Commitments and Contingencies - Minimum lease commitments 2019 (Details) $ in Thousands	Sep. 30, 2019 USD ($)
Minimum lease commitments, Payments due by period:
2019	$ 1,302
2020	5,222
2021	2,548
2022	1,379
2023	865
Thereafter	551
Total future minimum lease payments	11,867
Less: Imputed interest	(1,071)
Total operating lease liabilities	10,796
Operating lease liability, current	$ 4,730
Operating Lease, Liability, Current, Statement of Financial Position	veco:AccruedAndOtherLiabilitiesCurrent
Operating lease liability, noncurrent	$ 6,066
Operating Lease, Liability, Noncurrent, Statement of Financial Position	us-gaap:OperatingLeaseLiabilityNoncurrent
Total operating lease liabilities	$ 10,796