EX-21.1 2 veco-20221231xex21d1.htm EX-21.1

Exhibit 21.1

Subsidiaries of the Registrant

As of December 31, 2022

Subsidiary

    

Jurisdiction of Organization

    

Percentage Ownership(A)

U.S. Subsidiaries

Ultratech International Inc.

DE

100%

Veeco APAC LLC

DE

100%

Veeco Process Equipment Inc.

DE

100%

Foreign Subsidiaries

Veeco Asia Pte. Ltd.

Singapore

100%

Veeco GmbH

Germany

100%

Veeco Instruments Limited

England

100%

Veeco Instruments (Shanghai) Co. Ltd.

China

100%

Veeco Japan Ltd.

Japan

100%

Veeco Korea LLC

South Korea

100%

Veeco Malaysia Sdn. Bhd.

Malaysia

100%

Veeco Netherlands BV

Netherlands

100%

Veeco Taiwan Inc.

Taiwan

100%

Ultra-Tech Technologies Israel Ltd.

Israel

100%


(A)Includes direct and indirect ownership.