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Acquisitions and Dispositions - IPRD and other (Details) - USD ($) $ in Thousands		12 Months Ended
	May 26, 2017	Dec. 31, 2019	Dec. 31, 2018	Dec. 31, 2017
Business Combinations
Acquisition related costs			$ 2,959	$ 17,786
Non-cash share based compensation		$ 15,270	16,074	24,396
Amortization of intangible assets		17,085	32,351	35,475
Restructuring Charges.		$ 6,403	8,556	11,851
Acquisition costs
Business Combinations
Non-cash share based compensation				4,203
Ultratech
Business Combinations
Intangible assets acquired, amount	$ 346,940
Portion of IPR&D related to lithography technologies (as a percent)	50.00%
Portion of IPR&D related to laser annealing technologies (as a percent)	33.00%
Acquisition related costs			$ 3,000	17,800
Net sales				65,280
Loss before income taxes				(62,284)
Inventory fair value step-up related to purchase accounting				9,600
Amortization of intangible assets				23,900
Restructuring Charges.				3,300
Ultratech \| Acquisition costs
Business Combinations
Non-cash share based compensation				$ 4,200
In-process R&D \| Ultratech
Business Combinations
Intangible assets acquired, amount	$ 43,340