Commitments and Contingencies - Minimum lease commitments (Details) - USD ($) $ in Thousands	Mar. 31, 2020	Dec. 31, 2019
Minimum lease commitments, Payments due by period:
2020	$ 3,898
2021	4,970
2022	4,387
2023	1,112
2024	551
Total future minimum lease payments	14,918
Less: Imputed interest	(1,338)
Total operating lease liabilities	13,580
Operating lease liability, current	$ 4,286	$ 4,196
Operating Lease, Liability, Current, Statement of Financial Position	veco:AccruedAndOtherLiabilitiesCurrent
Operating lease liability, noncurrent	$ 9,294	$ 10,300
Operating Lease, Liability, Noncurrent, Statement of Financial Position	us-gaap:OperatingLeaseLiabilityNoncurrent
Total operating lease liabilities	$ 13,580