Document Format Files
Data Files
Seq | Description | Document | Type | Size |
---|---|---|---|---|
135 | XBRL TAXONOMY EXTENSION SCHEMA | veco-20240802.xsd | EX-101.SCH | 3006 |
136 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | veco-20240802_lab.xml | EX-101.LAB | 34240 |
137 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | veco-20240802_pre.xml | EX-101.PRE | 22353 |
148 | EXTRACTED XBRL INSTANCE DOCUMENT | tm2420712d1_8k_htm.xml | XML | 3555 |
EIN.: 112989601 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 8-K | Act: 34 | File No.: 000-16244 | Film No.: 241171923
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)