Subsequent Events (Details) (Subsequent Event, Synos, USD $) In Millions, unless otherwise specified	Oct. 01, 2013 Item
Subsequent events
Initial purchase price	$ 70
Number of employees	50
Maximum
Subsequent events
Earn-out consideration	115
Potential purchase price	$ 185

Number of persons employed by the Entity

No definition available.

Name:	dei_EntityNumberOfEmployees
Namespace Prefix:	dei_
Data Type:	xbrli:decimalItemType
Balance Type:	na
Period Type:	instant

- Definition

Amount of potential cash payments that could result from the contingent consideration arrangement.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Statement of Financial Accounting Standard (FAS)

-Number 141

-Paragraph 51

-Subparagraph f

-LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009. This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.

+ Details

Name:	us-gaap_BusinessAcquisitionContingentConsiderationPotentialCashPayment
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

The total cost of the acquired entity including the cash paid to shareholders of acquired entities, fair value of debt and equity securities issued to shareholders of acquired entities, the fair value of the liabilities assumed, and direct costs of the acquisition.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Statement of Financial Accounting Standard (FAS)

-Number 141

-Paragraph 51

-Subparagraph d

-LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009. This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.

+ Details

Name:	us-gaap_BusinessAcquisitionCostOfAcquiredEntityPurchasePrice
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Details

Name:	us-gaap_SubsequentEventLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Represents the potential purchase price, including the additional payment under the earn-out feature.

+ References

No definition available.

+ Details

Name:	veco_BusinessAcquisitionCostOfAcquiredEntityPotentialPurchasePrice
Namespace Prefix:	veco_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant