Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-25-107052-index-headers.html | 2025-11-05 16:31:22 | |
| 0001104659-25-107052-index.html | 2025-11-05 16:31:22 | |
| 0001104659-25-107052.txt | 2025-11-05 16:31:22 | |
 0001104659-25-107052-xbrl.zip | 246424 | 2025-11-05 16:31:22 |
| FilingSummary.xml | 36117 | 2025-11-05 16:31:22 |
| MetaLinks.json | 985685 | 2025-11-05 16:31:22 |
| R1.htm | 51520 | 2025-11-05 16:31:22 |
| R10.htm | 137924 | 2025-11-05 16:31:22 |
| R11.htm | 29779 | 2025-11-05 16:31:22 |
| R12.htm | 223430 | 2025-11-05 16:31:22 |
| R13.htm | 49246 | 2025-11-05 16:31:22 |
| R14.htm | 33135 | 2025-11-05 16:31:22 |
| R15.htm | 73903 | 2025-11-05 16:31:22 |
| R16.htm | 11718 | 2025-11-05 16:31:22 |
| R17.htm | 18584 | 2025-11-05 16:31:22 |
| R18.htm | 8465 | 2025-11-05 16:31:22 |
| R19.htm | 23875 | 2025-11-05 16:31:22 |
| R2.htm | 123173 | 2025-11-05 16:31:22 |
| R20.htm | 72248 | 2025-11-05 16:31:22 |
| R21.htm | 289144 | 2025-11-05 16:31:22 |
| R22.htm | 113572 | 2025-11-05 16:31:22 |
| R23.htm | 22866 | 2025-11-05 16:31:22 |
| R24.htm | 219682 | 2025-11-05 16:31:22 |
| R25.htm | 48661 | 2025-11-05 16:31:22 |
| R26.htm | 24768 | 2025-11-05 16:31:22 |
| R27.htm | 117968 | 2025-11-05 16:31:22 |
| R28.htm | 4147 | 2025-11-05 16:31:22 |
| R29.htm | 46006 | 2025-11-05 16:31:22 |
| R3.htm | 22069 | 2025-11-05 16:31:22 |
| R30.htm | 9953 | 2025-11-05 16:31:22 |
| R31.htm | 44888 | 2025-11-05 16:31:22 |
| R32.htm | 76200 | 2025-11-05 16:31:22 |
| R33.htm | 4862 | 2025-11-05 16:31:22 |
| R34.htm | 13458 | 2025-11-05 16:31:22 |
| R35.htm | 4421 | 2025-11-05 16:31:22 |
| R36.htm | 25596 | 2025-11-05 16:31:22 |
| R37.htm | 4807 | 2025-11-05 16:31:22 |
| R38.htm | 19791 | 2025-11-05 16:31:22 |
| R39.htm | 22096 | 2025-11-05 16:31:22 |
| R4.htm | 102697 | 2025-11-05 16:31:22 |
| R40.htm | 12730 | 2025-11-05 16:31:22 |
| R41.htm | 7452 | 2025-11-05 16:31:22 |
| R42.htm | 19065 | 2025-11-05 16:31:22 |
| R43.htm | 53277 | 2025-11-05 16:31:22 |
| R44.htm | 42878 | 2025-11-05 16:31:22 |
| R45.htm | 33885 | 2025-11-05 16:31:22 |
| R46.htm | 29547 | 2025-11-05 16:31:22 |
| R47.htm | 18392 | 2025-11-05 16:31:22 |
| R48.htm | 45027 | 2025-11-05 16:31:22 |
| R49.htm | 4263 | 2025-11-05 16:31:22 |
| R5.htm | 32787 | 2025-11-05 16:31:22 |
| R50.htm | 8310 | 2025-11-05 16:31:22 |
| R51.htm | 33328 | 2025-11-05 16:31:22 |
| R52.htm | 9513 | 2025-11-05 16:31:22 |
| R53.htm | 8141 | 2025-11-05 16:31:22 |
| R54.htm | 10161 | 2025-11-05 16:31:22 |
| R55.htm | 62034 | 2025-11-05 16:31:22 |
| R56.htm | 22691 | 2025-11-05 16:31:22 |
| R57.htm | 28494 | 2025-11-05 16:31:22 |
| R58.htm | 28846 | 2025-11-05 16:31:22 |
| R59.htm | 17438 | 2025-11-05 16:31:22 |
| R6.htm | 99308 | 2025-11-05 16:31:22 |
| R60.htm | 36075 | 2025-11-05 16:31:22 |
| R61.htm | 25424 | 2025-11-05 16:31:22 |
| R7.htm | 12354 | 2025-11-05 16:31:22 |
| R8.htm | 74725 | 2025-11-05 16:31:22 |
| R9.htm | 286612 | 2025-11-05 16:31:22 |
| report.css | 2767 | 2025-11-05 16:31:22 |
| Show.js | 1085 | 2025-11-05 16:31:22 |
| veco-20250930.xsd | 52442 | 2025-11-05 16:31:22 |
| veco-20250930x10q.htm | 2237591 | 2025-11-05 16:31:22 |
| veco-20250930x10q_htm.xml | 2412571 | 2025-11-05 16:31:22 |
| veco-20250930xex31d1.htm | 14912 | 2025-11-05 16:31:22 |
| veco-20250930xex31d2.htm | 13040 | 2025-11-05 16:31:22 |
| veco-20250930xex32d1.htm | 8791 | 2025-11-05 16:31:22 |
| veco-20250930xex32d2.htm | 8728 | 2025-11-05 16:31:22 |
| veco-20250930_cal.xml | 71604 | 2025-11-05 16:31:22 |
| veco-20250930_def.xml | 197185 | 2025-11-05 16:31:22 |
| veco-20250930_lab.xml | 517610 | 2025-11-05 16:31:22 |
| veco-20250930_pre.xml | 361438 | 2025-11-05 16:31:22 |