Selected Quarterly Financial Information (Details 2) (USD $)	12 Months Ended		1 Months Ended	3 Months Ended		12 Months Ended	1 Months Ended	3 Months Ended		12 Months Ended
	Dec. 31, 2012	Dec. 31, 2011	Jul. 31, 2011 CIGS Solar Systems Business Disposal Employee	Sep. 30, 2011 CIGS Solar Systems Business Disposal	Jun. 30, 2011 CIGS Solar Systems Business Disposal	Dec. 31, 2011 CIGS Solar Systems Business Disposal	Oct. 31, 2010 Metrology Divestiture	Sep. 30, 2012 Metrology Divestiture	Dec. 31, 2010 Metrology Divestiture	Dec. 31, 2011 Metrology Divestiture	Dec. 31, 2012 Metrology Divestiture	Oct. 07, 2010 Metrology Divestiture	Aug. 15, 2010 Metrology Divestiture
Selected Quarterly Financial Information (unaudited)
Maximum selling price of the product, from which substantial revenue is derived	$ 8,000,000
Information related to discontinued operations
Number of employees impacted			80
Transaction costs of disposition				19,100,000	50,700,000	69,800,000				5,200,000
Asset impairment	1,335,000	584,000				6,200,000
Goodwill write-off		10,836,000				10,800,000
Inventory write-offs						27,000,000
Charges to settle contracts						22,100,000
Lease related charges						1,400,000
Personnel severance charges						2,300,000
Sale amount of discontinued operations as per the agreement													229,400,000
Working capital adjustment which is included in total proceeds												1,000,000
Proceeds from divestiture of businesses							230,400,000
Restricted cash	2,017,000	577,000										22,900,000
Amount of proceeds related to assets in China							7,200,000
Proceeds received from sale deposit in escrow												22,900,000
Gain on disposal, pre-tax									156,300,000
Pre-tax deferred gain related to net assets in China									5,400,000		5,400,000
Deferred gain recognized related to net assets in China	$ 5,400,000							$ 5,400,000
Restriction period on use of proceeds which are held in escrow (in years)												1 year