Parent Directory| Name | Size | Last Modified |
|---|---|---|
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| 0001104659-26-055672-index.html | 2026-05-05 16:31:22 | |
| 0001104659-26-055672.txt | 2026-05-05 16:31:22 | |
 0001104659-26-055672-xbrl.zip | 225810 | 2026-05-05 16:31:22 |
| FilingSummary.xml | 36061 | 2026-05-05 16:31:22 |
| MetaLinks.json | 974933 | 2026-05-05 16:31:22 |
| R1.htm | 51520 | 2026-05-05 16:31:22 |
| R10.htm | 115967 | 2026-05-05 16:31:22 |
| R11.htm | 31100 | 2026-05-05 16:31:22 |
| R12.htm | 135163 | 2026-05-05 16:31:22 |
| R13.htm | 39915 | 2026-05-05 16:31:22 |
| R14.htm | 23871 | 2026-05-05 16:31:22 |
| R15.htm | 55426 | 2026-05-05 16:31:22 |
| R16.htm | 9724 | 2026-05-05 16:31:22 |
| R17.htm | 17737 | 2026-05-05 16:31:22 |
| R18.htm | 8465 | 2026-05-05 16:31:22 |
| R19.htm | 15517 | 2026-05-05 16:31:22 |
| R2.htm | 115130 | 2026-05-05 16:31:22 |
| R20.htm | 49405 | 2026-05-05 16:31:22 |
| R21.htm | 267490 | 2026-05-05 16:31:22 |
| R22.htm | 91363 | 2026-05-05 16:31:22 |
| R23.htm | 23038 | 2026-05-05 16:31:22 |
| R24.htm | 131428 | 2026-05-05 16:31:22 |
| R25.htm | 39346 | 2026-05-05 16:31:22 |
| R26.htm | 16762 | 2026-05-05 16:31:22 |
| R27.htm | 81040 | 2026-05-05 16:31:22 |
| R28.htm | 4147 | 2026-05-05 16:31:22 |
| R29.htm | 44860 | 2026-05-05 16:31:22 |
| R3.htm | 22069 | 2026-05-05 16:31:22 |
| R30.htm | 9329 | 2026-05-05 16:31:22 |
| R31.htm | 34855 | 2026-05-05 16:31:22 |
| R32.htm | 69168 | 2026-05-05 16:31:22 |
| R33.htm | 4862 | 2026-05-05 16:31:22 |
| R34.htm | 13458 | 2026-05-05 16:31:22 |
| R35.htm | 4419 | 2026-05-05 16:31:22 |
| R36.htm | 23988 | 2026-05-05 16:31:22 |
| R37.htm | 4807 | 2026-05-05 16:31:22 |
| R38.htm | 19789 | 2026-05-05 16:31:22 |
| R39.htm | 23699 | 2026-05-05 16:31:22 |
| R4.htm | 100813 | 2026-05-05 16:31:22 |
| R40.htm | 12731 | 2026-05-05 16:31:22 |
| R41.htm | 7452 | 2026-05-05 16:31:22 |
| R42.htm | 19066 | 2026-05-05 16:31:22 |
| R43.htm | 51304 | 2026-05-05 16:31:22 |
| R44.htm | 42086 | 2026-05-05 16:31:22 |
| R45.htm | 31869 | 2026-05-05 16:31:22 |
| R46.htm | 27538 | 2026-05-05 16:31:22 |
| R47.htm | 18392 | 2026-05-05 16:31:22 |
| R48.htm | 45013 | 2026-05-05 16:31:22 |
| R49.htm | 4263 | 2026-05-05 16:31:22 |
| R5.htm | 34874 | 2026-05-05 16:31:22 |
| R50.htm | 8310 | 2026-05-05 16:31:22 |
| R51.htm | 33330 | 2026-05-05 16:31:22 |
| R52.htm | 9036 | 2026-05-05 16:31:22 |
| R53.htm | 7664 | 2026-05-05 16:31:22 |
| R54.htm | 10161 | 2026-05-05 16:31:22 |
| R55.htm | 52684 | 2026-05-05 16:31:22 |
| R56.htm | 20561 | 2026-05-05 16:31:22 |
| R57.htm | 26891 | 2026-05-05 16:31:22 |
| R58.htm | 28844 | 2026-05-05 16:31:22 |
| R59.htm | 19886 | 2026-05-05 16:31:22 |
| R6.htm | 88724 | 2026-05-05 16:31:22 |
| R60.htm | 33431 | 2026-05-05 16:31:22 |
| R61.htm | 26287 | 2026-05-05 16:31:22 |
| R7.htm | 9969 | 2026-05-05 16:31:22 |
| R8.htm | 51869 | 2026-05-05 16:31:22 |
| R9.htm | 264862 | 2026-05-05 16:31:22 |
| report.css | 2767 | 2026-05-05 16:31:22 |
| Show.js | 1085 | 2026-05-05 16:31:22 |
| veco-20260331.xsd | 54600 | 2026-05-05 16:31:22 |
| veco-20260331x10q.htm | 1671311 | 2026-05-05 16:31:22 |
| veco-20260331x10q_htm.xml | 1835157 | 2026-05-05 16:31:22 |
| veco-20260331xex10d1.htm | 83010 | 2026-05-05 16:31:22 |
 veco-20260331xex10d1001.jpg | 4317 | 2026-05-05 16:31:22 |
| veco-20260331xex31d1.htm | 14938 | 2026-05-05 16:31:22 |
| veco-20260331xex31d2.htm | 13075 | 2026-05-05 16:31:22 |
| veco-20260331xex32d1.htm | 8826 | 2026-05-05 16:31:22 |
| veco-20260331xex32d2.htm | 8763 | 2026-05-05 16:31:22 |
| veco-20260331_cal.xml | 70110 | 2026-05-05 16:31:22 |
| veco-20260331_def.xml | 197880 | 2026-05-05 16:31:22 |
| veco-20260331_lab.xml | 516576 | 2026-05-05 16:31:22 |
| veco-20260331_pre.xml | 357599 | 2026-05-05 16:31:22 |