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Inventories (Details) - USD ($)
$ in Thousands
Dec. 31, 2023
Dec. 31, 2022
Inventories    
Materials $ 139,884 $ 134,940
Work-in-process 71,278 68,765
Finished goods 6,183 1,513
Evaluation inventory 20,290 1,690
Total $ 237,635 $ 206,908