclosure concepts are in another section within stockholders' equity." } } }, "auth_ref": [ "r95", "r569", "r724" ] }, "us-gaap_PrepaidExpenseAndOtherAssetsCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PrepaidExpenseAndOtherAssetsCurrent", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_AssetsCurrent", "weight": 1.0, "order": 7.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Prepaid Expense and Other Assets, Current", "terseLabel": "Prepaid expenses and other current assets", "documentation": "Amount of asset related to consideration paid in advance for costs that provide economic benefits in future periods, and amount of other assets that are expected to be realized or consumed within one year or the normal operating cycle, if longer." } } }, "auth_ref": [ "r824" ] }, "us-gaap_PrepaidExpenseAndOtherAssetsCurrentAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PrepaidExpenseAndOtherAssetsCurrentAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsPrepaidExpensesAndOtherCurrentAssetsDetails" ], "lang": { "en-us": { "role": { "label": "Prepaid Expense and Other Assets, Current [Abstract]", "terseLabel": "Prepaid expenses and other current assets" } } }, "auth_ref": [] }, "us-gaap_ProceedsFromConvertibleDebt": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ProceedsFromConvertibleDebt", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities", "weight": 1.0, "order": 3.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Proceeds from Convertible Debt", "terseLabel": "Proceeds from issuance of Notes, net of issuance cost", "verboseLabel": "Proceeds from issuance of 2029 Notes, net of issuance costs", "documentation": "The cash inflow from the issuance of a long-term debt instrument which can be exchanged for a specified amount of another security, typically the entity's common stock, at the option of the issuer or the holder." } } }, "auth_ref": [ "r39" ] }, "us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities", "weight": 1.0, "order": 5.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Proceeds from Issuance of Shares under Incentive and Share-based Compensation Plans, Including Stock Options", "terseLabel": "Proceeds (net of tax withholdings) from option exercises and employee stock purchase plan", "documentation": "Amount of cash inflow from issuance of shares under share-based payment arrangement. Includes, but is not limited to, option exercised." } } }, "auth_ref": [ "r8", "r18" ] }, "us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Proceeds from Sale and Maturity of Available-for-sale Securities", "terseLabel": "Proceeds from the sale of investments", "documentation": "Amount of cash inflow from sale, maturity, prepayment and call of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale)." } } }, "auth_ref": [ "r193", "r194", "r839" ] }, "us-gaap_ProceedsFromSaleOfProductiveAssets": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ProceedsFromSaleOfProductiveAssets", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities", "weight": 1.0, "order": 5.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Proceeds from Sale of Productive Assets", "terseLabel": "Proceeds from sale of productive assets", "documentation": "The cash inflow from the sale of property, plant and equipment (capital expenditures), software, and other intangible assets." } } }, "auth_ref": [ "r115" ] }, "srt_ProductOrServiceAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/srt/2023", "localname": "ProductOrServiceAxis", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "label": "Products and Services [Axis]" } } }, "auth_ref": [ "r267", "r557", "r583", "r584", "r585", "r586", "r587", "r588", "r687", "r710", "r725", "r814", "r854", "r855", "r861", "r883" ] }, "us-gaap_ProductWarrantiesDisclosuresAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ProductWarrantiesDisclosuresAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesWarrantyDetails" ], "lang": { "en-us": { "role": { "label": "Product Warranties Disclosures [Abstract]", "terseLabel": "Warranty" } } }, "auth_ref": [] }, "us-gaap_ProductWarrantyAccrual": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ProductWarrantyAccrual", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesWarrantyDetails" ], "lang": { "en-us": { "role": { "label": "Product Warranty Accrual", "periodEndLabel": "Balance, end of the period", "periodStartLabel": "Balance, beginning of the period", "documentation": "Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers." } } }, "auth_ref": [ "r90", "r338", "r340", "r344" ] }, "us-gaap_ProductWarrantyAccrualClassifiedCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ProductWarrantyAccrualClassifiedCurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails": { "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent", "weight": 1.0, "order": 3.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails" ], "lang": { "en-us": { "role": { "label": "Product Warranty Accrual, Current", "terseLabel": "Warranty", "documentation": "Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers. For classified balance sheets, represents the current portion of the liabilities (due within one year or within the normal operating cycle if longer)." } } }, "auth_ref": [ "r27", "r856", "r857" ] }, "us-gaap_ProductWarrantyAccrualPayments": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ProductWarrantyAccrualPayments", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesWarrantyDetails" ], "lang": { "en-us": { "role": { "label": "Product Warranty Accrual, Payments", "negatedLabel": "Consumption of reserves", "documentation": "Amount of decrease in the standard and extended product warranty accrual from payments made in cash or in kind to satisfy claims under the terms of the standard and extended product warranty." } } }, "auth_ref": [ "r341" ] }, "us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ProductWarrantyAccrualPreexistingIncreaseDecrease", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesWarrantyDetails" ], "lang": { "en-us": { "role": { "label": "Product Warranty Accrual, Preexisting, Increase (Decrease)", "terseLabel": "Changes in estimate", "documentation": "Amount of increase (decrease) in the standard and extended product warranty accrual from changes in estimates attributable to preexisting product warranties." } } }, "auth_ref": [ "r343" ] }, "us-gaap_ProductWarrantyAccrualWarrantiesIssued": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ProductWarrantyAccrualWarrantiesIssued", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesWarrantyDetails" ], "lang": { "en-us": { "role": { "label": "Product Warranty Accrual, Warranties Issued", "terseLabel": "Warranties issued", "documentation": "Amount of increase in the standard and extended product warranty accrual from warranties issued." } } }, "auth_ref": [ "r342" ] }, "veco_ProductWarrantyPeriod": { "xbrltype": "durationItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "ProductWarrantyPeriod", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesWarrantyDetails" ], "lang": { "en-us": { "role": { "documentation": "Represents the warranty period from the date of final acceptance on the products purchased by customers.", "label": "Product Warranty Period", "terseLabel": "Warranty period" } } }, "auth_ref": [] }, "srt_ProductsAndServicesDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/srt/2023", "localname": "ProductsAndServicesDomain", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "label": "Products and Services [Domain]" } } }, "auth_ref": [ "r267", "r557", "r583", "r584", "r585", "r586", "r587", "r588", "r687", "r710", "r725", "r814", "r854", "r855", "r861", "r883" ] }, "us-gaap_ProfitLoss": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ProfitLoss", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Net Income (Loss), Including Portion Attributable to Noncontrolling Interest", "verboseLabel": "Net income", "documentation": "The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest." } } }, "auth_ref": [ "r160", "r181", "r184", "r198", "r204", "r210", "r218", "r219", "r248", "r257", "r262", "r265", "r307", "r345", "r346", "r347", "r348", "r349", "r350", "r351", "r352", "r353", "r477", "r480", "r481", "r494", "r502", "r564", "r577", "r599", "r635", "r652", "r653", "r700", "r720", "r721", "r736", "r827", "r858" ] }, "us-gaap_PropertyPlantAndEquipmentByTypeAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PropertyPlantAndEquipmentByTypeAxis", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails" ], "lang": { "en-us": { "role": { "label": "Long-Lived Tangible Asset [Axis]", "documentation": "Information by type of long-lived, physical assets used to produce goods and services and not intended for resale." } } }, "auth_ref": [ "r13" ] }, "us-gaap_PropertyPlantAndEquipmentGross": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PropertyPlantAndEquipmentGross", "crdr": "debit", "calculation": { "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails": { "parentTag": "us-gaap_PropertyPlantAndEquipmentNet", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails" ], "lang": { "en-us": { "role": { "label": "Property, Plant and Equipment, Gross", "terseLabel": "Gross property, plant and equipment", "documentation": "Amount before accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures." } } }, "auth_ref": [ "r124", "r165", "r575" ] }, "us-gaap_PropertyPlantAndEquipmentLineItems": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PropertyPlantAndEquipmentLineItems", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails" ], "lang": { "en-us": { "role": { "label": "Property, Plant and Equipment [Line Items]", "terseLabel": "Property, plant, and equipment", "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table." } } }, "auth_ref": [] }, "us-gaap_PropertyPlantAndEquipmentNet": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PropertyPlantAndEquipmentNet", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_Assets", "weight": 1.0, "order": 2.0 }, "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails", "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Property, Plant and Equipment, Net", "terseLabel": "Property, plant, and equipment, net", "totalLabel": "Net property, plant, and equipment", "documentation": "Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures." } } }, "auth_ref": [ "r13", "r565", "r575", "r724" ] }, "us-gaap_PropertyPlantAndEquipmentTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PropertyPlantAndEquipmentTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsTables" ], "lang": { "en-us": { "role": { "label": "Property, Plant and Equipment [Table Text Block]", "terseLabel": "Schedule of property, plant, and equipment", "documentation": "Tabular disclosure of physical assets used in the normal conduct of business and not intended for resale. Includes, but is not limited to, balances by class of assets, depreciation and depletion expense and method used, including composite depreciation, and accumulated deprecation." } } }, "auth_ref": [ "r13" ] }, "us-gaap_PropertyPlantAndEquipmentTypeDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PropertyPlantAndEquipmentTypeDomain", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails" ], "lang": { "en-us": { "role": { "label": "Long-Lived Tangible Asset [Domain]", "documentation": "Listing of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale. Examples include land, buildings, machinery and equipment, and other types of furniture and equipment including, but not limited to, office equipment, furniture and fixtures, and computer equipment and software." } } }, "auth_ref": [ "r124" ] }, "us-gaap_PurchaseObligationFiscalYearMaturityAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "PurchaseObligationFiscalYearMaturityAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails" ], "lang": { "en-us": { "role": { "label": "Purchase Obligation, Fiscal Year Maturity [Abstract]", "verboseLabel": "Purchase commitments" } } }, "auth_ref": [] }, "ecd_PvpTable": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "PvpTable", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Pay vs Performance Disclosure [Table]", "terseLabel": "Pay vs Performance Disclosure" } } }, "auth_ref": [ "r776" ] }, "ecd_PvpTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "PvpTableTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Pay vs Performance [Table Text Block]", "terseLabel": "Pay vs Performance Disclosure, Table" } } }, "auth_ref": [ "r776" ] }, "srt_RangeAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/srt/2023", "localname": "RangeAxis", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesPerformanceObligationsTimingDetails", "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails", "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails" ], "lang": { "en-us": { "role": { "label": "Range [Axis]" } } }, "auth_ref": [ "r334", "r335", "r336", "r337", "r405", "r412", "r441", "r442", "r443", "r529", "r553", "r589", "r606", "r607", "r659", "r661", "r663", "r664", "r670", "r684", "r685", "r701", "r709", "r717", "r726", "r729", "r852", "r860", "r875", "r876", "r877", "r878", "r879" ] }, "srt_RangeMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/srt/2023", "localname": "RangeMember", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesPerformanceObligationsTimingDetails", "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails", "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails" ], "lang": { "en-us": { "role": { "label": "Range [Domain]" } } }, "auth_ref": [ "r334", "r335", "r336", "r337", "r405", "r412", "r441", "r442", "r443", "r529", "r553", "r589", "r606", "r607", "r659", "r661", "r663", "r664", "r670", "r684", "r685", "r701", "r709", "r717", "r726", "r729", "r852", "r860", "r875", "r876", "r877", "r878", "r879" ] }, "veco_ReceivablePurchaseAgreementAmountAvailable": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "ReceivablePurchaseAgreementAmountAvailable", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails" ], "lang": { "en-us": { "role": { "documentation": "Amount of trade receivables available to be sold from customers without recourse under the terms of the receivable purchase agreement.", "label": "Receivable Purchase Agreement, Amount Available", "terseLabel": "Amount of trade receivables available to be sold under agreement" } } }, "auth_ref": [] }, "veco_ReceivablePurchaseAgreementMaximumAmount": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "ReceivablePurchaseAgreementMaximumAmount", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails" ], "lang": { "en-us": { "role": { "documentation": "Maximum amount of trade receivables from customers to be sold without recourse under the terms of the receivable purchase agreement.", "label": "Receivable Purchase Agreement, Maximum Amount", "terseLabel": "Maximum amount of trade receivables to be sold under agreement" } } }, "auth_ref": [] }, "ecd_RecoveryOfErrCompDisclosureLineItems": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "RecoveryOfErrCompDisclosureLineItems", "lang": { "en-us": { "role": { "label": "Recovery of Erroneously Awarded Compensation Disclosure [Line Items]", "terseLabel": "Recovery of Erroneously Awarded Compensation Disclosure" } } }, "auth_ref": [ "r743", "r754", "r764", "r789" ] }, "us-gaap_RepaymentsOfConvertibleDebt": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RepaymentsOfConvertibleDebt", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities", "weight": -1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails", "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Repayments of Convertible Debt", "negatedTerseLabel": "Extinguishment of Convertible Notes", "terseLabel": "Cash paid for repurchase of notes", "documentation": "The cash outflow from the repayment of a long-term debt instrument which can be exchanged for a specified amount of another security, typically the entity's common stock, at the option of the issuer or the holder." } } }, "auth_ref": [ "r40" ] }, "veco_RepaymentsOfUnsecuredDebtShares": { "xbrltype": "sharesItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "RepaymentsOfUnsecuredDebtShares", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilities202320252027And2029ConvertibleSeniorNotesDetails" ], "lang": { "en-us": { "role": { "documentation": "The number of shares of common stock used to repay long-term debt that is not secured by collateral. Excludes repayments of tax exempt unsecured debt.", "label": "Repayments Of Unsecured Debt, Shares", "terseLabel": "Number of shares of common stock used for repurchase of notes" } } }, "auth_ref": [] }, "us-gaap_ResearchAndDevelopmentExpense": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ResearchAndDevelopmentExpense", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": { "parentTag": "us-gaap_OperatingExpenses", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Research and Development Expense.", "terseLabel": "Research and development", "documentation": "The aggregate costs incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process whether intended for sale or the entity's use, during the reporting period charged to research and development projects, including the costs of developing computer software up to the point in time of achieving technological feasibility, and costs allocated in accounting for a business combination to in-process projects deemed to have no alternative future use." } } }, "auth_ref": [ "r92", "r453", "r880" ] }, "us-gaap_ResearchAndDevelopmentExpenseMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ResearchAndDevelopmentExpenseMember", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails" ], "lang": { "en-us": { "role": { "label": "Research and Development Expense [Member]", "terseLabel": "Research and development", "documentation": "Primary financial statement caption in which the reported facts about research and development expense have been included." } } }, "auth_ref": [] }, "veco_RestOfWorldMember": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "RestOfWorldMember", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "documentation": "Remaining regions of the world not specifically identified.", "label": "Rest Of World [Member]", "terseLabel": "Rest Of World" } } }, "auth_ref": [] }, "ecd_RestatementDateAxis": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "RestatementDateAxis", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Restatement Determination Date [Axis]", "terseLabel": "Restatement Determination Date:" } } }, "auth_ref": [ "r744", "r755", "r765", "r790" ] }, "ecd_RestatementDeterminationDate": { "xbrltype": "dateItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "RestatementDeterminationDate", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Restatement Determination Date", "terseLabel": "Restatement Determination Date" } } }, "auth_ref": [ "r745", "r756", "r766", "r791" ] }, "ecd_RestatementDoesNotRequireRecoveryTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "RestatementDoesNotRequireRecoveryTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Restatement Does Not Require Recovery [Text Block]", "terseLabel": "Restatement does not require Recovery" } } }, "auth_ref": [ "r752", "r763", "r773", "r798" ] }, "veco_RestrictedAndPerformanceSharesMember": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "RestrictedAndPerformanceSharesMember", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" ], "lang": { "en-us": { "role": { "documentation": "Represents the information pertaining to restricted and performance shares.", "label": "Restricted And Performance Shares [Member]", "terseLabel": "Non-vested restricted shares and performance shares" } } }, "auth_ref": [] }, "us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RestrictedCashAndCashEquivalentsAtCarryingValue", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_AssetsCurrent", "weight": 1.0, "order": 3.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Restricted Cash and Cash Equivalents, Current", "terseLabel": "Restricted cash", "documentation": "Amount of cash and cash equivalents restricted as to withdrawal or usage, classified as current. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates." } } }, "auth_ref": [ "r42", "r164", "r202" ] }, "us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Cash and Cash Equivalents [Domain]", "documentation": "Type of cash and cash equivalent. Cash is currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates." } } }, "auth_ref": [ "r164" ] }, "us-gaap_RestrictedStockMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RestrictedStockMember", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails" ], "lang": { "en-us": { "role": { "label": "Restricted Stock [Member]", "terseLabel": "Restricted stock", "documentation": "Stock including a provision that prohibits sale or substantive sale of an equity instrument for a specified period of time or until specified performance conditions are met." } } }, "auth_ref": [ "r47" ] }, "us-gaap_RetainedEarningsAccumulatedDeficit": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RetainedEarningsAccumulatedDeficit", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_StockholdersEquity", "weight": 1.0, "order": 4.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Retained Earnings (Accumulated Deficit).", "verboseLabel": "Accumulated deficit", "documentation": "Amount of accumulated undistributed earnings (deficit)." } } }, "auth_ref": [ "r98", "r133", "r572", "r593", "r595", "r597", "r616", "r724" ] }, "us-gaap_RetainedEarningsMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RetainedEarningsMember", "presentation": [ "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails" ], "lang": { "en-us": { "role": { "label": "Retained Earnings [Member]", "terseLabel": "Accumulated Deficit", "documentation": "Accumulated undistributed earnings (deficit)." } } }, "auth_ref": [ "r159", "r207", "r208", "r209", "r211", "r217", "r219", "r308", "r309", "r449", "r450", "r451", "r462", "r463", "r484", "r486", "r487", "r489", "r492", "r590", "r592", "r600", "r887" ] }, "us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RevenueFromContractWithCustomerIncludingAssessedTax", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": { "parentTag": "us-gaap_GrossProfit", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails", "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Revenue from Contract with Customer, Including Assessed Tax", "terseLabel": "Net sales", "verboseLabel": "Sales", "documentation": "Amount, including tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value-added and excise." } } }, "auth_ref": [ "r249", "r250", "r256", "r260", "r261", "r267", "r269", "r271", "r401", "r402", "r557" ] }, "us-gaap_RevenueFromContractWithCustomerPolicyTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RevenueFromContractWithCustomerPolicyTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureBasisOfPresentationPolicies" ], "lang": { "en-us": { "role": { "label": "Revenue from Contract with Customer [Policy Text Block]", "terseLabel": "Revenue Recognition", "documentation": "Disclosure of accounting policy for revenue from contract with customer." } } }, "auth_ref": [ "r158", "r392", "r393", "r394", "r395", "r396", "r397", "r398", "r399", "r686" ] }, "us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract": { "xbrltype": "booleanItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RevenuePracticalExpedientIncrementalCostOfObtainingContract", "presentation": [ "http://www.veeco.com/role/DisclosureBasisOfPresentationRevenueRecognitionDetails" ], "lang": { "en-us": { "role": { "label": "Revenue, Practical Expedient, Incremental Cost of Obtaining Contract [true false]", "terseLabel": "Revenue, practical expedient, incremental cost of obtaining contract", "documentation": "Indicates (true false) whether practical expedient was elected to recognize incremental cost of obtaining contract as expense when incurred if amortization period would have been one year or less." } } }, "auth_ref": [ "r324", "r400" ] }, "us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation": { "xbrltype": "booleanItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RevenuePracticalExpedientRemainingPerformanceObligation", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesPerformanceObligationsTimingDetails" ], "lang": { "en-us": { "role": { "label": "Revenue, Practical Expedient, Remaining Performance Obligation [true/false]", "terseLabel": "Revenue, Practical Expedient, Remaining Performance Obligation", "documentation": "Indicates (true false) whether optional exemption was applied not to disclose amount of transaction price allocated to and explanation of expected timing of revenue recognition for remaining performance obligation, when contract has expected duration of one year or less or right to consideration corresponds directly to performance completed." } } }, "auth_ref": [ "r391" ] }, "us-gaap_RevenueRemainingPerformanceObligation": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RevenueRemainingPerformanceObligation", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesPerformanceObligationsTimingDetails" ], "lang": { "en-us": { "role": { "label": "Revenue, Remaining Performance Obligation, Amount", "terseLabel": "Remaining performance obligations", "documentation": "Amount of transaction price allocated to performance obligation that has not been recognized as revenue." } } }, "auth_ref": [ "r154" ] }, "us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesPerformanceObligationsTimingDetails" ], "lang": { "en-us": { "role": { "label": "Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction", "terseLabel": "Performance obligations", "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table." } } }, "auth_ref": [] }, "veco_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionOriginalPeriod": { "xbrltype": "durationItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionOriginalPeriod", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesPerformanceObligationsTimingDetails" ], "lang": { "en-us": { "role": { "documentation": "Period at time of contract origination in which remaining performance obligation is expected to be recognized as revenue, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.", "label": "Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Original Period", "terseLabel": "Performance obligation at time of contract origination" } } }, "auth_ref": [] }, "us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1": { "xbrltype": "durationItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesPerformanceObligationsTimingDetails" ], "lang": { "en-us": { "role": { "label": "Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Period", "terseLabel": "Remaining performance obligations, expected timing of satisfaction", "documentation": "Period in which remaining performance obligation is expected to be recognized as revenue, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days." } } }, "auth_ref": [ "r155" ] }, "us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesPerformanceObligationsTimingDetails" ], "lang": { "en-us": { "role": { "label": "Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Start Date [Axis]", "documentation": "Start date of time band for expected timing of satisfaction of remaining performance obligation, in YYYY-MM-DD format." } } }, "auth_ref": [ "r155" ] }, "us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesPerformanceObligationsTimingDetails" ], "lang": { "en-us": { "role": { "label": "Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction [Table]", "documentation": "Disclosure of information about expected timing for satisfying remaining performance obligation." } } }, "auth_ref": [] }, "veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage": { "xbrltype": "percentItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "RevenueRemainingPerformanceObligationExpectedTimingPercentage", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesPerformanceObligationsTimingDetails" ], "lang": { "en-us": { "role": { "documentation": "Percentage of remaining performance obligation expected to be recognized.", "label": "Revenue Remaining Performance Obligation Expected Timing Percentage", "terseLabel": "Percentage of remaining performance obligation expected to be recognized" } } }, "auth_ref": [] }, "veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "RevolvingCreditFacilityDecember2021LetterOfCreditMember", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "documentation": "Revolving Credit Facility Letter of Credit, entered into December 16, 2021.", "label": "Revolving Credit Facility, December 2021, Letter Of Credit [Member]", "terseLabel": "Credit Facility, Letter of Credit" } } }, "auth_ref": [] }, "veco_RevolvingCreditFacilityDecember2021Member": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "RevolvingCreditFacilityDecember2021Member", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "documentation": "Revolving Credit Facility, entered into December 16, 2021.", "label": "Revolving Credit Facility, December 2021 [Member]", "terseLabel": "Credit Facility" } } }, "auth_ref": [] }, "us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Right-of-Use Asset Obtained in Exchange for Operating Lease Liability", "terseLabel": "Right-of-use assets obtained in exchange for lease obligations", "documentation": "Amount of increase in right-of-use asset obtained in exchange for operating lease liability." } } }, "auth_ref": [ "r519", "r723" ] }, "ecd_Rule10b51ArrAdoptedFlag": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "Rule10b51ArrAdoptedFlag", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements" ], "lang": { "en-us": { "role": { "label": "Rule 10b5-1 Arrangement Adopted [Flag]", "terseLabel": "Rule 10b5-1 Arrangement Adopted" } } }, "auth_ref": [ "r807" ] }, "ecd_Rule10b51ArrTrmntdFlag": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "Rule10b51ArrTrmntdFlag", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements" ], "lang": { "en-us": { "role": { "label": "Rule 10b5-1 Arrangement Terminated [Flag]", "terseLabel": "Rule 10b5-1 Arrangement Terminated" } } }, "auth_ref": [ "r807" ] }, "us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfAccruedLiabilitiesTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesTables" ], "lang": { "en-us": { "role": { "label": "Schedule of Accrued Liabilities [Table Text Block]", "terseLabel": "Schedule of accrued expenses and other current liabilities", "documentation": "Tabular disclosure of the components of accrued liabilities." } } }, "auth_ref": [] }, "us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureEquityTables" ], "lang": { "en-us": { "role": { "label": "Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]", "terseLabel": "Schedule of the changes in the balances of each component of AOCI, net of tax", "documentation": "Tabular disclosure of the components of accumulated other comprehensive income (loss)." } } }, "auth_ref": [ "r35", "r868", "r869" ] }, "us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable", "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails" ], "lang": { "en-us": { "role": { "label": "Schedule of Antidilutive Securities Excluded from Computation of Earnings Per Share [Table]", "documentation": "Schedule for securities (including those issuable pursuant to contingent stock agreements) that could potentially dilute basic earnings per share (EPS) in the future that were not included in the computation of diluted EPS because to do so would increase EPS amounts or decrease loss per share amounts for the period presented, by Antidilutive Securities." } } }, "auth_ref": [ "r47" ] }, "us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfAvailableForSaleSecuritiesLineItems", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails" ], "lang": { "en-us": { "role": { "label": "Debt Securities, Available-for-Sale [Line Items]", "terseLabel": "Total available-for-sale securities", "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table." } } }, "auth_ref": [ "r277", "r278", "r279", "r280", "r281", "r282", "r283", "r284", "r285", "r286", "r287", "r288" ] }, "us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsTables" ], "lang": { "en-us": { "role": { "label": "Schedule of Available-for-sale Securities Reconciliation [Table Text Block]", "terseLabel": "Schedule of amortized cost and fair value of available-for-sale securities", "documentation": "Tabular disclosure of the reconciliation of available-for-sale securities from cost basis to fair value." } } }, "auth_ref": [] }, "us-gaap_ScheduleOfBusinessAcquisitionsByAcquisitionTable": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfBusinessAcquisitionsByAcquisitionTable", "presentation": [ "http://www.veeco.com/role/DisclosureBusinessCombinationConsiderationDetails" ], "lang": { "en-us": { "role": { "label": "Schedule of Business Acquisitions, by Acquisition [Table]", "documentation": "Schedule reflecting each material business combination (or series of individually immaterial business combinations) completed during the period, including background, timing, and recognized assets and liabilities." } } }, "auth_ref": [ "r71", "r72", "r471" ] }, "us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareTables" ], "lang": { "en-us": { "role": { "label": "Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]", "terseLabel": "Schedule of computations of basic and diluted income per share", "documentation": "Tabular disclosure of an entity's basic and diluted earnings per share calculations, including a reconciliation of numerators and denominators of the basic and diluted per-share computations for income from continuing operations." } } }, "auth_ref": [ "r836" ] }, "us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationTables" ], "lang": { "en-us": { "role": { "label": "Schedule of Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Table Text Block]", "terseLabel": "Schedule of share-based compensation expense", "documentation": "Tabular disclosure of allocation of amount expensed and capitalized for award under share-based payment arrangement to statement of income or comprehensive income and statement of financial position. Includes, but is not limited to, corresponding line item in financial statement." } } }, "auth_ref": [ "r68" ] }, "us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables" ], "lang": { "en-us": { "role": { "label": "Revenue from External Customers by Products and Services [Table Text Block]", "verboseLabel": "Schedule of sales by end-market", "documentation": "Tabular disclosure of entity-wide revenues from external customers for each product or service or each group of similar products or services if the information is not provided as part of the reportable operating segment information." } } }, "auth_ref": [ "r54" ] }, "veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsTables" ], "lang": { "en-us": { "role": { "documentation": "Tabular disclosure of assets, excluding financial assets and goodwill, which lack physical substance with a finite life or exist in perpetuity, by major class.", "label": "Schedule of Intangible Assets, Excluding Goodwill [Table Text Block]", "verboseLabel": "Schedule of intangible assets excluding goodwill" } } }, "auth_ref": [] }, "us-gaap_ScheduleOfInventoryCurrentTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfInventoryCurrentTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsTables" ], "lang": { "en-us": { "role": { "label": "Schedule of Inventory, Current [Table Text Block]", "terseLabel": "Schedule of inventories", "documentation": "Tabular disclosure of the carrying amount as of the balance sheet date of merchandise, goods, commodities, or supplies held for future sale or to be used in manufacturing, servicing or production process." } } }, "auth_ref": [ "r22", "r102", "r103", "r104" ] }, "us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfProductWarrantyLiabilityTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesTables" ], "lang": { "en-us": { "role": { "label": "Schedule of Product Warranty Liability [Table Text Block]", "terseLabel": "Schedule of changes in product warranty reserves", "documentation": "Tabular disclosure of the changes in the guarantor's aggregate product warranty liability, including the beginning balance of the aggregate product warranty liability, the aggregate reductions in that liability for payments made (in cash or in kind) under the warranty, the aggregate changes in the liability for accruals related to product warranties issued during the reporting period, the aggregate changes in the liability for accruals related to preexisting warranties (including adjustments related to changes in estimates), and the ending balance of the aggregate product warranty liability." } } }, "auth_ref": [ "r339" ] }, "us-gaap_ScheduleOfPropertyPlantAndEquipmentTable": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfPropertyPlantAndEquipmentTable", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsPropertyPlantAndEquipmentDetails" ], "lang": { "en-us": { "role": { "label": "Property, Plant and Equipment [Table]", "documentation": "Disclosure of information about physical assets used in the normal conduct of business and not intended for resale. Includes, but is not limited to, balances by class of assets, depreciation and depletion expense and method used, including composite depreciation, and accumulated deprecation." } } }, "auth_ref": [ "r13" ] }, "us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables" ], "lang": { "en-us": { "role": { "label": "Schedule of Revenue from External Customers and Long-Lived Assets, by Geographical Areas [Table Text Block]", "terseLabel": "Schedule of sales by geographic region", "documentation": "Tabular disclosure of information concerning material long-lived assets (excluding financial instruments, customer relationships with financial institutions, mortgage and other servicing rights, deferred policy acquisition costs, and deferred taxes assets) located in identified geographic areas and/or the amount of revenue from external customers attributed to that country from which revenue is material. An entity may also provide subtotals of geographic information about groups of countries." } } }, "auth_ref": [ "r55", "r108" ] }, "us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfSegmentReportingInformationBySegmentTable", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "label": "Schedule of Segment Reporting Information, by Segment [Table]", "documentation": "A table disclosing the profit or loss and total assets for each reportable segment of the entity. An entity discloses certain information on each reportable segment if the amounts (a) are included in the measure of segment profit or loss reviewed by the chief operating decision maker or (b) are otherwise regularly provided to the chief operating decision maker, even if not included in that measure of segment profit or loss." } } }, "auth_ref": [ "r51", "r52", "r53", "r56" ] }, "us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails", "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" ], "lang": { "en-us": { "role": { "label": "Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table]", "documentation": "Disclosure of information about share-based payment arrangement." } } }, "auth_ref": [ "r414", "r416", "r419", "r420", "r421", "r422", "r423", "r424", "r425", "r426", "r427", "r428", "r429", "r430", "r431", "r432", "r433", "r434", "r435", "r436", "r437", "r438", "r439", "r440", "r441", "r442", "r443", "r444" ] }, "us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationTables" ], "lang": { "en-us": { "role": { "label": "Share-Based Payment Arrangement, Restricted Stock and Restricted Stock Unit, Activity [Table Text Block]", "terseLabel": "Summary of non-vested restricted and performance shares activity", "documentation": "Disclosure of the number and weighted-average grant date fair value for restricted stock and restricted stock units that were outstanding at the beginning and end of the year, and the number of restricted stock and restricted stock units that were granted, vested, or forfeited during the year." } } }, "auth_ref": [] }, "us-gaap_ScheduleOfStockholdersEquityTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ScheduleOfStockholdersEquityTableTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureEquityTables" ], "lang": { "en-us": { "role": { "label": "Schedule of Stockholders Equity [Table Text Block]", "terseLabel": "Schedule of Stockholders' Equity", "documentation": "Tabular disclosure of changes in the separate accounts comprising stockholders' equity (in addition to retained earnings) and of the changes in the number of shares of equity securities during at least the most recent annual fiscal period and any subsequent interim period presented is required to make the financial statements sufficiently informative if both financial position and results of operations are presented." } } }, "auth_ref": [ "r17" ] }, "veco_ScientificAndOtherMember": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "ScientificAndOtherMember", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "documentation": "Represents the entity's Scientific & Other reporting segment.", "label": "Scientific And Other [Member]", "terseLabel": "Scientific & Other" } } }, "auth_ref": [] }, "us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "label": "Secured Overnight Financing Rate (SOFR) Overnight Index Swap Rate [Member]", "terseLabel": "SOFR", "documentation": "Fixed rate on U.S. dollar, constant-notional interest rate swap that has its variable-rate leg referenced to Secured Overnight Financing Rate (SOFR) with no additional spread over SOFR on variable-rate leg." } } }, "auth_ref": [ "r864" ] }, "dei_Security12bTitle": { "xbrltype": "securityTitleItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "Security12bTitle", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Title of 12(b) Security", "documentation": "Title of a 12(b) registered security." } } }, "auth_ref": [ "r738" ] }, "dei_SecurityExchangeName": { "xbrltype": "edgarExchangeCodeItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "SecurityExchangeName", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Security Exchange Name", "documentation": "Name of the Exchange on which a security is registered." } } }, "auth_ref": [ "r740" ] }, "srt_SegmentGeographicalDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/srt/2023", "localname": "SegmentGeographicalDomain", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "label": "Geographical [Domain]" } } }, "auth_ref": [ "r269", "r270", "r602", "r603", "r604", "r660", "r662", "r665", "r671", "r675", "r676", "r677", "r678", "r679", "r680", "r681", "r682", "r683", "r688", "r711", "r729", "r861", "r883" ] }, "us-gaap_SegmentReportingAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "SegmentReportingAbstract", "lang": { "en-us": { "role": { "label": "Segment Reporting and Geographic Information" } } }, "auth_ref": [] }, "us-gaap_SegmentReportingDisclosureTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "SegmentReportingDisclosureTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformation" ], "lang": { "en-us": { "role": { "label": "Segment Reporting Disclosure [Text Block]", "terseLabel": "Segment Reporting and Geographic Information", "documentation": "The entire disclosure for reporting segments including data and tables. Reportable segments include those that meet any of the following quantitative thresholds a) it's reported revenue, including sales to external customers and intersegment sales or transfers is 10 percent or more of the combined revenue, internal and external, of all operating segments b) the absolute amount of its reported profit or loss is 10 percent or more of the greater, in absolute amount of 1) the combined reported profit of all operating segments that did not report a loss or 2) the combined reported loss of all operating segments that did report a loss c) its assets are 10 percent or more of the combined assets of all operating segments." } } }, "auth_ref": [ "r244", "r245", "r246", "r247", "r248", "r255", "r259", "r263", "r264", "r265", "r266", "r267", "r268", "r271" ] }, "us-gaap_SegmentReportingInformationLineItems": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "SegmentReportingInformationLineItems", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "label": "Segment Reporting Information [Line Items]", "verboseLabel": "Revenue reporting by end-market and geographic region", "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table." } } }, "auth_ref": [] }, "us-gaap_SellingGeneralAndAdministrativeExpense": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "SellingGeneralAndAdministrativeExpense", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": { "parentTag": "us-gaap_OperatingExpenses", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Selling, General and Administrative Expense", "terseLabel": "Selling, general, and administrative", "documentation": "The aggregate total costs related to selling a firm's product and services, as well as all other general and administrative expenses. Direct selling expenses (for example, credit, warranty, and advertising) are expenses that can be directly linked to the sale of specific products. Indirect selling expenses are expenses that cannot be directly linked to the sale of specific products, for example telephone expenses, Internet, and postal charges. General and administrative expenses include salaries of non-sales personnel, rent, utilities, communication, etc." } } }, "auth_ref": [ "r111" ] }, "us-gaap_SellingGeneralAndAdministrativeExpensesMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "SellingGeneralAndAdministrativeExpensesMember", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails" ], "lang": { "en-us": { "role": { "label": "Selling, General and Administrative Expenses [Member]", "terseLabel": "Selling, general and administrative", "documentation": "Primary financial statement caption encompassing selling, general and administrative expense." } } }, "auth_ref": [] }, "veco_SemiconductorMember": { "xbrltype": "domainItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "SemiconductorMember", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "documentation": "Represents the entity's Semiconductor reporting segment.", "label": "Semiconductor [Member]", "terseLabel": "Semiconductor" } } }, "auth_ref": [] }, "us-gaap_ShareBasedCompensation": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ShareBasedCompensation", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": { "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities", "weight": 1.0, "order": 5.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Share based Compensation", "terseLabel": "Share-based compensation expense", "documentation": "Amount of noncash expense for share-based payment arrangement." } } }, "auth_ref": [ "r11" ] }, "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" ], "lang": { "en-us": { "role": { "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Additional Disclosures [Abstract]", "terseLabel": "Weighted Average Grant Date Fair Value" } } }, "auth_ref": [] }, "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" ], "lang": { "en-us": { "role": { "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period", "negatedLabel": "Forfeited (in shares)", "documentation": "The number of equity-based payment instruments, excluding stock (or unit) options, that were forfeited during the reporting period." } } }, "auth_ref": [ "r435" ] }, "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue": { "xbrltype": "perShareItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" ], "lang": { "en-us": { "role": { "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value", "terseLabel": "Forfeited (in dollars per share)", "documentation": "Weighted average fair value as of the grant date of equity-based award plans other than stock (unit) option plans that were not exercised or put into effect as a result of the occurrence of a terminating event." } } }, "auth_ref": [ "r435" ] }, "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" ], "lang": { "en-us": { "role": { "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period", "terseLabel": "Granted (in shares)", "documentation": "The number of grants made during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan)." } } }, "auth_ref": [ "r433" ] }, "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue": { "xbrltype": "perShareItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" ], "lang": { "en-us": { "role": { "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value", "terseLabel": "Granted (in dollars per share)", "documentation": "The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan)." } } }, "auth_ref": [ "r433" ] }, "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" ], "lang": { "en-us": { "role": { "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number", "periodEndLabel": "Outstanding at the end of the period (in shares)", "periodStartLabel": "Outstanding at the beginning of the period (in shares)", "documentation": "The number of non-vested equity-based payment instruments, excluding stock (or unit) options, that validly exist and are outstanding as of the balance sheet date." } } }, "auth_ref": [ "r430", "r431" ] }, "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" ], "lang": { "en-us": { "role": { "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]", "terseLabel": "Number of Shares", "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period." } } }, "auth_ref": [] }, "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue": { "xbrltype": "perShareItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" ], "lang": { "en-us": { "role": { "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value", "periodEndLabel": "Outstanding at the end of the period (in dollars per share)", "periodStartLabel": "Outstanding at the beginning of the period (in dollars per share)", "documentation": "Per share or unit weighted-average fair value of nonvested award under share-based payment arrangement. Excludes share and unit options." } } }, "auth_ref": [ "r430", "r431" ] }, "veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod": { "xbrltype": "sharesItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" ], "lang": { "en-us": { "role": { "documentation": "The number of performance award adjustments made during the period on other than stock (or unit) option plans resulting in decrease in awards outstanding.", "label": "Share Based Compensation Arrangement By Share Based Payment Award Equity Instruments Other Than Options Performance Award Adjustments In Period", "negatedLabel": "Performance award adjustments (in shares)" } } }, "auth_ref": [] }, "veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue": { "xbrltype": "perShareItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" ], "lang": { "en-us": { "role": { "documentation": "The weighted average fair value of performance award adjustments during the period for nonvested equity-based awards other than stock (or unit) option plans.", "label": "Share Based Compensation Arrangement By Share Based Payment Award Equity Instruments Other Than Options Performance Award Adjustments Weighted Average Grant Date Fair Value", "terseLabel": "Performance award adjustments (in dollars per share)" } } }, "auth_ref": [] }, "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" ], "lang": { "en-us": { "role": { "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period", "negatedLabel": "Vested (in shares)", "documentation": "The number of equity-based payment instruments, excluding stock (or unit) options, that vested during the reporting period." } } }, "auth_ref": [ "r434" ] }, "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue": { "xbrltype": "perShareItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" ], "lang": { "en-us": { "role": { "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value", "terseLabel": "Vested (in dollars per share)", "documentation": "The weighted average fair value as of grant date pertaining to an equity-based award plan other than a stock (or unit) option plan for which the grantee gained the right during the reporting period, by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash in accordance with the terms of the arrangement." } } }, "auth_ref": [ "r434" ] }, "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails", "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" ], "lang": { "en-us": { "role": { "label": "Share-based Compensation Arrangement by Share-based Payment Award [Line Items]", "terseLabel": "Share-based compensation", "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table." } } }, "auth_ref": [ "r414", "r416", "r419", "r420", "r421", "r422", "r423", "r424", "r425", "r426", "r427", "r428", "r429", "r430", "r431", "r432", "r433", "r434", "r435", "r436", "r437", "r438", "r439", "r440", "r441", "r442", "r443", "r444" ] }, "us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails", "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails", "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "All Award Types", "terseLabel": "All Award Types", "documentation": "Award under share-based payment arrangement." } } }, "auth_ref": [ "r419", "r420", "r421", "r422", "r423", "r424", "r425", "r426", "r427", "r428", "r429", "r430", "r431", "r432", "r433", "r434", "r435", "r436", "r437", "r438", "r439", "r440", "r441", "r442", "r443", "r444" ] }, "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod": { "xbrltype": "durationItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod", "presentation": [ "http://www.veeco.com/role/DisclosureShareBasedCompensationRecognizedShareBasedCompensationDetails" ], "lang": { "en-us": { "role": { "label": "Share-based Compensation Arrangement by Share-based Payment Award, Expiration Period", "terseLabel": "Expiration term", "documentation": "Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days." } } }, "auth_ref": [ "r719" ] }, "us-gaap_SharesOutstanding": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "SharesOutstanding", "presentation": [ "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails" ], "lang": { "en-us": { "role": { "label": "Shares, Outstanding", "periodEndLabel": "Balance (in shares)", "periodStartLabel": "Balance (in shares)", "documentation": "Number of shares issued which are neither cancelled nor held in the treasury." } } }, "auth_ref": [] }, "us-gaap_ShortTermInvestmentsAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "ShortTermInvestmentsAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Short-term Investments [Abstract]", "terseLabel": "Short-term investments" } } }, "auth_ref": [] }, "us-gaap_StatementEquityComponentsAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "StatementEquityComponentsAxis", "presentation": [ "http://www.veeco.com/role/DisclosureEquityAociRollforwardDetails", "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails" ], "lang": { "en-us": { "role": { "label": "Equity Components [Axis]", "documentation": "Information by component of equity." } } }, "auth_ref": [ "r17", "r33", "r159", "r186", "r187", "r188", "r207", "r208", "r209", "r211", "r217", "r219", "r243", "r308", "r309", "r388", "r449", "r450", "r451", "r462", "r463", "r484", "r485", "r486", "r487", "r488", "r489", "r492", "r503", "r504", "r505", "r506", "r507", "r508", "r522", "r590", "r591", "r592", "r600", "r654" ] }, "srt_StatementGeographicalAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/srt/2023", "localname": "StatementGeographicalAxis", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "label": "Geographical [Axis]" } } }, "auth_ref": [ "r269", "r270", "r602", "r603", "r604", "r660", "r662", "r665", "r671", "r673", "r675", "r676", "r677", "r678", "r679", "r680", "r681", "r682", "r683", "r688", "r711", "r729", "r861", "r883" ] }, "us-gaap_StatementLineItems": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "StatementLineItems", "presentation": [ "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails" ], "lang": { "en-us": { "role": { "label": "Statement [Line Items]", "terseLabel": "Statement", "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table." } } }, "auth_ref": [ "r207", "r208", "r209", "r243", "r557", "r596", "r601", "r608", "r609", "r610", "r611", "r612", "r613", "r615", "r618", "r619", "r620", "r621", "r622", "r623", "r624", "r625", "r626", "r628", "r629", "r630", "r631", "r632", "r634", "r636", "r637", "r640", "r641", "r642", "r643", "r644", "r645", "r646", "r647", "r648", "r649", "r650", "r651", "r654", "r730" ] }, "us-gaap_StatementOfCashFlowsAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "StatementOfCashFlowsAbstract", "lang": { "en-us": { "role": { "label": "Consolidated Statements of Cash Flows" } } }, "auth_ref": [] }, "us-gaap_StatementOfFinancialPositionAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "StatementOfFinancialPositionAbstract", "lang": { "en-us": { "role": { "label": "Consolidated Balance Sheets" } } }, "auth_ref": [] }, "us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "StatementOfIncomeAndComprehensiveIncomeAbstract", "lang": { "en-us": { "role": { "label": "Consolidated Statements of Comprehensive Income" } } }, "auth_ref": [] }, "us-gaap_StatementTable": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "StatementTable", "presentation": [ "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails" ], "lang": { "en-us": { "role": { "label": "Statement [Table]", "documentation": "Schedule reflecting a Statement of Income, Statement of Cash Flows, Statement of Financial Position, Statement of Shareholders' Equity and Other Comprehensive Income, or other statement as needed." } } }, "auth_ref": [ "r207", "r208", "r209", "r243", "r557", "r596", "r601", "r608", "r609", "r610", "r611", "r612", "r613", "r615", "r618", "r619", "r620", "r621", "r622", "r623", "r624", "r625", "r626", "r628", "r629", "r630", "r631", "r632", "r634", "r636", "r637", "r640", "r641", "r642", "r643", "r644", "r645", "r646", "r647", "r648", "r649", "r650", "r651", "r654", "r730" ] }, "ecd_StkPrcOrTsrEstimationMethodTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "StkPrcOrTsrEstimationMethodTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/ErrCompDisclosure" ], "lang": { "en-us": { "role": { "label": "Stock Price or TSR Estimation Method [Text Block]", "terseLabel": "Stock Price or TSR Estimation Method" } } }, "auth_ref": [ "r747", "r758", "r768", "r793" ] }, "us-gaap_StockAppreciationRightsSARSMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "StockAppreciationRightsSARSMember", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "Stock Appreciation Rights (SARs) [Member]", "terseLabel": "Stock Appreciation Rights (SARs)", "documentation": "Right to receive cash or shares equal to appreciation of predetermined number of grantor's shares during predetermined time period." } } }, "auth_ref": [] }, "us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "StockIssuedDuringPeriodSharesShareBasedCompensation", "presentation": [ "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails" ], "lang": { "en-us": { "role": { "label": "Stock Issued During Period, Shares, Share-based Compensation, Net of Forfeitures", "terseLabel": "Net issuance under employee stock plans (in shares)", "documentation": "Number, after forfeiture, of shares or units issued under share-based payment arrangement. Excludes shares or units issued under employee stock ownership plan (ESOP)." } } }, "auth_ref": [ "r17", "r95", "r96", "r133" ] }, "us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "StockIssuedDuringPeriodValueShareBasedCompensation", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails" ], "lang": { "en-us": { "role": { "label": "Stock Issued During Period, Value, Share-based Compensation, Net of Forfeitures", "terseLabel": "Net issuance under employee stock plans", "documentation": "Value, after forfeiture, of shares issued under share-based payment arrangement. Excludes employee stock ownership plan (ESOP)." } } }, "auth_ref": [ "r67", "r95", "r96", "r133" ] }, "us-gaap_StockholdersEquity": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "StockholdersEquity", "crdr": "credit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_LiabilitiesAndStockholdersEquity", "weight": 1.0, "order": 2.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureEquityAociRollforwardDetails", "http://www.veeco.com/role/DisclosureEquityStatementOfStockholdersEquityDetails", "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Stockholders' Equity Attributable to Parent", "periodEndLabel": "Balance at the end of the period", "periodStartLabel": "Balance at the beginning of the period", "totalLabel": "Total stockholders' equity", "documentation": "Amount of equity (deficit) attributable to parent. Excludes temporary equity and equity attributable to noncontrolling interest." } } }, "auth_ref": [ "r96", "r99", "r100", "r121", "r617", "r633", "r655", "r656", "r724", "r737", "r831", "r846", "r866", "r887" ] }, "us-gaap_StockholdersEquityAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "StockholdersEquityAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Equity, Attributable to Parent [Abstract]", "terseLabel": "Stockholders' equity:" } } }, "auth_ref": [] }, "us-gaap_StockholdersEquityNoteAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "StockholdersEquityNoteAbstract", "lang": { "en-us": { "role": { "label": "Equity" } } }, "auth_ref": [] }, "us-gaap_StockholdersEquityNoteDisclosureTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "StockholdersEquityNoteDisclosureTextBlock", "presentation": [ "http://www.veeco.com/role/DisclosureEquity" ], "lang": { "en-us": { "role": { "label": "Stockholders' Equity Note Disclosure [Text Block]", "verboseLabel": "Equity", "documentation": "The entire disclosure for equity." } } }, "auth_ref": [ "r129", "r203", "r374", "r376", "r377", "r378", "r379", "r380", "r381", "r382", "r383", "r384", "r385", "r387", "r388", "r491", "r657", "r658", "r672" ] }, "us-gaap_SupplementalCashFlowInformationAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "SupplementalCashFlowInformationAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "label": "Supplemental Cash Flow Information [Abstract]", "terseLabel": "Supplemental Disclosure of Cash Flow Information" } } }, "auth_ref": [] }, "ecd_TabularListTableTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "TabularListTableTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Tabular List [Table Text Block]", "terseLabel": "Tabular List, Table" } } }, "auth_ref": [ "r787" ] }, "us-gaap_TaxesPayableCurrent": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "TaxesPayableCurrent", "crdr": "credit", "calculation": { "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails": { "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent", "weight": 1.0, "order": 6.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesAccruedExpensesAndOtherCurrentLiabilitiesDetails" ], "lang": { "en-us": { "role": { "label": "Taxes Payable, Current", "terseLabel": "Sales, use, and other taxes", "documentation": "Carrying value as of the balance sheet date of obligations incurred and payable for statutory income, sales, use, payroll, excise, real, property and other taxes. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer)." } } }, "auth_ref": [ "r25" ] }, "us-gaap_TechnologyBasedIntangibleAssetsMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "TechnologyBasedIntangibleAssetsMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails" ], "lang": { "en-us": { "role": { "label": "Technology-Based Intangible Assets [Member]", "terseLabel": "Technology", "documentation": "Technology-based intangible assets, including, but not limited to, patented technology, unpatented technology, and developed technology rights." } } }, "auth_ref": [ "r20" ] }, "ecd_TotalShareholderRtnAmt": { "xbrltype": "monetaryItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "TotalShareholderRtnAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Total Shareholder Return Amount", "terseLabel": "Total Shareholder Return Amount" } } }, "auth_ref": [ "r779" ] }, "ecd_TotalShareholderRtnVsPeerGroupTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "TotalShareholderRtnVsPeerGroupTextBlock", "presentation": [ "http://xbrl.sec.gov/ecd/role/PvpDisclosure" ], "lang": { "en-us": { "role": { "label": "Total Shareholder Return Vs Peer Group [Text Block]", "terseLabel": "Total Shareholder Return Vs Peer Group" } } }, "auth_ref": [ "r786" ] }, "veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "TradeReceivablesSoldUnderReceivablePurchaseAgreement", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails" ], "lang": { "en-us": { "role": { "documentation": "Amount of accounts receivable that has been sold to other entities.", "label": "Trade Receivables Sold Under Receivable Purchase Agreement", "terseLabel": "Receivables sold" } } }, "auth_ref": [] }, "us-gaap_TrademarksAndTradeNamesMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "TrademarksAndTradeNamesMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsIntangibleAssetsDetails" ], "lang": { "en-us": { "role": { "label": "Trademarks and Trade Names [Member]", "terseLabel": "Trademarks and tradenames", "documentation": "Rights acquired through registration of a trademark to gain or protect exclusive use of a business name, symbol or other device or style, or rights either acquired through registration of a business name to gain or protect exclusive use thereof." } } }, "auth_ref": [ "r73" ] }, "ecd_TradingArrAxis": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "TradingArrAxis", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements" ], "lang": { "en-us": { "role": { "label": "Trading Arrangement [Axis]", "terseLabel": "Trading Arrangement:" } } }, "auth_ref": [ "r806" ] }, "ecd_TradingArrByIndTable": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "TradingArrByIndTable", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements" ], "lang": { "en-us": { "role": { "label": "Trading Arrangements, by Individual [Table]", "terseLabel": "Trading Arrangements, by Individual" } } }, "auth_ref": [ "r808" ] }, "dei_TradingSymbol": { "xbrltype": "tradingSymbolItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "TradingSymbol", "presentation": [ "http://www.veeco.com/role/DocumentDocumentAndEntityInformation" ], "lang": { "en-us": { "role": { "label": "Trading Symbol", "documentation": "Trading symbol of an instrument as listed on an exchange." } } }, "auth_ref": [] }, "veco_TransferFromInventories": { "xbrltype": "monetaryItemType", "nsuri": "http://www.veeco.com/20240331", "localname": "TransferFromInventories", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" ], "lang": { "en-us": { "role": { "documentation": "Net transfer of inventory to property, plant and equipment in non-cash transactions.", "label": "Transfer From Inventories", "terseLabel": "Net transfer of inventory to property, plant and equipment" } } }, "auth_ref": [] }, "us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails", "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "Financial Instruments [Domain]", "documentation": "Instrument or contract that imposes a contractual obligation to deliver cash or another financial instrument or to exchange other financial instruments on potentially unfavorable terms and conveys a contractual right to receive cash or another financial instrument or to exchange other financial instruments on potentially favorable terms." } } }, "auth_ref": [ "r277", "r278", "r279", "r280", "r281", "r282", "r283", "r284", "r285", "r286", "r287", "r288", "r289", "r290", "r291", "r292", "r293", "r294", "r295", "r296", "r297", "r298", "r299", "r300", "r301", "r302", "r303", "r304", "r305", "r306", "r370", "r386", "r490", "r523", "r524", "r525", "r526", "r527", "r528", "r529", "r530", "r531", "r532", "r533", "r534", "r535", "r536", "r537", "r538", "r539", "r540", "r541", "r542", "r543", "r544", "r545", "r546", "r547", "r548", "r549", "r550", "r551", "r552", "r579", "r815", "r816", "r817", "r818", "r819", "r820", "r821", "r842", "r843", "r844", "r845" ] }, "ecd_TrdArrAdoptionDate": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "TrdArrAdoptionDate", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements" ], "lang": { "en-us": { "role": { "label": "Trading Arrangement Adoption Date", "terseLabel": "Adoption Date" } } }, "auth_ref": [ "r809" ] }, "ecd_TrdArrDuration": { "xbrltype": "durationItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "TrdArrDuration", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements" ], "lang": { "en-us": { "role": { "label": "Trading Arrangement Duration", "terseLabel": "Arrangement Duration" } } }, "auth_ref": [ "r810" ] }, "ecd_TrdArrIndName": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "TrdArrIndName", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements" ], "lang": { "en-us": { "role": { "label": "Trading Arrangement, Individual Name", "terseLabel": "Name" } } }, "auth_ref": [ "r808" ] }, "ecd_TrdArrIndTitle": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "TrdArrIndTitle", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements" ], "lang": { "en-us": { "role": { "label": "Trading Arrangement, Individual Title", "terseLabel": "Title" } } }, "auth_ref": [ "r808" ] }, "ecd_TrdArrSecuritiesAggAvailAmt": { "xbrltype": "sharesItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "TrdArrSecuritiesAggAvailAmt", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements" ], "lang": { "en-us": { "role": { "label": "Trading Arrangement, Securities Aggregate Available Amount", "terseLabel": "Aggregate Available" } } }, "auth_ref": [ "r811" ] }, "ecd_TrdArrTerminationDate": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "TrdArrTerminationDate", "presentation": [ "http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements" ], "lang": { "en-us": { "role": { "label": "Trading Arrangement Termination Date", "terseLabel": "Termination Date" } } }, "auth_ref": [ "r809" ] }, "country_US": { "xbrltype": "domainItemType", "nsuri": "http://xbrl.sec.gov/country/2023", "localname": "US", "presentation": [ "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationDetails" ], "lang": { "en-us": { "role": { "label": "UNITED STATES", "terseLabel": "UNITED STATES" } } }, "auth_ref": [] }, "us-gaap_USGovernmentAgenciesDebtSecuritiesMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "USGovernmentAgenciesDebtSecuritiesMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails", "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "US Government Agencies Debt Securities [Member]", "terseLabel": "Government agency securities", "documentation": "Debentures, notes, and other debt securities issued by US government agencies, for example, but not limited to, Government National Mortgage Association (GNMA or Ginnie Mae). Excludes US treasury securities and debt issued by government-sponsored Enterprises (GSEs), for example, but is not limited to, Federal Home Loan Mortgage Corporation (FHLMC or Freddie Mac), Federal National Mortgage Association (FNMA or Fannie Mae), and the Federal Home Loan Bank (FHLB)." } } }, "auth_ref": [ "r697", "r712", "r881" ] }, "us-gaap_USTreasurySecuritiesMember": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "USTreasurySecuritiesMember", "presentation": [ "http://www.veeco.com/role/DisclosureAssetsAvailableForSaleSecuritiesDetails", "http://www.veeco.com/role/DisclosureAssetsFairValueDetails" ], "lang": { "en-us": { "role": { "label": "US Treasury Securities [Member]", "terseLabel": "U.S. treasuries", "documentation": "This category includes information about debt securities issued by the United States Department of the Treasury and backed by the United States government. Such securities primarily consist of treasury bills (short-term maturities - one year or less), treasury notes (intermediate term maturities - two to ten years), and treasury bonds (long-term maturities - ten to thirty years)." } } }, "auth_ref": [ "r697", "r712", "r714", "r881" ] }, "us-gaap_UnbilledContractsReceivable": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "UnbilledContractsReceivable", "crdr": "debit", "calculation": { "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": { "parentTag": "us-gaap_AssetsCurrent", "weight": 1.0, "order": 5.0 } }, "presentation": [ "http://www.veeco.com/role/StatementConsolidatedBalanceSheets" ], "lang": { "en-us": { "role": { "label": "Unbilled Contracts Receivable", "terseLabel": "Contract assets", "documentation": "Unbilled amounts due for services rendered or to be rendered, actions taken or to be taken, or a promise to refrain from taking certain actions in accordance with the terms of a legally binding agreement between the entity and, at a minimum, one other party. An example would be amounts associated with contracts or programs where the recognized revenue for performance thereunder exceeds the amounts billed under the terms thereof as of the date of the balance sheet." } } }, "auth_ref": [ "r555" ] }, "ecd_UndrlygSecurityMktPriceChngPct": { "xbrltype": "pureItemType", "nsuri": "http://xbrl.sec.gov/ecd/2023", "localname": "UndrlygSecurityMktPriceChngPct", "presentation": [ "http://xbrl.sec.gov/ecd/role/AwardTimingDisclosure" ], "lang": { "en-us": { "role": { "label": "Underlying Security Market Price Change, Percent", "terseLabel": "Underlying Security Market Price Change" } } }, "auth_ref": [ "r805" ] }, "us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths", "crdr": "credit", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails" ], "lang": { "en-us": { "role": { "label": "Unrecorded Unconditional Purchase Obligation, Due in Next Rolling Twelve Months", "terseLabel": "Purchase commitments due within one year", "documentation": "Amount of the fixed and determinable portion of the unrecorded unconditional purchase obligation maturing in the next rolling twelve months following the latest balance sheet. For interim and annual periods when interim periods are reported on a rolling approach, from latest balance sheet date." } } }, "auth_ref": [] }, "us-gaap_UseOfEstimates": { "xbrltype": "textBlockItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "UseOfEstimates", "presentation": [ "http://www.veeco.com/role/DisclosureBasisOfPresentationPolicies" ], "lang": { "en-us": { "role": { "label": "Use of Estimates, Policy [Policy Text Block]", "terseLabel": "Use of Estimates", "documentation": "Disclosure of accounting policy for the use of estimates in the preparation of financial statements in conformity with generally accepted accounting principles." } } }, "auth_ref": [ "r48", "r49", "r50", "r150", "r151", "r152", "r153" ] }, "us-gaap_VariableLeaseCost": { "xbrltype": "monetaryItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "VariableLeaseCost", "crdr": "debit", "presentation": [ "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails" ], "lang": { "en-us": { "role": { "label": "Variable Lease, Cost", "terseLabel": "Variable lease costs", "documentation": "Amount of variable lease cost, excluded from lease liability, recognized when obligation for payment is incurred for finance and operating leases." } } }, "auth_ref": [ "r517", "r723" ] }, "us-gaap_VariableRateAxis": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "VariableRateAxis", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "label": "Variable Rate [Axis]", "documentation": "Information by type of variable rate." } } }, "auth_ref": [] }, "us-gaap_VariableRateDomain": { "xbrltype": "domainItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "VariableRateDomain", "presentation": [ "http://www.veeco.com/role/DisclosureLiabilitiesRevolvingCreditFacilityDetails" ], "lang": { "en-us": { "role": { "label": "Variable Rate [Domain]", "documentation": "Interest rate that fluctuates over time as a result of an underlying benchmark interest rate or index." } } }, "auth_ref": [] }, "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "WeightedAverageNumberOfDilutedSharesOutstanding", "calculation": { "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails": { "parentTag": null, "weight": null, "order": null, "root": true } }, "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails", "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Weighted Average Number of Shares Outstanding, Diluted", "terseLabel": "Diluted (in shares)", "totalLabel": "Diluted weighted average shares outstanding", "documentation": "The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period." } } }, "auth_ref": [ "r223", "r238" ] }, "us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "WeightedAverageNumberOfSharesOutstandingAbstract", "presentation": [ "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Weighted Average Number of Shares Outstanding, Diluted [Abstract]", "terseLabel": "Weighted average number of shares:" } } }, "auth_ref": [] }, "us-gaap_WeightedAverageNumberOfSharesOutstandingBasic": { "xbrltype": "sharesItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "WeightedAverageNumberOfSharesOutstandingBasic", "calculation": { "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails": { "parentTag": "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding", "weight": 1.0, "order": 1.0 } }, "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails", "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" ], "lang": { "en-us": { "role": { "label": "Weighted Average Number of Shares Outstanding, Basic", "terseLabel": "Basic (in shares)", "verboseLabel": "Basic weighted average shares outstanding", "documentation": "Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period." } } }, "auth_ref": [ "r221", "r238" ] }, "us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract": { "xbrltype": "stringItemType", "nsuri": "http://fasb.org/us-gaap/2023", "localname": "WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract", "presentation": [ "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails" ], "lang": { "en-us": { "role": { "label": "Weighted Average Number of Shares Outstanding Reconciliation [Abstract]", "verboseLabel": "Denominator:" } } }, "auth_ref": [] } } } }, "std_ref": { "r0": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "25", "Paragraph": "1", "SubTopic": "20", "Topic": "940", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481913/940-20-25-1" }, "r1": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "30", "Paragraph": "7", "SubTopic": "30", "Topic": "805", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479637/805-30-30-7" }, "r2": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "30", "Paragraph": "8", "SubTopic": "30", "Topic": "805", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479637/805-30-30-8" }, "r3": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "35", "Paragraph": "1", "Subparagraph": "(b)", "SubTopic": "30", "Topic": "805", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479613/805-30-35-1" }, "r4": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "35", "Paragraph": "1", "Subparagraph": "b", "SubTopic": "30", "Topic": "805", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479613/805-30-35-1" }, "r5": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "SubTopic": "230", "Topic": "830", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481877/830-230-45-1" }, "r6": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "10A", "SubTopic": "10", "Topic": "220", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-10A" }, "r7": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "10A", "Subparagraph": "(a),(b),(c)", "SubTopic": "10", "Topic": "220", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-10A" }, "r8": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "14", "Subparagraph": "(a)", "SubTopic": "10", "Topic": "230", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-14" }, "r9": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "15", "Subparagraph": "(f)", "SubTopic": "10", "Topic": "230", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-15" }, "r10": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "20", "SubTopic": "10", "Topic": "810", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481231/810-10-45-20" }, "r11": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "28", "Subparagraph": "(a)", "SubTopic": "10", "Topic": "230", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-28" }, "r12": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "28", "Subparagraph": "(b)", "SubTopic": "10", "Topic": "230", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-28" }, "r13": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "SubTopic": "10", "Topic": "360", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482099/360-10-50-1" }, "r14": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(b)", "SubTopic": "30", "Topic": "805", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479581/805-30-50-1" }, "r15": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1A", "Subparagraph": "(c)(3)", "SubTopic": "10", "Topic": "810", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481203/810-10-50-1A" }, "r16": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1A", "Subparagraph": "(c),(3)", "SubTopic": "10", "Topic": "810", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481203/810-10-50-1A" }, "r17": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "SubTopic": "10", "Topic": "505", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-2" }, "r18": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2A", "Subparagraph": "(a)", "SubTopic": "10", "Topic": "718", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2A" }, "r19": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "e", "SubTopic": "470", "Topic": "942", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480848/942-470-50-3" }, "r20": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "13", "SubTopic": "20", "Topic": "805", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479876/805-20-55-13" }, "r21": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(22))", "SubTopic": "10", "Topic": "210", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r22": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "210", "SubTopic": "10", "Section": "50", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483489/210-10-50-1" }, "r23": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "210", "SubTopic": "10", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02.19(a))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r24": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "210", "SubTopic": "10", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02.19(b),22(b))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r25": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "210", "SubTopic": "10", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02.19,20)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r26": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "210", "SubTopic": "10", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02.19-26)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r27": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "210", "SubTopic": "10", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02.20)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r28": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "210", "SubTopic": "10", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02.21)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r29": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "210", "SubTopic": "10", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02.22(a)(1))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r30": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "210", "SubTopic": "10", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02.22(a)(5))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r31": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "210", "SubTopic": "10", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02.22)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r32": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "210", "SubTopic": "10", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02.24)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r33": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "210", "SubTopic": "10", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02.29-31)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r34": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "220", "SubTopic": "10", "Section": "45", "Paragraph": "14", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-14" }, "r35": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "220", "SubTopic": "10", "Section": "45", "Paragraph": "14A", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-14A" }, "r36": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "220", "SubTopic": "10", "Section": "45", "Paragraph": "5", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-5" }, "r37": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "230", "SubTopic": "10", "Section": "45", "Paragraph": "13", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-13" }, "r38": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "230", "SubTopic": "10", "Section": "45", "Paragraph": "13", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-13" }, "r39": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "230", "SubTopic": "10", "Section": "45", "Paragraph": "14", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-14" }, "r40": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "230", "SubTopic": "10", "Section": "45", "Paragraph": "15", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-15" }, "r41": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "230", "SubTopic": "10", "Section": "45", "Paragraph": "15", "Subparagraph": "(e)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-15" }, "r42": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "230", "SubTopic": "10", "Section": "45", "Paragraph": "4", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-4" }, "r43": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "230", "SubTopic": "10", "Section": "50", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482913/230-10-50-2" }, "r44": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "230", "SubTopic": "10", "Section": "50", "Paragraph": "3", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482913/230-10-50-3" }, "r45": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "230", "SubTopic": "10", "Section": "50", "Paragraph": "4", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482913/230-10-50-4" }, "r46": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "230", "SubTopic": "10", "Section": "50", "Paragraph": "5", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482913/230-10-50-5" }, "r47": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "260", "SubTopic": "10", "Section": "50", "Paragraph": "1", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482662/260-10-50-1" }, "r48": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "275", "SubTopic": "10", "Section": "50", "Paragraph": "4", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-4" }, "r49": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "275", "SubTopic": "10", "Section": "50", "Paragraph": "8", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-8" }, "r50": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "275", "SubTopic": "10", "Section": "50", "Paragraph": "9", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-9" }, "r51": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "280", "SubTopic": "10", "Section": "50", "Paragraph": "22", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-22" }, "r52": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "280", "SubTopic": "10", "Section": "50", "Paragraph": "25", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-25" }, "r53": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "280", "SubTopic": "10", "Section": "50", "Paragraph": "30", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-30" }, "r54": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "280", "SubTopic": "10", "Section": "50", "Paragraph": "40", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-40" }, "r55": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "280", "SubTopic": "10", "Section": "50", "Paragraph": "41", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-41" }, "r56": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "350", "SubTopic": "20", "Section": "50", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482573/350-20-50-1" }, "r57": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "350", "SubTopic": "30", "Section": "45", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482686/350-30-45-2" }, "r58": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "350", "SubTopic": "30", "Section": "50", "Paragraph": "1", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482665/350-30-50-1" }, "r59": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "350", "SubTopic": "30", "Section": "50", "Paragraph": "2", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482665/350-30-50-2" }, "r60": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "350", "SubTopic": "30", "Section": "50", "Paragraph": "2", "Subparagraph": "(a)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482665/350-30-50-2" }, "r61": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "360", "SubTopic": "10", "Section": "50", "Paragraph": "1", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482099/360-10-50-1" }, "r62": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "360", "SubTopic": "10", "Section": "50", "Paragraph": "1", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482099/360-10-50-1" }, "r63": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "470", "SubTopic": "50", "Section": "40", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481303/470-50-40-2" }, "r64": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "470", "SubTopic": "50", "Section": "40", "Paragraph": "4", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481303/470-50-40-4" }, "r65": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "505", "SubTopic": "10", "Section": "50", "Paragraph": "3", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-3" }, "r66": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "505", "SubTopic": "10", "Section": "50", "Paragraph": "8", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-8" }, "r67": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "718", "SubTopic": "10", "Section": "50", "Paragraph": "2", "Subparagraph": "(d)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r68": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "718", "SubTopic": "10", "Section": "50", "Paragraph": "2", "Subparagraph": "(h)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r69": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "718", "SubTopic": "20", "Section": "55", "Paragraph": "12", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481089/718-20-55-12" }, "r70": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "718", "SubTopic": "20", "Section": "55", "Paragraph": "13", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481089/718-20-55-13" }, "r71": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "805", "SubTopic": "10", "Section": "50", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479328/805-10-50-2" }, "r72": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "805", "SubTopic": "10", "Section": "50", "Paragraph": "3", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479328/805-10-50-3" }, "r73": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "805", "SubTopic": "20", "Section": "55", "Paragraph": "14", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479876/805-20-55-14" }, "r74": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "805", "SubTopic": "20", "Section": "55", "Paragraph": "20", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479876/805-20-55-20" }, "r75": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "805", "SubTopic": "30", "Section": "25", "Paragraph": "5", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479668/805-30-25-5" }, "r76": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "805", "SubTopic": "30", "Section": "25", "Paragraph": "6", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479668/805-30-25-6" }, "r77": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "805", "SubTopic": "30", "Section": "50", "Paragraph": "1", "Subparagraph": "(c)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479581/805-30-50-1" }, "r78": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "810", "SubTopic": "10", "Section": "45", "Paragraph": "12", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481231/810-10-45-12" }, "r79": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "815", "SubTopic": "10", "Section": "50", "Paragraph": "4A", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480434/815-10-50-4A" }, "r80": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "815", "SubTopic": "10", "Section": "50", "Paragraph": "4A", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480434/815-10-50-4A" }, "r81": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "815", "SubTopic": "10", "Section": "50", "Paragraph": "4B", "Subparagraph": "(c)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480434/815-10-50-4B" }, "r82": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "815", "SubTopic": "10", "Section": "50", "Paragraph": "4B", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480434/815-10-50-4B" }, "r83": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "815", "SubTopic": "10", "Section": "50", "Paragraph": "4C", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480434/815-10-50-4C" }, "r84": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "815", "SubTopic": "10", "Section": "50", "Paragraph": "4D", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480434/815-10-50-4D" }, "r85": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "820", "SubTopic": "10", "Section": "50", "Paragraph": "2", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-2" }, "r86": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "835", "SubTopic": "30", "Section": "45", "Paragraph": "1A", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482925/835-30-45-1A" }, "r87": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "835", "SubTopic": "30", "Section": "45", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482925/835-30-45-2" }, "r88": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "835", "SubTopic": "30", "Section": "45", "Paragraph": "3", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482925/835-30-45-3" }, "r89": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "835", "SubTopic": "30", "Section": "55", "Paragraph": "8", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482949/835-30-55-8" }, "r90": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "942", "SubTopic": "210", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.9-03.15(5))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1" }, "r91": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "942", "SubTopic": "470", "Section": "50", "Paragraph": "3", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480848/942-470-50-3" }, "r92": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Name": "Accounting Standards Codification", "Topic": "985", "SubTopic": "20", "Section": "50", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481283/985-20-50-1" }, "r93": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(19))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r94": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(20))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r95": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(28))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r96": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(29))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r97": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(30)(a)(1))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r98": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(30)(a)(3))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r99": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(30))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r100": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(31))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r101": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(32))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r102": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(6)(a))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r103": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(6)(b))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r104": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(6)(c))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r105": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "11", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-11" }, "r106": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.5-03(10))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2" }, "r107": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.5-03(20))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2" }, "r108": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.5-03.1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2" }, "r109": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.5-03.1,2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2" }, "r110": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.5-03.2(a),(d))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2" }, "r111": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.5-03.4)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2" }, "r112": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.5-03.7(b))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2" }, "r113": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.5-03.8)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2" }, "r114": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "8", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2" }, "r115": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "12", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-12" }, "r116": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "13", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-13" }, "r117": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "24", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-24" }, "r118": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "25", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-25" }, "r119": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "28", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-28" }, "r120": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "235", "Name": "Accounting Standards Codification", "Publisher": "FASB", "URI": "https://asc.fasb.org//235/tableOfContent" }, "r121": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "310", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SAB Topic 4.E)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480418/310-10-S99-2" }, "r122": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "330", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SAB Topic 5.BB)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480581/330-10-S99-2" }, "r123": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "350", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(a)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482665/350-30-50-2" }, "r124": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "360", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482099/360-10-50-1" }, "r125": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "440", "Name": "Accounting Standards Codification", "Publisher": "FASB", "URI": "https://asc.fasb.org//440/tableOfContent" }, "r126": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "470", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "12A", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481573/470-10-45-12A" }, "r127": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "25", "Paragraph": "10", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481284/470-20-25-10" }, "r128": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-5" }, "r129": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "505", "Name": "Accounting Standards Codification", "Publisher": "FASB", "URI": "https://asc.fasb.org//505/tableOfContent" }, "r130": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-6" }, "r131": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-6" }, "r132": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "7", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-7" }, "r133": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.3-04)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480008/505-10-S99-1" }, "r134": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "740", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SAB Topic 6.I.7)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479360/740-10-S99-1" }, "r135": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "805", "Name": "Accounting Standards Codification", "Publisher": "FASB", "URI": "https://asc.fasb.org//805/tableOfContent" }, "r136": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "810", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "19", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481231/810-10-45-19" }, "r137": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "820", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-2" }, "r138": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "942", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.9-03(11))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1" }, "r139": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "942", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.9-03(13))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1" }, "r140": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "942", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.9-03(15)(1))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1" }, "r141": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "942", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.9-03(16))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1" }, "r142": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "942", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.9-03(23))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1" }, "r143": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "942", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.9-04(15))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483589/942-220-S99-1" }, "r144": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "942", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.9-04(22))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483589/942-220-S99-1" }, "r145": { "role": "http://fasb.org/us-gaap/role/ref/legacyRef", "Topic": "942", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.9-04.9)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483589/942-220-S99-1" }, "r146": { "role": "http://fasb.org/us-gaap/role/ref/otherTransitionRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-6" }, "r147": { "role": "http://fasb.org/us-gaap/role/ref/otherTransitionRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "7", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-7" }, "r148": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "2", "Subparagraph": "(a)", "SubTopic": "20", "Topic": "740", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482659/740-20-45-2" }, "r149": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "6", "Subparagraph": "(a)", "SubTopic": "10", "Topic": "270", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482989/270-10-45-6" }, "r150": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(b)", "SubTopic": "10", "Topic": "275", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-1" }, "r151": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(c)", "SubTopic": "10", "Topic": "275", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-1" }, "r152": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "11", "SubTopic": "10", "Topic": "275", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-11" }, "r153": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "12", "SubTopic": "10", "Topic": "275", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-12" }, "r154": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "13", "Subparagraph": "(a)", "SubTopic": "10", "Topic": "606", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-13" }, "r155": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "13", "Subparagraph": "(b)(1)", "SubTopic": "10", "Topic": "606", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-13" }, "r156": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "9", "Subparagraph": "(b)", "SubTopic": "10", "Topic": "740", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-9" }, "r157": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.4-08(h))", "SubTopic": "10", "Topic": "235", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1" }, "r158": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Name": "Accounting Standards Codification", "Topic": "606", "Publisher": "FASB", "URI": "https://asc.fasb.org//606/tableOfContent" }, "r159": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "105", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "6", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479343/105-10-65-6" }, "r160": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "205", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "7", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483499/205-20-50-7" }, "r161": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483467/210-10-45-1" }, "r162": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "5", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483467/210-10-45-5" }, "r163": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483489/210-10-50-1" }, "r164": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(1))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r165": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(13))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r166": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(14))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r167": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(15))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r168": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(17))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r169": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(18))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r170": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(20))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r171": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(22))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r172": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(30)(a)(4))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r173": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(4))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r174": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(6)(b))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r175": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(6))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r176": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(9))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r177": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "10A", "Subparagraph": "(e)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-10A" }, "r178": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "10A", "Subparagraph": "(f)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-10A" }, "r179": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "10A", "Subparagraph": "(h)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-10A" }, "r180": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "14A", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-14A" }, "r181": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1A", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-1A" }, "r182": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1A", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-1A" }, "r183": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1A", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-1A" }, "r184": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1B", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-1B" }, "r185": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1B", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-1B" }, "r186": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482765/220-10-50-4" }, "r187": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482765/220-10-50-5" }, "r188": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482765/220-10-50-6" }, "r189": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(210.5-03(11))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2" }, "r190": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.5-03(24))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2" }, "r191": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.5-03(25))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2" }, "r192": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "5", "Subparagraph": "(SAB Topic 6.B)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-5" }, "r193": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "11", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-11" }, "r194": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "12", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-12" }, "r195": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "15", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-15" }, "r196": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "15", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-15" }, "r197": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "17", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-17" }, "r198": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-2" }, "r199": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "24", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-24" }, "r200": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "25", "Subparagraph": "(e)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-25" }, "r201": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482913/230-10-50-2" }, "r202": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "8", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482913/230-10-50-8" }, "r203": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "235", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.4-08(e)(1))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1" }, "r204": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "235", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.4-08(g)(1)(ii))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1" }, "r205": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "235", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.4-08(h)(2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1" }, "r206": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "235", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "3", "Subparagraph": "(SX 210.12-04(a))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-3" }, "r207": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "23", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483421/250-10-45-23" }, "r208": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "24", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483421/250-10-45-24" }, "r209": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "5", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483421/250-10-45-5" }, "r210": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(b)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-1" }, "r211": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(b)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-1" }, "r212": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "11", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-11" }, "r213": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "11", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-11" }, "r214": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-3" }, "r215": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-4" }, "r216": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "7", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-7" }, "r217": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "7", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-7" }, "r218": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "8", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-8" }, "r219": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "9", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-9" }, "r220": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "Name": "Accounting Standards Codification", "Publisher": "FASB", "URI": "https://asc.fasb.org//260/tableOfContent" }, "r221": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "10", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-10" }, "r222": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "11", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-11" }, "r223": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "16", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-16" }, "r224": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-2" }, "r225": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "22", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-22" }, "r226": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "23", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-23" }, "r227": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "28A", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-28A" }, "r228": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "40", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-40" }, "r229": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "40", "Subparagraph": "(b)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-40" }, "r230": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "40", "Subparagraph": "(b)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-40" }, "r231": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "40", "Subparagraph": "(b)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-40" }, "r232": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "40", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-40" }, "r233": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "42", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-42" }, "r234": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "60B", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-60B" }, "r235": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "60B", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-60B" }, "r236": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "60B", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-60B" }, "r237": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "7", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-7" }, "r238": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482662/260-10-50-1" }, "r239": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482662/260-10-50-1" }, "r240": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482662/260-10-50-2" }, "r241": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482662/260-10-50-3" }, "r242": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "15", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482635/260-10-55-15" }, "r243": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "272", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483014/272-10-45-1" }, "r244": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "Name": "Accounting Standards Codification", "Publisher": "FASB", "URI": "https://asc.fasb.org//280/tableOfContent" }, "r245": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "15", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-15" }, "r246": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "21", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-21" }, "r247": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "21", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-21" }, "r248": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "22", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-22" }, "r249": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "22", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-22" }, "r250": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "22", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-22" }, "r251": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "22", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-22" }, "r252": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "22", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-22" }, "r253": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "22", "Subparagraph": "(e)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-22" }, "r254": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "22", "Subparagraph": "(h)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-22" }, "r255": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "26", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-26" }, "r256": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "30", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-30" }, "r257": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "30", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-30" }, "r258": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "30", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-30" }, "r259": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "31", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-31" }, "r260": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "32", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-32" }, "r261": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "32", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-32" }, "r262": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "32", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-32" }, "r263": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "32", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-32" }, "r264": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "32", "Subparagraph": "(e)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-32" }, "r265": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "32", "Subparagraph": "(f)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-32" }, "r266": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "34", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-34" }, "r267": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "40", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-40" }, "r268": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "41", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-41" }, "r269": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "41", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-41" }, "r270": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "41", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-41" }, "r271": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "42", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-42" }, "r272": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "310", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481990/310-10-45-2" }, "r273": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "310", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "9", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481990/310-10-45-9" }, "r274": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "310", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481962/310-10-50-4" }, "r275": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "11", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481830/320-10-45-11" }, "r276": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481830/320-10-45-2" }, "r277": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-2" }, "r278": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-2" }, "r279": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(aa)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-2" }, "r280": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(aaa)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-2" }, "r281": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-2" }, "r282": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-2" }, "r283": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-2" }, "r284": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-3" }, "r285": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-3" }, "r286": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-3" }, "r287": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-3" }, "r288": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-3" }, "r289": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5" }, "r290": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5" }, "r291": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Subparagraph": "(aaa)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5" }, "r292": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5" }, "r293": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Subparagraph": "(e)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5" }, "r294": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Subparagraph": "(f)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5" }, "r295": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Subparagraph": "(f)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5" }, "r296": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Subparagraph": "(f)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5" }, "r297": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Subparagraph": "(f)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5" }, "r298": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Subparagraph": "(f)(4)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5" }, "r299": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5A", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5A" }, "r300": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5A", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5A" }, "r301": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5A", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5A" }, "r302": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5B", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5B" }, "r303": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5B", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5B" }, "r304": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5B", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5B" }, "r305": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5B", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5B" }, "r306": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5B", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-5B" }, "r307": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "323", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481687/323-10-50-3" }, "r308": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "326", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "4", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479654/326-10-65-4" }, "r309": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "326", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "5", "Subparagraph": "(c)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479654/326-10-65-5" }, "r310": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "326", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479344/326-20-45-1" }, "r311": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "326", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "11", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479319/326-20-50-11" }, "r312": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "326", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "13", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479319/326-20-50-13" }, "r313": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "326", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "14", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479319/326-20-50-14" }, "r314": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "326", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "16", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479319/326-20-50-16" }, "r315": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "326", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479319/326-20-50-5" }, "r316": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "326", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479130/326-30-45-1" }, "r317": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "326", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479106/326-30-50-4" }, "r318": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "326", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479106/326-30-50-5" }, "r319": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "326", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "7", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479106/326-30-50-7" }, "r320": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "326", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "9", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479106/326-30-50-9" }, "r321": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "330", "Name": "Accounting Standards Codification", "Publisher": "FASB", "URI": "https://asc.fasb.org//330/tableOfContent" }, "r322": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "330", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483080/330-10-50-1" }, "r323": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "330", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483080/330-10-50-4" }, "r324": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "340", "SubTopic": "40", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479483/340-40-50-5" }, "r325": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "350", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482598/350-20-45-1" }, "r326": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "350", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482665/350-30-50-1" }, "r327": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "350", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482665/350-30-50-1" }, "r328": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "350", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(a)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482665/350-30-50-2" }, "r329": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "350", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482665/350-30-50-2" }, "r330": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "360", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482099/360-10-50-3" }, "r331": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "420", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482017/420-10-50-1" }, "r332": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "440", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482648/440-10-50-4" }, "r333": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "440", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482648/440-10-50-4" }, "r334": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "450", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483076/450-20-50-4" }, "r335": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "450", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "9", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483076/450-20-50-9" }, "r336": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "450", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SAB Topic 5.Y.Q2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480102/450-20-S99-1" }, "r337": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "450", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SAB Topic 5.Y.Q4)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480102/450-20-S99-1" }, "r338": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "460", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-4" }, "r339": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "460", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "8", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8" }, "r340": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "460", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "8", "Subparagraph": "(c)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8" }, "r341": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "460", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "8", "Subparagraph": "(c)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8" }, "r342": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "460", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "8", "Subparagraph": "(c)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8" }, "r343": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "460", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "8", "Subparagraph": "(c)(4)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8" }, "r344": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "460", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "8", "Subparagraph": "(c)(5)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8" }, "r345": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1A", "Subparagraph": "(SX 210.13-01(a)(4)(i))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1A" }, "r346": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1A", "Subparagraph": "(SX 210.13-01(a)(4)(iii)(A))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1A" }, "r347": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1A", "Subparagraph": "(SX 210.13-01(a)(4)(iv))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1A" }, "r348": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1A", "Subparagraph": "(SX 210.13-01(a)(5))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1A" }, "r349": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1B", "Subparagraph": "(SX 210.13-02(a)(4)(i))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1B" }, "r350": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1B", "Subparagraph": "(SX 210.13-02(a)(4)(iii)(A))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1B" }, "r351": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1B", "Subparagraph": "(SX 210.13-02(a)(4)(iii)(B))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1B" }, "r352": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1B", "Subparagraph": "(SX 210.13-02(a)(4)(iv))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1B" }, "r353": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1B", "Subparagraph": "(SX 210.13-02(a)(5))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1B" }, "r354": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1B", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B" }, "r355": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1B", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B" }, "r356": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1B", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B" }, "r357": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1B", "Subparagraph": "(e)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B" }, "r358": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1B", "Subparagraph": "(f)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B" }, "r359": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1B", "Subparagraph": "(h)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B" }, "r360": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1D", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1D" }, "r361": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1D", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1D" }, "r362": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1D", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1D" }, "r363": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1E", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1E" }, "r364": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1E", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1E" }, "r365": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1E", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1E" }, "r366": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1F", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1F" }, "r367": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1F", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1F" }, "r368": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1F", "Subparagraph": "(b)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1F" }, "r369": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1F", "Subparagraph": "(b)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1F" }, "r370": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1I", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1I" }, "r371": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(b)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-4" }, "r372": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(b)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-4" }, "r373": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-6" }, "r374": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "13", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-13" }, "r375": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "13", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-13" }, "r376": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "13", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-13" }, "r377": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "13", "Subparagraph": "(g)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-13" }, "r378": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "13", "Subparagraph": "(h)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-13" }, "r379": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "13", "Subparagraph": "(i)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-13" }, "r380": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "14", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-14" }, "r381": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "14", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-14" }, "r382": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "14", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-14" }, "r383": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "16", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-16" }, "r384": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "18", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-18" }, "r385": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "18", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-18" }, "r386": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "18", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-18" }, "r387": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "18", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-18" }, "r388": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.3-04)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480008/505-10-S99-1" }, "r389": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479837/606-10-45-1" }, "r390": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479837/606-10-45-2" }, "r391": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "15", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-15" }, "r392": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "17", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-17" }, "r393": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "18", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-18" }, "r394": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "18", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-18" }, "r395": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "19", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-19" }, "r396": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "20", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-20" }, "r397": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "20", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-20" }, "r398": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "20", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-20" }, "r399": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "20", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-20" }, "r400": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "22", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-22" }, "r401": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-4" }, "r402": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-5" }, "r403": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "8", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-8" }, "r404": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "8", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-8" }, "r405": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "715", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(d)(i)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1" }, "r406": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "715", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(d)(iv)(01)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1" }, "r407": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "715", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(d)(iv)(02)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1" }, "r408": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "715", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(d)(iv)(02)(A)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1" }, "r409": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "715", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(d)(iv)(02)(B)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1" }, "r410": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "715", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(d)(iv)(02)(C)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1" }, "r411": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "715", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(d)(iv)(03)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1" }, "r412": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "715", "SubTopic": "80", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480576/715-80-50-5" }, "r413": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "Name": "Accounting Standards Codification", "Publisher": "FASB", "URI": "https://asc.fasb.org//718/tableOfContent" }, "r414": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "35", "Paragraph": "1D", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480483/718-10-35-1D" }, "r415": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "35", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480483/718-10-35-2" }, "r416": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "35", "Paragraph": "3", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480483/718-10-35-3" }, "r417": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480454/718-10-45-1" }, "r418": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r419": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(a)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r420": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(a)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r421": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(a)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r422": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)(1)(i)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r423": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)(1)(ii)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r424": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)(1)(iii)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r425": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)(1)(iv)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r426": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)(1)(iv)(01)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r427": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)(1)(iv)(02)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r428": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)(1)(iv)(03)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r429": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)(1)(iv)(04)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r430": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)(2)(i)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r431": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)(2)(ii)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r432": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)(2)(iii)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r433": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)(2)(iii)(01)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r434": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)(2)(iii)(02)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r435": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)(2)(iii)(03)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r436": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(d)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r437": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(d)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r438": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(e)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r439": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(e)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r440": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(f)(2)(i)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r441": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(f)(2)(ii)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r442": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(f)(2)(iii)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r443": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(f)(2)(iv)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r444": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(f)(2)(v)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r445": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(h)(1)(i)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r446": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(h)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r447": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(h)(2)(i)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r448": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(l)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r449": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "15", "Subparagraph": "(e)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480336/718-10-65-15" }, "r450": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "15", "Subparagraph": "(f)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480336/718-10-65-15" }, "r451": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "15", "Subparagraph": "(f)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480336/718-10-65-15" }, "r452": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SAB Topic 14.F)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479830/718-10-S99-1" }, "r453": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "730", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482916/730-10-50-1" }, "r454": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "Name": "Accounting Standards Codification", "Publisher": "FASB", "URI": "https://asc.fasb.org//740/tableOfContent" }, "r455": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "4", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482525/740-10-45-4" }, "r456": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "6", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482525/740-10-45-6" }, "r457": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "10", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-10" }, "r458": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "12", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-12" }, "r459": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "14", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-14" }, "r460": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "17", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-17" }, "r461": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "21", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-21" }, "r462": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "8", "Subparagraph": "(d)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482615/740-10-65-8" }, "r463": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "8", "Subparagraph": "(d)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482615/740-10-65-8" }, "r464": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SAB TOPIC 6.I.5.Q1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479360/740-10-S99-1" }, "r465": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SAB TOPIC 6.I.7)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479360/740-10-S99-1" }, "r466": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SAB Topic 6.I.Fact.1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479360/740-10-S99-1" }, "r467": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SAB Topic 6.I.Fact.2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479360/740-10-S99-1" }, "r468": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SAB Topic 11.C)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479360/740-10-S99-2" }, "r469": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "270", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482526/740-270-50-1" }, "r470": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "740", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482603/740-30-50-2" }, "r471": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "805", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479907/805-20-50-5" }, "r472": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "805", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479907/805-20-50-5" }, "r473": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "805", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(b)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479581/805-30-50-1" }, "r474": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "805", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(b)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479581/805-30-50-1" }, "r475": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "805", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(c)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479581/805-30-50-1" }, "r476": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "805", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(a)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479581/805-30-50-4" }, "r477": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "810", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "19", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481231/810-10-45-19" }, "r478": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "810", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "25", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481231/810-10-45-25" }, "r479": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "810", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "25", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481231/810-10-45-25" }, "r480": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "810", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1A", "Subparagraph": "(a)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481203/810-10-50-1A" }, "r481": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "810", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1A", "Subparagraph": "(c)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481203/810-10-50-1A" }, "r482": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "810", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(bb)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481203/810-10-50-3" }, "r483": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "810", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481203/810-10-50-3" }, "r484": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "815", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "6", "Subparagraph": "(e)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480528/815-20-65-6" }, "r485": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "815", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "6", "Subparagraph": "(h)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480528/815-20-65-6" }, "r486": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "815", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "6", "Subparagraph": "(h)(1)(i)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480528/815-20-65-6" }, "r487": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "815", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "6", "Subparagraph": "(h)(1)(iii)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480528/815-20-65-6" }, "r488": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "815", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "6", "Subparagraph": "(h)(1)(iv)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480528/815-20-65-6" }, "r489": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "815", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "6", "Subparagraph": "(i)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480528/815-20-65-6" }, "r490": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "815", "SubTopic": "40", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Subparagraph": "(f)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480237/815-40-50-5" }, "r491": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "815", "SubTopic": "40", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480237/815-40-50-6" }, "r492": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "815", "SubTopic": "40", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "1", "Subparagraph": "(e)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480175/815-40-65-1" }, "r493": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "815", "SubTopic": "40", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "1", "Subparagraph": "(e)(4)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480175/815-40-65-1" }, "r494": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "815", "SubTopic": "40", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "1", "Subparagraph": "(f)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480175/815-40-65-1" }, "r495": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "820", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-2" }, "r496": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "820", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-2" }, "r497": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "820", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-2" }, "r498": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "820", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(bbb)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-2" }, "r499": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "820", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(bbb)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-2" }, "r500": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "820", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-3" }, "r501": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "820", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6A", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-6A" }, "r502": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "825", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "28", "Subparagraph": "(f)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482907/825-10-50-28" }, "r503": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "830", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "17", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481694/830-30-45-17" }, "r504": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "830", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "20", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481694/830-30-45-20" }, "r505": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "830", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "20", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481694/830-30-45-20" }, "r506": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "830", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "20", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481694/830-30-45-20" }, "r507": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "830", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "20", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481694/830-30-45-20" }, "r508": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "830", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481674/830-30-50-1" }, "r509": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "835", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483013/835-20-50-1" }, "r510": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "835", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "3", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482925/835-30-45-3" }, "r511": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "835", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482900/835-30-50-1" }, "r512": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "842", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479041/842-20-45-1" }, "r513": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "842", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479041/842-20-45-1" }, "r514": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "842", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479041/842-20-45-2" }, "r515": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "842", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "5", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479041/842-20-45-5" }, "r516": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "842", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-4" }, "r517": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "842", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-4" }, "r518": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "842", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(g)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-4" }, "r519": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "842", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(g)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-4" }, "r520": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "842", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(g)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-4" }, "r521": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "842", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-6" }, "r522": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "848", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "2", "Subparagraph": "(a)(3)(iii)(03)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483550/848-10-65-2" }, "r523": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(b)(2)(i)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3" }, "r524": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(b)(2)(ii)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3" }, "r525": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(b)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3" }, "r526": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(bb)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3" }, "r527": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(bb)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3" }, "r528": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(bb)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3" }, "r529": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(c)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3" }, "r530": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(c)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3" }, "r531": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(c)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3" }, "r532": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(b)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-4" }, "r533": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(b)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-4" }, "r534": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(b)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-4" }, "r535": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-4" }, "r536": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481444/860-30-45-1" }, "r537": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "7", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481420/860-30-50-7" }, "r538": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "50", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(a)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481229/860-50-50-3" }, "r539": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "50", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(a)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481229/860-50-50-3" }, "r540": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "50", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(a)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481229/860-50-50-3" }, "r541": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "50", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(a)(4)(i)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481229/860-50-50-3" }, "r542": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "50", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(a)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481229/860-50-50-4" }, "r543": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "50", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(a)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481229/860-50-50-4" }, "r544": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "50", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(a)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481229/860-50-50-4" }, "r545": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "50", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(a)(4)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481229/860-50-50-4" }, "r546": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "50", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(a)(5)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481229/860-50-50-4" }, "r547": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "50", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(a)(6)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481229/860-50-50-4" }, "r548": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "50", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(a)(7)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481229/860-50-50-4" }, "r549": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "50", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481229/860-50-50-4" }, "r550": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "50", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(e)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481229/860-50-50-4" }, "r551": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "50", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(e)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481229/860-50-50-4" }, "r552": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "860", "SubTopic": "50", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(e)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481229/860-50-50-4" }, "r553": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "910", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482546/910-10-50-6" }, "r554": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "912", "SubTopic": "310", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "11", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482312/912-310-45-11" }, "r555": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "912", "SubTopic": "310", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482312/912-310-45-2" }, "r556": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "912", "SubTopic": "330", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482105/912-330-50-1" }, "r557": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "924", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SAB Topic 11.L)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479941/924-10-S99-1" }, "r558": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "926", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483154/926-20-50-5" }, "r559": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "928", "SubTopic": "340", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483147/928-340-50-1" }, "r560": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "942", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.9-03(10)(1))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1" }, "r561": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "942", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.9-03(6))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1" }, "r562": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "942", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.9-04(26))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483589/942-220-S99-1" }, "r563": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "942", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.9-04(27))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483589/942-220-S99-1" }, "r564": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "942", "SubTopic": "235", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.9-05(b)(2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479557/942-235-S99-1" }, "r565": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "942", "SubTopic": "360", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480842/942-360-50-1" }, "r566": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-03(a)(1))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1" }, "r567": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-03(a)(12))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1" }, "r568": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-03(a)(15)(b)(2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1" }, "r569": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-03(a)(21))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1" }, "r570": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-03(a)(22))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1" }, "r571": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-03(a)(23)(a)(3))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1" }, "r572": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-03(a)(23)(a)(4))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1" }, "r573": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-03(a)(25))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1" }, "r574": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-03(a)(8)(b))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1" }, "r575": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-03(a)(8))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1" }, "r576": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-04(11))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483586/944-220-S99-1" }, "r577": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-04(16))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483586/944-220-S99-1" }, "r578": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-04(18))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483586/944-220-S99-1" }, "r579": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-04(2)(a))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483586/944-220-S99-1" }, "r580": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-04(22))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483586/944-220-S99-1" }, "r581": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-04(23))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483586/944-220-S99-1" }, "r582": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-04(9))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483586/944-220-S99-1" }, "r583": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "235", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.12-17(Column A))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480149/944-235-S99-2" }, "r584": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "235", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.12-17(Column B))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480149/944-235-S99-2" }, "r585": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "235", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.12-17(Column C))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480149/944-235-S99-2" }, "r586": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "235", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.12-17(Column D))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480149/944-235-S99-2" }, "r587": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "235", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.12-17(Column E))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480149/944-235-S99-2" }, "r588": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "235", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.12-17(Column F))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480149/944-235-S99-2" }, "r589": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "40", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "7A", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480081/944-40-50-7A" }, "r590": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "40", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "2", "Subparagraph": "(e)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480016/944-40-65-2" }, "r591": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "40", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "2", "Subparagraph": "(f)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480016/944-40-65-2" }, "r592": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "40", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "2", "Subparagraph": "(f)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480016/944-40-65-2" }, "r593": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "40", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "2", "Subparagraph": "(g)(2)(i)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480016/944-40-65-2" }, "r594": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "40", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "2", "Subparagraph": "(g)(2)(ii)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480016/944-40-65-2" }, "r595": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "944", "SubTopic": "40", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "2", "Subparagraph": "(h)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480016/944-40-65-2" }, "r596": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "3", "Subparagraph": "(SX 210.6-03(d))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479886/946-10-S99-3" }, "r597": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "11", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480990/946-20-50-11" }, "r598": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "13", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480990/946-20-50-13" }, "r599": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "205", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "3", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480767/946-205-45-3" }, "r600": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "205", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "4", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480767/946-205-45-4" }, "r601": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "4", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480555/946-210-45-4" }, "r602": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(b)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480524/946-210-50-1" }, "r603": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480524/946-210-50-2" }, "r604": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Subparagraph": "(a)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480524/946-210-50-6" }, "r605": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Subparagraph": "(a)(4)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480524/946-210-50-6" }, "r606": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Subparagraph": "(e)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480524/946-210-50-6" }, "r607": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Subparagraph": "(f)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480524/946-210-50-6" }, "r608": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(1))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r609": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(12)(b)(1))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r610": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(12)(b)(2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r611": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(12)(b)(3))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r612": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(13)(a)(2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r613": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(13)(a)(3))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r614": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(14))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r615": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(16)(a))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r616": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(17))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r617": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(19))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r618": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(2)(a))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r619": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(2)(b))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r620": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(3)(a))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r621": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(3)(b))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r622": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(3)(c))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r623": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(6)(b))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r624": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(6)(c))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r625": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(6)(d))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r626": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(6)(e))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r627": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(8))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r628": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(9)(b))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r629": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(9)(c))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r630": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(9)(d))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r631": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-04(9)(e))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1" }, "r632": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.6-05(2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-2" }, "r633": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.6-05(4))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-2" }, "r634": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "3", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483581/946-220-45-3" }, "r635": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "7", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483581/946-220-45-7" }, "r636": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(1))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r637": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(2)(a))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r638": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(2)(g)(3))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r639": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(3))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r640": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(7)(a)(1))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r641": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(7)(a)(2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r642": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(7)(a)(3))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r643": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(7)(a)(5))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r644": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(7)(a)(6))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r645": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(7)(a)(7))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r646": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(7)(c)(1))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r647": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(7)(c)(2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r648": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(7)(c)(3))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r649": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(7)(c)(5))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r650": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(7)(c)(6))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r651": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(7)(c)(7))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r652": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.6-07(9))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1" }, "r653": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "3", "Subparagraph": "(SX 210.6-09(1)(d))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-3" }, "r654": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "3", "Subparagraph": "(SX 210.6-09(4)(b))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-3" }, "r655": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "3", "Subparagraph": "(SX 210.6-09(6))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-3" }, "r656": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "3", "Subparagraph": "(SX 210.6-09(7))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-3" }, "r657": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "235", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481062/946-235-50-2" }, "r658": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "235", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481062/946-235-50-2" }, "r659": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.12-12(Column A)(Footnote 2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-1" }, "r660": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.12-12(Column C)(Footnote 5))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-1" }, "r661": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.12-12A(Column A)(Footnote 2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-2" }, "r662": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.12-12A(Column C)(Footnote 4))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-2" }, "r663": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "3", "Subparagraph": "(SX 210.12-12B(Column A)(Footnote 4)(a))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-3" }, "r664": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "3", "Subparagraph": "(SX 210.12-12B(Column A)(Footnote 4)(b))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-3" }, "r665": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "3", "Subparagraph": "(SX 210.12-12B(Column C)(Footnote 2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-3" }, "r666": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "5", "Subparagraph": "(SX 210.12-13(Column A)(Footnote 3))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-5" }, "r667": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "5", "Subparagraph": "(SX 210.12-13(Column G)(Footnote 8))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-5" }, "r668": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "5B", "Subparagraph": "(SX 210.12-13B(Column E)(Footnote 4))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-5B" }, "r669": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "5C", "Subparagraph": "(SX 210.12-13C(Column H)(Footnote 7))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-5C" }, "r670": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "6", "Subparagraph": "(SX 210.12-14(Column A)(Footnote 2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-6" }, "r671": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "6", "Subparagraph": "(SX 210.12-14(Column F)(Footnote 7))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-6" }, "r672": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "946", "SubTopic": "505", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481004/946-505-50-6" }, "r673": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "948", "SubTopic": "310", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.12-29(Footnote 4))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479851/948-310-S99-1" }, "r674": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "954", "SubTopic": "440", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480327/954-440-50-1" }, "r675": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "970", "SubTopic": "360", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.12-28(Column B))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1" }, "r676": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "970", "SubTopic": "360", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.12-28(Column C))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1" }, "r677": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "970", "SubTopic": "360", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.12-28(Column D))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1" }, "r678": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "970", "SubTopic": "360", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.12-28(Column E))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1" }, "r679": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "970", "SubTopic": "360", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.12-28(Column F))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1" }, "r680": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "970", "SubTopic": "360", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.12-28(Column G))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1" }, "r681": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "970", "SubTopic": "360", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.12-28(Column H))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1" }, "r682": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "970", "SubTopic": "360", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.12-28(Column I))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1" }, "r683": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "970", "SubTopic": "360", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.12-28(Footnote 2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1" }, "r684": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "976", "SubTopic": "310", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482856/976-310-50-1" }, "r685": { "role": "http://www.xbrl.org/2003/role/disclosureRef", "Topic": "978", "SubTopic": "310", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482707/978-310-50-1" }, "r686": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(e)", "SubTopic": "10", "Topic": "235", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483426/235-10-50-4" }, "r687": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "13H", "Subparagraph": "(a)", "SubTopic": "40", "Topic": "944", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480046/944-40-55-13H" }, "r688": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "13H", "Subparagraph": "(b)", "SubTopic": "40", "Topic": "944", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480046/944-40-55-13H" }, "r689": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483467/210-10-45-1" }, "r690": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483467/210-10-45-1" }, "r691": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(6)(a)(1))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r692": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(6)(a)(3))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r693": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(6)(a)(4))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r694": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "210", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "22", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483444/210-20-55-22" }, "r695": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "23", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-23" }, "r696": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "235", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483426/235-10-50-4" }, "r697": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "235", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.4-08(m)(1)(ii)(A))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1" }, "r698": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "52", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482635/260-10-55-52" }, "r699": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "30", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-30" }, "r700": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "31", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-31" }, "r701": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "310", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "12A", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481933/310-10-55-12A" }, "r702": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "326", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "8", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479081/326-30-55-8" }, "r703": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "350", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "24", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482548/350-20-55-24" }, "r704": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1B", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B" }, "r705": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "69B", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481568/470-20-55-69B" }, "r706": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "69C", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481568/470-20-55-69C" }, "r707": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "69E", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481568/470-20-55-69E" }, "r708": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "69F", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481568/470-20-55-69F" }, "r709": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "505", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "13", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-13" }, "r710": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "91", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479777/606-10-55-91" }, "r711": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "91", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479777/606-10-55-91" }, "r712": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "715", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(d)(ii)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1" }, "r713": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "715", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(d)(iv)(01)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1" }, "r714": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "715", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "17", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480482/715-20-55-17" }, "r715": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "715", "SubTopic": "80", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "11", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480576/715-80-50-11" }, "r716": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "715", "SubTopic": "80", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480576/715-80-50-6" }, "r717": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "715", "SubTopic": "80", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "8", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480547/715-80-55-8" }, "r718": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(a)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r719": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "718", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(a)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2" }, "r720": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "810", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "4J", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481175/810-10-55-4J" }, "r721": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "810", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "4K", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481175/810-10-55-4K" }, "r722": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "842", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(c)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-3" }, "r723": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "842", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "53", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479589/842-20-55-53" }, "r724": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "852", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "10", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481372/852-10-55-10" }, "r725": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "944", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "2", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479401/944-30-55-2" }, "r726": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "944", "SubTopic": "40", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "29F", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480046/944-40-55-29F" }, "r727": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(b)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480524/946-210-50-1" }, "r728": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Subparagraph": "(a)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480524/946-210-50-6" }, "r729": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "946", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480493/946-210-55-1" }, "r730": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "946", "SubTopic": "310", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480833/946-310-45-1" }, "r731": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.12-12(Column A)(Footnote 2)(i))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-1" }, "r732": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.12-12A(Column A)(Footnote 2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-2" }, "r733": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "3", "Subparagraph": "(SX 210.12-12B(Column A)(Footnote 1)(a))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-3" }, "r734": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "6", "Subparagraph": "(SX 210.12-14(Column A)(Footnote 2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-6" }, "r735": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "946", "SubTopic": "830", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "10", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480167/946-830-55-10" }, "r736": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "946", "SubTopic": "830", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "11", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480167/946-830-55-11" }, "r737": { "role": "http://www.xbrl.org/2003/role/exampleRef", "Topic": "946", "SubTopic": "830", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "12", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480167/946-830-55-12" }, "r738": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12", "Subsection": "b" }, "r739": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12", "Subsection": "b-2" }, "r740": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12", "Subsection": "d1-1" }, "r741": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 10-Q", "Number": "240", "Section": "308", "Subsection": "a" }, "r742": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 20-F", "Section": "16", "Subsection": "J", "Paragraph": "a" }, "r743": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 20-F", "Section": "6", "Subsection": "F", "Paragraph": "1" }, "r744": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 20-F", "Section": "6", "Subsection": "F", "Paragraph": "1", "Subparagraph": "i" }, "r745": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 20-F", "Section": "6", "Subsection": "F", "Paragraph": "1", "Subparagraph": "i", "Sentence": "A" }, "r746": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 20-F", "Section": "6", "Subsection": "F", "Paragraph": "1", "Subparagraph": "i", "Sentence": "B" }, "r747": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 20-F", "Section": "6", "Subsection": "F", "Paragraph": "1", "Subparagraph": "i", "Sentence": "C" }, "r748": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 20-F", "Section": "6", "Subsection": "F", "Paragraph": "1", "Subparagraph": "i", "Sentence": "D" }, "r749": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 20-F", "Section": "6", "Subsection": "F", "Paragraph": "1", "Subparagraph": "i", "Sentence": "E" }, "r750": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 20-F", "Section": "6", "Subsection": "F", "Paragraph": "1", "Subparagraph": "ii" }, "r751": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 20-F", "Section": "6", "Subsection": "F", "Paragraph": "1", "Subparagraph": "iii" }, "r752": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 20-F", "Section": "6", "Subsection": "F", "Paragraph": "2" }, "r753": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 20-F", "Subsection": "F", "Paragraph": "1", "Subparagraph": "ii", "Section": "6" }, "r754": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 40-F", "Section": "19", "Paragraph": "a" }, "r755": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 40-F", "Section": "19", "Paragraph": "a", "Subparagraph": "1" }, "r756": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 40-F", "Section": "19", "Paragraph": "a", "Subparagraph": "1", "Sentence": "i" }, "r757": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 40-F", "Section": "19", "Paragraph": "a", "Subparagraph": "1", "Sentence": "ii" }, "r758": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 40-F", "Section": "19", "Paragraph": "a", "Subparagraph": "1", "Sentence": "iii" }, "r759": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 40-F", "Section": "19", "Paragraph": "a", "Subparagraph": "1", "Sentence": "iv" }, "r760": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 40-F", "Section": "19", "Paragraph": "a", "Subparagraph": "1", "Sentence": "v" }, "r761": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 40-F", "Section": "19", "Paragraph": "a", "Subparagraph": "2" }, "r762": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 40-F", "Section": "19", "Paragraph": "a", "Subparagraph": "3" }, "r763": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 40-F", "Section": "19", "Paragraph": "b" }, "r764": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form N-CSR", "Section": "18", "Paragraph": "a" }, "r765": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form N-CSR", "Section": "18", "Paragraph": "a", "Subparagraph": "1" }, "r766": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form N-CSR", "Section": "18", "Paragraph": "a", "Subparagraph": "1", "Sentence": "i" }, "r767": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form N-CSR", "Section": "18", "Paragraph": "a", "Subparagraph": "1", "Sentence": "ii" }, "r768": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form N-CSR", "Section": "18", "Paragraph": "a", "Subparagraph": "1", "Sentence": "iii" }, "r769": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form N-CSR", "Section": "18", "Paragraph": "a", "Subparagraph": "1", "Sentence": "iv" }, "r770": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form N-CSR", "Section": "18", "Paragraph": "a", "Subparagraph": "1", "Sentence": "v" }, "r771": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form N-CSR", "Section": "18", "Paragraph": "a", "Subparagraph": "2" }, "r772": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form N-CSR", "Section": "18", "Paragraph": "a", "Subparagraph": "3" }, "r773": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form N-CSR", "Section": "18", "Paragraph": "b" }, "r774": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Forms 10-K, 10-Q, 20-F", "Number": "240", "Section": "13", "Subsection": "a-1" }, "r775": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "v" }, "r776": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "v", "Paragraph": "1" }, "r777": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "v", "Paragraph": "2", "Subparagraph": "ii" }, "r778": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "v", "Paragraph": "2", "Subparagraph": "iii" }, "r779": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "v", "Paragraph": "2", "Subparagraph": "iv" }, "r780": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "v", "Paragraph": "2", "Subparagraph": "vi" }, "r781": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "v", "Paragraph": "3" }, "r782": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "v", "Paragraph": "4" }, "r783": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "v", "Paragraph": "5", "Subparagraph": "i" }, "r784": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "v", "Paragraph": "5", "Subparagraph": "ii" }, "r785": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "v", "Paragraph": "5", "Subparagraph": "iii" }, "r786": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "v", "Paragraph": "5", "Subparagraph": "iv" }, "r787": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "v", "Paragraph": "6" }, "r788": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "v", "Paragraph": "6", "Subparagraph": "i" }, "r789": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "w", "Paragraph": "1" }, "r790": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "w", "Paragraph": "1", "Subparagraph": "i" }, "r791": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "w", "Paragraph": "1", "Subparagraph": "i", "Sentence": "A" }, "r792": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "w", "Paragraph": "1", "Subparagraph": "i", "Sentence": "B" }, "r793": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "w", "Paragraph": "1", "Subparagraph": "i", "Sentence": "C" }, "r794": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "w", "Paragraph": "1", "Subparagraph": "i", "Sentence": "D" }, "r795": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "w", "Paragraph": "1", "Subparagraph": "i", "Sentence": "E" }, "r796": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "w", "Paragraph": "1", "Subparagraph": "ii" }, "r797": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "w", "Paragraph": "1", "Subparagraph": "iii" }, "r798": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "w", "Paragraph": "2" }, "r799": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "x", "Paragraph": "1" }, "r800": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "x", "Paragraph": "2" }, "r801": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "x", "Paragraph": "2", "Subparagraph": "ii", "Sentence": "A" }, "r802": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "x", "Paragraph": "2", "Subparagraph": "ii", "Sentence": "C" }, "r803": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "x", "Paragraph": "2", "Subparagraph": "ii", "Sentence": "D" }, "r804": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "x", "Paragraph": "2", "Subparagraph": "ii", "Sentence": "E" }, "r805": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "402", "Subsection": "x", "Paragraph": "2", "Subparagraph": "ii", "Sentence": "F" }, "r806": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "408", "Subsection": "a" }, "r807": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "408", "Subsection": "a", "Paragraph": "1" }, "r808": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "408", "Subsection": "a", "Paragraph": "2", "Subparagraph": "A" }, "r809": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "408", "Subsection": "a", "Paragraph": "2", "Subparagraph": "B" }, "r810": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "408", "Subsection": "a", "Paragraph": "2", "Subparagraph": "C" }, "r811": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "408", "Subsection": "a", "Paragraph": "2", "Subparagraph": "D" }, "r812": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-K", "Number": "229", "Section": "408", "Subsection": "b", "Paragraph": "1" }, "r813": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-T", "Number": "232", "Section": "405" }, "r814": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4H", "SubTopic": "40", "Topic": "944", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480081/944-40-50-4H" }, "r815": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Name": "Regulation S-K (SK)", "Number": "229", "Section": "1402", "Paragraph": "(a)", "Publisher": "SEC" }, "r816": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Name": "Regulation S-K (SK)", "Number": "229", "Section": "1402", "Paragraph": "(b)", "Subparagraph": "(1)", "Publisher": "SEC" }, "r817": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Name": "Regulation S-K (SK)", "Number": "229", "Section": "1402", "Paragraph": "(b)", "Subparagraph": "(2)", "Publisher": "SEC" }, "r818": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Name": "Regulation S-K (SK)", "Number": "229", "Section": "1402", "Paragraph": "(b)", "Subparagraph": "(3)", "Publisher": "SEC" }, "r819": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Name": "Regulation S-K (SK)", "Number": "229", "Section": "1402", "Paragraph": "(c)", "Subparagraph": "(2)(i)", "Publisher": "SEC" }, "r820": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Name": "Regulation S-K (SK)", "Number": "229", "Section": "1402", "Paragraph": "(c)", "Subparagraph": "(2)(ii)", "Publisher": "SEC" }, "r821": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Name": "Regulation S-K (SK)", "Number": "229", "Section": "1402", "Paragraph": "(c)", "Subparagraph": "(2)(iii)", "Publisher": "SEC" }, "r822": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(17))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r823": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(20))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r824": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "210", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.5-02(9))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1" }, "r825": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482765/220-10-50-4" }, "r826": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482765/220-10-50-5" }, "r827": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "220", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482765/220-10-50-6" }, "r828": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "28", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-28" }, "r829": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "230", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "28", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-28" }, "r830": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "235", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.4-08(f))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1" }, "r831": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "235", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.4-08(g)(1)(ii))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1" }, "r832": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "235", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.4-08(h)(1)(Note 1))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1" }, "r833": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "23", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483421/250-10-45-23" }, "r834": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "24", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483421/250-10-45-24" }, "r835": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "250", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "5", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483421/250-10-45-5" }, "r836": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "260", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482662/260-10-50-1" }, "r837": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "280", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "18", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-18" }, "r838": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481830/320-10-45-1" }, "r839": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "11", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481830/320-10-45-11" }, "r840": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-2" }, "r841": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-3" }, "r842": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "320", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "9", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481800/320-10-50-9" }, "r843": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "321", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479536/321-10-50-3" }, "r844": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "321", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479536/321-10-50-3" }, "r845": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "321", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479536/321-10-50-3" }, "r846": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "323", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481687/323-10-50-3" }, "r847": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "326", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479106/326-30-50-4" }, "r848": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "350", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482573/350-20-50-1" }, "r849": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "350", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482573/350-20-50-1" }, "r850": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "350", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(h)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482573/350-20-50-1" }, "r851": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "410", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481850/410-20-50-1" }, "r852": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "410", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "10", "Subparagraph": "(c)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481931/410-30-50-10" }, "r853": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "450", "Name": "Accounting Standards Codification", "Publisher": "FASB", "URI": "https://asc.fasb.org//450/tableOfContent" }, "r854": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "450", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "9", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483076/450-20-50-9" }, "r855": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "450", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SAB Topic 5.Y.Q2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480102/450-20-S99-1" }, "r856": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "460", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "8", "Subparagraph": "(c)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8" }, "r857": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "460", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "8", "Subparagraph": "(c)(5)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8" }, "r858": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "470", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1A", "Subparagraph": "(SX 210.13-01(a)(4)(ii))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1A" }, "r859": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "470", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1A", "Subparagraph": "(SX 210.13-01(a)(4)(iii))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1A" }, "r860": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "470", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1B", "Subparagraph": "(d)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B" }, "r861": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "5", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-5" }, "r862": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "606", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "55", "Paragraph": "91", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479777/606-10-55-91" }, "r863": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "715", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(d)(ii)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1" }, "r864": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "815", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "25", "Paragraph": "6A", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480682/815-20-25-6A" }, "r865": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "815", "SubTopic": "40", "Name": "Accounting Standards Codification", "Section": "65", "Paragraph": "1", "Subparagraph": "(e)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480175/815-40-65-1" }, "r866": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "825", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "28", "Subparagraph": "(f)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482907/825-10-50-28" }, "r867": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "830", "SubTopic": "230", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481877/830-230-45-1" }, "r868": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "830", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "20", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481694/830-30-45-20" }, "r869": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "830", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481674/830-30-50-1" }, "r870": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "842", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(a)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-3" }, "r871": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "842", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "6", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-6" }, "r872": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "852", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "7", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481404/852-10-50-7" }, "r873": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "852", "SubTopic": "10", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "7", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481404/852-10-50-7" }, "r874": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(c)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3" }, "r875": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(c)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3" }, "r876": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "3", "Subparagraph": "(c)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3" }, "r877": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(b)(1)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-4" }, "r878": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(b)(2)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-4" }, "r879": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "860", "SubTopic": "20", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "4", "Subparagraph": "(b)(3)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-4" }, "r880": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "912", "SubTopic": "730", "Name": "Accounting Standards Codification", "Section": "25", "Paragraph": "1", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147482517/912-730-25-1" }, "r881": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "942", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2", "Subparagraph": "(b)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480832/942-320-50-2" }, "r882": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "944", "SubTopic": "210", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.7-03(a)(16)(a)(2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1" }, "r883": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "944", "SubTopic": "30", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "2B", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147479432/944-30-50-2B" }, "r884": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "944", "SubTopic": "80", "Name": "Accounting Standards Codification", "Section": "50", "Paragraph": "1", "Subparagraph": "(e)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480109/944-80-50-1" }, "r885": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "946", "SubTopic": "205", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "4", "Subparagraph": "(a)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480767/946-205-45-4" }, "r886": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "45", "Paragraph": "3", "Subparagraph": "(i)", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483581/946-220-45-3" }, "r887": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "3", "Subparagraph": "(SX 210.6-09(4)(b))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-3" }, "r888": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "946", "SubTopic": "220", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "3", "Subparagraph": "(SX 210.6-09(7))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-3" }, "r889": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "1", "Subparagraph": "(SX 210.12-12(Column A)(Footnote 2)(ii))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-1" }, "r890": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "2", "Subparagraph": "(SX 210.12-12A(Column A)(Footnote 2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-2" }, "r891": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "3", "Subparagraph": "(SX 210.12-12B(Column A)(Footnote 1)(b))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-3" }, "r892": { "role": "http://www.xbrl.org/2009/role/commonPracticeRef", "Topic": "946", "SubTopic": "320", "Name": "Accounting Standards Codification", "Section": "S99", "Paragraph": "6", "Subparagraph": "(SX 210.12-14(Column A)(Footnote 2))", "Publisher": "FASB", "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-6" } } } ZIP 86 0001558370-24-007070-xbrl.zip IDEA: XBRL DOCUMENT begin 644 0001558370-24-007070-xbrl.zip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�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

    1_8GL_(W(9].7HA5>X" _D\_,N9_Q=C41HK\?WM<_J2=0#]#T8,*J_^SOS<3?O3K MWQY2'-1,-X]P 7H .[D5 ]F]L+B]80.I#X!DQBJ&X]H>/LD#?Y;N8Q#K8EUO M[*BR*MHJ<'8[3%__QDW3A<]RS1CTFA!A\3XT_U9\@[(N(>@@(I_1-[:O/)<&!QQ3$;)^7!L,SE\E71AU<>W9.M5RC+2U2R;$JK M=A=:,KU:YWTA>7Q/AZH.AET_KFK=89L?^7YR6E$5>.71/7F[TC2=C>\2:F6N M3FKM#,EFT)69IU>N-GG1(!?I*9_/UL=%H6VUDQZ:#G_T]$DF5VJ[0R]!I.:N M37+YG*JGT, ,XNF5JL@,>X6*);(IL5PRDR:YF6=1]_2C>ZZ3>7E2-_4>[[5F MZSE!,WQW[,,KCU:46.C]?J6>Y_A4SINWXDHAW1?0E48H[L6FY^VZ^C,X-&5V9*?[W=;!L677+,K M3:;V()U@X)5'*Q*)?(*@EYT1.^@45T6-6!6J/FK <+0B;[#HU]-].Z'%W6G% MG#-U=5 (6S7@*Z'[$B)4T $*?V\LS"IQYJ%9M A"+5?3\R8ID5E:$="EY(4B M(?6$>4-):U6"?]V+5V-!%_F#B#56";O((_R@B'\8+E_!/Y+_0(13SXEP'\:S M"[Q&#]JBB:GKI@]=GQAVF&.0. XV0$\F^4A8!56V<["%>AHZV+E@-^;W_8?RKR34._%-D^*?#L MMI$%=H1%SS6W'P1>,/[DP%G>BWC#:XZ#$=?>OECX0#)8YMLJLU+4*Y59>P9] M[_XFO.<$RO&6:MO?XRBX_QV$%CZDTZLN?1ADX0=O+Q7'T%OS7'!A5_[YM [Y MCK3.8T3VP5P(=9]X,:L5,>*3&$'>)U[L*Q@QXI,8D;E_L85(Q(<(F7X6(R)D MNA)&9.^)%_LL1HR(H.EG,2*"IBMA1.0TG94/[SSH]&HX_;FU"4=["I]2K/ : M*%]U?89DZNC#__>+^O7'SD'JLGWIW[V#$PG%EPL%2=PG+]_>_B.;C;P!85Z' M=Y+/=%#PICE^&2_H&R[Y%7_CJ\'N/32(;/T/4_+(UD="\2-M/9[!%70%^"L8 MQ?5W9/0CHQ\9_63.KT#)_Z3I MZ/&_1Y!V+DM^/J(V'X MJL; '="2)'2$/%OK?R.)>I5Y]2D25^5/EHA/WZ>R7 M1U0OGD?^2S4";'&GIN>(ANP\GC/^@*/YY6,RWM+]X'P M?SDE]O7A$P/+KU[W>?ITGIYU\HDAY%&_+1JU];EXORV2^G@_OCV?_7'$==B, MSUY;:H9#+4RXS;+:?FC(_MRYO%)_)#AUWZ1%B>;FQ++8U+R504PP:M>)+ MI\A+M.*+0.#602 XRG9=*/#/Q?KSGD/QF\!]K)6N&$L0J#ZJJ4*U5"$$:/-Q M@1YIGDAP4DX;3]:U?L-2/JEU+Z,Y=C);S'5X$< UNY5$JMQ 37=2$ N2QTTY MS]&T-X*"6X>"R!^X8']>P>D"2C(F)K\F^RNR*(A.;W1AEZ#2CS]T9:]?XX%# M*WPY6>/S ]2E*XM<@A3QTG"/:\\'[!IDDA1^0-!M2CKH-J6&W:9T",OG@[B? M@6?7-.]PFQX\$\)]\=*^>$KAD[9?%XE_^M*FS$\&?D;C^(*W+@_YH4G\N?/S M4G\QZ(UQDYZX:IDV?A77M=6QAQMV]LE3*I4%DW9.9"9#!_2198;N<;43Q*C1/HJ M <7I5M4*X2\=#8S3Q8XX+?:'(@,!!89>V60$*!&@1&[))?'DM3$I*ZFI/&0K M:\)+;U1^T2TIB\55 HDMERR*E'IQ?I%=C'Q%WX@^B8 $!6_4\0BV/Y_.?%N; M6@TTL/E@1RL1[6A=)H/UE8-9/C?%]>4K_?H$'DJRS<$HI>2\]FVD VWQ$Z :(0B$8I\8,_LRY?Z MI4,O+QX%9I)FO<;8\H!/SIJ*L]$;ML\9A,IMX-3WTNR2;BF65:- ;),=ERV(6Q*#3:?AC,E4S[ MOR@WR MB4ZR9/.RQLV$L3TLR.-^#HV/P9MRB?2M3]J[S-P4&\1\],]<-1#E8S:0=-%Q MU E4-40D)S:QS3F>B1)3#=?$QW=# _:D[GU31^P=US+M!0J8^,(W)T&0TKRQG)3#P;:[MHQ0+ M?-+A2*Q,4_4SR[;)JB6*=CLK7ACJC$ =7SFOB%Z1[$M#MCO5""7=*E9IXN28 MK16O5M@74SS0HJNRC[:'C6T;@E MN;^JI)8EA2,X99#O3^WI,J\KI\9L*9J;HEIJ(TZD.IQ.+R?2L)IOGQJSY4T5 MOUZ=E);\0J.SE.?GDF,?C<0Z>KJWFIC%-:'8?'XDMKW%0TNUIFTA=7PEX;!3 M?LR-5,VSJX2<6>8&J^S)D5BE3%E+:PW6A*&0.6JN1[3%)913([$R+EEI2B97 M8./F5'KH-C,)=JZ<&HE%EY1AVHBK.2+?JYOY#>,DA^LVY'OBZ95#OB#4UC,@ M$ - RG6]J]D9$W'SZ$K+M!IPO84RZW%NELU.$E6G>7)HFNZTVF;N(>%JZY15 MI>KQ03%/^/#*HWO6&X3LE8U\CJ\ENM,XLVY6,ZF3W"2 /%"DSD375'.0$"$A M .>@*X_N^<#/"!8DNQJ_[BS\^:S;>,BWVJ>&IJUF(+W)Q%-U(E5,S1O3(E.M MI4YRLSQ+D!6PB*<(E5=6JMCQJ): KCQZ>B=7FA9!9=$B:K7-U,P0V55?5$[Q MO=/*#^6!;>;9O#'SK)5%]"8^^.^:T\)SC'3=JE1:=78]JEA9%YS MS-.9YK"O>;F%[ F>9W4GC$ 2QY^!6.167E9=J856GT&7;I=_X3%3!=61=-/Q;,!-D/F&MAO?M .P6<^; MCNMTIZ(-M88%<<53E*X5*EEA69\JGS)FZK7IE+%, M# $Y2?T3PRN)C]%28ONK/?/0Q_.;G0N\5P>&?E"DT Y!Y$E)OK07NFL+ M.?OZ.H9G@,50Y_38 6WC#I#BZBH>T/%W&?]'* Z%5)R=<)2F^HVIHTD;$RS] MDWSY4[+NG8=Y:?PL=*!W+,7_083Y<_UV;%?HH"EVV"5'OS7$E3KWYEN7>^ND M([;VUA8X<-T?N8]]Z? [37M%&("T"):K9JE2AR[)TTG[P#%'5/XM>S;J4N\ MX\@S1Z*$%6Q?OQC;1F^*L".W?KPDA!/\ANS*4H/UMB E3#E EJ9HVP*I4]RP M.HX/M?S4TR8IU5X6!VW4Q@$*X!J(MO/41<>"-1?7T/ET51?&CN MQ%]0J ;_@)YJ/]4]_+?87VC"'=08&#U!.?=5=WI\Y?;^X6#'IW]WME,>X8,< MZ,GK.OJO:85*9,8L#SKB<$%H/=!#APH V7__S>=!=I_C(UBAGV'( XD$\Q?8 M2U4"CZ;^0'TA&8+HCYMT=E0*]!1[",?^ *?(*7;4$%.:6G!Z@Y&B=.GBY_@# M?R!RWWCL9.H^&7*(]XLF*)$1(ZZ!$>0]E8X8<0V,(.[IB!/7P(D(FZZ$ M$1$V70LCH$J0$2>N@!,1-ET-(XAH@/T9&?'>XN'7(KF?T0CJ93"X+1KL.D,E M7^L,%2P^?4^F;KO)VC-IL,E"1YG_K: M#\S41O$TQN%+3=XG5?J#=;/9LW68CR_G=G,>= MD*3>%F1D[ZGK[S4;>Z[-[/5"QK5[RU]]^ 45$N":&U%'_=C/I,5?O:JSM2X( M=@:^>CGG.(@3;OO]L/YW;VS#$)R:V=43U<.ZFX/:/:0IW 3-+MJ>U^N6V'DM MV;84WDMX'<[HUDSW STPPWH?()\N!V*#HJD31V[(AUZO;%0S!N'EN)6YE$MM MC4:EY,$Y8)JXS#G@2-&O4]&#/;0?KNCTOJ+3'U3TS,"FRVZUOF:].3-L]:WB M=+[\\W-T?ZSH1)F1\VM&5#51S%#4B%@4'S@&*GH*GZU+7J@']K=2],#CO+;E MW$# V $.P,6SJ&96!DN@FQ;2H6\0^GW2H>^7BTR^QR)?*R[[?I;F R[E5J48 M0RX\*E2(_Z'MX929F:XE%)X=I,C9.CX23"K.?+[M60X6<2W9Z3?84E.CF@FQ MS?9*Z$PI=#*I.YJ\4+.9"!B^R2)?J^SZ?L#P 1?T+<"0J8_\?E).M/FY7A?$ MRB GK?T_[Q;SYTXI[?1Z:]>K\UZAT]8VFSCE$@@84..8.R+S4L.'"!BN.3GZ M_;.?7:#K\ EW,048P!;UX)R@**,V'(YKXX*X;Q-"?95E>[7[SQ?WN?TR+_D* M"7--]O,#CG6HUZ5 JZ$590Y4.C1FV_0.K;6,?G;*"GR^7Y$G/6E.B#C2)LBK#I,H[Z%1+FFK#I [[] M^["I,*92H%LUF:Z6LUVOGCP>41T'K&^SJ5[?WO%C]Q%;,XGMTL[W=[P23-%&$D_^03AH,.$!.CAP51' M'=.&:Q^4_=::8H'K,?*,K#/2 W.ICFFJ$=\>,+E_6<8>OXG^^,D-U3ZY6UHZ M>9^(>AP\8?L7-9N@HJX?U\"(['TBZDAT#8R(-.)*&$'>TR].@8T8\6G01"4C M1IR/$>_,EK_J+'WND MH?T%<7_Y'@@?Z6XQP+\!^607A B$OE!DKV_)$51='=\_U*+@9R < Q*>!\5[J:'RL("U\6R+NA=!Y#=0"/R7;4.ZG^,.OM:5+Y#R"[3F MNR8!^*3RQI?WF+[ADE_;S;G>)?\9AG_YH8KG;=8^CRP;X)TQ^(V S_PEJO\_4JIG[D89O0#_X>[=*":CU!7K/C2>:A/]92J5['YDJ<3]/M MPWI?QA&XB4!21X?8#D<7+X%D[LTM9@PT@71;'1BXX.%1M4I)(S*<,$FRJ1Y5 MR=<'<;_ _WF%\#-#48]F&N>.9AKCRL>* 5_9P]-A\7CAWE0TN& @;],T@O+' M()ERHLC8Z1JBIK*DPLZ7=3Z?M/DRD_"%E$"AGA:)U(5.XOY,!0RL[E>O^QS' M" )C>MM04L"#NO&I@1!,;'$QJ.P3PY98GJ@7>>;CTN^1^!Y#1[(&QM^_"F$]+IS;97PJ#@/RDJ_5EBPYK#Q MYVT]+H>XF-A1F!?E6;ZEEX,>>$%0VGM[_ 7F M4:7V_![((OBZ)QP@CN6KP&P6 <%Y[-*@4LDF3?A"!N=CB O-M_B9:GH=V9BO M6E0QXTE M=OHX^Q7%FS>2UT$@\M?_S]Z7-K>M(VM_O[^"E3DSE;PEZ9#4GLR<*L66E\3[ M$B?YHH)(2&),D3(7R\JO?[L!DJ(6KZ%$4L*]-3DV36)I=#^]H-'85B-G]TW/GQ8__J\M?XIM5I!J&GW5;QX;C;;HX!;] 2J9::Y8V.Y>S93H\:2=HG MV^@8/1*WR7 ]:&'EK!26(K%ZPM"Y_T%^7@UL_; ]I'5E\/W;V?']?:NCR,S2 M682=Y,R<[1-1$;,1,9NMM(\"(/)AY&\QCGYJG1V[ZH[[[=/![9?VF?/Y6^-; M'S$*K:-R2:[E.$[SI\G&K*#D3*9Q94/.6J5VO&Y#*@J_.LDX.6 Z??!KQ8N^ M=W]]28J7SLW=SN=3_>TW,:>98RR[^HYVW;@]NJ7>H'4Y.%<'D\YY1U%XDG%M M5=>V;X'LI1 )2BY].$>(\">YPNO$A&P8*W^4*GQ3J=2]O5/M^ZWJGET?TF]] M[\<>0PM,RE%*2SRJ1ZIE9[,JWEP)[XR6].9E^V+5"#63$@<%>Q T'JEZ[&05 MY0@?/2VJ5F+A+SY%/!LV6W+P_V9**4:.$U:)MIV/H5$2FU50PE%E:-2G15ZI MD?2@XX_$').)&]JWS5(YM'<^1G8-DD'"JU.J_Y9B/R,Y%FB)%:AC%)LI0AU\ M-EN'.GSX3,7(8&$\>_1151#@XG6X*TJI7EW14LV%)(57!(?\0GM@=]>38KL@^$90%-5C9_S[! \1C$E*+; MW5SPDE"O&98?*Z>7_B3>^Q;Q=0S/?5CSJ!)'U%E 6";G)%20#Y8SD"<]^=>M MT3\?V.W.SY^GS?,.LZ:93$1ORK_+GR_O:N%]TKA7SU&KO'-T?[51/^M_'PW,P M;\ M^'5X>SR&-Q?:U'_4[KZV:N/&M>K^+FJ7]9-#^AO;7!BG_&U\\./([%#YZV7_ M"WVXN&QXY^-.=;'WBU%K\/G6.!BUAT>_[K]_,T9:V<-KO1=Z?]"K-QWYQ+F5 MC=V#5H_:IO*;M.#-A=[O'XZ4TYL'QY GX[V]\OAKJ^-5\+Q3V/N*;Y3@US-> MD8==P]5,V_6=)3="- ZJ1KUUKNA'B5=#$HS%-">5( M43])?#X23"AQ%/UCP5[!,(+I>CA="4QP6!(/3'B$9S#O)4JT 2I$Q.Y?OF.X MNL$,85 >@GTVJ>>P;BWKX M5**]'C["3NAP9#O$F4BZ 0\="EZ)*W6I-Z;48M]HQ'$F8*Q(9 @F%ON(N"[U M^!4KID$8$4'_L<'W(OWB4&C8PP]'O@.8%]S)@DWREES)=X,I3P<0*(/(WB%<-;M!3?^]'Q8T0FHQI)T-8 O0M;' MKQD[@-&B4^@9;%O*OHCSAF,CU7"-+8FP9L <+J)E(W6):W .&Y*)I W0S46! M<<%"HW<^+G@X(SX/M[1]RQP@3Y?"U,3:P"/3(/0 M0MMKNF.)I=.>.:@+^=R.;-?%&$O(*7NV$VG+1ZY.4BQO5_[Y>^BUB_ZM1Z_N MFN[>Q?E:%&4RC)+4=4F!@\D<5>)[=OB >ZGLR;IO5)+%;1E_%(Y*\/X8<;55 M)A9"*8E;2S*Q#C*[:E6L1.HK(: I(PLAH"DCZR"@*2LK4:HTQ$(DMQ"OS55[ MSGW(5S7LU:C'?-$@J@A>?6M%<+5:RG>]^*M'0C'3',>$\AN?0Z_4*1'>?!:? MK8"(#$)$:K?8*:6:FFMA3S1=6:QR=E0;M.5M8?L12G.&:1L0U,Q/] M6VB"3&)$+HW%E*7IE1=G%"3ZH-&1A_NL.BSZ6*?#&,U73?((]QQ[N\ 19H.8IR[?"I);/3#2C] +JMA\\AX 5:EC$ MF1QZ=(AG)7 &CFV:\.DA@AEUO26GJ)3^^.SA5KL]NJ[=]KXZYU^NSYO'K4ZE M4P;K4"W4JRLZ125@0,! SF&@'(>!WB\%@N[MRTKG\?N%:C@S!0>_=/LR#+*[FPA1MUZ?)08GGX.8D!'BZD MVN73>UL2T/D32$ZY%,_*\#F[)88VT&8#$&YSF?I,+=HSE@'M[LG!V;?OHZ_% M6U)\N*R-?OAWU:OS3A7MK4;SJ7H90CJ%=&ZJ=*[#E'J)=)X85>VD>7+>O*[9 M.U?^X??!V;&-A[9J>*'44T?$LQO9RJ#%D[8'U%XX1+(Q/FW"R)N]JH5I>_"/ M.KYI$^;E:/Y",!_Y#NT89\:7\MGYN2.?^JW*Y$'].;EU7U?6\7E;J_(*,(]D M-T+U"Y#?9?YQA.]%-0+X[M=B[_"WI_KM2:VGN";5#L]/\ 0MF%_E4G/1S?VW M0 :!# (9$D*&5]MYZT,&^^#T?F"?58UKH^;OUY.RA08Z.?QZ29NO=/W)I\6I."9;+A!\*,#<@N,//;J^: M5J_W4%=%JX?*[65UKW[ERQ*('_%\SW8FTU=A-"!0((@2 M/U-@]7%5B:0;KN90;^8X?I=3ATV*UR+NT#*>WAT M: &S]0VD<1!M1Y(YU*6,:OB+3N^I:8^P"A)K%J8(8PPJ Z0/I.M"S<44K#,R7835*)XJ?;.C6/?%XQMR>KU_,/Q\T!F4WH(B.KPH6UC\AA?^ MH 3Y 30^ P;7-SU6,^>EY8 Y@3O.;^74*AL[QVU5OO3JZJ_RY,@=)ZS"#T_V M9O12T:4:ZB8\U^52:Y[[>?7=TUY@.UO]@!O<^1*;3#6='EZ.M)OO\O&MX;:\ M'#)S&4/U_"2= MU>]>H_=SSU.OOU8:?GF'7G9^#,>/T-F)V@P)_9&ILY@.*D@@!GX/O@ V+D@N M=(AUD& Y7'^$7V-Q'I<.#:"1[FN@N8.U B;O&>80"^1HU 6#XO( 7[RFO)\7+TR#?OY!QP7<<=GX? MG=^WY6;YZ^U-4=8'N]]__CQX2#H.]T*N9<5O0I:]1&8!>_"6/L*L7P?%O3M" MOA?EG:+U[4SI[)^TD%E[MN\LNIA+28WIV@0/9ER?1F7P"BQ M>G-%!YWJF3E+G#.PM!QU6)U1,*D!8D+X<3TZ8IK7M/N ,%PW#]'/(*,1T#"H M"39&'2.Y,"<-'07"&L-Z>$$[5,CZ./LA,5@I,GQQ9AI!<;. 3. RF;Y.7=:7U#6)=8O#1UJ&/B% !S1' M)3!9'')OV"9\]AY75Y4_M:^_L9^43Q\D6/X!-_@F,P7R6OH]UA/7I3.BW9)^ M, DL%3A=(R*A"@'8,VS4(VR@11.U#RN/-T1?RZ/:P+)QV1A*$@^ @)?&&V+Q M->A@%+M6'DO%315),*48P5T@@#<:@#J$AP,P;HM88(YAL!,HML!X)6:XH+;C MIE: +QOP@O$K#)Y)Z>!,EG X#.LME8JD3CVCVD%MN*#[X\TS/##NFH($(5#QJ[Q9X!X"!MHX" M1?4^&')#PV/&._L;'T<8_)8T@!(/+#_? 9MR\=T08+[M7+:/W!!C2HOTBU%@ MUOH,;,=(X!T,YP1T-2P<1S@FS8Y^#6-@RPOFYZPR?454IA>5Z5>:$B0JTXO* M]*E5IH_),<."4+;0J^Q4M%I9UJO5CJ*JY4ZEJM%.HT8:';79+6O59JTB*[5W M_\R63K?.+JX?3@\Z[FU1)S??R=WGSP^U\;+R]I-BI_9%V]5^RJ>-\E=[N/?[ MY[Y[OJR\O>L=$#)6#MSK8K'[_7ZW K;]EZ7E[4%>?G4UZV1R^[5^/;C]:75^ M:?76LO+VWVY.&HILCISKXM7N[=W!7:_3["\M;^_5FO:N^Z4YD"_/&]WRN?JM M??FYOZP4?>U@=._4C[N:_'5T>-C>N_:[-_+YLE+TOR?7=S>?]9IY2\\O+WID M_%/N?QTO*T5?L;W/C6%#V[\]O7NXLFXM1_:NXZ7HHS=/B@_T]H3TC]NTY1*O MK/H7GMGOU!??W-$]\N7"_=&ZKIWN-5L-]W:?[IQW&HMOWMSMWAB=7OGR>K]R M7!QI_>ZHZN M\ MO?CO26E]/K='%]?X._5553\JG7V_[_+[XV3>O1OK)E]MB M494GM0?]/E-S[-O7@X?3BZOS1\_;HW3'_38._TU&.-5"?*2.P@& M#[M?=P;?1^W]XN3SYR]G-PG2\=W][?UJ_-BY.+O8JGP]' Z\5 MW&+<[T_;+;WO%^MHQ;>NZ@LCO7DRVCXNZ^;=_F>9G-P- M)U]^?6Z3[S#6)6SZ\V+GXO?)_8-]O7]W.BA?&-KEH UC7<*G=LW7KL<[E8H\ M_%VM?3ZX_/GU] ;&NH2I:.7^V^G-H3>^I?N3[^5Q^:+^#1@ 7ET@ECUL].JR M^H5<$W?'^?IKTNJ,)^S5D%A@"@9HS[<.G]S-"79I5N)V!&>U8H:K&Q26Y^XN M.KO,1@;W?R:B$=K!/>)Z$IBY8P.0%*,4VH"UWV>EZ^%--'=COC.WD;'"\M!F M^Z&S#@%X+[P_$ODM[(->X-*\Y\X"B^$'MCZX&+X+7@"X^=!<:.E?MFZB4 (V MT/7-VT=>_1Q[->CG PN!L"KM,/'J/F[T#GTKFKUA]1R"ID@8OXZ[_RSR[07^ MUM &Q46CT#-&>28\, VM(XT< EX.&Q#W%R)"=AV;Z!KT$FR _0U_G!U&*?#F MICX+IYW=]8AA\6UD6 T8E,MVMUG9>^KT)^&="ZZ/$1VPVOO\HH5@2%KHAS[M M HW0;;RW3>A,V_B@^M.!C%WP=,&8L_%R.&D+XJ0S\YVR'_+0 7%T:==P;Z5= M3$Z(I.Q@=S>2,A[1*'!^9[$[VW!J-K#H.78;E%L$VA(^A9% M>1Y0HG/Q&6#W.G:O8_(:"Q8$(Q_!H&V+O#TS : 9H!Q M#D"L2?\!2/XDL2L2MS)"MYP4\:AS&)G&6SX<<._?YHTXM!]/363]FY_/8#[OD0$ MQY:E']E6_P@SP5KL\I_/DVFN##%;#B7N(Q>"T/.!IZEGI];M\*+B/S1-KWM( M^PL)06N;:!N8UYO<&#J-I?@$LU\Z^<^3LV O!LAP21UFH2S.TSJX:HV_]4?- M:^-,_7DHW^W?RX>+\\R(<&SP+2?EDBK*1,\G%XU2N4I ;HJ%R,!"**5R62Q$ M!A:B7FH^60!1+,3:H$D1.B(+"P'0I(J%R,!"-$M-<=],%A9"*37$)7T)+L3+ MBWD\JK6?\RC60HBPV1T8=-&L5Y;X ME9HR3CQW78L4W=22W*TL&3 YDUGTM\E\ZI6;GD+0)5OPB=D1*.RI3SZ)ZB%) M;!=ECQ SPI\.:?@&3L:+^V>%6-PP%WSTZ+:'(,VC&Q%"Q%YAJVPR'V7=;8F. ML-98^W.GS'/O@:S1X%CK)).X\."Y;(XUU+G%X\'IW3?B.EXGR(T\=8+,R-:# MX7:PEDYG1A2.*1;6Z3PH\L7US\%!1YY4>\W#UIUO=R_??@="+&T3CQ7CK&\, M;Q"F;AZ&>4%,__Y;_>=! MMY^R:,OZ?N?'N?N9MM7]@^;EK_V#KQUMS*\^:98+BEQ?S>TGZ4:0-CQ$-&=R M/5;A9Q,#0ML:_]F:X$[J>N!5)EXH>DM-O2X,YX?Q2Y7OFI <7>GOXZ[)YNW_PZ[!2.52TYG#,;TI1E8(LJZNS]+9/H#(8Y=J:$%;J0/(J M@_(I(/'H3O7(O#_^IPPDC7NO>:DH]V?MXM&![EB_FI6& M?QY[;X%A>O *!".5E-I27V!5@(I[W)$:C. 32$" S,2J# MB\ZWAB?3NWUU]UCV=?=SVB9>S;[[,KP:=%7YYOJ<7/X\D?>^R*U.G47S&@59 M68G++X)Y&1=N$=%[I7!?M?>^G=[:;4VNV-U.;B21+4MGTACH"*=:=Y3]X>Z@/1E:HYNKPWKEZ"!M'>$?'Q_? M%Q]VG%M?]>\N.Q6Y=UAO=1K, *P6Y(8B8GQKB/&E+6VK-",S.-TL@Y>?[^ZTIMI63F5Z;Y)VJWO2(RZ""QB@ M2KU05U=H@.867'(3]U/4T?-'GVV/F(D>.5)>!__=W;ZT?P^*<\E*\[$Z>XM>CYX9?/M>+U_OC^=M3\?N+_[J"HH[%6 M+1>JL@@7YB]<^.(3H@M5F3?WH*C("]S$O,"4YRU"6MLU[]32UE)?;Q%=6=_V M'IJ?5.?7$KHBAI+9M"IQ0C*A?;7H LZ9&S,P_JT!VGC.!#KKE ?GXROS^.9+ MNW9S-OS5^[ECWSMI)[EV]W?:OSK[U=8MJ>]4/[<.&S?R-;N1#]/EZX5&K2%" M)?G)I1('(Q/:S'J11/?UA_L?7\:-_O77K^:#?7_J]H9TG+)$[\FW/_9V=D:= M=JUU1,ZOFL;9966,$EU[]T]9*UT^.&[OGY:->ONWMS>NI6T:^E^ZC>[1B?GY=N?S;?7B]_&7X=?* M.=[ #*9AHU!IK- RW#XY$A&I+<:/5QF@2_##MWZUJ^=5^<>U\<,:NJ>7P[NK M@[3Q@^QWK.O:R)%OU7/]:X/2&TOKMA _,)-?+30K*ZS,D5M!REFH;V=@6$2$ M^#(;XDO+(-PF]'Y30'#GI&/??/W2M/3[W5O_^YWI'5:/KN[=M+-?]:;:JLF7 M^^ZM>O7MYD?Q='QMU\'J*Z/55ZL4RK((".8H()B60;=-\O^F\"'(__ZPZ=NG M#^4CN?CSQ_YOT?;'I6N6F37^Y#_>#S5]*C?804W*%N@(DI3ECF/C 8FI@WMF/J(D#X M]G.4FW*L?ME9RNT^0_]Z"Q*%ZK3'1"H ^.']KW*S::J_Y;O.C^.ST^/6]^/; MM&W&J^_&^(Y<^/3:;W'UYN B/MR?5\ZN)^=5*M^URY/ZSN^+DTDM;0.0[A7KOWZP?8[X 9@51S8S'%\,9WR&KDUZE==\&T33N:_L-C;EA_6ST-=CN;1SM<# MNU?LM?=/CT[.KH:VLSMH=93:6@IS;"5(O*1PVR: Q N+MFTY2.2AHL>)^?.W MIQ)EI_WUNDU_6,Y8[7T;(TBLHZ1';D&"&8U_>P18^Y__ZL;]GPZM69J.+92> MV)/P/,D0?@[/F924)AU^&MFN@6ORT:$F,-\]#>F+QU#>S8QM2NRB9INV\S&4 MR;!%)/E"1*1H%1P@8 M@4E&+OT8_O I@55]@G)L#$633&S?^]@S'J@>)U0PG8 I9IV!MXZ+'PU:<@+H M<9EH+# ].RLT*VAS4A'GX#\B(?\5&X)1 0:9,]<,!X_X62A$/==P/1=#SFW? ML4>T('D#*AV#W,!2MXGK%21 3ZG5L8 M,(8#:MY3A%H<#['<8C"H^-G,IT?UULEB4R^U'9@^C.EDS:3$06-I,*?"RMCJ MK"I/W$#6*-BN3D@1M1(++''RJ-78J-F___@!'_"M,'0:5G$G(!)9/?V@H_67:0/A\=WA]22-!TF$D"I?W*EZ7"Y818, M&#E@SX I: 8QD1=TMI+LG0OJ^B8W\DY'E/NV;A1)SIJ26!.==\#+P35W)E*T M/024ZA,'D44"ZW(,/TI'MGV+OT?O;"CAXAY\C_W?[,A.?4?2IZS7I:8]9NZ# M9WA@7[L2CDR5H5E&MZ(9T,V-Z,9>4#Y)8\,;@/&-9O>0$@M? L:\I"PD$7!^ MO87/\!5X[CO RM!#2V.I,4JS7 :G! Q\:%:G.G=09K]7VDN^;S]H V+U::RA M2KRADG0SH);DN^ ML &"5%TPKX([16/0:=$\@0 &O:=N(9Q6\)R BZ 9(RSA M-?\G^C""02X^!A(.E[WO ?WIXOM@05D+#PW$?GWA\=@PS>@9DLDU@#V((\%8 M',J6TI48V$\]I)[O^>@ZP?]XJ_Q/ALXN(YA(CZ]P26J9YA-_9VVZ?O<7D &; M))+EXW8K+H9CN+!K$^@;%\T;$ _XS#=U22.P-!+1/!\0S@DP#9K1 MC5X/&D$:.@!^)@S1L8?2R+&Q(QA]\&Y)^F'[DCM@C5FV)P$E-0K]Z3Y%(A@ MGJ!)$3.?FF4A\!O=$5A \#KT1]R0W71<2/QIPB8[)#HMK04LWJI%UPV[[0<0 M2#0MI$M_")]-4H33>CT)C M()ZV2:4 Y7NDB\&CR!P9 =E)/\!]HM^CV.ES\]$IWH4"(HNA\.FLX+D+'@]' M)'L$P GDE<"F8=%V:*<@30P*XHW]:#;/I;3'%G7<@3$J2-\HU6QI *SH2F % MZS,3F4BA_>N&0XZYK%9G6H8SV%V%NZI,6M@!$T^,%,(!O-7M2I+0#@3.]!Q;\$!D<)P PC5 M/46,F5!\!@(.&#X&E.C!6_:8B31,'4BKXQ!*D0E/!B#QA>E0"'.= K,$ (1J MQ,4 LF3:5K\(/0W#EB-;-,C!YP%Q .]-A MMSFA@X9 "7/K4X99 ^"78@S% +J&(Y\'LX^!SAR<<42> [8@ MWVE$.@7CQ/V;H_$_?T* EL'8]]A$LFH71)QA]X$W.:(/U&#SI"=8^7]Q 13S&%&"SCDS@ M<'1WX+'F4#*G-U'4<*%-^H#"PYR@>%LH9J PD#NYZ\#5'N.V11Z%X=PP/;U' MNE([4ICO T_@9J\=^ $?T'*U4/65I$/4R!+M 0LQB]P8,HLAD/ 80R+#.10& M1IE:A6%YMDXFD=(;HJZ-=/GL/.*62^ ##$ 9,IGD>A[W<8;4<]"4P)XXK^'? MC4#1!G2:X3,4Y6!O7"KOAB9#0=H'CBV")U)L,=L.>M1PIXX-P)T1!#0 77!L M0/&/*1H=)I#6F8 ? ^,(W(;"' @ (0.S />(X@MS2^D(C1O*U_QEV,%]"; O M H<1B]D<=P70U;+[#GCL'420U:08C!Y."P'_!2 M,'85]@;^&WH[K%/@()O!+AIIC)5Q=8^85]@*O<+0A>$^Y)S+B"<+?,ZG<4[J M$YB+.^!1HZGT6;9.N0AR*\=$RY@/!>PM!# PV%R4$=R/X&P" P.-R"4YW)AW MF:Y"4[& /#Q&AS:45(:VA'U[9TB,X'E$#1;U MTB,KFJ_]Y<9<\'I7=/3.Z,A&9KB&F!&<*T MYXM7\6: =C6R?P#LD2Z!UT9@[-A#P^+.2,_6_, E6L+9,>52F =8E])0YF+J M \QU#+&R)F88,>K6\J!;$"1V*CGF8""3]QUPW7HLS-$C7,I5@2&G#8!#*8"^ MRTA!0/50+@^W%'@3* [O6PPC@,L=H$=,ALJ2/[(MOH;,5![;"XX&F0=0HWW&2=&48\MQ644I%E MM_*8(N@RFZ&KC@%XKO7;U]^DH^E.PJS%Q1;+?20DP(R\0$.YT_#&G(%Z"-U\ MIF0('[JW4M>V"UDOQI!7?%0%# M(:['+!LO8I=P%P)C>:"H7Z'5F,>..Q(P)6Y!HDJ*)K<[G5%@+QU^WBW+@)WI M5M=LX&J)*QZS%&/,#P8S7Y\E_<:8=/E81_$A@O&F#>B4&#TT9'POV-PS@;O- M^ =(?[;<$65'2R=UYD2?@2K*\B#T0R6IP&: M\3]D./HDG;)5##8R-UZ)(58'KLGC= OCMT'@@(>J$-3 \31L%DYY),P\BQ#1 MAOGQYS8C?HCD!8Y)T_#7&3,EVB:P/DBXH4&C9P/;"W[$3ZO[TL7>G&3Q^WJ? M9($H%!U%EEQZYR,'L,V$Z2Y)8Z+P,S"\IW&0-LNT['3C?\2/%YN;P2NKXLQ@:D7 MKIFVKQ?Y-JD;E[ZYW8F%MF M3N);EZP!I':T.PBL"8L,O[ELI0O!+I!+T6B&OGCN'^?5N55Y>@1\?0+V>DS6 M0*@*4NMH-Y*R>>'C#8/A\O&N#^ M+F8M'S,]598+?%L-81?]\6VDXQ7;@8[RHY@@8P8X2\L.-17?>1M1RP4#PZE&ZJW:#VB;";^ M0A'MCR+_.T6]%" NHK/&43VT*I@2 M+,HEI=R4&_5:8TX]RM,S[H%N7#0_/"<<3JPTP;N75NBJU$K55"_^B;WXBJ.A M?UA.HY9JP;54IBRG>KU+"E.NEU(MNBGX>AU3KI3JJ99>3F.5MVR^V[(I M"[3>@AD+M-Z&*0NTWO@I;R%:UTIU =<;/^5:2=DV699+\K9-62W):[@4=153 M?F4Q^@R%NAK;AUIOF+)FF_CP?^\4^=T;YU]6T[Z6!.?]Z-[N"_9?KG#?13KF M6R[MZ98+WXHI*P4IH>L*,F*I(KW>NJ>S*:;KG\A*]:VBHE1+M?I*Y_^GHK## M=J22NYTC(VKOM:LMU-Z6J+W*'XBRFNZ%=G\JZKAW+?2:T&M"&+@PE(4P"&%( MSLC+L3"+TDIWWM MU GU^(&1Q 1UO3-JS$^(ZZS%?Q/;BDQ[Q9*Y63.=:Q&?O!)OYA#.2X[R2]'- MD-E$(TK28 Q3[U+6S[7CTL\GI3VO)]G MVQS$@7>"RVB2#1=M./\%>C&]':''F#$QOR7EJ26L-9O-@ERKYGKS(F'_)&7U M5ZTGY(ML.-"DO?4NT%2@Z2*:*H5*HR[0-#-H6DLJLK/A0"/0-.=H&D1Q-@M. MZX5JO2'0='VG)Y]!TT9RD9D-AYJTTWHV/Y%GW[%=O'W'[AE>3J.]66#4;.QC M).Q4Y'XOHUXM5)1FOOZHJLC=R7ONSIKC2&N=VVET&T!P:8); MD"SJ? GU.!<6EP^66ZS=H>37H^-E_\MVB;.IU@)D,O2 M:JP=Y)8L1PKRL_$((6 PXX*WGHKB @?SE+R2!DR(3)=,33*'F2[17;TUUOY% M>)4S7J^HTWMJVB.\U7!C0J1B!T#LP.(&@-HLU"IB R!O.[!*4J>7TEXIL0,K M\'>K\;=>J-8$_N8.?Q-)T1?XNT7SWC#\W90,&+4@Y[V:S18FP"1X0BKMM1+Y M+QN6_S(72KJDI@F]%:0^M:A#S *+*1%]:%B&ZV&:S#W-9]Q:[)7D::ED/M>5>4/ G)SED3S7I$_B#P:D4>3CSR:4V] 'KRPCO3:BV&T6N\T"0',# MH V!G@(]OJYJ!#)__)Q)\1()/!A)\H,TK MVR/F8C3&338*D_8L,[2ID;9"6>^6<]JS37A+NEHNE.L5L4&2LSWILMB4%IO2 M K\%?E?5@BIRBO*'WTF=EDU[I01^"_Q>;])1VM--/"-?J25^5BUMZ=CX!"5Q MRY7(3LIJ=M*G^"U7/ 4IGR%R<5)["^I6R)6JV,?)S$ZXDM3]Y1L.%%NT%YY/ M:Y#5B)+0>Q91S3K'4Y\8A+VJ*Q\?O% M >O2GNW0,![FD0>:7"GK?*S55F[T MY''36U4+]:JXR"L[N]ZY20'*:&!)X&-FY2N/^-@LR'+BYW/SN7R9@$>1%"2P M5"O2)2)#.4%%1-Q%H424$9F^0F) 6%L8]I/>8NM6C/\#YL3,A5 M;$B(3>0D]&JCF;A235LT-GX[.:&BI6FOD]A+%M MH/L/XN>B>H2 [FV!, '= M&0,SD0;T)]A=*POLSEL24'*5KM->*I'_LWGY/R?4$R5__OC"AS(H%MWVNR9- M1Y'^M9JK'9VPW.3+)0)QV7#)RF@-$=0VBC4*XG7C19( M*O**!) *('TZKI/VO))/2E*4Q ,Y^832C"0E)5(N020E96R2+/[RMT< *_[Y MKV[<__G02M/!A7@4>^+9(_XK_#R@B!0@FTJ3#C^-;-?P#!OP@YK$,^YI*+JR M_&^<86QPTVA74;--V_D8HES8XNAA27.LZU*-AK$DM5*20^2$!;1H1%*)^)XM MR9*,_?X-'8?_,CI%H^"8"R,PRP*W&:MDG"ONK MBTOT2%PVM=&PS-8NW;T&8/%C:D6O@[LXL^=AU* M;HMCH-,2=)M#R"GP1J^2KFN;OC>/JZOFA=B+\,>7ZJ88Z*[6\A,+L;:%D)_< MN1$+L::%J)<:8B&RL! "FC*R$)52X\DHGUB(-2V$_,P!.K$08B&V:R&$U921 MA1!64T860EA-&5D(835E9"&$LA8+(19"6$T97(AZJ?KD?J]8"&$U;=="5$O* MD\D!8B'6IJPKPGS-PD((:$IV(5Y[I.JYK>KUS1J37=AO8[[.7=O47TR&O.4' MKI &FFWBP_^]4^1W;R1(62TMI,NN]6PPTN&Y:K3=F4[B!,,L&8=2Z1C^,'"E MMJ5373HFCC;@:9EEI2#]]^]N0MG3:RCZEVWQV2P:1.)3>:OT*-52>;7''_Y4 M/'8&Q.K3Q$3@:5-J';--+-UZ@U2!L 2V>OD3@[)\6P*JK%:$KA>Z7@C(XP)2 M%@(B!&2UQG".!>0,&K1U;F%Z-O\O?R8,Z(VVH (#>B[\*#\2G)L1%W4:>IF9 M_]_"+-]RIIH)T-6>0U7. LU5GP%^"40^>?3MO8[GM1Q7,BS)&]B^2RS=_1"= M@Q/XN(FL_#8D2[U8W5.Z_C(\/4DMO7'Z@AOA$(39$F\ZI* M_(W% @'Y O*W%]L$603D+Z2Z;SH6;#WD\_SM35]F'G#;/B'>%/;.^A;#W,6B MEW1H:+:E^YIG.QL08EVCHEWK)!.J_+V&82==CU:5"^6&N"7A10>_UU/;NYE, M/=IT6=PT?N.-DK*LYCLHNW*/(7NW, -<;N:NZ+;N!@L,WFH,5JI-@<%YP^"* MP& Q[ZW'X$QFTKP(=]\KU?H' ;L93IY9!KOOE0_)Q8S27JWMR)I)/;*46AAI MEWA$NO1LAV !IZV* >9I0R1AER1G_H?2*,B*V!7)SA:Q(K:(Q20%(J8:D:DJ M(H,P0XB88*QEP\%B*R:9;T1,.7/FQ?&18TEXKL=+U05Q./#J4M'AL/X2)G4LQ;8/A; M\WG2GFX2\2RU4*N41<9/_C)^JB+E)_=LNODI/XK*.WCRJD/;(V:B1:KSL8A_ MJG]GM$\9M(]N^UV3IJ-MDRLFD?J\$G>-*H6*J+V3I9US6203B4D*0,TKH%;+ MA:HL %4 :AZQ9BLFN;F RD)!:<\KZ=1.N=!LR )/,Y/3E%1JI\AHRM0D=;GD]I;>]>+6B\T:HUT46Y7LRS&W; ME.PR%]MH'[=;(B E=@.RN\_Z%A^@4:@T$H^';,PJ9V%C=IF:K(HZ#6+> H$W M H%5M="L)%Y;?F.6.:L0K @,%O,6&)S)G)@7WFU5*52J35'L)LNY,TMC1+6R M*':3>S;=EI28G8%AD2T+]N5IPV/]D\SE7G&M4BC+^4Z<6?]*9V)3N5P7F\IB MD@)C?"1HPU>Q4*V)E,?L)/PDE/XM MLGTR-3[)[4.FOMB)B;V._8K#WG>KF@JHF7>-N89<[JGG-%W,\B MYBTP>#,PN-PHU"OBCJR\8; J\G[$O 4&9R_OYTT87"E4ZC6!P3G+ &HD=->L MR/_)X;QSEO\3!I)N;,?4MRP,F.B% 9MS?^3B+2R9NBSR;5O7XL* [&Q'%\4^ MK9BD -.\@FE57&8EL#1W,+,5D]QL+%V\S6H#L#3Q\$X^5S<3V3[_3R3[9);3 MMC+9)YT+R7,;>TM^_R/URQ-G")/@+;L9G&H^;C)/6S@V?@<[T>MYTUXML84M M(%Q ^)LA?#5WIZ6\YA#^2H93Z5%=Q6WOB)]K2EHV-3V%*\D[W MM!=+I#"])6+VMT< =O[YKV[<__G02M/!A= 6>^+9(_XK_#S@L2VEI#3I\-/( M=@W/L &*J$D\XYZ&! 8# V<8&]R4VD7--FWG8PB888NCAR7-L:Y+-1I&_]1* M20XW&6!-+1J15"*^9TNR)&._?T/'X;^,3M$H.'S#"$PRP2?;UD\%( M)I@PK">XJ[%:]HDV5]3%)7HD1I[::$YL3QI28D'G/=]\A(6S(EN,76(LJYF4 M. @F@[FYEK&364Y?,>JKE5C4F4]1;<1&S?[]OQ?)6VQ6@>BIC%_[M-AU*+DM MDAYT_)&88S)Q0W.H68KV+3]&-DZ9A<#E4KGZ;RGV\U0 8\,9DH=BC&(!0Q9- MVO,^!I^%SQR.!\'#!4AX-]=NQ'$JP/HL2E644KVZHJ6:VPTHQ^PN(@T[,L2)O!'\&S'"&Q/P4WS$('KW[YXIAEMV3=N"OP ANQ*?D);PZ2^IE M%$R(!C&%H)86A/"2F-"<86G 5B[5I9[M2-Z PO\<2KF)-H0&!ZY$+1W^?DP< M;8#72H%5JE8DTB>&Y7KL$\T>CHC#J#)R#-OA7T]@SM((AF;KDN[ U"RI.Y'< MH%OVX24=&IIMZ;[F0>\PO%OJ%21HRS.(:4Z QCV7>OB93ODXV:P2CTB7 M\#W(2$$BEBY=:@:LBM$S-.D_9#CZ))W">V'S;DGZ/)'ZU.Z#3AA,"E%C(1V" M9N-GQ'FSK-B?Y- ^+)?[@E%B*WBO!/MXYO+,L)&2=!F?2;S+X)7959&>6A"8 M@>GC\X@Z7PCR-O9^18PQ_ AM_U562TT)&,J$UOF\_E( /\)'T*\[HAIRHCE) M<'SE)>,+1L4&.""&B3_@$)5&28[&PT;8*%4>&> -E>@#_HZC<*@TAK> 'V'Y M+1]&94M=.N5& *(BX\I[XA@$Q8Z-P_8=J>=[/GS.QZ8;KN<87=]C ] 2Z&A(/4994:, M,C&H>PK#0^2&7Z!7&*VD?,:?/]4'!@S" H^[%?8V]! M!Y9FC!B2!ET,0)X L&.-]LB]'0[.1G4!@15E+OE$@8:@#+60L+L4H!@>S0$7;L%TG8% M_!7J ,!@^.*>([DV +$!*'?@NQ#.4?L@?GM4&UA@W_?1107K("(8(V#(:89E MV?=,'7&%/$;!ND=E"WP=J@(G3OIX2P98%@8S'1EO#T&D/1)H-11JZAGX1XGH M]P3^TN<"!7QO0".A?(R]@61W?W&]"EQ^\5AO*%:6NRK#\:6@ Y3#L<)DD>[$ MY&H9/G9MRZ)FD1G3T'4T6N+.4M4")GB4HHP^.E?)L&QD- +N#\P%G"S2+%K9 M";,@T/7BU@;T8YK%T*R',EL2!94-?-4/+84A[1// 5KQ6;C^ M:&0[GF3:5A\;I8K 7+8=#"RA-I?# M'!CR<,\W3<:(*#6&.VT8?O9=_J5.T1DQ+!J:2V$?8"$AR6QTA*!]BV*8"4.G M4AAUU;&I+G$-[N,,R2300BR$Y'==>N=S9Y9/-HSD;/ARG_I.G(XAY+W<*D:T M G2,1?3C> I_*3^+FQ'RO#B>R)9P-KI?F&/ B/-P@+G9DZ>%'9BNG84KI_,[',Q<)EV[4IAF Z& M". #JV05=RGN%.M@:4>>16 "(.@\&K+#9F&*,,:-UQE/'F<\,NY\ Z@PX:%! M'G?$:*[M.QI:4-U-MZ!0I3)G%0G ?@#3PK@G)@IZ 3G(5Q*G< EE61 M15IYB!AYRF7!&X)FOHE^[\YE:7.Q7A&[ ]Q&!-,X\LUJBEAB9: F%C6Q MYX2]1IF!; XO.QY<:Y3D)P^JQS WUKX-;6+L(21)^#O+D_[(]>H8B/"L/HME M3T:ODJYKF[XWGQRY'A>,O0A_?%427/#O'R;9-I\LZ"$68FT+H33%0F1A(=12 M7:Q$)E:BU*R+A6=;F6;MU?;/&XRL+CM^:SF4];3+F MBP;@).'#_[U3W[V5'N52LYEJ3;7&4T'-%T0+6 R7[YMA(#>Q,DA/JV_!)WGC MDUVJT6&7.H^QBD#3#*)IXU6!0[ZTB_\N8(*0AW?_X"987L!2L,$JV:"\% CG M3''Y$4-UAH[UB(XST_Q;H&LFT34=&Z3Z5F%3FZ7F:N_S?HDP/9GI\]ZP.-9X M ]MWB:6[T_2Z/[ RTJXCL?/87E1B7)[V#-.H$()QJ;3GG40EHR"PD[7+UC#5 MX_450\N%9K.1*(;7TU]EP=V"NUDQQ4:AOJ045PZ,LXO9E(<-L*[6*(9KG61B MA=&>W2_(J)25U40O=$@W#BFX=%.YM-Q,2 ^DK>0OER:^"<\D>=LM[9MW5BK! M&9QO\@:@JA8:C<35DQ"1S+",$)$_%9%*K5"K+1:I\QKO"]H:-RKU MPMPKBVVD/;'$I5AMU@NJDNB-SUOCAZ7.#8+-7^S$R=5"?U;%#"L2\N./K!C1 "P-=G 3 M:QY(1D^*-X)V9%CU9;:F;% Y#@CB^/!TH6;&XUV$)\.7#W?3SU/>4%@+DQ7# M\P:$5XP,ZLO%Z]Y(/<<>!H56>0%@S1YV#2NL(&7'SQTN/U!8B*U\KV>P*L6L M9!^E\]V.;><6%RBH' =R!(+GT* 9/+V'-0=]^(O=!5 ,AS2M5SD=MT6I/EUC M"W!4\L;4O)\ISE((RO-BGZXVH+IOLE+(0;V3$9GP(Y%V6%?08GJ$'4*D%E81 ML&Q@PH(T\D%NL=P*4&=HA/-F9;3"-HRHAB^KCLLI"OV:K'+R!K);3'?]\EW/ MZ$WFL!CX80A/)F$)X>GB$<1./,[[BD)I0&M><-G-ZNG5M5>184D8>ZQZ%1/C MTXCI6IS 1O:JR^3TB&\=+((G,XW$494U'1I22XHX1I>%A5!*Y;)8B PLA#A" MEX55 %P2I0>RL! "ES*R$ *7LK * I>278A7;OL]ZSCDZ\S&:FSV?-$@@7,K M:JE1S_4AL2L6L#GF 9OV-&"3^+'KY^ KDR<)!49D$".R>V14+I4KN4:#!$\. MYU+>!1L\!L6I)V,?4+# M:TD2$^VTIY1&)AY&-=.>=Q*Y=QD\.ON&=%*ET*@NIMG](4BEO;R"K;>F7Q-/BVKUSS!MTU[PJN#5 M3>35'/J92.,]EJA(E>%T2Y8>Q-9 M6ZTG6)PBYZR==7]T3@=/?=.YRZ^%EYI9RS])^,D9UJC-Q)%&\*?@S^3X,\DJ M@GGBSTWP1GO4<=C1X_"F8II$/3KAA0I3?17P]%)(>M^HJ!^$>2[8.=OL_!9M MJS3%/FA._<[+ 8&%[!(7"YW80W0Y>1Q8N)_"O,\LX#0* MD-7Z=G)H_EW0G0&Q^A2K5&$%'>@7JW3!CUBOSA&[HL* S[(!_V)_M*96A3\J MV#GC[/P6Y8N+K*B)YR.EO<@;ZY-&*I=5AIR6@R2N2SU>UM0T")NMD6 L.!^+ M]Z?(M)%7*J1[:W!B*EBM%AIR,W$M+!A;,';*>QV%:J6\I7R=?__WR>/]>$*5 M92J%)="QIOI[WV4[MA_BVCM65S>I.@?"8W[\^J!-N&OB)=WJB=?[)\U" MN29VS(1<"+F8VT'YUPPMN0>FJ4&Q3(S0AH35_JK&;O]Y757(N#G MND_QO@TK*K/![K!1E5)SY@X;HN,U#?RRBI[-[XN9'AUFWRCE4GEZR\V( &<2 MT\0+''HNM YS()).-0>OM&!;";/7B&@O#WCP(5:GE[F4I"N\(N(5+;!K=TR@ M.MY10SQ^PPN[70"( 81@HV1-X64EEF>S^W"@E4_132-!T_PFC[FIA:_$NORT ME"0S71%- ZF$T8[(A(V%M1Q<7A/D'V3K,A!>VC16L54S*7$0AP9!XQ$88R>K M*-GZ:.$@M1*SX_D4R_)\6=;_FRDW&P$CWBIA.Q]#M1&;55"72V5(V:=%7LV6 M]*#CC\0S11Y!S]'"&\&LPL8I2JE=7M%1S_E4YI@V)!(C5^]^[?UV= M[LRQ(F\$?P9EY@R).5,&*7CT[I\K)C& ##LVN^3#C?B4O(179TF]C(*IW]!R MR*Y-$C>TK.*&EG*I)FYHB7%BB@7X&Z( ?S86HE(1"Y&!A6B4ZJI8B PLA"KN M!LG&0@ TB87(PD((:,K(0@BK*=F%>.V6Y7/N0X[*!*^,!_-%@T3J9B-3Y+@D M_]KN:=D@UA'(D<'ES_*U'4J^,2+1VUM6?"#K3^>Z9L:HYITQDKK/)9?XD(G[ M7(1VV2CC(DF[-&7H2.D^EPUBAK=A0=K)/SMDA,O,TQETP_.=1 ZP\'5->W)I MI/SA+DW:\TXBHX_'$K-UUNZE>7KOJX5F4TXTO3\+ARA38><,S'OKV;E6:%9J M";)SSM$Y!U9W[+BHP=*$6*IF ?,Z-\!J6J,JS>CZKF%1UZ5<'^(C M=O: X'L.U86!DW/W<_WSSJ)UGY'",,)QW:9Y9U$07NSFEN5"N9YD58:EMEJ?ZK#LU0])C4@V5] M6WFI3S5I>T$NU-5$+X,5P8!L,8R0C5<%".JU)&^HRKFJV)+J2ZR2T+PIL$M99&C@%=&4LJ#EG+[!=>DRG*V;/L(BEB5HQJZ@54RG)XK#M7#9S2J>>:Z)$23860M2*R<1"B((,&5D( M<'V%1&1A(42MF(PL!$"3(A8B PLAK*9D%^*U6RO/N0\Y.H*X,A[,%PU$K9BU MUHK9&-;)&W)L!C2(8C K X%DB\%L,1NDFY"7J=(O.42#3)1^25M9"#,SLV9F MRM"16NF7C6&&MV%!VID'E]3S3,KV8NV>1.]\MID])HX^/9@W-KS! ,C!]I?) M0T*U86I;>4@M&X?SMKZ8AE(NR&J2>43<-$Y[73.45I='?E9RR\_U@EIK))H6 MEVMXSH%=CC=B00^H>#7;<@V=78YG6WC/'*KC#3"N-K5"3%IG?_( 1$JAH20) M1"L/.65A>5.H'Y,*#S^YUYS)TQX''W7G3X9P7'W?-C4R9:$6>##NNF/:]$?/]*H5%)N.+Z5C#V0G&;#6%L M)0/S2D1MUPN5BI*XVLX'8V_;$?/PT/,RA2WU;.<59\M9MCW\R;-C3<,O+MMT MYWOI\9?H<&3:$V@XV(<'2Z+OD*'+SU@_LV$0;R@\G1T_M?W8D7,8ET,U:MS# MIV!!4C[!=CB42\_6;J4S'R9'7"J=F<1:5_HR!'=',YW2RD M&[ ; 5:DQ 'A\JA#74^"!T0"D8]]/@+&G,!+R,83?G"?#@UB63[C:)!+XCCP M=U>"(7TA\-B9\$0NI0MXI^'!"LY+/F8B2W\ZULF=4&F MB6,:,)91(!',]4&)V;&'0/M) :1)IW1(]8($4PQF3?62= A#!,W'\6D,BO4$J'C%X;'.A0Y& M"NCLPW M#X8>)PPTZ [@SYC-16$N/J@4DPU)*LM<<3VZ)F7Y-8NBEAI_M"K! M]Z]>%FEV1:3G%T/BZ]#\\W78?*3K4J#,/>6K%[*&Z_=ZAF8PPR2H P/K:0/U M:&"YH#[M3>N@V*/ ='&9SO9'(]OQ)%<;4-TWF3T1<$1@ ;#%A04 5:O3KL<; M9>5UHD\"?&*P%&/(T(30?1JTP=]@%*/:&PII/?0H^DS<8"E(GR!L T'+ [&W-.N8%Q_U6,(5V"&$H&WD72: M/1P:7FCX6#;830XCN 4R& ?&#]A\$&MB+0#%I;'MW++Q!0MAL7I$2"^'&L.N M[R -'3*&=]S LC'!9D(LP!L8^*SP==8@T,N1P.*$Y<*!.;!.*)X@&"/;#4L3 M!5(!Q'-QN,80!,-@KP$8,#IBA^#VC:UP#4*R =$'!H@F?1@9#K\H*1)CM 55 MG/#I7D#'3,$7/\H;.Z&LF4 T]*L'0>-12 $[6<41Y4HH/H^UE&SG8QC\B,TJ.)"BLF! GQ;YZ6W2@XX_$G-,)FX8!&^6HGC1 MQRA^@F20%+E4!J49^QG)L4!+K-,4H]A,J:;@L]EJ3>'#9TZ1!POCV:./JE+" MD/D0?@TF5E' SEK14LT%[,NQ/4TB@?/9^]^[?UV=[BS-_6>.C&4[0V+.Y/\' MC][]<\6 A:<18&DK-^)3\A)>G27U,@JFX:UY#OCI8$-)IUW@\$ 9(PCN1*"T M3<[;%(I#K:B!24= 'VDQ6H&IB8#/7P.@'I);4$,^,R8C4P459]^V ZT+8[@W MM$!5NO3QYCB,\\@'\A_K -6:C9J&U0R<:9!KJ)D*?<%(@M\X_T*'3.?';EPJ M23!KKNBPD9[/C:FG!H<'0+@5QXT!U)#SEMRSW6:)E8ADZ/][UY&;5:K6>VJG M3*N53H5VRYVFK,$_Y6JC45?D'$;E;,"$N#/6$8A%:5P]QX&"M:K8^][48!;W1M8F_8S'/T M+1YN9EX.#!0L9H\\L&_0^;(T%C&&/V)Y'.@O%JQV/1Q\WT" /GVD=XF[=AC/ M-AZH7H1?[2'E@,T[9O!(P"$Q'(!LTV>X1T;@FST 33P*,_Q+4=52,W(DB3>W M71#JAUBK&,5Q_>ZO *=GR,T7!.84H]YB9T -, _EN)>!DP2#TZ5+5G9L M^R;ZCZYO>BSB E[X]&7NBL5GCD^FO<.#O^12/9PZK/S ,!&0GNIR2)"-=%^C MC[2_;*+,A1]#-QAB@L]!F'_S[P'I7!JI*#!_6.804V.7 (B!EH.F3Z?Z+ @& M\<[ N#-T5(N/L0!;+ !A% /<]4#'7T-^FTC!)@B. =T_G<),P2X.G4SN91?1 MP2_"2-#%=K+EBZW?/F6Q2VTBM1\XWFP+!-\P&PPK14=F$THVP;".J8\QT,-E MEDD^ :O1UP8HS3&7'F' H??4\A'VP!&Q,-;# 7"V^#(3" !U,"&@CUX/ILR$ MC\=![&!++8;X6K@N-%P7)JT\# 3L;ME#0Y.,X0AL2!9.6OJ^- 2Y"/I'9!^. M3/H @J 1'P$09A3UB5)E@P=L2:9AW?+Q\%!/$/FQF)A+X%N//2"$8?5,PJ-Y MLX!2 ),HN%B]"'K2Y.<[VOL$,@*_P:+V$ILP] MM\1#IRNL&@_S9EO@^%]F6' -Y 4!87!3F;^.;#8;R0-A0JN C<&VH#.?Q(;*AN='^QS!RN' ?60/S#R8\"7;< %%RQI5#]Z&P$BA 6:" >6X M8!5I 9MX:."'YMTUF/3AVF BQPB@'&5*GS.K&Y5_,S9LR/\.=1_?19EV]_*, M'6R()9E 9Q@=@=4V)S/1$MSU>F0BX0061\\L4IZ\XU-N&0;3 0DV,4#/,0(X M#STBPG<4EDR%NRB\[SA<37$/P8EK [9?Q,92NBR!\C"AHR?H6&;D6T8ZC&*^ MDGZ;SLXM<)[^'>!3W(2:TSG<;>);BA9NBP5F1&0@1<@[!2/N9#$DBH76P!+4 MD/2N%W(&7Y_'>0X1<8Y%8HR0+8L@B,5I#=JMTDJETR.U:J="NO5.4U/J'5K3 MJDVB5.J-2G8"MSS"T.W4JK QUP(5#@,6RLF(>,XS1%FD M2N>:"H%"GU)6BU-V%%&6807W/?CU1+@@2X)3+VV*VWY!VJ7%@XDX&F[&]G![ MP..Y%'>^X411D*#U<#?#8%H?TT+ +9U)PKR]NOPU( /68/PR WCO172_8- +5-P"K;X[O9;OS@>/'PBQS'DJX!N@ M*L?XCV4O[+-9Q RU+E>G3/V'+@7>X<6J5FOJ] M\C%PE$%BY&%0D8$-68J-.6$?XS6+]JHU0G]).0)@-<_X_9FX7]$IPYS*R1+\ M+2Z<4I+8T*38V+; >8OG]1J(0ICWS"WA,"?)9&093_5HEM_DK!N+9 ]@YGG.3(WF09.)P( M:*RR,R^A8TIZ5#H@#CA0T^T,*9"B+H6F<0\XVB4*[!"6J<-<;.AH#[H,*"X7 MS[F'#*V?P9N!G@DKZS-E(\57* Q*LMCY3$-?P[1W)J!=2BUVH"$4T]#(B:Y+ MGIGDR*'WB#1H@(?!@8TWL=\>/RV#<:-KO5ZGI]2T3J51E3NDIM8Z6K=:+=,: MJ=2[="%^JEY;P&*&BWOE^B4&E>U>FQV1G08[4L< M23%ARE=\N!W3^(CG8_+ M7'-M$RCL;4",$]O*EO,9L&1/K=4:VQ<\23Q>X4Z[7JG(M=98LEZ1PF!*.,SST/!VI8+O4V*ZF MJK0F [-UF_5>IU+1U4Y35AJ=NM8H*[UZM:S1)3M)QV";HB+U)K'.1D>!_\=04.?*[I0[Y>"7\X9U?W5]XC=O)[?. MS[-CVK6:OUOO)(L,89A4TS\>>XYY19VA>]J[U< M^3??3]UC6FWOE'='7X?5O6'UN/].HJY&1M",Y_AT10>17L;?U9+$Z"?%"+@% MG!T+#O9 I,$D?C9&*/5L#$WC9[KAT, ? +/GDK*<)$FI17'M0A#8#B0'?M7M MD8<;8$-;YUM;F!S#TI&94QPD3EWX)I44N5LM*ICNQ$\UQ\X#A>E4[PDFHO18 M+C.&?6$YI8K<0.OK@O9]GHHI71:_?OBX>0O)XF$&+)/E?2S7YL?UGW\U:_5F MS.%WM@?34P>FL=LR/3G?'7]L'IS>>; MADR^*K[3K\<'V3,^)__YZ9S#^%3,T.6CN!1[&)M1^+V M5KNZ<$[W3\?E\OF[&0JWW,YI[TTD->K[REGWL_K]NG;>WSV6G3MJ$B I;G\. MB>F"H7.R-TMARQ_JMA>\L,BR4W>HU>^W[HEAMH;>.PDU';PGQRA^H3?4S\6Z MN7\]-&39J$]^3GK0]S]EN2#+'$7.9:=>$PF89T;L#BNXIF\TP03ME2XA<9/5OGHWF$U0.IB#3S#'>"F+S_W ML'E:;7X7(-B2Y(QMV:&% &M13-Y*^ /@>,Q,7@('/6#E&3P /_9Y2#!\_?AP M6/G2N/4]]_O1)3GX=M :O_LG,*D6H35N8F5B7E?.T/+FIW7=+S;57:]_K;PYK,*VI43@_,\X*^JLL5RR@Q+/1GK%82U(;2S4%6>#/<1B34CR0 MR,X-L,I3+"$?NXH%!:^"3\]L,(0GK.O@D#M#X9F$_B'1V0D'%P]/\^I$,)ZE MG;.=IYG,M9$/^*#QLE2QR>'!*MP?BTYS7+9WE@U[:JG'3Q::9 R&/$LH"_+6 M0ID)]J+FUB)2W=+>R2'<3Z6YO3'<+ H]4(7*MW.AU&D17.A5:[W:ZI*IW M:KI6E;L]O2%KBX''6OMA /+DN9VFTBPWT]]RK0$(!T/:@A#,-3_FS4[-C V7 M'_9F>80%7C8PT$73L L-B,,*GK$]39ZB/(7W9_.$41]^HV"%!V;GGL%N)@IJ MG M'3[@*,6>S("9//+FD&Q162Q:Z^D3P:"MH\#26YI\$H+[QX?_>5=^]A!QJ MI52NS5_LL=;KN!HO(->3MNZTA(;.3:YN4-G\@O8H'J2F;X>+Q^C"P@PCXDRM MH$WDI1=KJI3)]*^8['H\2QO)::74Q;(I/7VB8^; M$KF5PS]EL##==O[?MQ D4.(Y1NS B.,DV*6NYABCF1R15ZMSP1YS3EZ.N0-S MS@50), )M2PHD@1P0C!# LS0R#TLL'VW0&> K2^X(A&N>,IZSP%7'("#AZ'Z M)*QPSQ[]<11YVD:>+H5\P73^()0=I\DZ8B_KH\F3,>/<36?#./;I_87<36?# M5N?I_9;<36?C5FNQ*-:,L?%<7$N12\HV\\*:-HUFYT/"-HLN MU8JP0I@K_#%(UO@4[^@_=[[M?7JV._[:IW=!^A$F31,-EX?17SNC9!"8,<& BRHD-!.>GFZG#4D Q>?""NIYC:+S\)UY,C+GC4HL5 MFN89@\$]R-297B4=INO'86GI:BRT@P:.[20ZS'9'Z\Y+L1*!?(<3U8@ M<"&AZL6,+\R[E>[NY%)II3C!]9B &[^"PB@4J_.L4;@F:?I_ZXKR9,T&5;>9 M];;%!E73LT$3LSN%S2ELSK2!2=B<>5]!87.*U1$V9YHV9UD1<<^-MSG+ROKB MGCM(Z1X>QPMJ__+")NVHGG]0V&3&FL13XT$%TC()ZI4JE??D0YBN&W^CJB]Y MH_?D,;[892/"!A4VZ&9,4-B@^9(X88-F>3K"!DW3!A5QSRVP0=<6]WS$!ETH MKB=L4&&#;H".%#9HWE=0V*!B=80-FJH-JHHXZ.;;H&K&XZ!*@]WYOE,*:U&& M!FE5YH7A>>72F6]FWFS*M;#ZV25QNL0*KS0N2J6Z[$3XKNVYK,[X8O,CC+"YWKX7+>A*\OV M@IOEPXOE#W&)"3]YLTL\PB\JZ%*-^'A3@N=*K!^/]/E=/'B/F*X'=R%$;9AX MRO)(PSH=KS.T%AG.5+XH1QEN7I9,,XVU[K[/OE[C:S7VK6V:4VH$,B M3*&T13__4"U,H;ROH#"%Q.H(4RAU4^CLHKW-[)>:*73F4!?6A6TL"H,H;0#( M/V +@RCO*R@,(K$ZPB!*W2#::1UM,_NE9A#M$%/S36$/"7LH[Q,4]E"^)$[8 M0UF>CK"'TK6'=MM[V\Q^J=E#N[1G6(8PAX0YE*OU$A>*97DZPM3)\G2$J9.N MJ7/4^KS-[)>:J7-$NM045L[F3&?#!$/8-%F>CK!ILCP=8=.D:=-4MIGUTK!G M=FP8CG1&^H^=)'O/[C#U\/P_<6=.B@6W17D$GNAX'*W-2RA(8)I^$-;1YDQG MP\1,6$=9GHZPCK(\G6Q:1W][I&O2U1.3C4NG_[^]:WUJ&P?BW^^OT*33;\0D M=B#!I,S0'G,76B@#7/LQ(]L*UB&BG.PT]7]_J[4,MO.BY$%"PPR.(D6/W?UI M=_68M2\57ONH^E)(Y;ZKX=]QN51;2G<(WH[2J;%B;-.-I.!!N9^ 1P-!$Y>C MM:UZ0OKWQ]I0]X0<97(\EN:RJH%% M\R4#:>%C)Y2=4'9"650HO\#V9YJ1%:PEZZW,(&0+1\PI&H0TVMBTIU['!"1D MBNF8%Z\V4*+_ZW::0#,V;ZB$">;'2O8UK$2RQ)$O[C $_,=)&QY9/5\PJC3H M0]-X-9T KC..U!5["7;#,+OVR&NGD1LU/O_(#]ZC_OV=DC 72IHJ1Y69=S;* M_0YFHV+TODI[T+%+Q8@F4;;AL1+L"&TPND/L&7%AGVHA0W281Q*!91 $52^H EI[F7O5]\< MBX!KL$>%BMI/*U-!!Q%SLT2^5ZU_C.[1L]!/9V]F/5#9 >DRRT@U'>84%&+> M$*LIKM$"V^>-(^NH.6O)F],KN<;+/FCVO3I2=."FMF,$3)JKLQ_+J0>NV# & M/PW4]ZILZG04Y'ZH?=U?\1+,\YE;#(Y5G[D!M"'\GD0:H%S3_J%B5^;CZG#. MGO>FTFG.HY8S>39$=[U(@$#;N@\MOC%8GF',0(5!^DR8Y4[?M\8.#'<">@4! MO9BVMRRT137^"LCYF+@OQU6JN8V+8U:Y]<%/@ELE)%LZOO(F^7ZT3[YWOGSI MG%Z0H]X?A-XCAY=&_55C>?N3^ M'E[H^=>_+\F513YWSJXO3R]W:-L$/?GFM>*Y#/N(.LY4G_:W%'4[>_WVD#G; MY[QA?2X5^0:.)L9Z+KNP[WH3&!#--N&#&/;[E$<+/,> M1?ZHSUQA*!SV%?/T^8233MKR]8L?D@>3;U\\G6!X,DC@(XP?Q,G_4$L#!!0 M ( -N#IUA_X -_X3D .5P 0 8 =F5C;RTR,#(T,#,S,7AE>#$P9#$N M:'1M[7UI<]M6TNY?P?54YI5N4=3B+9&R],@W*J MDL(+,N47\.E55$R\83J;^8GW0659%,?>ZRP*+Y3G[>[T7_1W]Y[W=[:V?GL% MSSJ2F])DWWN^_7)[;V?OF;>[M[^[L__\I7?ZP=OX-#S:I(O?G!P-OYP.^*VG MGUZ_/S[RGFQM;__Q]&A[^\WP#7_QK+^SZPTS/\FC(DH3/][>'GQ\XCV9%,5L M?WO[ZNJJ?_6TGV87V\.S[4DQC9]MQVF:JWY8A$]^>X6?P-_*#W][-56%[P43 M/\M5\>N33\.W6S_#%454Q.JW5]OZ7[YVE(;SWUZ%T:67%_-8_?IDZF<74;)5 MI+/]ISNSX@#NW(:O:]=\V[J*PF("T]WYZ6#FAV&47&S%:ESL[^[V7[ZPGV71 MQ<1^F/+D]C,5^T5TJ?#ISG.#6/G9_B@M)@?U5[3=.=/WC=.DV!K[TRB>[__/ M,)JJW/NHKKRS=.HG_]/C3^#?7&71^'\.Z.H\^H^"1\,$XRA16Q/%X^P_?7E0 MJ&_%EA]'%_ V_/2 EV0?+O;PSZ[\@$,8589PQ4\9I7$(7PZ^3:)15/S];[LO M=@Z @'9?;8]@,6>W-?#&*ZLSV?W%G4D E*XR_J1 *ANGV72_G,U4%OBY6C#' MSX/!T8EW_/%\>/;IP^#C\!Q^/NI[>SN[OWCGPY.C_\7?X?/CSP/O]/WAQU>C M[#?\\_%D>'PT\$[>>J>#L[9$1F\CAYZ#O;103Y?W];S_O M[>T%/C:_IF?MY&D=( M14?I%!C2_-5V^1N]=O=@TXMR;P9')0?^4Z1>D";C*)MZ.#+_RL_H0_Q%36=Q M.E?*2_PI7#I2<7IU_Q/X':BM4*HR@73LG2E8V2A 'GI>I,%7[U,2P2+?^_ . M<<7I50^?U/E$=:G2F.H9W0%W(V#SD9,H#E5_'TX8GP9&#;WFGL)SW/A_6$ M=X6P/N,L!=*%8TS+C?_>^\K@F"KDB7O=O33>T!#$484@'N.NMXT5Y_H*-TR_ M_VH2%6HKG_F!VI]E:NLJ\V=PKUV/HO"#"4QKHC)5I+1_XS0&=I+W/9AEK')8 M )A:=A7ERIMEZ644RN51TG-.4914CDT^\4')FOA &'A-#D3A396?@.: [R@F MH.!XH1K#/$.^ERFH_VH;Q\_2E+23PA_%2L]GE&:P.KB,L3_+U;[^P94/R/U% M-*"N 4>[@!T6@<"JC%\6J?Z ]1CZA-62GY_UG^W]=/#$(_D*N@L)6-2S0/P5 MH1[*I[TG9J(G%GH404 M1KY/B[Y=A"M-\_G3_O.G]SO-O>^;9N5DU%9/B $TU"*=\ILNHQRTO#@JYON3 M*(3GR\'9>7K@$BFMUS;1QG\K?;P!@PC9(#&\1T\EWSG9#WX63+S=9ST/&?M? M98N'\(TJO(_E=*2R!5HYCN$@?+WGN?OR(/>&DTPI[PM)V>'YF[#6=EGBL8QQ[8 MFV#CANI;1733)^9I8*#E90:C] MV,X%Q*<]IAZ%QUO.X* M_?TRX4M0:V2^^#(_ .LZI%E1D(!L532(2[!\J^,2IZ]W"!-_FV;>K,QF8,0V M'$9Z9&W#M@9SVWAX[&@E]W@TFK%:7(! MZ^JXN&#H8Q4![2B]0T)V,(/CL;MEWE5:QNA'#%*PTW%,;)7[WCCS QPZSM*G M%_;LNV7$25K0/5X)^QU7GLM/S)U',ET54<8[UO<>UQD?? L4_.+GWM2?.YX/ MH"C6T\(++)'+AO'%X)KEXS&^[16/1>7>+0[_!-;^G(+/)#?K>O^*3]EDE)\%_@7/N=%_X4^$FW3 O[?RG7%N\K*F5!.DB;B7;U=1 2 T-+&.=.2IJJH\1#>=9W_M\"B=S$JFQ=QB"*(G@ MX%(*@G 0(LUTZEQ'RX3<9O+&'O"A*+B,%/ $)X4N: M??5V=W_>@7,.0U#Z1J*O101YIE_W_RC&U0?]:\D]'6O,2J)>Z0EH1)D*%(PU MK"PV3.H*-:6QC)&C?G;!19FP3X);RX1B.K SM'?.?N&-.O#JKCU%P/$G5*2 MA<$@4 /JF:>BM@;*/.IN>"U+AQ&J(3/0UGAH54H /1:Y.#!B;0O) [0ZO@&O MOP*BSOE&&+<:CX$+;ZXTM/XMYH2L#7+KFUU$^Z?O!X?G ^3$ V_X[G#H?3GY M=.8='AT-3H>4HW+R%CX?2%+*'\?OWWN'[\]/O*.3C^?#X^$GN*UR<<\[_/C& M._S];## _!AO>.*]'GBO3S[!IZ^_T*.&@[,/YW09/.3-\? 8'N69K6>/#/\] MR8Q$ $7@ L1V$M94.R=+JOJ%K$^=#G9JN_?4V5 W9:L2Z:Q^9K+!9OZ%VAJ! MUOYURQ^#3-[W8SC7N3C=7K[H/WOYD^;Q_-E.+H.W_7$\?'?R:>B]/_YP/#Q$^NK1HYS;#X^&QY^/ MAU] F+T__./UX='_ E\T[X6/F(X_#SY^&M!/__AT=GS^!FZ&IWFG9R>?C\^) M;N%XG ^.F(:7J9GX'%0SY4BUG8/;9('-/7GZLG5/]BC^WY7<]E"C>15-P9#/ M O1K!^D6*A [3Y_N?E/?=G="H.7=_I^S"\PX*'Y] B)M-HF")WJ4893/8G^^ M'R7TRE& M@?4*W&NZ\C57X%]M_]5D[8)=@"7T*3WVUR?_>O/Y7Q_VGB&#\W]#F60?]Q@7 M >=CZ>#F$WYN)]RD)KDSP9A.7!\:>2B6F-XK_:=IS7U]JS@34?2R__2YB"*^ M\>:S?_%]L^>DI\?,+8A,EMMW*\[W!V69U;.RG&?>F$%JJOT^Y]W2R>]HM]QU M:SNZI[] '7LXJW]%"KCO"A=/E[BTFO5@ZN!W/TRARW"BY[OO0&KYPI#Y/#"F;SS4=3Z]+JS+"N%*F"X M%'Z48#( 74I!H%F9Y:6?&.]V1ST#$WI+H8:WX>?H'$>WZ4AUEVQPA.LA2S9Z M'B@BP:0:?<_46&4*9D2I+WE'E$O7$-R3S*KQU#:ILSSRUQ\X#>FZY6&-@DDG+:^#Z?9,/H5-P:@F,MBL/6;L$=:. M:>%L2LLX=B=<_B:E:%T#O+7*M+^<5-G[(:4**+V?!V<8WS!RA91A5]JUO3?>S64R:965G<)3>2WM8QR::-WKO;[1'--/K_: AJ91EFFDGZ*:2!34!PB8,XQ)65FB@+$E)>" M(BZ%B['LNQ)S@4O'RH>C'8L-H?4D2L9F:I:<6;#HLG26X0N\Q-2?\4SJBA2] M&7AV$>5C)S&9\DW_74:8NU[XWW!DG'R+.7N818_,/1T!B_1U MPAW*.3F_V8 M=S;#/!$6!/0>N[T@I,8E6AZ2J6IH!$Y>P!5Q*&9L/O0(#C (&*0\P+N!O?BV_$7)*+E%(.\==,Q>H23;W&VE0(%5Z#2> ^CQN!;K@V MZ3GFW++4G6-M %=WZW>!.066'WQ,WX&T8YEL)X[SQ>5R55TT&B?IE;I$(H@P MR0JI(.;%R!1G1D[]K[!=\()\XLW\.25 P[5QI$H]'CI?"6NA^+M,"_/.X?]I M6L(ML*N^R=RY]..2KNX^O-,R+J(9O,6D$-MEDPJ!EN,K$VRL<(#)FO91M9Q3 M)%O0[7!'Z6SXX9\E48?.@H? M3E))5YI$(RO$R9JXIRI*K\*!5BUJ6B?,W'O"S'TI.VUQR@=6=O8>4%0O3QN_ MN1XT=$5F\!5F'*OP@KQE4DFA>7F$A2Y?F2>9K'H4J;90((!+59)+QCOP992E M)%VYQ@-+DE)MCR'KCHRKL2:]X5<6LI5+.,L(PH0AL&Y0X,I*(\ M])Q;"N+A+8F]?@Y&MYNY3_+I(DU#5#UZ: J.D1\7$9Y1,.1GEM9)D M5]\"4"4NF$(M@?0\U'$JB@O<#=\C&?%K$74E\[/Y$F-<*VIHTO!D0AAL4, <4U3_]&^]6OT5UVD=H2[W1FLS YCH):J/A3A]\)**NC?% M@[.2SB>+&L&"PMN6JL)]['*UJY= [?!H(D-ZK3S>O[@ A1P/$.W. M%AH8P( "I4)$-6/NR2H^*'+X5-P.?@&/$6Z@=3?G%%89-4LR+LG8 D4Y]J,I M7AVG>4[G32^CKGR6-8U0C(HZ0 Q_91)Z M)*;N(6W&$-;V5!;F.\U>D9OCI7*YX=",9E=HD24DC2L M2B1YR.',D9JG:#ZJHHB5WG2\C58\=PI,!64-CEJE_!$+4&91YA1#&F%>+\BD MHVK83'4J>!UC"^J"U7H-ZPJ5J^Q;)5BNL&:T_(7]:D\?\*CHZL/O42BM[$>Z M9$&YF%'PE3GSE+J=?H=BRI5!^36%T$I"KLEY.NM0CQS=&5@)B(<9':-3J@/O M>YL;K351OC08&AVR#G0IL U3/GY/&(HJ#I', ;6LL M6Z/'PS/UQ;,2#D<0S[?(" MI3'X".O\FH7>06D0 !3UWIO@ZZ\>L0EQ4$!W0 M" 2!&WIAF6FW7!Y]\S9>;'K JF#B,X(ZJ3E-0X'#:T,BLKH);>VU5PM/ M-ZM,LZYA46M,K(<5<2.278Y*YZXU.+4\G .+1.>=K+ I%@\;BXN\8A7EP2I< MS84RV0N\2&QZ9F!1=&HO== BO0E^IR5WE_IHQRBOF9]":1N@EYGP+*UF:X"G M5P]%50Q_^D:'::S]7['9"1D)[M:5ZQ714B--2R.P4U7;:*2-)\'VJE"4%@7H M'LBXC)PF1U=4!@G;V;G51L(X"X%$(X>E&_3;J M.!SCFD8@AHGKHYBZ0Y2W\Z>H__H,=L;VAROGT<"-N>[^KYVF\^R'%'YO3\[> M#HZ'G\X&'OS85MV\3L]Y\MNS!TW/N=40U=M4LC\NTRC4PC5,RU%1S1>I.Y?( M%67YDH,J,LXXQ,1A ^TE]4V2HK8=,M@<62M>^H2ACH[B5N*$Z& M"U=<,HX*[(X9X,;#NYL'1\>'RZC=^I(W01B6!6]C=U2+]M(A4'?)'47/$=ZR M\96T8M?U7-=$:LXX43>!)$B;6.J_ZW1XU7U+ZVR4=3;*CY6-\@AE^T-FHVBV MXR1$W%RVO['N-,*Z)7 P$U4R0+NN=$$S9XP!,HQJYI4TTZJE)1*YS,F(QHS# M&!/V1;)A; !D*=IV:!2B?V_.;OUK9'U4P\H4%IX5%,T7N39S2F8Z_(!A21Q] MG%:B^3V.<:-GOP2IF<%:DC)RE47DJZB' .!NN('O,)D%<)$(^EA=P&PH+HQQ M:ZM'H-S!WR-\?6H5$/,,6;\2 ( MY5B:P"?L4W8(Z(AZDIC2T?-BC>;-NZ,[3-;@:F%+P;A.1#";^=:)9-&A0/0Y M'Y0;X!@<%L.W4IY 5M1H=K.:I:*?6>!H26WDC&M5^-FI0;63=4#5I0':B]VX0-NVPV#",J"R5_:1L^T_5?#8D'P33#D& M<96'1 >,_1C3F2I4$D2J,R?$1!EZ7E""RCX%W3/R/U0TV UR2SD<1A@(*I/8I$T%DR3"(]-#9X\/"_!5 M%<$$?P>A@KZM,/,Q (##GJ@IEK\B3YF6L0\+CQ,O*2$^'1=8Y-P#'IH 6\+M M0/*.X8& O\ O1KJ!$II%^)87PJT$; 9XSS-!"EHF_P,!HW7 MR) 9/-IN/]!4()"WL[008O(#X"2YKAESN;#%,@$98@0L.M)-LY:#V3;5)Z+V)?:M24!*2(.,@0IOG7!A2N8 W[I1S'Y M"(U9)U: LR)&BC&H-QE=JXX>90?N6AD77;('U<" LOZ#JH&U65M)&@>F7\XP MM-["]FNFBT9SYX)Z"2^6B2/+JF*YU GZ[5-:)X=HS>\ADT.&DR@+O5,0(O/: MYMQ(_:M2&'JR+Q*XIR7UN (IZR#.CTOR#Q-QRO?L4T&7KV'>/9MW=>H@:0M78<"&8M22[5IQ9&BOOOL&25W& M$P+J3)I@A11*7 EUD_!D4YPB-/4L;O2%D&:$@0/.K*&HP(KSDX&*_PG8O[Y1 M\)*1&[D:762<12 Y=87XQC7M M&,>41WG1I@_9]&[C%*)+N!, D3#NS#KIQ3*5ATQZ^0B?4.Y3$=V**;F*^8AQ M5:@=S853X,BGX%-HD&.-5!-7. M*MRB\?//%:5NX]MF]0%F_1 W)KE,8V3::)[.-QM.Q^9=& 7U*3L-O^_2![CD MP.=8)^R*DY7S7/P"QJ1U\FQAE!W2\SL[#&4F9% MS]A<&^C-U79.&X6(J[\6<=!R@!SL,/9<;1ZTU@]HLN1@]B2:PD:-=8X?N^N9 M#^^+'P+VC':[X&0M^8"8J$A(*R#!:@4R2G*F;[//;):E5)Q 08R0%%]+XO6# M5CD<5$."^ SV.OW ?!+-.L,(HFQWR7([UKQUL/F!.$4VJ;] $/$NF^MD#T5H ML99>,\Y9W?;-ZQNE.E<312L.+R*Q6"-D?C851H$&$+B"B+]J=F]R#US%W^\7 M31;1<7'SV%/%S%7%M;((Q@RB7W'(R>^I3IY+; M .S/'EA)Z05C&Z,!"/>PK0C'?&T.5"3W\P>6W.=\LF['"WQCT7U3_N@OYH_: M$X0?QTHG4MT5CW/\3LBW@.WS)ZQ/4Z :+7I4T$,U4T0:4CP7%%RK-'>5!B0_ ME=E)U'D7KP4! -0N)9V% XK(U5#ED5+U:LB;2JV(#_E@)N"NW#8GJ)[Z!U+8 M'UTU\K/^BX<$#E%4CT8QT>\S_4$[!",X%$NQ3!0J>(&29YND=/:-]U"%\DDJ M],1\Y7(D]G^C)"=[&]E".C:A&8U>1K2[&.@):9V!%^A.=VSM(W/3,^5UPF#T M2//*2',:JKFDR,UH)8".T7O^UM["8Y.T3_@?P44\&@W=PXUFN ,/+8)9ENLL M0"2]]%CAX>I&AF899:G/,9K$U!;*"YQ*5F(@H4X5Q"0.B3ZAJT([B#,%G)4= MIJ"147X>OTXOKDV7G/K?HFDYU=4&,]1*BL)$M/H/2/X>D?PZEV&=R_ CYC(\ M0EGV\D%56(UM>3R=E@GR=IOS_T:-,8-Y2+&^,;,3XM.GC"X!C.F, MTJUN!X>C'J[J=?4?[APA3&AO9_=%1T8$\%SB]D$646,Y+I8,P'S$'^/(J7U MD3)6(8:LJ'"07$=N]),2#+1J6 WF^-4+*Z%RBH5)GH3C7V;P*WY?SSJJ@+K@ M_1?4#U-JGL<1ABY[GHH*+E%OK_K460U@YX*.G*CY@<4/0" J<:V3$LON=*F3 M1[0F=$KCXPC?[$*"HB %24^%/;^,TMB8RK .!UIQCVPQJ<_5<1@"< KJTZ#D MS B*]^7>.,(:$E[R7%%(%NZ$1^9EY-PG=?V,M591M&,0J(TH9SV=$):/WI0[ MS\;9P^Z KL,SJ>:5R-=Z-19-ODIKZ$.S&3=NM+RK!;C>(-H?#!F06\(EH)8@ M19"6H//99?&<2*IY!1.=3!SF9%:?O#*,XM9XF=T+ZX8SX6 [L]IM/1WE<-,D M>9 DA&#;.O-0X,$$BR*CJ@/P+H9236W-/RM=>7.!17G%V@HL+@+*G( D$)>0 MIE'#6P94]C*P)OG)#,F F206:$=Y;M(L/OJ" /3>'Q$2@IB^WNO4U"6=!$$Y MT]>=^V,E:;SO8(WAG6XC)OW8<^MQQ2L'&F/&OKYJV"_G'.A.N@!6,Y=9Z\?H MM.'?+8\YO. \$0OZL#2M0&_AG6TQ>?/VO>;2^;NS5 ?/JH@[><,3N2:EZ(=I GN@>JRW6X/.X.5M+4P.E@L8&' M'J>5 3I\).U:XW7UK/?\ARP@&A[^[R1M5I=QZZ&R7T3%).6%;,]*0'$GJ$ 8' M8S.0SJ7TEA9 G)0];;1<*B833S 3&Q 4L'MQ9'VYZZ :<<6'K*XXM83ZAW.N MALBL;LXD3]W\?DZ77\1*O V] M$BL=WD0Y7.D MD@^=EQGRF9X;DH3W]RP?20R$GU%PX8*M3+BLBEN7HD[,"%>O5:S9 M^"76DF:9 _NI&H#KE.;""(HZQ:5[).SV *Z2H.LI0$O:C0IH\^!Q,JJ7>_?, MJ#;\S9L^[ADR*>#5(E:L MF#'0#NH;&",1^^):(>,U'Q"X,\JPTQ6K-B:O85R:Z)X8X(Y;4-SSDAR+4K3$ MM,RZH6^GU$V_*^$IT]C1_2KO1$XG7MGNU]S4 M#I75:=LPHZ8$ 0-VN,H;P^4Z.-#P]"P%%=MAUYR>8#D!OGD!(]".42JIIW5P MC 1">+K">^-]@EYO+J*H5&"9": M^#$&:SI88I/#=O%5/^]2YB2/TNG> I]P)50AF$H&LOC[6?"Y@[ME (Y06,@* M(%[>,D6$S.W\#O7@+H'J&X,2,9TVW0Y+8W7I8^RF=>2(>_ 2AJJFB$M^ )8Q3 M1+;H"1RQ2G*E$W>Y^--D5^-(<'X5],F"$+"HT(*NBBT0\5MJT7^-DK'-+?N3)+FKVNI6:#:PGV:HDV/E/+W_(?6OIJK5 M3&!1L4;IO-%YQP60>$03TL*SG446N4&C10KQXE=C8=X5$HIMH9AJ'#%I/E)5 MV#EG!S.G>E2LY\92?*H^9ACN (FP#G!: :+YSR:_R+74D%T9).\&2GTKL=3X MQ3U@&UM6<5,8XQ7:-+ILO<'4,9$+-T+O\Y)S@K@NXS&"$&L?MNXFL^$ [XTX MT\)4CJ,E":R:(%U&:5(*O@DE]J-%K"'9-[M@;&M98@(>6)\-8C=RJLQ4MXDB M)?[2B<1I6G>$2]62 "/"I^PX+!?5;C],1)O63@8*3K\JVB3&&Y;+8KH+1+'K MHVSZLA&M!4<0S(UU('4QAI.:QIE.VR;./^&4.D1T JL&'C6E(B>VMUW/J!?" MP4T75AM&5!G44>O#17[X%YR,OSSJ[8L?,FGE9/AN<.:=GIU\/L8.U>O\%7CJ MBX?-7]%B56.U8K+&]^6Q,%:U8W9HTD*CJ4JA%( HI)1F.GJ*;:,VKSD:KI#T!>#YD(\#'EF@*!0: V8*&3 MCWMS2KMV;F4EM9*KOC!G'S-@T1UM!*=IQ4"9JM*Y3,/)2$^3FF1J-VW1VJ#7 MU,IJ*1F=#YL^#E'/8TQ@WG2)LY.I93 MM5T:/-0O\I0Q)?1H=9IK@"&)G@.!0Q@3)E(Y4C;A5/)LM5;0!;W,GM>NLF+M MFER?9#G)#PF;Y9[DMXQ8QJO-S_>EBXJN+$(8 MP)6.[)J0-2$_)%03[@72@&9)WZ?L.$1K>E6&BTC81F;9C.316 8IA$3NWI8T M6TGL).RVJ5^@&<;5UQK<4V6Y"K7 BC)Y0<%6)<,).9FQTG5$O[TA>NK!LY6' MTQ.L3*,$3M.0O29^>(ECC.5ISY9CME<@.C.4O>8[/D#H=8VCYTU<8">!^"IR[DELP/E]#=AA7; M5D]P"\VP/Q(5_>'Z)U(U(NS5L,61I(N6^4"JXU3'T1F M,CV!DVD@PG<\*;63F-^:*1UEC)AJ*"/?I[[Y68MZT"T5-WS?32-C%H(^D9<(OY.C3V, MG;'KNB']G"C+U&6**0#H$X%[>QT2>IUEM,XR6F<9KZUFHJ0GTMZ^B6Q>.TLY.PBAZG6>*K#^>QAKYUU9M%LM6J^8:!&*RP# ME>9(4COMUUQQ1:KP'&EHM2EQHM4HC=RP*]EC682#*U5UYE(0XM[;"FCKD0X)8 M':6V).'[-,? G_&)+/,Z_,PJ]E@$QRGF>Z^$NG.,=8E-')4NQX<=U,6 M(^/T2.12$(HJS)UBMO5)TR?MYP<\:56,(H^;D+JD>?/C=PBB@3JB"" M[:GX2-:4#O&9KD^$/A&_/.")^ --3.(=>O_X M=/;%&YX='[[W3M[2+>>?CM[!7\?#'K4'/_F(-YV>G1P-!F^./_Z^]H,YR50[ MCP15^ON4F-50I0U$-$%Q50Z,H;[P[Y^;\-ZWE]/A\RVY$UBN]( M63E,YAKMS_2633-GNS&.*JB;FM@N@"X3M^NM-22L$6$"AD#!? .EM!B'B"YC MD.+I4)'[BNP,4^% _@4=<.%2*5+#I25=:%P%KZ&"C DVO>%7D?V$IWG*.%BIK1<1MXMS'S$'X_?B:E9!E]1;U2SQ M: YI?;;-V7[05%._$,AF,L%O?L:/$\$ST/9*6WF%6Q]M4FC8B[7_..GA(9%] M%I:P&?,.9#K85R!5HWR"V,Q@?B6%GT7QO-$HG-V*%AU"VC F1 /2DM? OVKG M84][8GN, $T>#>004KO3DDYD$V6-J\-!I-79,\+F5HCX'ZQIHX[GLI0VV*,& MVZT)@H/":1#X.=<#4V6 @1RD%N6D4. ?@L2( MW@*5J#&*&VI8JDKG6T5"77[EH,D(,[WH,0IUQQFU2H_GFCRPO]!Z_QO%PPOW M'Y4DX/AB2W2D\_+.]7 WN)^=0(=(D+H&)%-+<5SOB.Q(N/J)K&=L.FTA+:J] M9NGFU*Y76E9:W<5*6ZM>,T#+Z6P;N&I;NOK3I?(RJX4Z6MK".;X!5UY*$HMY MCM.XM!V[U1F5VVG.GF5' J_I1^AG? /9B?NHPU0) L3'&K6(2&X<\ MUU6;<*]NTEW)5VZKQP[\&#%*3!VWJ<9&^&.VKSBOV6UGBVZ6!-,=8;\15QC= M[6*4ZAINJ?#&$<1IL'P=KJLV-;A>RH3^NJ0S65W,BB%RZ<>E(0WV6U'^G(&< MA ^Y13?%'?Q$MA=V%M/38 L8^Q.KLV#+UUNAMR):^11K@5U))! ''LCW(/:C M*<>X@-9C5A.X)5%%_Q%H1U&"N6T%^X*;K<7Y@%-* 'Q5ZH-<(09SS<+N"]7A M,G"\]4+?I*EYW:'57JF^T5D$3H1:0VR!N:%,1)?Z6-#H8VJ8A14>FUJ9:MT( M:H]1FV:%T3KYW](NHXKNI*%H:Q,P")V<;4J;;!I T>X=@$6!%+ 0UZCV!&QI MAQH)!59T [2Q;F /$VDDW:,7B%['I7OP-\+]@MJK7^:FM.A)UT-![B+HAU(R M?.AA4F9*)9;6N*,F;8H%@/K*Q7GS:J9N&]6O>8OPEC]OH"$@!=_H.&YRL<:3$6TP>]F&;I\Q:Z$[5HBFU"MET;].(R!33T7XZ3\;<(;;A M*# 4%G=RH"6&.@,:2C&&F(2^Q7#1ZW!U<^2\YKMV.)W1]1M>6K<>9_I73'<9LB MDHBNO.6L0!/(C[46H8I6O&9$PHJ^KZYM:'&K'CEEO:3'3\TQ%-&8@)M00 MQ@\O2?9@+ZVH#IKX5=^-Z0)3#)-)Q64U=7-U\T7\'4W$>E!\V$(5/U.WPDP] M2]?4P=017]MIS#E2A R$6Y^;BG[J1]3I!$;SQ*2=.+1$>1H58LJY:N9F]"$( MJH6E/*DDJI7AX,4/E&'QZ-J,O^CO/B0$T!N_\'6S<)TY?II%EWYP2YT/&ZUH MJSQJ3BV084(QH;M2O5F>8V,L$J98K"X8<=S7N$&,)ID*)M*C9LA4*\08F#@Y M_]('&=X$A+7L:SR.L,FTJ#C88@\8+ZC\5*R>H[LYECQ!L>*K#2,F$9B!!MME MDNH< OP76]3FCB,GKPV"S33US9_.L+)J4@*-4Y9ZB$UYM1KUWYF5=!/X?TCS :8Z@)*(G&-*N2VXS)C<$$"&/@5'.8I&A] MFR3M21DBD0X%'81ZR.[#A0!SGTBHY_1_[^F5,UV:S?K9RC3LFYTFTH(=QC4N M8R=>4MDRV##_ MG=BF&PIL>.[%]1W020N66[*MX,F"B8W=-]NT9 ;,@)HS!ZE 0E>.5<>&]31<'#DS-0I%([MNG4IG&/U#0F2] M]Y.+$@[$=^3058P7 D 6:W5A_5VE#[KI<-^B$?!!Y(\)2M"'H\>#=@%(!LD% M)I.Q3TKJW.R-B$,E)<&6ZQC@$GVO7-5K^Y!M7'*XIW%KAICI'0!:6+6AW)K6 M#:T_)/K/(=HZ4XTO^P9(C;QN'Y1B5GC&:=X&'4W71#_;^>7P=K2>A;UVK(]@ M<3=!\;C8LG"G#-PYB3WVB$XIS)YQ9N1\89U%!:^7U"M>HHFT)A1$-:>SL.FL MY;I %KQBE9)NO1O9@MVP,;F0'%@H="/=UX,0Z-&]C05>8+.4L6]8SD4IR' & MM?Q8@Q:=*08^T*Z61GN-JL_\< M,1#^ C.9LS+0/6&"'Y"'NKVOT46I\V;VGP-[FCNP-R9F@1L 4[B@W'A8 M=Y;>!OXM5(CM[,>TEB:G@O2B*#'I>FZ7ZV;#QVX=\5&]:E=KIB:-4MS MEB*94*-;6%%^0=?\^NN\BG5>Q5WD5=Q%,X^G+UEB57H(?%\[C__K>?9_EV;N M@IAA_"N.MK8,*]+Y':WY@C%7&QQ4.QH,_OGN^/7QT#OD5@9W-#[=X&5A7XG: M#%ZL-H'A!&%SOB!*HRLM%1+SGED)(+?4>/ MLAW-IZ398):B@ )Q&F7[@_I>O6U*A7_NO>S_@FOL$;7]^@0_!"+B]JY:K#!S M1H>*/\O5OO[!W6+<0-E=Y*4$#Y)HT/3/[YI$J[VGY)=^S*.CZ5H1"U]%L6TY%_AL0"# M:[*CZU+$WL_]G]>G\"840;XI+:L&)*OLXF\3'US$"V$UUHRP;0MH"HMWX .C M,ZQ Z\XJ__58WS7I^N7S5WDY:VKS(-I1G6\N+(:G7VW#/;]Y#I=$#PR5+&77 MVI\U([HV(P*N_].:Y=P/RQEBQZ5BS7%NE>,\OQ6.LV8S=\MF=M=LYO[8S"13 M.?HIUISF5CG-WIK3_ "-YZ,.P MRGXU^,XVN<=U_/6.@L0+XB-+8FLMFH.)8=LG\CA%' M_?M*$8([RFYRIHJ41@<1Q[\5^_.T+/;'T3<5N@%]'J5>P*KP*5:^SN+(0K+-6IRH\F3)D.*VC$6UI4/C@*[I>4W/J]/S M\;@U7#RSWLL,8SP:W:4E:(O)39K@K:?3IID:C:JWC,PUK)G;_U*ZDB(9^1I& M/^74MDKO42RFOO1-4GT:88K6AO-N/H<]3SSEF^L3M#Y!]WF"EAT3H1BY_ MTJD-'<)#'Q0^-VM*7E/R/5-R;*RY%@Y?I5$0%V.%\&D_#)DNI4HL M!D_+2_ MMZ;3>Z;3CRT@)Z0;]W0-3"/[[?RL2K;_45G:<_EN@\<:=!7#9ZV"W\V:+6SN M=VI5V/!!A9QX]]R4C]0=)S=8:':SK+32"WTQ][[K?__;[HN= [N$/PP_68N] MQ\U.L'K6.?,(IHF8$S6CY,>38VNZ>]QTAT*ICII*&!1842W@-ESHAM]1]^A$ MBK="]0WEF0:C92?2QK=-$"O9%I%3(:=86N9%&GS%LN4 R^L8WU]< M4",%U)#4+Q)'UN[V4["KKZ1(;F.^B> A,/(7=\4Y7V/@733JWR_^Y#<@^NX MZLWV]!]-GM=S(]=K2>^MBN.'F.::Y:U9WNHL[VT-) M96TG\ YCAOK<1;7+! M);$E!$G!?DDM$(\+V*)5TLG#0K#6$_^2FG:CLS!348*0<;:4!+$PZCPOU37) M6WHLA!-W $.,-ED3[6:86F4@NP3AP2\Z7G(I<'9[.UBU3]PY].?4*"I0QK2Q M+^DL>#E@GAS!X+I8_78I_KNGW81-C]# MMAUA] M[PM82?7A!,FG>Y(>3;"N Y^$R'!92J!?.0*@8!=>;/"%EY/P<1S';5U+UYK; MFHW=6A!PF6WO%,XQ8S).6^Y1QYS)=^(ATC:.:IF=*G4,?"#$)=:63?@0R3UR M R$;PCV9@D7,*U=TNYR?\WL(H'?YF]8G9WUR;N7D'+4+;6-X:]CH'OU6^%]5 MP@A+R.$1>H*,

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end XML 88 veco-20240331x10q_htm.xml IDEA: XBRL DOCUMENT 0000103145 srt:MinimumMember 2024-01-01 2024-03-31 0000103145 us-gaap:AccumulatedOtherComprehensiveIncomeMember 2023-01-01 2023-03-31 0000103145 srt:MaximumMember veco:RevolvingCreditFacilityDecember2021Member 2021-12-16 0000103145 veco:RevolvingCreditFacilityDecember2021Member us-gaap:SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember 2021-12-16 0000103145 veco:CertificateOfDepositsAndTimeDepositsMember us-gaap:FairValueInputsLevel1Member us-gaap:FairValueMeasurementsRecurringMember 2024-03-31 0000103145 us-gaap:USTreasurySecuritiesMember us-gaap:FairValueInputsLevel1Member us-gaap:FairValueMeasurementsRecurringMember 2024-03-31 0000103145 us-gaap:MoneyMarketFundsMember us-gaap:FairValueInputsLevel1Member us-gaap:FairValueMeasurementsRecurringMember 2024-03-31 0000103145 us-gaap:CorporateDebtSecuritiesMember us-gaap:FairValueInputsLevel2Member us-gaap:FairValueMeasurementsRecurringMember 2024-03-31 0000103145 veco:CertificateOfDepositsAndTimeDepositsMember us-gaap:FairValueMeasurementsRecurringMember 2024-03-31 0000103145 us-gaap:USTreasurySecuritiesMember us-gaap:FairValueMeasurementsRecurringMember 2024-03-31 0000103145 us-gaap:MoneyMarketFundsMember us-gaap:FairValueMeasurementsRecurringMember 2024-03-31 0000103145 us-gaap:CorporateDebtSecuritiesMember us-gaap:FairValueMeasurementsRecurringMember 2024-03-31 0000103145 veco:CertificateOfDepositsAndTimeDepositsMember us-gaap:FairValueInputsLevel1Member us-gaap:FairValueMeasurementsRecurringMember 2023-12-31 0000103145 us-gaap:MoneyMarketFundsMember us-gaap:FairValueInputsLevel1Member us-gaap:FairValueMeasurementsRecurringMember 2023-12-31 0000103145 us-gaap:CorporateDebtSecuritiesMember us-gaap:FairValueInputsLevel2Member us-gaap:FairValueMeasurementsRecurringMember 2023-12-31 0000103145 veco:CertificateOfDepositsAndTimeDepositsMember us-gaap:FairValueMeasurementsRecurringMember 2023-12-31 0000103145 us-gaap:MoneyMarketFundsMember us-gaap:FairValueMeasurementsRecurringMember 2023-12-31 0000103145 us-gaap:CorporateDebtSecuritiesMember us-gaap:FairValueMeasurementsRecurringMember 2023-12-31 0000103145 veco:DerivativeContractCappedCallMember 2020-05-13 0000103145 veco:DerivativeContractCappedCallMember 2020-05-13 2020-05-13 0000103145 veco:EpiluvacAbMember veco:PercentageOfOrdersReceivedDuringEarnOutPeriodMember 2023-01-31 2023-01-31 0000103145 us-gaap:CommonStockMember 2024-01-01 2024-03-31 0000103145 us-gaap:CommonStockMember 2023-01-01 2023-03-31 0000103145 us-gaap:RetainedEarningsMember 2024-03-31 0000103145 us-gaap:AdditionalPaidInCapitalMember 2024-03-31 0000103145 us-gaap:AccumulatedTranslationAdjustmentMember 2024-03-31 0000103145 us-gaap:AccumulatedOtherComprehensiveIncomeMember 2024-03-31 0000103145 us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember 2024-03-31 0000103145 us-gaap:RetainedEarningsMember 2023-12-31 0000103145 us-gaap:AdditionalPaidInCapitalMember 2023-12-31 0000103145 us-gaap:AccumulatedTranslationAdjustmentMember 2023-12-31 0000103145 us-gaap:AccumulatedOtherComprehensiveIncomeMember 2023-12-31 0000103145 us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember 2023-12-31 0000103145 us-gaap:RetainedEarningsMember 2023-03-31 0000103145 us-gaap:AdditionalPaidInCapitalMember 2023-03-31 0000103145 us-gaap:AccumulatedOtherComprehensiveIncomeMember 2023-03-31 0000103145 us-gaap:RetainedEarningsMember 2022-12-31 0000103145 us-gaap:AdditionalPaidInCapitalMember 2022-12-31 0000103145 us-gaap:AccumulatedOtherComprehensiveIncomeMember 2022-12-31 0000103145 us-gaap:CommonStockMember 2024-03-31 0000103145 us-gaap:CommonStockMember 2023-12-31 0000103145 us-gaap:CommonStockMember 2023-03-31 0000103145 us-gaap:CommonStockMember 2022-12-31 0000103145 srt:MinimumMember us-gaap:RestrictedStockMember 2024-01-01 2024-03-31 0000103145 srt:MaximumMember us-gaap:RestrictedStockMember 2024-01-01 2024-03-31 0000103145 veco:RestrictedAndPerformanceSharesMember 2024-03-31 0000103145 veco:RestrictedAndPerformanceSharesMember 2023-12-31 0000103145 veco:RestrictedAndPerformanceSharesMember 2024-01-01 2024-03-31 0000103145 srt:MinimumMember 2024-04-01 2024-03-31 0000103145 srt:MaximumMember 2024-04-01 2024-03-31 0000103145 2024-04-01 2024-03-31 0000103145 veco:SemiconductorMember 2024-01-01 2024-03-31 0000103145 veco:ScientificAndOtherMember 2024-01-01 2024-03-31 0000103145 veco:RestOfWorldMember 2024-01-01 2024-03-31 0000103145 veco:DataStorageMember 2024-01-01 2024-03-31 0000103145 veco:CompoundSemiconductorMember 2024-01-01 2024-03-31 0000103145 veco:AsiaPacificExcludingChinaMember 2024-01-01 2024-03-31 0000103145 us-gaap:EMEAMember 2024-01-01 2024-03-31 0000103145 country:US 2024-01-01 2024-03-31 0000103145 country:CN 2024-01-01 2024-03-31 0000103145 veco:SemiconductorMember 2023-01-01 2023-03-31 0000103145 veco:ScientificAndOtherMember 2023-01-01 2023-03-31 0000103145 veco:RestOfWorldMember 2023-01-01 2023-03-31 0000103145 veco:DataStorageMember 2023-01-01 2023-03-31 0000103145 veco:CompoundSemiconductorMember 2023-01-01 2023-03-31 0000103145 veco:AsiaPacificExcludingChinaMember 2023-01-01 2023-03-31 0000103145 us-gaap:EMEAMember 2023-01-01 2023-03-31 0000103145 country:US 2023-01-01 2023-03-31 0000103145 country:CN 2023-01-01 2023-03-31 0000103145 us-gaap:MachineryAndEquipmentMember 2024-03-31 0000103145 us-gaap:LeaseholdImprovementsMember 2024-03-31 0000103145 us-gaap:LandMember 2024-03-31 0000103145 us-gaap:BuildingAndBuildingImprovementsMember 2024-03-31 0000103145 us-gaap:MachineryAndEquipmentMember 2023-12-31 0000103145 us-gaap:LeaseholdImprovementsMember 2023-12-31 0000103145 us-gaap:LandMember 2023-12-31 0000103145 us-gaap:BuildingAndBuildingImprovementsMember 2023-12-31 0000103145 us-gaap:AccumulatedTranslationAdjustmentMember 2024-01-01 2024-03-31 0000103145 us-gaap:AccumulatedOtherComprehensiveIncomeMember 2024-01-01 2024-03-31 0000103145 us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember 2024-01-01 2024-03-31 0000103145 us-gaap:RetainedEarningsMember 2024-01-01 2024-03-31 0000103145 us-gaap:RetainedEarningsMember 2023-01-01 2023-03-31 0000103145 srt:MinimumMember veco:RevolvingCreditFacilityDecember2021Member 2021-12-16 2021-12-16 0000103145 srt:MaximumMember veco:RevolvingCreditFacilityDecember2021Member 2021-12-16 2021-12-16 0000103145 veco:RevolvingCreditFacilityDecember2021Member 2021-12-16 0000103145 veco:RevolvingCreditFacilityDecember2021LetterOfCreditMember 2021-12-16 0000103145 veco:RevolvingCreditFacilityDecember2021Member 2024-01-01 2024-03-31 0000103145 veco:RevolvingCreditFacilityDecember2021Member 2023-01-01 2023-12-31 0000103145 us-gaap:FairValueInputsLevel2Member us-gaap:FairValueMeasurementsRecurringMember us-gaap:USGovernmentAgenciesDebtSecuritiesMember 2024-03-31 0000103145 us-gaap:FairValueInputsLevel2Member us-gaap:FairValueMeasurementsRecurringMember us-gaap:CorporateDebtSecuritiesMember 2024-03-31 0000103145 us-gaap:FairValueInputsLevel1Member us-gaap:FairValueMeasurementsRecurringMember us-gaap:USTreasurySecuritiesMember 2024-03-31 0000103145 us-gaap:FairValueMeasurementsRecurringMember us-gaap:USTreasurySecuritiesMember 2024-03-31 0000103145 us-gaap:FairValueMeasurementsRecurringMember us-gaap:USGovernmentAgenciesDebtSecuritiesMember 2024-03-31 0000103145 us-gaap:FairValueMeasurementsRecurringMember us-gaap:CorporateDebtSecuritiesMember 2024-03-31 0000103145 us-gaap:FairValueInputsLevel2Member us-gaap:FairValueMeasurementsRecurringMember 2024-03-31 0000103145 us-gaap:FairValueInputsLevel1Member us-gaap:FairValueMeasurementsRecurringMember 2024-03-31 0000103145 us-gaap:FairValueMeasurementsRecurringMember 2024-03-31 0000103145 us-gaap:FairValueInputsLevel2Member us-gaap:FairValueMeasurementsRecurringMember us-gaap:USGovernmentAgenciesDebtSecuritiesMember 2023-12-31 0000103145 us-gaap:FairValueInputsLevel2Member us-gaap:FairValueMeasurementsRecurringMember us-gaap:CorporateDebtSecuritiesMember 2023-12-31 0000103145 us-gaap:FairValueInputsLevel2Member us-gaap:FairValueMeasurementsRecurringMember us-gaap:CommercialPaperMember 2023-12-31 0000103145 us-gaap:FairValueInputsLevel1Member us-gaap:FairValueMeasurementsRecurringMember us-gaap:USTreasurySecuritiesMember 2023-12-31 0000103145 us-gaap:FairValueMeasurementsRecurringMember us-gaap:USTreasurySecuritiesMember 2023-12-31 0000103145 us-gaap:FairValueMeasurementsRecurringMember us-gaap:USGovernmentAgenciesDebtSecuritiesMember 2023-12-31 0000103145 us-gaap:FairValueMeasurementsRecurringMember us-gaap:CorporateDebtSecuritiesMember 2023-12-31 0000103145 us-gaap:FairValueMeasurementsRecurringMember us-gaap:CommercialPaperMember 2023-12-31 0000103145 us-gaap:FairValueInputsLevel2Member us-gaap:FairValueMeasurementsRecurringMember 2023-12-31 0000103145 us-gaap:FairValueInputsLevel1Member us-gaap:FairValueMeasurementsRecurringMember 2023-12-31 0000103145 us-gaap:FairValueMeasurementsRecurringMember 2023-12-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2027Member us-gaap:OtherNonoperatingIncomeExpenseMember 2023-01-01 2023-12-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2025Member us-gaap:OtherNonoperatingIncomeExpenseMember 2023-01-01 2023-12-31 0000103145 us-gaap:TrademarksAndTradeNamesMember 2024-03-31 0000103145 us-gaap:TechnologyBasedIntangibleAssetsMember 2024-03-31 0000103145 us-gaap:OtherIntangibleAssetsMember 2024-03-31 0000103145 us-gaap:CustomerRelationshipsMember 2024-03-31 0000103145 us-gaap:TrademarksAndTradeNamesMember 2023-12-31 0000103145 us-gaap:TechnologyBasedIntangibleAssetsMember 2023-12-31 0000103145 us-gaap:OtherIntangibleAssetsMember 2023-12-31 0000103145 us-gaap:CustomerRelationshipsMember 2023-12-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2027Member 2023-05-19 2023-05-19 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2025Member 2023-05-19 2023-05-19 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2025AndDue2027Member 2023-05-19 2023-05-19 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2023Member 2021-01-01 2021-12-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2023Member 2020-01-01 2020-12-31 0000103145 veco:RevolvingCreditFacilityDecember2021Member 2021-12-16 2021-12-16 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2029Member 2023-12-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2027Member 2023-12-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2025Member 2023-12-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2023Member 2017-01-10 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2025Due2027AndDue2029Member 2024-01-01 2024-03-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2025AndDue2027Member 2024-01-01 2024-03-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2029Member 2023-05-19 2023-05-19 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2025Member 2020-11-17 2020-11-17 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2027Member 2020-05-18 2020-05-18 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2029Member 2023-05-19 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2025Member 2020-11-17 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2027Member 2020-05-18 0000103145 srt:MinimumMember veco:RevolvingCreditFacilityDecember2021Member us-gaap:SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember 2021-12-16 2021-12-16 0000103145 srt:MinimumMember veco:RevolvingCreditFacilityDecember2021Member us-gaap:BaseRateMember 2021-12-16 2021-12-16 0000103145 srt:MaximumMember veco:RevolvingCreditFacilityDecember2021Member us-gaap:SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember 2021-12-16 2021-12-16 0000103145 srt:MaximumMember veco:RevolvingCreditFacilityDecember2021Member us-gaap:BaseRateMember 2021-12-16 2021-12-16 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2029Member 2024-03-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2027Member 2024-03-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2025Member 2024-03-31 0000103145 2023-03-31 0000103145 2022-12-31 0000103145 veco:EpiluvacAbMember 2024-03-31 0000103145 us-gaap:OtherNoncurrentLiabilitiesMember veco:EpiluvacAbMember 2024-03-31 0000103145 veco:EpiluvacAbMember 2023-01-31 0000103145 veco:EpiluvacAbMember veco:PercentageOfOrdersReceivedDuringEarnOutPeriodMember 2023-01-31 0000103145 veco:EpiluvacAbMember veco:CompletionOfMilestonesMember 2023-01-31 0000103145 veco:EpiluvacAbMember 2024-01-01 2024-03-31 0000103145 veco:EpiluvacAbMember 2023-01-01 2023-01-31 0000103145 us-gaap:CommercialPaperMember 2023-12-31 0000103145 us-gaap:USTreasurySecuritiesMember 2024-03-31 0000103145 us-gaap:USGovernmentAgenciesDebtSecuritiesMember 2024-03-31 0000103145 us-gaap:CorporateDebtSecuritiesMember 2024-03-31 0000103145 us-gaap:USTreasurySecuritiesMember 2023-12-31 0000103145 us-gaap:USGovernmentAgenciesDebtSecuritiesMember 2023-12-31 0000103145 us-gaap:CorporateDebtSecuritiesMember 2023-12-31 0000103145 veco:PotentiallyDilutiveSharesMember 2024-01-01 2024-03-31 0000103145 veco:PotentiallyDilutiveSharesMember 2023-01-01 2023-03-31 0000103145 us-gaap:ConvertibleDebtMember 2023-01-01 2023-03-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2029Member 2024-01-01 2024-03-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2027Member 2024-01-01 2024-03-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2025Member 2024-01-01 2024-03-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2027Member 2023-01-01 2023-03-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2025Member 2023-01-01 2023-03-31 0000103145 veco:ConvertibleSeniorUnsecuredNotesDue2023Member 2023-01-01 2023-03-31 0000103145 us-gaap:SellingGeneralAndAdministrativeExpensesMember 2024-01-01 2024-03-31 0000103145 us-gaap:ResearchAndDevelopmentExpenseMember 2024-01-01 2024-03-31 0000103145 us-gaap:CostOfSalesMember 2024-01-01 2024-03-31 0000103145 us-gaap:SellingGeneralAndAdministrativeExpensesMember 2023-01-01 2023-03-31 0000103145 us-gaap:ResearchAndDevelopmentExpenseMember 2023-01-01 2023-03-31 0000103145 us-gaap:CostOfSalesMember 2023-01-01 2023-03-31 0000103145 us-gaap:AdditionalPaidInCapitalMember 2024-01-01 2024-03-31 0000103145 us-gaap:AdditionalPaidInCapitalMember 2023-01-01 2023-03-31 0000103145 2023-01-01 2023-03-31 0000103145 2024-03-31 0000103145 2023-12-31 0000103145 veco:JohnKiernanMember 2024-03-31 0000103145 veco:JohnKiernanMember 2024-01-01 2024-03-31 0000103145 2024-05-01 0000103145 2024-01-01 2024-03-31 shares iso4217:USD pure iso4217:USD shares veco:D veco:segment veco:item P1Y http://fasb.org/us-gaap/2023#FairValueInputsLevel2Member http://www.veeco.com/20240331#AccruedAndOtherLiabilitiesCurrent http://fasb.org/us-gaap/2023#OperatingLeaseLiabilityNoncurrent http://www.veeco.com/20240331#AccruedAndOtherLiabilitiesCurrent 0000103145 --12-31 2024 Q1 false http://fasb.org/us-gaap/2023#FairValueInputsLevel2Member P1Y http://fasb.org/us-gaap/2023#MeasurementInputDiscountRateMember http://fasb.org/us-gaap/2023#FairValueInputsLevel2Member http://fasb.org/us-gaap/2023#MeasurementInputDiscountRateMember 10-Q true 2024-03-31 false 0-16244 VEECO INSTRUMENTS INC. DE 11-2989601 Terminal Drive Plainview NY 11803 516 677-0200 Common Stock VECO NASDAQ Yes Yes Large Accelerated Filer false false false 56637662 173998000 158781000 326000 339000 122886000 146664000 106532000 103018000 34336000 24370000 243266000 237635000 34550000 35471000 715894000 706278000 115297000 118459000 23685000 24377000 42054000 43945000 214964000 214964000 118724000 117901000 3075000 3117000 1233693000 1229041000 54011000 42383000 59259000 57624000 93812000 118026000 852000 26425000 234359000 218033000 6496000 6552000 248811000 274941000 30949000 31529000 25168000 25544000 545783000 556599000 0.01 0.01 500000 500000 0 0 0 0 0.01 0.01 120000000 120000000 56637473 56637473 56364131 56364131 566000 564000 1196180000 1202440000 -510315000 -532169000 1479000 1607000 687910000 672442000 1233693000 1229041000 174484000 153504000 99065000 91487000 75419000 62017000 29642000 27562000 24700000 22627000 1891000 2111000 2859000 89000 53374000 52211000 22045000 9806000 3324000 2073000 2619000 2875000 22750000 9004000 896000 263000 21854000 8741000 0.39 0.17 0.37 0.17 55968000 50559000 60764000 59856000 21854000 8741000 -95000 470000 -33000 6000 -128000 476000 21726000 9217000 21854000 8741000 6405000 6276000 296000 226000 -842000 191000 8082000 7027000 -625000 13480000 -3157000 4838000 25763000 -395000 4783000 17621000 13431000 -24215000 5534000 853000 94000 2145000 213000 9361000 13918000 5990000 6946000 30373000 53473000 40049000 28791000 3492000 2033000 20725000 -762000 14340000 8509000 1818000 1318000 1241000 20173000 -14840000 -27441000 -42000 10000 15204000 -14275000 159120000 155472000 174324000 141197000 619000 2744000 992000 386000 599000 5052000 4304000 630000 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 1 — Basis of Presentation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The accompanying unaudited Consolidated Financial Statements of Veeco have been prepared in accordance with U.S. GAAP as defined in Financial Accounting Standards Board (“FASB”) Accounting Standards Codification 270 for interim financial information and with the instructions to Rule 10-01 of Securities and Exchange Commission Regulation S-X. Accordingly, they do not include all of the information and footnotes required by U.S. GAAP for complete financial statements as the interim information is an update of the information that was presented in Veeco’s most recent annual financial statements. For further information, refer to Veeco’s Consolidated Financial Statements and Notes thereto included in the Annual Report on Form 10-K for the year ended December 31, 2023 (“2023 Form 10-K”). In the opinion of management, all adjustments considered necessary for a fair presentation have been included. All such adjustments are of a normal, recurring nature.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco reports interim quarters on a 13-week basis ending on the last Sunday of each quarter. The fourth quarter always ends on the last day of the calendar year, December 31. The 2024 interim quarters end on March 31, June 30, and September 29, and the 2023 interim quarters ended on April 2, July 2, and October 1. These interim quarters are reported as March 31, June 30, and September 30 in Veeco’s interim consolidated financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The preparation of financial statements in conformity with U.S. GAAP requires the Company’s management to make estimates and assumptions that affect the amounts reported in the financial statements and accompanying notes. Although these estimates are based on management’s knowledge of current events and actions it may undertake in the future, actual results may differ from these estimates.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Revenue Recognition</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Revenue is recognized upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration the Company expects to receive in exchange for such product or service. The Company’s contracts with customers generally do not contain variable consideration. In the rare instances where variable consideration is included, the Company estimates the amount of variable consideration and determines what portion of that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. The Company’s contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, maintenance, and service plans. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. The Company also evaluates whether multiple transactions with the same customer or related parties should be considered part of a single contract based on an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">   </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">When there are separate units of accounting, the Company allocates revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which the Company separately sells the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, the Company estimates stand-alone selling prices generally using an expected cost plus margin approach.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">   </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Most of the Company’s revenue is recognized at a point in time when the performance obligation is satisfied. The Company considers many facts when evaluating each of its sales arrangements to determine the timing of revenue recognition, including its contractual obligations and the nature of the customer’s post-delivery acceptance provisions. The Company’s system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. For many of these arrangements, a customer source inspection of the system is performed in the Company’s facility, test data is sent to the customer documenting that the system is functioning to the agreed upon specifications prior to delivery, or other quality assurance testing is performed </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">internally to ensure system functionality prior to shipment. Historically, such source inspection or test data replicates the field acceptance provisions that are performed at the customer’s site prior to final acceptance of the system. When the Company objectively demonstrates that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or the Company’s historical experience of its tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where the Company cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. The Company recognizes such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">   </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In certain cases the Company’s contracts with customers contain a billing retention, which is billed by the Company and payable by the customer when field acceptance provisions are completed. Revenue recognized in advance of the amount that has been billed is recorded as a contract asset on the Consolidated Balance Sheets.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">   </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company recognizes revenue related to maintenance and service contracts over time based upon the respective contract term. Installation revenue is recognized over time as the installation services are performed. The Company recognizes revenue from the sales of components, spare parts, and specified service engagements at a point in time, which is typically consistent with the time of delivery in accordance with the terms of the applicable sales arrangement.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">   </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company may receive advanced payments on system transactions. The timing of the transfer of goods or services related to the advanced payments is either at the discretion of the customer or generally expected to be within one year from the advanced receipt. As such, the Company does not adjust transaction prices for the time value of money. Incremental direct costs incurred related to the acquisition of a customer contract, such as sales commissions, are expensed as incurred since the expected amortization period is one year or less.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company has elected to treat shipping and handling costs as a fulfillment activity, and the Company includes such costs in cost of sales when the Company recognizes revenue for the related goods. Taxes assessed by governmental authorities that are collected by the Company from a customer are excluded from revenue.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Inventories</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="color:#212529;">Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter the Company assesses the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods; and evaluation inventory at customer facilities. Obsolete inventory or inventory in excess of management’s estimated usage requirement is written down to its estimated net realizable value if less than cost. The Company evaluates usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for the Company’s products may require a write down of inventory, which would be reflected in cost of sales in the period the revision is made. Inventory acquired as part of a business combination is recorded at fair value on the date of acquisition.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Recent Accounting Standards Not Yet Adopted</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In November 2023, the FASB issued ASU 2023-07: <i style="font-style:italic;">Segment Reporting (Topic 280) – Improvements to Reportable Segment Disclosures</i>. This standard primarily enhances disclosures about significant segment expenses. The standard requires interim and annual disclosure of significant segment expenses that are regularly provided to the chief operating decision-maker (“CODM”) and included within the reported measure of a segment’s profit or loss, requires interim disclosures about a reportable segment’s profit and loss and assets that are currently required annually, requires disclosure of the position and title of the CODM, clarifies circumstances in which an entity can disclose multiple </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">segment measures of profit or loss and contains other disclosure requirements. This authoritative guidance is effective for fiscal years beginning after December 15, 2023, and interim periods within fiscal years beginning after December 15, 2024, with early adoption permitted. The Company is evaluating the effect of this new guidance on its consolidated financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p> <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The accompanying unaudited Consolidated Financial Statements of Veeco have been prepared in accordance with U.S. GAAP as defined in Financial Accounting Standards Board (“FASB”) Accounting Standards Codification 270 for interim financial information and with the instructions to Rule 10-01 of Securities and Exchange Commission Regulation S-X. Accordingly, they do not include all of the information and footnotes required by U.S. GAAP for complete financial statements as the interim information is an update of the information that was presented in Veeco’s most recent annual financial statements. For further information, refer to Veeco’s Consolidated Financial Statements and Notes thereto included in the Annual Report on Form 10-K for the year ended December 31, 2023 (“2023 Form 10-K”). In the opinion of management, all adjustments considered necessary for a fair presentation have been included. All such adjustments are of a normal, recurring nature.</p> <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco reports interim quarters on a 13-week basis ending on the last Sunday of each quarter. The fourth quarter always ends on the last day of the calendar year, December 31. The 2024 interim quarters end on March 31, June 30, and September 29, and the 2023 interim quarters ended on April 2, July 2, and October 1. These interim quarters are reported as March 31, June 30, and September 30 in Veeco’s interim consolidated financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p> P91D <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The preparation of financial statements in conformity with U.S. GAAP requires the Company’s management to make estimates and assumptions that affect the amounts reported in the financial statements and accompanying notes. Although these estimates are based on management’s knowledge of current events and actions it may undertake in the future, actual results may differ from these estimates.</p> <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Revenue Recognition</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Revenue is recognized upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration the Company expects to receive in exchange for such product or service. The Company’s contracts with customers generally do not contain variable consideration. In the rare instances where variable consideration is included, the Company estimates the amount of variable consideration and determines what portion of that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. The Company’s contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, maintenance, and service plans. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. The Company also evaluates whether multiple transactions with the same customer or related parties should be considered part of a single contract based on an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">   </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">When there are separate units of accounting, the Company allocates revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which the Company separately sells the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, the Company estimates stand-alone selling prices generally using an expected cost plus margin approach.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">   </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Most of the Company’s revenue is recognized at a point in time when the performance obligation is satisfied. The Company considers many facts when evaluating each of its sales arrangements to determine the timing of revenue recognition, including its contractual obligations and the nature of the customer’s post-delivery acceptance provisions. The Company’s system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. For many of these arrangements, a customer source inspection of the system is performed in the Company’s facility, test data is sent to the customer documenting that the system is functioning to the agreed upon specifications prior to delivery, or other quality assurance testing is performed </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">internally to ensure system functionality prior to shipment. Historically, such source inspection or test data replicates the field acceptance provisions that are performed at the customer’s site prior to final acceptance of the system. When the Company objectively demonstrates that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or the Company’s historical experience of its tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where the Company cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. The Company recognizes such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">   </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In certain cases the Company’s contracts with customers contain a billing retention, which is billed by the Company and payable by the customer when field acceptance provisions are completed. Revenue recognized in advance of the amount that has been billed is recorded as a contract asset on the Consolidated Balance Sheets.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">   </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company recognizes revenue related to maintenance and service contracts over time based upon the respective contract term. Installation revenue is recognized over time as the installation services are performed. The Company recognizes revenue from the sales of components, spare parts, and specified service engagements at a point in time, which is typically consistent with the time of delivery in accordance with the terms of the applicable sales arrangement.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">   </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company may receive advanced payments on system transactions. The timing of the transfer of goods or services related to the advanced payments is either at the discretion of the customer or generally expected to be within one year from the advanced receipt. As such, the Company does not adjust transaction prices for the time value of money. Incremental direct costs incurred related to the acquisition of a customer contract, such as sales commissions, are expensed as incurred since the expected amortization period is one year or less.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company has elected to treat shipping and handling costs as a fulfillment activity, and the Company includes such costs in cost of sales when the Company recognizes revenue for the related goods. Taxes assessed by governmental authorities that are collected by the Company from a customer are excluded from revenue.</p> true <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Inventories</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="color:#212529;">Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter the Company assesses the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods; and evaluation inventory at customer facilities. Obsolete inventory or inventory in excess of management’s estimated usage requirement is written down to its estimated net realizable value if less than cost. The Company evaluates usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for the Company’s products may require a write down of inventory, which would be reflected in cost of sales in the period the revision is made. Inventory acquired as part of a business combination is recorded at fair value on the date of acquisition.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p> <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Recent Accounting Standards Not Yet Adopted</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In November 2023, the FASB issued ASU 2023-07: <i style="font-style:italic;">Segment Reporting (Topic 280) – Improvements to Reportable Segment Disclosures</i>. This standard primarily enhances disclosures about significant segment expenses. The standard requires interim and annual disclosure of significant segment expenses that are regularly provided to the chief operating decision-maker (“CODM”) and included within the reported measure of a segment’s profit or loss, requires interim disclosures about a reportable segment’s profit and loss and assets that are currently required annually, requires disclosure of the position and title of the CODM, clarifies circumstances in which an entity can disclose multiple </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">segment measures of profit or loss and contains other disclosure requirements. This authoritative guidance is effective for fiscal years beginning after December 15, 2023, and interim periods within fiscal years beginning after December 15, 2024, with early adoption permitted. The Company is evaluating the effect of this new guidance on its consolidated financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p> <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 2 — Income Per Common Share</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic income per share is calculated by dividing net income by the weighted average number of shares outstanding during the period. Diluted income per share is calculated by dividing net income available to common shareholders by the weighted average number of shares used to calculate basic income per share plus the weighted average number of common share equivalents outstanding during the period. The dilutive effect of outstanding options to purchase common stock and share-based awards is considered in diluted income per share by application of the treasury stock method. The dilutive effect of performance share units is included in diluted income per common share if the performance targets have been achieved, or would have been achieved if the reporting date was the end of the contingency period. Finally, the Company includes the dilutive effect of shares issuable upon conversion of its Notes in the calculation of diluted income per share using the if-converted method. The Company has the option for the 2025 and 2027 Notes to settle the conversion value in any combination of cash or shares, and as such, the maximum number of shares issuable are included in the dilutive share count if the effect would be dilutive. The Company must settle the principal amount of the 2029 Notes in cash, and has the option to settle any excess of the conversion value over the principal amount in any combination of cash or shares. As such, the Company only includes the excess shares that may be issuable above the principal amount of the 2029 Notes in the dilutive share count, if the effect would be dilutive.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The computations of basic and diluted income per share for the three months ended March 31, 2024 and 2023 are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;width:29.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended March 31, </b></p></td><td style="vertical-align:bottom;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="9" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="6" style="vertical-align:bottom;white-space:nowrap;width:32.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands, except per share amounts)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Numerator: </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,854</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,741</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Interest expense associated with convertible notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 514</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,277</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income available to common shareholders</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 22,368</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,018</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Denominator:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 55,968</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 50,559</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Effect of potentially dilutive share-based awards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 939</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 355</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dilutive effect of convertible notes </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,857</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,942</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Diluted weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 60,764</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,856</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Net income per common share:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 0.39</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 0.17</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 0.37</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 0.17</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Potentially dilutive shares excluded from the diluted calculation as their effect would be antidilutive</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 213</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,140</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:middle;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Potential shares to be issued for settlement of the convertible notes excluded from the diluted calculation as their effect would be antidilutive </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,603</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p> <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;width:29.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended March 31, </b></p></td><td style="vertical-align:bottom;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="9" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="6" style="vertical-align:bottom;white-space:nowrap;width:32.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands, except per share amounts)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Numerator: </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,854</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,741</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Interest expense associated with convertible notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 514</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,277</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income available to common shareholders</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 22,368</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,018</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Denominator:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 55,968</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 50,559</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Effect of potentially dilutive share-based awards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 939</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 355</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dilutive effect of convertible notes </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,857</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,942</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Diluted weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 60,764</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,856</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Net income per common share:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 0.39</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 0.17</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 0.37</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 0.17</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Potentially dilutive shares excluded from the diluted calculation as their effect would be antidilutive</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 213</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,140</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:middle;width:63.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Potential shares to be issued for settlement of the convertible notes excluded from the diluted calculation as their effect would be antidilutive </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,603</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p> 21854000 8741000 514000 1277000 22368000 10018000 55968000 50559000 939000 355000 3857000 8942000 60764000 59856000 0.39 0.17 0.37 0.17 213000 1140000 5603000 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 3 — Business Combination</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Epiluvac</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On January 31, 2023, the Company acquired Epiluvac AB, a privately held manufacturer of chemical vapor deposition (CVD) epitaxy systems that enable silicon carbide (SiC) applications in the electric vehicle market. This acquisition is expected to accelerate penetration into the emerging, high-growth SiC equipment market. The results of Epiluvac’s operations have been included in the consolidated financial statements since the date of acquisition. Acquisition date fair value totaled $56.4 million, which included $30.4 million of cash and $26.1 million of contingent consideration.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> <span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The purchase agreement included performance milestones that, if achieved, could trigger additional payments to the original selling shareholders. The contingent arrangements include payments up to $15.0 million based on the timely completion of certain defined milestones tied to strategic targets, and up to $20.0 million based on the percentage of orders received during the defined Earn-out period. The Earn-out period is four years after the closing date of the acquisition, or earlier if certain conditions are met.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company estimated the fair value of the contingent consideration by assigning probabilities and discount factors to each of the various defined performance milestones, while using a Monte-Carlo simulation model to determine the most likely outcome for payments to be based on value of orders received. These fair value measurements are based on significant inputs not observable in the market and thus represent a Level 3 measurement as defined in ASC 820. The <span style="-sec-ix-hidden:Hidden_pJqZ4EwwiEGIrBGuiyKcjw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">discount rate</span></span> used was 5.54% for the strategic target and order value related contingent payments. The rate was determined based on the nature of the milestone, the risks and uncertainties involved and the time period until the milestone was measured. The determination of the various probabilities and discount factors is highly subjective, requires significant judgment and is influenced by a number of factors, including the adoption of SiC technology. The aggregate fair value of the contingent consideration arrangement at the acquisition date was $26.1 million. While the use of SiC is expected to grow in the near future, it is difficult to predict the rate at which SiC will be adopted by the market and thus would impact the sales of our equipment.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company updates its estimate of fair value of the contingent consideration each reporting period, utilizing the same methodologies described above. The <span style="-sec-ix-hidden:Hidden_fuWc62eqW0SeKzKkZcp0VQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">discount rate</span></span> used was 5.6% for the strategic target and order value related contingent payments. During the three months ended March 31, 2024, the Company recognized approximately $0.6 million of a reduction to contingent consideration, included within “Other operating expense (income) net” in the Consolidated Statement of Operations. Additionally, during the three months ended March 31, 2024, the Company paid $1.8 million to the original selling shareholders in recognition of a performance milestone having been successfully completed. Total contingent consideration liability as of March 31, 2024 was $21.8 million included within “Other liabilities” on the Consolidated Balance Sheet.</p> 56400000 30400000 26100000 15000000.0 20000000.0 P4Y 0.0554 26100000 0.056 -600000 1800000 21800000 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 4 — Assets</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Investments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Short-term investments are generally classified as available-for-sale and reported at fair value, with unrealized gains and losses, net of tax, presented as a separate component of stockholders’ equity under the caption “Accumulated other comprehensive income” in the Consolidated Balance Sheets. These securities may include U.S. treasuries, government agency securities, corporate debt, and commercial paper, all with maturities of greater than three months when purchased. All realized gains and losses and unrealized losses resulting from declines in fair value that are other than temporary are included in “Other operating expense (income), net” in the Consolidated Statements of Operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Fair value is the price that would be received for an asset or the amount paid to transfer a liability in an orderly transaction between market participants. Veeco classifies certain assets based on the following fair value hierarchy:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt 0pt 0pt 18pt;">Level 1: Quoted prices in active markets that are unadjusted and accessible at the measurement date for identical, unrestricted assets or liabilities;</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt 0pt 0pt 18pt;"><span style="margin-left:0pt;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt 0pt 0pt 18pt;">Level 2: Quoted prices for identical assets and liabilities in markets that are not active, quoted prices for similar assets and liabilities in active markets or financial instruments for which significant inputs are observable, either directly or indirectly; and</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt 0pt 0pt 18pt;"><span style="margin-left:0pt;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt 0pt 0pt 18pt;">Level 3: Prices or valuations that require inputs that are both significant to the fair value measurement and unobservable.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A financial instrument’s level within the fair value hierarchy is based on the lowest level of any input that is significant to the fair value measurement. Veeco has evaluated the estimated fair value of financial instruments using available market information and valuations as provided by third-party sources. The use of different market assumptions or estimation methodologies could have a significant effect on the estimated fair value amounts.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table presents the portion of Veeco’s assets that were measured at fair value on a recurring basis at March 31, 2024 and December 31, 2023:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;width:9.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level 1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level 2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level 3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:41.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 84,211</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 84,211</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,655</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,655</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,999</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,999</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,363</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,363</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 115,573</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,655</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 118,228</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 46,464</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 46,464</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,425</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,425</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 50,997</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 50,997</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 46,464</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 76,422</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 122,886</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-weight:bold;margin-left:0pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 74,262</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 74,262</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,988</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,988</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,587</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,587</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 95,849</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,988</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 97,837</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,493</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,493</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 41,818</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 41,818</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 35,409</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 35,409</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,944</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,944</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,493</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 87,171</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 146,664</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">There were no transfers between fair value measurement levels during the three months ended March 31, 2024.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At March 31, 2024 and December 31, 2023, the amortized cost and fair value of available-for-sale securities consist of:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 46,565</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (101)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 46,464</p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,455</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (30)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,425</p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 51,098</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (101)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 50,997</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 123,118</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (232)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 122,886</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-weight:bold;margin-left:0pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,541</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (51)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,493</p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 41,843</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (31)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 41,818</p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 35,447</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (47)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 35,409</p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,944</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,944</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 146,775</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 18</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (129)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 146,664</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Available-for-sale securities in a loss position at March 31, 2024 and December 31, 2023 consist of:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Continuous Loss Position </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Continuous Loss Position </b></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for Less than 12 Months</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for 12 Months or More</b></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="10" style="vertical-align:bottom;white-space:nowrap;width:40.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 46,464</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (101)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,425</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (30)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 45,471</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (98)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,495</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3)</p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 117,360</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (229)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,495</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3)</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 43,118</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (50)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 34,885</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (31)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 23,262</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (33)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,618</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (15)</p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 101,265</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (114)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,618</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (15)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The contractual maturities of securities classified as available-for-sale at March 31, 2024 were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">March 31, 2024</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:72.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:23.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:72.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due in one year or less</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 112,231</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 112,050</p></td></tr><tr><td style="vertical-align:bottom;width:72.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due after one year through two years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,887</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,836</p></td></tr><tr><td style="vertical-align:bottom;width:72.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 123,118</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.37%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 122,886</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Actual maturities may differ from contractual maturities because borrowers may have the right to call or prepay obligations with or without call or prepayment penalties. There were no realized gains or losses, or unrealized losses from declines in fair value that are other than temporary, for the three months ended March 31, 2024 and 2023.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Accounts Receivable</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Accounts receivable is presented net of an allowance for doubtful accounts of $1.0 million at March 31, 2024 and December 31, 2023. The Company considered its current expectations of future economic conditions when estimating its allowance for doubtful accounts. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Inventories</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Inventories at March 31, 2024 and December 31, 2023 consist of the following:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">March 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:32.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Materials</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 144,793</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 139,884</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Work-in-process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 75,344</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 71,278</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Finished goods</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,670</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 6,183</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Evaluation inventory</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 19,459</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 20,290</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 243,266</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 237,635</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Prepaid Expenses and Other Current Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Prepaid expenses and other current assets primarily consist of supplier deposits, prepaid value-added tax, lease deposits, prepaid insurance, prepaid software and maintenance, and other receivables. The Company had deposits with its suppliers of $17.0 million and $19.4 million at March 31, 2024 and December 31, 2023, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Property, Plant, and Equipment</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant, and equipment at March 31, 2024 and December 31, 2023 consist of the following:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">March 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:32.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Land</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,061</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,061</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Building and improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 61,292</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 61,679</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Machinery and equipment <sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 182,811</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 181,180</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Leasehold improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 53,009</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 52,913</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Gross property, plant, and equipment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 302,173</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 300,833</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: accumulated depreciation and amortization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 186,876</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 182,374</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Net property, plant, and equipment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 115,297</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 118,459</p></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:7.5pt;vertical-align:top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Machinery and equipment also includes software, furniture and fixtures</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">For the three months ended March 31, 2024 and 2023, depreciation expense was $4.5 million and $4.2 million, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Goodwill</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.25;margin:0pt 0pt 8pt 0pt;">Goodwill represents the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. There were no changes to goodwill during the three months ended March 31, 2024.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Intangible Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intangible assets consist of purchased technology, customer relationships, patents, trademarks and tradenames, licenses, and backlog, and are initially recorded at fair value. Long-lived intangible assets are amortized over their estimated useful lives in a method reflecting the pattern in which the economic benefits are consumed or amortized on a straight-line basis if such pattern cannot be reliably determined.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The components of purchased intangible assets were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:normal;width:30.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:normal;width:30.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2023</b></p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net </b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net</b></p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.35%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="17" style="vertical-align:bottom;white-space:normal;width:62.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Technology</p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 355,928</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 322,997</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 32,931</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 355,928</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 321,923</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 34,005</p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer relationships</p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 146,925</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 138,154</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,771</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 146,925</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 137,649</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,276</p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Trademarks and tradenames</p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 30,910</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 30,571</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 339</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 30,910</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 30,269</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 641</p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,746</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,733</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:normal;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 13</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,746</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,723</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:normal;width:7.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 23</p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 537,509</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 495,455</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 42,054</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 537,509</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 493,564</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 43,945</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other intangible assets primarily consist of patents, licenses, and backlog.</p> <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;width:9.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level 1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level 2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level 3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:41.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 84,211</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 84,211</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,655</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,655</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,999</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,999</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,363</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,363</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 115,573</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,655</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 118,228</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 46,464</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 46,464</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,425</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,425</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 50,997</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 50,997</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 46,464</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 76,422</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 122,886</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-weight:bold;margin-left:0pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 74,262</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 74,262</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,988</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,988</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,587</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,587</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 95,849</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,988</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 97,837</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,493</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,493</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 41,818</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 41,818</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 35,409</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 35,409</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,944</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,944</p></td></tr><tr><td style="vertical-align:bottom;width:56.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,493</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 87,171</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 146,664</p></td></tr></table> 84211000 84211000 2655000 2655000 9999000 9999000 21363000 21363000 115573000 2655000 118228000 46464000 46464000 25425000 25425000 50997000 50997000 46464000 76422000 122886000 74262000 74262000 1988000 1988000 21587000 21587000 95849000 1988000 97837000 59493000 59493000 41818000 41818000 35409000 35409000 9944000 9944000 59493000 87171000 146664000 0 0 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 46,565</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (101)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 46,464</p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,455</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (30)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,425</p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 51,098</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (101)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 50,997</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 123,118</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (232)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 122,886</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-weight:bold;margin-left:0pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,541</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (51)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,493</p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 41,843</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (31)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 41,818</p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 35,447</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (47)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 35,409</p></td></tr><tr><td style="vertical-align:bottom;width:55.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,944</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,944</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 146,775</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 18</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (129)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 146,664</p></td></tr></table> 46565000 101000 46464000 25455000 30000 25425000 51098000 101000 50997000 123118000 232000 122886000 59541000 3000 51000 59493000 41843000 6000 31000 41818000 35447000 9000 47000 35409000 9944000 9944000 146775000 18000 129000 146664000 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Continuous Loss Position </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Continuous Loss Position </b></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for Less than 12 Months</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for 12 Months or More</b></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="10" style="vertical-align:bottom;white-space:nowrap;width:40.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 46,464</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (101)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,425</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (30)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 45,471</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (98)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,495</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3)</p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 117,360</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (229)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,495</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3)</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 43,118</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (50)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 34,885</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (31)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 23,262</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (33)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,618</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (15)</p></td></tr><tr><td style="vertical-align:bottom;width:56.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 101,265</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (114)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,618</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (15)</p></td></tr></table> 46464000 101000 25425000 30000 45471000 98000 1495000 3000 117360000 229000 1495000 3000 43118000 50000 34885000 31000 23262000 33000 2618000 15000 101265000 114000 2618000 15000 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">March 31, 2024</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:72.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:23.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:72.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due in one year or less</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 112,231</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 112,050</p></td></tr><tr><td style="vertical-align:bottom;width:72.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due after one year through two years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,887</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,836</p></td></tr><tr><td style="vertical-align:bottom;width:72.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 123,118</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.37%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 122,886</p></td></tr></table> 112231000 112050000 10887000 10836000 123118000 122886000 0 0 0 0 1000000.0 1000000.0 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">March 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:32.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Materials</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 144,793</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 139,884</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Work-in-process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 75,344</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 71,278</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Finished goods</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,670</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 6,183</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Evaluation inventory</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 19,459</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 20,290</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 243,266</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 237,635</p></td></tr></table> 144793000 139884000 75344000 71278000 3670000 6183000 19459000 20290000 243266000 237635000 17000000.0 19400000 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">March 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:32.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Land</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,061</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,061</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Building and improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 61,292</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 61,679</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Machinery and equipment <sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 182,811</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 181,180</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Leasehold improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 53,009</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 52,913</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Gross property, plant, and equipment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 302,173</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 300,833</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: accumulated depreciation and amortization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 186,876</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 182,374</p></td></tr><tr><td style="vertical-align:bottom;width:65.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Net property, plant, and equipment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 115,297</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.36%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 118,459</p></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:7.5pt;vertical-align:top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Machinery and equipment also includes software, furniture and fixtures</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p> 5061000 5061000 61292000 61679000 182811000 181180000 53009000 52913000 302173000 300833000 186876000 182374000 115297000 118459000 4500000 4200000 0 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:normal;width:30.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:normal;width:30.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2023</b></p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net </b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net</b></p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.35%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:normal;width:8.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="17" style="vertical-align:bottom;white-space:normal;width:62.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Technology</p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 355,928</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 322,997</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 32,931</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 355,928</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 321,923</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 34,005</p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer relationships</p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 146,925</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 138,154</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,771</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 146,925</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 137,649</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,276</p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Trademarks and tradenames</p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 30,910</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 30,571</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 339</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 30,910</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 30,269</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 641</p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,746</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,733</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:normal;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 13</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,746</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,723</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:normal;width:7.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 23</p></td></tr><tr><td style="vertical-align:bottom;width:35.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:normal;width:1.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 537,509</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 495,455</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 42,054</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 537,509</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:8.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 493,564</p></td><td style="vertical-align:bottom;white-space:normal;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:normal;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:normal;width:7.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 43,945</p></td></tr></table> 355928000 322997000 32931000 355928000 321923000 34005000 146925000 138154000 8771000 146925000 137649000 9276000 30910000 30571000 339000 30910000 30269000 641000 3746000 3733000 13000 3746000 3723000 23000 537509000 495455000 42054000 537509000 493564000 43945000 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 5 — Liabilities</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Accrued Expenses and Other Current Liabilities</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The components of accrued expenses and other current liabilities at March 31, 2024 and December 31, 2023 consist of:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">March 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:27.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Payroll and related benefits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 35,059</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 28,321</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Warranty</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,667</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,864</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating lease liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,955</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,025</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Interest</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,804</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,149</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Professional fees</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,237</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,834</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales, use, and other taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,217</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,825</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Contingent consideration</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,814</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,320</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,792</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,259</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 57,624</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Warranty</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Warranties are typically valid for one year from the date of system final acceptance. The Company estimates the costs that may be incurred under the warranty which are determined by analyzing specific product and historical configuration </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">statistics and regional warranty support costs and are affected by product failure rates, material usage, and labor costs incurred in correcting product failures during the warranty period. Unforeseen component failures or exceptional component performance can also result in changes to warranty costs. Changes in product warranty reserves for the three months ended March 31, 2024 include:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:82.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:82.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:82.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 8,864</p></td></tr><tr><td style="vertical-align:bottom;width:82.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Warranties issued</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,545</p></td></tr><tr><td style="vertical-align:bottom;width:82.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Consumption of reserves</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,542)</p></td></tr><tr><td style="vertical-align:bottom;width:82.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Changes in estimate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (200)</p></td></tr><tr><td style="vertical-align:bottom;width:82.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.52%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.02%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 8,667</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Contract Liabilities and Performance Obligations</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Contract liabilities consist of unsatisfied performance obligations related to advanced payments received and billing in excess of revenue recognized. The contract liability balance as of December 31, 2023 was approximately $118.0 million, of which the Company recognized approximately $35.6 million in revenue during the three months ended March 31, 2024.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">This reduction in contract liabilities was offset in part by new billings for products and services which were unsatisfied performance obligations to customers and revenue had not yet been recognized as of March 31, 2024.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">As of March 31, 2024, the Company has approximately $139.8 million of remaining performance obligations on contracts with an original estimated duration of one year or more, of which approximately 82% is expected to be recognized within one year, with the remaining amounts expected to be recognized between <span style="-sec-ix-hidden:Hidden_tWM9QUUx7UuiavvgshiQmA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span></span> to three years. The Company has elected to exclude disclosures regarding remaining performance obligations that have an original expected duration of one year or less. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Convertible Senior Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">2023 Notes </i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On January 10, 2017, the Company issued $345.0 million of 2.70% convertible senior unsecured notes due 2023 (the “2023 Notes”). The 2023 Notes had a maturity date of January 15, 2023, unless earlier purchased by the Company, redeemed, or converted. The Company repurchased and retired approximately $111.5 million and $213.3 million of aggregate principal amount of its outstanding 2023 Notes during the years ended December 31, 2021 and December 31, 2020, respectively. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The 2023 notes that remained outstanding matured on January 15, 2023 and were paid in cash and settled by the Company at that time.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">2025 Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On November 17, 2020, as part of the privately negotiated exchange agreement, the Company issued $132.5 million of 3.50% convertible senior notes due 2025 (the “2025 Notes”). The 2025 Notes bear interest at a rate of 3.50% per year, payable semiannually in arrears on January 15 and July 15 of each year, commencing on July 15, 2021. The 2025 Notes mature on January 15, 2025, unless earlier purchased by the Company, redeemed, or converted. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On May 19, 2023, in connection with the completion of a private offering of $230.0 million aggregate principal amount of 2.875% convertible senior notes due 2029 described below, the Company repurchased and retired approximately </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$106.0 million in aggregate principal amount of its outstanding 2025 Notes, with a carrying amount of $105.4 million, for approximately $106.0 million of cash and 0.7 million shares of the Company’s common stock. The Company accounted for the partial settlement of the 2025 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $16.5 million for the year ended December 31, 2023.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">2027 Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On May 18, 2020, the Company completed a private offering of $125.0 million of 3.75% convertible senior notes due 2027 (the “2027 Notes”). The Company received net proceeds of approximately $121.9 million, after deducting underwriting discounts and fees and expenses payable by the Company. Additionally, the Company used approximately $10.3 million of cash to purchase capped calls, discussed below. The 2027 Notes bear interest at a rate of 3.75% per year, payable semiannually in arrears on June 1 and December 1 of each year, commencing on December 1, 2020. The 2027 Notes mature on June 1, 2027, unless earlier purchased by the Company, redeemed, or converted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On May 19, 2023, in connection with the completion of a private offering of $230.0 million aggregate principal amount of 2.875% convertible senior notes due 2029 described below, the Company repurchased and retired approximately $100.0 million in aggregate principal amount of its outstanding 2027 Notes, with a carrying amount of $98.5 million, for approximately $92.8 million of cash and 3.8 million shares of the Company’s common stock. The Company accounted for the partial settlement of the 2027 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $80.6 million for the year ended December 31, 2023.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">2029 Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On May 19, 2023, the Company completed a private offering of $230.0 million of 2.875% convertible senior notes due 2029 (the “2029 Notes”). The Company received net proceeds of approximately $223.2 million, after deducting underwriting discounts and fees and expenses payable by the Company. Additionally, the Company used approximately $198.8 million of net proceeds from the offering to fund the cash portion of the 2025 Notes and 2027 Notes extinguishments described above and the remainder for general corporate purposes. The 2029 Notes bear interest at a rate of 2.875% per year, payable semiannually in arrears on June 1 and December 1 of each year, commencing on December 1, 2023. The 2029 Notes mature on June 1, 2029, unless earlier purchased by the Company, redeemed, or converted. The Company will settle any conversions of the 2029 Notes by paying cash up to the aggregate principal amount of the 2029 Notes to be converted, and paying or delivering either cash, shares of Company’s common stock, or a combination of cash and shares of common stock at the Company’s election, in respect of the remainder, if any, of the conversion obligation in excess of the aggregate principal amount of the 2029 Notes being converted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The 2025 Notes, 2027 Notes, and 2029 Notes (collectively, the “Notes”) are unsecured senior obligations of Veeco and rank senior in right of payment to any of Veeco’s subordinated indebtedness; equal in right of payment to all of Veeco’s unsecured indebtedness that is not subordinated; effectively subordinated in right of payment to any of Veeco’s secured indebtedness to the extent of the value of the assets securing such indebtedness; and structurally subordinated to all indebtedness and other liabilities (including trade payables) of Veeco’s subsidiaries.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company may redeem for cash, at its option, all or any portion of (i) the outstanding 2025 Notes at any time on or after January 15, 2023, (ii) the outstanding 2027 Notes at any time on or after June 6, 2024 and/or (iii) the outstanding 2029 Notes at any time on or after June 8, 2026, in each case, at a redemption price equal to 100% of the principal amount of such Notes to be redeemed plus accrued and unpaid interest to, but excluding, the redemption date, if the last reported sale price of the common stock has been at least 130% of the conversion price for the applicable series of Notes then in effect for at least 20 trading days (whether or not consecutive) during any 30 consecutive trading day period (including the last trading day of such period) ending on, and including, the trading day immediately preceding the date </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">on which the Company provides the redemption notice. Upon the Company’s notice of redemption, holders may elect to convert their Notes based on the conversion rates and criteria outlined below.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Notes are convertible at the option of the holders upon the satisfaction of specified conditions and during certain periods as described below. The initial conversion rates are 41.6667, 71.5372, and 34.21852 shares of the Company’s common stock per $1,000 principal amount of the 2025 Notes, 2027 Notes, and 2029 Notes, respectively, representing initial effective conversion prices of $24.00, $13.98, and $29.22 per share of common stock, respectively. The conversion rates may be subject to adjustment upon the occurrence of certain specified events.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Holders may convert all or any portion of their Notes, in multiples of one thousand dollar principal amount, at their option at any time prior to the close of business on the business day immediately preceding October 15, 2024, with respect to the 2025 Notes, October 1, 2026, with respect to the 2027 Notes, and February 1, 2029 with respect to the 2029 Notes, only under the following circumstances:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(i)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">During any calendar quarter (and only during such calendar quarter), if the last reported sale price of the common stock for at least </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">20</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> trading days (whether or not consecutive) during a period of </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">30</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> consecutive trading days ending on the last trading day of the immediately preceding calendar quarter is greater than or equal to </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">130%</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> of the conversion price on each applicable trading day;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"><span style="margin-left:0pt;visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(ii)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">During the </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">five</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> consecutive business day period after any </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">five</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> consecutive trading day period (the “measurement period”) in which the trading price per </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> thousand dollar principal amount of Notes for each trading day of the measurement period was less than </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">98%</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> of the product of the last reported sale price of Veeco’s common stock and the conversion rate on each such trading day;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"><span style="margin-left:0pt;visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(iii)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">If the Company calls any or all of applicable series of the Notes for redemption at any time prior to the close of business on the scheduled trading day immediately preceding the redemption date; or</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"><span style="margin-left:0pt;visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(iv)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Upon the occurrence of specified corporate events. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">For the calendar quarter ended March 31, 2024, the last reported sales price of the common stock during the 30 consecutive trading days, based on the criteria outlined in (i) above, was greater than 130% of the conversion price of the 2025 Notes and 2027 Notes, and as such are convertible by the holders until June 30, 2024.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Holders may convert their Notes at any time, regardless of the foregoing circumstances, on October 15, 2024 with respect to the 2025 Notes, October 1, 2026 with respect to the 2027 Notes, and February 1, 2029 with respect to the 2029 Notes, until the close of business on the business day immediately preceding the respective maturity date.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Notes are recorded as a single unit within liabilities in the consolidated balance sheets as the conversion features within the Notes are not derivatives that require bifurcation and the Notes do not involve a substantial premium. Transaction costs of $1.9 million, $3.1 million, and $6.8 million incurred in connection with the issuance of the 2025 Notes, 2027 Notes, and 2029 Notes, respectively, were recorded as direct deductions from the related debt liabilities and recognized as non-cash interest expense using the effective interest method over the expected terms of the Notes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The carrying value of the 2025 Notes, 2027 Notes, and 2029 Notes are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:21.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:1.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:1.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:10.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:10.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:10.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:10.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:10.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:10.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:21.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2023</b></p></td></tr><tr><td style="vertical-align:bottom;width:21.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-family:'Calibri','Helvetica','sans-serif';font-weight:bold;">  </b></p></td><td style="vertical-align:bottom;width:1.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:10.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:10.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:10.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:10.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:10.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:21.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:76.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:21.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025 Notes</p></td><td style="vertical-align:bottom;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (75)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26,425</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (102)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26,398</p></td></tr><tr><td style="vertical-align:bottom;width:21.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027 Notes</p></td><td style="vertical-align:bottom;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 25,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (293)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 24,707</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 25,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (313)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 24,687</p></td></tr><tr><td style="vertical-align:bottom;width:21.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2029 Notes</p></td><td style="vertical-align:bottom;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 230,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (5,896)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 224,104</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 230,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,144)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 223,856</p></td></tr><tr><td style="vertical-align:bottom;width:21.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-weight:bold;margin-left:0pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 281,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,264)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 275,236</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 281,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,559)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 274,941</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total interest expense related to the 2023 Notes, 2025 Notes, 2027 Notes, and 2029 Notes is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended March 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="9" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td colspan="6" style="vertical-align:bottom;white-space:nowrap;width:28.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">  </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">  </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 23</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 232</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,159</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 234</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,172</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2029 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,653</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">  </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 28</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 117</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 20</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 105</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2029 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 248</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total Interest Expense</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,415</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,580</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company determined the 2025 Notes, 2027 Notes, and <span style="-sec-ix-hidden:Hidden_LFS_0Udhmk-EbxGqA_PgRA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2029</span></span> Notes are Level <span style="-sec-ix-hidden:Hidden_sidnpNUzKEW9YrV665icoQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2</span></span> <span style="-sec-ix-hidden:Hidden_zmYkT4iBp0OxwMjTOTRwKw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">liabilities</span></span> in the fair value hierarchy and had an estimated fair value at March 31, 2024 of $36.8 million, $62.1 million, and $342.5 million, respectively. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Capped Call Transactions</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In connection with the offering of the 2027 Notes, on May 13, 2020, the Company entered into privately negotiated capped call transactions (the “Capped Call Transactions”), pursuant to capped call confirmations, covering the total principal amount of the 2027 Notes for an aggregate premium of $10.3 million. The Capped Call Transactions are expected generally to reduce the potential dilution to the Company’s common stock upon any conversion of the 2027 Notes and/or offset any cash payments the Company is required to make in excess of the aggregate principal amount of converted 2027 Notes, as the case may be, with such reduction and/or offset subject to a cap based on the capped price of the Capped Call Transactions. The Capped Call Transactions exercise price is equal to the initial conversion price of the 2027 Notes, and the capped price of the Capped Call Transactions is approximately $18.46 per share and is subject to certain adjustments under the terms of the capped call confirmations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Capped Call Transactions are separate transactions entered into by the Company with the capped call counterparties, are not part of the terms of the 2027 Notes and do not change the holders’ rights under the 2027 Notes. Holders of the 2027 Notes do not have any rights with respect to the Capped Call Transactions. The cost of the Capped Call Transactions is not expected to be tax-deductible as the Company did not elect to integrate the Capped Call Transactions into the 2027 Notes for tax purposes. The Company used a portion of the net proceeds from the offering of the 2027 Notes to pay for the Capped Call Transactions, and the cost of the Capped Call Transactions was recorded as a reduction of the Company’s additional paid-in capital in the accompanying consolidated financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Revolving Credit Facility </i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On December 16, 2021, the Company entered into a loan and security agreement providing for a senior secured revolving credit facility in an aggregate principal amount of $150 million (the “Credit Facility”), including a $15 million letter of credit sublimit. The Credit Facility is guaranteed by the Company’s direct material U.S. subsidiaries, subject to customary exceptions. Borrowings under the Credit Facility are secured by a first-priority lien on substantially all of the assets of the Company, subject to customary exceptions. The Credit Facility has a term of five years, maturing on December 16, 2026, or earlier if certain liquidity measures are not met prior to the 2025 Notes maturing. Subject to certain conditions and the receipt of commitments from the lenders, the Loan and Security Agreement allows for revolving commitments under the Credit Facility to be increased by up to $75 million. The existing lenders under the Credit Facility are entitled, but not obligated, to provide such incremental commitments.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Borrowings will bear interest at a floating rate which can be, at the Company’s option, either (a) an alternate base rate plus an applicable rate ranging from 0.50% to 1.25% or (b) a Secured Overnight Financing Rate (“SOFR”) (with a floor of 0.00%) for the specified interest period plus an applicable rate ranging from 1.50% to 2.25%, in each case, depending on the Company’s Secured Net Leverage Ratio (as defined in the Loan and Security Agreement). The Company will pay an unused commitment fee ranging from 0.25% to 0.35% based on unused capacity under the Credit Facility and the Company’s Secured Net Leverage Ratio. The Company may use the proceeds of borrowings under the Credit Facility to pay transaction fees and expenses, provide for its working capital needs and reimburse drawings under letters of credit and for other general corporate purposes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Loan and Security Agreement contains customary affirmative covenants for transactions of this type, including, among others, the provision of financial and other information to the administrative agent, notice to the administrative agent upon the occurrence of certain material events, preservation of existence, maintenance of properties and insurance, compliance with laws, including environmental laws, the provision of additional guarantees, and an affiliate transactions covenant, subject to certain exceptions. The Loan and Security Agreement contains customary negative covenants, including, among others, restrictions on the ability to merge and consolidate with other companies, incur indebtedness, refinance our existing convertible notes, grant liens or security interests on assets, make investments, acquisitions, loans, or advances, pay dividends, and sell or otherwise transfer assets.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Loan and Security Agreement contains financial maintenance covenants that require the Borrower to maintain an Interest Coverage Ratio (as defined in the Loan and Security Agreement) of not less than 3.00 to 1.00, a Total Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than 4.50 to 1.00, and a Secured Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than 2.50 to 1.00, in each case, tested at the end of each fiscal quarter commencing with the fiscal quarter ending September 30, 2022. The Loan and Security Agreement also provides for a number of customary events of default, including, among others: payment defaults to the lenders; voluntary and involuntary bankruptcy proceedings; covenant defaults; material inaccuracies of representations and warranties; certain change of control events; material money judgments; and other customary events of default. The occurrence of an event of default could result in the acceleration of obligations and the termination of lending commitments under the Loan and Security Agreement.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">No amounts were outstanding under the Credit Facility as of March 31, 2024 or December 31, 2023.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Other Liabilities</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other liabilities at March 31, 2024 and December 31, 2023 were approximately $25.2 million and $25.5 million, respectively; which primarily included contingent consideration of $21.8 million and $22.4 million, respectively; medical and dental benefits from former executives of $1.9 million; and asset retirement obligations of $0.9 million.</p> <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">March 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:27.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Payroll and related benefits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 35,059</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 28,321</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Warranty</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,667</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,864</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating lease liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,955</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,025</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Interest</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,804</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,149</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Professional fees</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,237</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,834</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales, use, and other taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,217</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,825</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Contingent consideration</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,814</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,320</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,792</p></td></tr><tr><td style="vertical-align:bottom;width:70.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,259</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 57,624</p></td></tr></table> 35059000 28321000 8667000 8864000 3955000 4025000 2804000 1149000 2237000 1834000 3217000 1825000 1814000 3320000 9792000 59259000 57624000 P1Y <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:82.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:82.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:82.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 8,864</p></td></tr><tr><td style="vertical-align:bottom;width:82.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Warranties issued</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,545</p></td></tr><tr><td style="vertical-align:bottom;width:82.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Consumption of reserves</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,542)</p></td></tr><tr><td style="vertical-align:bottom;width:82.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Changes in estimate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (200)</p></td></tr><tr><td style="vertical-align:bottom;width:82.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.52%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.02%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 8,667</p></td></tr></table> 8864000 1545000 1542000 -200000 8667000 118000000.0 35600000 139800000 P1Y 0.82 P1Y P3Y true 345000000.0 0.0270 111500000 213300000 132500000 0.0350 0.0350 230000000.0 0.02875 106000000.0 105400000 106000000.0 700000 16500000 125000000.0 0.0375 121900000 10300000 0.0375 230000000.0 0.02875 100000000.0 98500000 92800000 3800000 80600000 230000000.0 0.02875 223200000 198800000 0.02875 1 1.30 20 30 0.0416667 0.0715372 0.03421852 1000 24.00 13.98 29.22 1000 20 30 1.30 5 5 1000 0.98 30 1.30 1900000 3100000 6800000 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:21.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:1.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:1.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:10.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:10.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:10.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:10.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:10.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:10.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:21.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2023</b></p></td></tr><tr><td style="vertical-align:bottom;width:21.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-family:'Calibri','Helvetica','sans-serif';font-weight:bold;">  </b></p></td><td style="vertical-align:bottom;width:1.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:10.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:10.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:10.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:10.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:10.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:21.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:76.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:21.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025 Notes</p></td><td style="vertical-align:bottom;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (75)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26,425</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (102)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26,398</p></td></tr><tr><td style="vertical-align:bottom;width:21.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027 Notes</p></td><td style="vertical-align:bottom;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 25,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (293)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 24,707</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 25,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (313)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 24,687</p></td></tr><tr><td style="vertical-align:bottom;width:21.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2029 Notes</p></td><td style="vertical-align:bottom;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 230,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (5,896)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 224,104</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 230,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,144)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 223,856</p></td></tr><tr><td style="vertical-align:bottom;width:21.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-weight:bold;margin-left:0pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 281,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,264)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 275,236</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 281,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,559)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 274,941</p></td></tr></table> 26500000 75000 26425000 26500000 102000 26398000 25000000 293000 24707000 25000000 313000 24687000 230000000 5896000 224104000 230000000 6144000 223856000 281500000 6264000 275236000 281500000 6559000 274941000 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended March 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="9" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td colspan="6" style="vertical-align:bottom;white-space:nowrap;width:28.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">  </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">  </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 23</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 232</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,159</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 234</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,172</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2029 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,653</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">  </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 28</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 117</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 20</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 105</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2029 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 248</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total Interest Expense</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,415</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,580</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr></table> 23000 232000 1159000 234000 1172000 1653000 4000 28000 117000 20000 105000 248000 2415000 2580000 36800000 62100000 342500000 10300000 18.46 150000000 15000000 P5Y 75000000 0.0050 0.0125 0.0000 0.0150 0.0225 0.0025 0.0035 3.00 4.50 2.50 0 0 25200000 25500000 21800000 22400000 1900000 1900000 900000 900000 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 6 — Commitments and Contingencies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;background:#ffff00;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Leases</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company’s operating leases primarily include real estate leases for properties used for manufacturing, R&amp;D activities, sales and service, and administration, as well as certain equipment leases. Some leases may include options to renew for a period of up to 5 years, while others may include options to terminate the lease. The weighted average remaining lease term of the Company’s operating leases as of March 31, 2024 was 11 years, and the weighted average discount rate used in determining the present value of future lease payments was 5.6%.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table provides the maturities of lease liabilities at March 31, 2024:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Operating</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Payments due by period:</b></p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,557</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,138</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,097</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027</p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,640</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2028</p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,422</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,824</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total future minimum lease payments</p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 48,678</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: Imputed interest</p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (13,774)</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total</p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 34,904</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Reported as of March 31, 2024</b></p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_KwLHGBT3r02T7RzvgnoGfw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Accrued expenses and other current liabilities</span></span></p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,955</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term operating lease liabilities</p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,949</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="-sec-ix-hidden:Hidden_zxfCyGSgfk-pDkC6LKd45w;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Total</span></span></p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 34,904</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating lease costs for the three months ended March 31, 2024 and 2023 were $1.2 million and $1.4 million, respectively. Variable lease costs for the three months ended March 31, 2024 and 2023 were $0.4 million and $0.3 million, respectively. Additionally, the Company has an immaterial amount of short-term leases. Operating cash outflows from operating leases for the three months ended March 31, 2024 and 2023 were $1.6 million and $1.4 million, respectively. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Receivable Purchase Agreement</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company entered into a receivable purchase agreement with a financial institution to sell certain of its trade receivables from customers without recourse, up to $30.0 million at any point in time. Pursuant to this agreement, the Company did not sell any receivables during the three months ended March 31, 2024, and $18.9 million was available under the agreement for additional sales of receivables as of March 31, 2024. The Company sold $8.3 million of receivables under this agreement for the three months ended March 31, 2023. The net sale of accounts receivable under the agreement is reflected as a reduction of accounts receivable in the Company’s Consolidated Balance Sheet at the time of sale and any fees for the sale of trade receivables were not material for the periods presented.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Purchase Commitments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco has purchase commitments of $200.8 million at March 31, 2024, substantially all of which become due within one year.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Bank Guarantees</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco has bank guarantees and letters of credit issued by a financial institution on its behalf as needed. At March 31, 2024, outstanding bank guarantees and standby letters of credit totaled $23.7 million, and unused bank guarantees and letters of credit of $17.0 million were available to be drawn upon.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Legal Proceedings</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company is involved in various legal proceedings arising in the normal course of business. The Company does not believe that the ultimate resolution of these matters will have a material adverse effect on its consolidated financial position, results of operations, or cash flows.</p> P5Y P11Y 0.056 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table provides the maturities of lease liabilities at March 31, 2024:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Operating</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Payments due by period:</b></p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,557</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,138</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,097</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027</p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,640</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2028</p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,422</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,824</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total future minimum lease payments</p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 48,678</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: Imputed interest</p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (13,774)</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total</p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 34,904</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Reported as of March 31, 2024</b></p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_KwLHGBT3r02T7RzvgnoGfw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Accrued expenses and other current liabilities</span></span></p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,955</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term operating lease liabilities</p></td><td style="vertical-align:bottom;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,949</p></td></tr><tr><td style="vertical-align:bottom;width:82.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="-sec-ix-hidden:Hidden_zxfCyGSgfk-pDkC6LKd45w;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Total</span></span></p></td><td style="vertical-align:bottom;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 34,904</p></td></tr></table> 2557000 4138000 4097000 3640000 3422000 30824000 48678000 13774000 34904000 3955000 30949000 34904000 1200000 1400000 400000 300000 1600000 1400000 30000000.0 0 18900000 18900000 8300000 200800000 23700000 17000000.0 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 7 — Equity</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Statement of Stockholders’ Equity</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following tables present the changes in Stockholders’ Equity:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Additional</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Other</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:15.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Common Stock</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Paid-in</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Comprehensive</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Capital</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Deficit</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Income</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="18" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:57.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Balance at December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;"> </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 56,364</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 564</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 1,202,440</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (532,169)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 1,607</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 672,442</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 21,854</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 21,854</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Other comprehensive income (loss), net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (128)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (128)</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Share-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 8,082</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 8,082</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net issuance under employee stock plans</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 273</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 2</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (14,342)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (14,340)</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Balance at March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;"> </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 56,637</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 566</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 1,196,180</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (510,315)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 1,479</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 687,910</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Additional</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Other</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:15.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Common Stock</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Paid-in</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Comprehensive</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Capital</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Deficit</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Income</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="18" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:57.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Balance at December 31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;"> </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 51,660</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 517</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 1,078,180</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (501,801)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 928</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 577,824</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 8,741</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 8,741</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Other comprehensive income (loss), net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 476</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 476</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Share-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 7,027</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 7,027</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net issuance under employee stock plans</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 33</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (8,509)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> <span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (8,509)</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Balance at March 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;"> </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 51,693</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 517</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 1,076,698</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (493,060)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 1,404</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 585,559</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Accumulated Other Comprehensive Income (“AOCI”)</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table presents the changes in the balances of each component of AOCI, net of tax:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains (Losses)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Foreign</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">on Available</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Currency</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for Sale </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Translation</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Securities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:62.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,761</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (154)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,607</p></td></tr><tr><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (33)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (95)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (128)</p></td></tr><tr><td style="vertical-align:bottom;width:62.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,728</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.05%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (249)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,479</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">There were minimal reclassifications from AOCI into net income for the three months ended March 31, 2024 and 2023. </p> <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Additional</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Other</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:15.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Common Stock</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Paid-in</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Comprehensive</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Capital</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Deficit</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Income</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="18" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:57.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Balance at December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;"> </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 56,364</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 564</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 1,202,440</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (532,169)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 1,607</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 672,442</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 21,854</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 21,854</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Other comprehensive income (loss), net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (128)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (128)</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Share-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 8,082</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 8,082</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net issuance under employee stock plans</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 273</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 2</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (14,342)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (14,340)</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Balance at March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;"> </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 56,637</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 566</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 1,196,180</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (510,315)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 1,479</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 687,910</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Additional</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Other</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:15.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Common Stock</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Paid-in</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Comprehensive</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Capital</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Deficit</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Income</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="18" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:57.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Balance at December 31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;"> </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 51,660</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 517</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 1,078,180</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (501,801)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 928</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 577,824</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 8,741</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 8,741</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Other comprehensive income (loss), net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 476</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 476</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Share-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 7,027</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 7,027</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net issuance under employee stock plans</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 33</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (8,509)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"> <span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> —</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (8,509)</p></td></tr><tr><td style="vertical-align:bottom;width:40.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Balance at March 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;"> </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 51,693</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 517</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 1,076,698</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (493,060)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.57%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 1,404</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> 585,559</p></td></tr></table> 56364000 564000 1202440000 -532169000 1607000 672442000 21854000 21854000 -128000 -128000 8082000 8082000 273000 2000 -14342000 -14340000 56637000 566000 1196180000 -510315000 1479000 687910000 51660000 517000 1078180000 -501801000 928000 577824000 8741000 8741000 476000 476000 7027000 7027000 33000 -8509000 -8509000 51693000 517000 1076698000 -493060000 1404000 585559000 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains (Losses)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Foreign</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">on Available</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Currency</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for Sale </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Translation</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Securities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:62.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,761</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (154)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,607</p></td></tr><tr><td style="vertical-align:bottom;width:62.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (33)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (95)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (128)</p></td></tr><tr><td style="vertical-align:bottom;width:62.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,728</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.05%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (249)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,479</p></td></tr></table> 1761000 -154000 1607000 -33000 -95000 -128000 1728000 -249000 1479000 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 8 — Share-based Compensation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restricted share awards are issued to employees and to members of our board of directors that are subject to specified restrictions and a risk of forfeiture. The restrictions typically lapse over <span style="-sec-ix-hidden:Hidden_FY_6-EfO2kiwMhskczoevw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span></span> to four years and may entitle holders to dividends and voting rights. Other types of share-based compensation include performance share awards, performance share units, and restricted share units (collectively with restricted share awards, “restricted shares”), as well as options to purchase common stock.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Share-based compensation expense was recognized in the following line items in the Consolidated Statements of Operations for the three months ended March 31, 2024 and 2023:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:66.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:66.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;width:27.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended March 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="9" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:66.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="6" style="vertical-align:bottom;width:29.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cost of sales</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,730</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,451</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td></tr><tr><td style="vertical-align:bottom;width:66.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Research and development</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,318</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,089</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Selling, general, and administrative</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.37%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,034</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,487</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,082</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,027</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">For the three months ended March 31, 2024, equity activity related to non-vested restricted shares and performance shares was as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">    </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">    </p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Number of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Grant Date</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance - December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,464</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 26.19</p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,019</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 37.72</p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 200</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 27.81</p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,040)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25.93</p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (13)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 23.06</p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance - March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,630</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 31.13</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p> P4Y <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:66.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:66.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;width:27.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended March 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="9" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:66.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="6" style="vertical-align:bottom;width:29.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cost of sales</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,730</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,451</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td></tr><tr><td style="vertical-align:bottom;width:66.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Research and development</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,318</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,089</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Selling, general, and administrative</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.37%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,034</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,487</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,082</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,027</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr></table> 1730000 1451000 2318000 2089000 4034000 3487000 8082000 7027000 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">    </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">    </p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Number of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Grant Date</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance - December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,464</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 26.19</p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,019</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 37.72</p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 200</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 27.81</p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,040)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25.93</p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (13)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 23.06</p></td></tr><tr><td style="vertical-align:bottom;width:75.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance - March 31, 2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,630</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 31.13</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p> 2464000 26.19 1019000 37.72 -200000 27.81 1040000 25.93 13000 23.06 2630000 31.13 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 9 — Income Taxes</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income taxes are estimated for each of the jurisdictions in which the Company operates. Deferred income taxes reflect the net tax effect of temporary differences between the carrying amount of assets and liabilities for financial reporting purposes and the amounts used for income tax purposes, as well as the tax effect of carryforwards. Realization of net deferred tax assets is dependent on future taxable income. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At the end of each interim reporting period, the effective tax rate is aligned with expectations for the full year. This estimate is used to determine the income tax provision on a year-to-date basis and may change in subsequent interim periods.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income before income taxes and income tax expense for the three months ended March 31, 2024 and 2023 were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:70.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:70.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended March 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;"> </b></p></td></tr><tr><td style="vertical-align:bottom;width:70.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">    </p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">    </p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;"> </b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:70.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands, except percentages)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;"> </b></p></td></tr><tr><td style="vertical-align:bottom;width:70.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income before income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 22,750</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 9,004</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income tax expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 896</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 263</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Effective tax rate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">3.94%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">2.93%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company’s income tax expense for the three months ended March 31, 2024 was $0.9 million, compared to $0.3 million for the comparable prior period. For the three months ended March 31, 2024 and March 31, 2023, the effective tax rate was lower than the U.S. statutory tax rate primarily relating to a discrete income tax benefit for share-based compensation windfall. Additionally, the effective tax rate was also favorably impacted by the tax benefits related to Foreign-Derived Intangible Income and research and development tax credits.</p> <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:70.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:70.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended March 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;"> </b></p></td></tr><tr><td style="vertical-align:bottom;width:70.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">    </p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">    </p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;"> </b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:70.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands, except percentages)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;"> </b></p></td></tr><tr><td style="vertical-align:bottom;width:70.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income before income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 22,750</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 9,004</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income tax expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 896</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 263</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Effective tax rate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">3.94%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.11%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">2.93%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr></table> 22750000 9004000 896000 263000 0.0394 0.0293 900000 300000 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 10 — Segment Reporting and Geographic Information</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco operates and measures its results in one operating segment and therefore has<span style="font-size:11pt;"> </span>one reportable segment: the development, manufacture, sales, and support of semiconductor and thin film process equipment primarily sold to make electronic devices.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco serves the following four end-markets: </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Semiconductor</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Semiconductor market refers to early process steps in logic and memory applications where silicon wafers are processed. There are many different process steps in forming patterned wafers, such as deposition, etching, masking, and doping, where the microchips are created but remain on the silicon wafer. This market includes mask blank production for extreme ultraviolet (“EUV”) lithography, as well as Advanced Packaging, which refers to a portfolio of wafer-level assembly technologies that enable improved performance of electronic products, such as smartphones, high-end servers, and graphical processors. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Compound Semiconductor</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Compound Semiconductor market includes Photonics, Power Electronics, RF Filters and Amplifiers, and Solar applications. Photonics refers to light source technologies and laser-based solutions for 3D sensing, datacom and telecom applications. This includes micro-LED, laser diodes, edge emitting lasers and vertical cavity surface emitting lasers (“VCSELs”). Power Electronics refers to semiconductor devices such as rectifiers, inverters and converters for the </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">control and conversion of electric power in applications such as fast or wireless charging of consumer electronics and automotive applications. RF power amplifiers and filters (including surface acoustic wave (“SAW”) and bulk acoustic wave (“BAW”) filters) are used in 5G communications infrastructure, smartphones, tablets, and mobile devices. They make use of radio waves for wireless broadcasting and/or communications. Solar refers to power obtained by harnessing the energy of the sun through the use of compound semiconductor devices such as photovoltaics.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Data Storage </i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Data Storage refers to the Hard Disk Drive (“HDD”) market, for which our systems enable customers to manufacture thin film magnetic heads for hard disk drives as part of large capacity storage applications.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Scientific &amp; Other</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Scientific &amp; Other refers to advanced materials research and a range of manufacturing applications including optical coatings (laser mirrors, optical filters, and anti-reflective coatings).</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales by end-market and geographic region for the three months ended March 31, 2024 and 2023 were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended March 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;width:22.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by end-market</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 120,384</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 93,107</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Compound Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,002</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,159</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Data Storage</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 18,017</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,514</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Scientific &amp; Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 15,081</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 17,724</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 174,484</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 153,504</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by geographic region</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 27,868</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 31,011</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">EMEA<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,488</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 22,947</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">China</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 64,308</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 60,747</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Rest of APAC</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 73,220</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 38,744</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Rest of World</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 600</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 54</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 174,484</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 153,504</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:7.5pt;vertical-align:top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">EMEA consists of Europe, the Middle East, and Africa</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">For geographic reporting, sales are attributed to the location in which the customer facility is located.</p> 1 1 4 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended March 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;width:22.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by end-market</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 120,384</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 93,107</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Compound Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,002</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,159</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Data Storage</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 18,017</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,514</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Scientific &amp; Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 15,081</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 17,724</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 174,484</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 153,504</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by geographic region</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 27,868</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 31,011</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">EMEA<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,488</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 22,947</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">China</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 64,308</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 60,747</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Rest of APAC</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 73,220</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 38,744</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Rest of World</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 600</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 54</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 174,484</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 153,504</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:7.5pt;vertical-align:top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">EMEA consists of Europe, the Middle East, and Africa</span></td></tr></table> <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">​</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended March 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2024</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">    </b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td><td colspan="5" style="vertical-align:bottom;width:22.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by end-market</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 120,384</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 93,107</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Compound Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,002</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,159</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Data Storage</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 18,017</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,514</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Scientific &amp; Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 15,081</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 17,724</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 174,484</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 153,504</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by geographic region</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 27,868</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 31,011</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">EMEA<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,488</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 22,947</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">China</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 64,308</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 60,747</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Rest of APAC</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 73,220</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 38,744</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Rest of World</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 600</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 54</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.97%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 174,484</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 153,504</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:7.5pt;vertical-align:top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">EMEA consists of Europe, the Middle East, and Africa</span></td></tr></table> 120384000 93107000 21002000 21159000 18017000 21514000 15081000 17724000 174484000 153504000 27868000 31011000 8488000 22947000 64308000 60747000 73220000 38744000 600000 54000 174484000 153504000 <p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 5. Other Information</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">During the fiscal quarter ended March 31, 2024, the following directors and Section 16 officers, as applicable, adopted, modified or terminated “Rule 10b5-1 trading arrangements” (as defined in Item 408 of Regulation S-K):</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">●  On February 29, 2024, John Kiernan, our Chief Financial Officer, entered into a trading plan intended to satisfy the affirmative defense conditions of Rule 10b5-1(c).  Mr. Kiernan’s plan covers the sale of 30,000 shares of our common stock, between June 10, 2024 and May 30, 2025. Transactions under the plan are based upon pre-established dates. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">​</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">There were no “non-Rule 10b5-1 trading arrangements” (as defined in Item 408 of Regulation S-K) adopted, modified or terminated during the fiscal quarter ended March 31, 2024 by our directors and Section 16 officers. Each of the Rule 10b5-1 trading arrangements are in accordance with our Securities Trading Policy and actual sale transactions made pursuant to such trading arrangements will be disclosed publicly in Section 16 filings with the SEC in accordance with applicable securities laws, rules and regulations.</p> February 29, 2024 John Kiernan Chief Financial Officer true 30000 false false