Business Combination - Consideration (Details) $ in Thousands		3 Months Ended
Jan. 31, 2023 USD ($)	Jun. 30, 2023 USD ($)
Business Combination
Contingent consideration, Accrued expenses and other current liabilities		$ 9,791
Other liabilities
Business Combination
Contingent consideration, Other liabilities		16,600
Epiluvac AB
Business Combination
Cash paid, net of cash acquired	$ 30,373
Contingent consideration	26,055
Acquisition date fair value	56,428
Contingent consideration	$ 26,100	26,400
Additional contingent consideration recognized		$ 300
Contingent consideration measurement input	0.0554
Business Combination, Contingent Consideration, Liability, Measurement Input	us-gaap:MeasurementInputDiscountRateMember
Epiluvac AB \| Accrued expenses and other current liabilities
Business Combination
Contingent consideration, Accrued expenses and other current liabilities	$ 9,800
Epiluvac AB \| Other liabilities
Business Combination
Contingent consideration, Other liabilities	16,600
Epiluvac AB \| Completion of certain defined milestones
Business Combination
Contingent consideration payments, High end of range	15,000
Epiluvac AB \| Percentage of orders received during defined Earn-out period
Business Combination
Contingent consideration payments, High end of range	$ 20,000
Maximum earn-out period	4 years

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

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Amount of consideration transferred, consisting of acquisition-date fair value of assets transferred by the acquirer, liabilities incurred by the acquirer, and equity interest issued by the acquirer.

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- Definition

Amount of increase (decrease) in the value of a contingent consideration liability, including, but not limited to, differences arising upon settlement.

+ References

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- Definition

For contingent consideration arrangements recognized in connection with a business combination, this element represents an estimate of the high-end of the potential range (undiscounted) of the consideration which may be paid.

+ References

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Amount of liability recognized arising from contingent consideration in a business combination.

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Amount of liability recognized arising from contingent consideration in a business combination, expected to be settled within one year or the normal operating cycle, if longer.

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- Definition

Value of input used to measure contingent consideration liability from business combination.

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Indicates measurement input for business combination contingent consideration liability.

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Amount of liability recognized arising from contingent consideration in a business combination, expected to be settled beyond one year or the normal operating cycle, if longer.

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- Definition

The cash outflow associated with the acquisition of business during the period. The cash portion only of the acquisition price.

+ References

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- Definition

Amount of estimated fair value contingent consideration incurred by the acquirer as part of consideration transferred in a business combination.

+ References

No definition available.

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For contingent consideration arrangements recognized in connection with a business combination, this element represents maximum earn-out period for determining contingent consideration, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

No definition available.

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