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Document and Entity Information (USD $)
12 Months Ended
Dec. 31, 2012
Oct. 24, 2013
Jun. 28, 2011
Document and Entity Information      
Entity Registrant Name VEECO INSTRUMENTS INC    
Entity Central Index Key 0000103145    
Document Type 10-K    
Document Period End Date Dec. 31, 2012    
Amendment Flag false    
Current Fiscal Year End Date --12-31    
Entity Well-known Seasoned Issuer Yes    
Entity Voluntary Filers No    
Entity Current Reporting Status No    
Entity Filer Category Large Accelerated Filer    
Entity Public Float     $ 1,376,219,104
Entity Common Stock, Shares Outstanding   39,246,279  
Document Fiscal Year Focus 2012    
Document Fiscal Period Focus FY