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Amount of intangible assets, excluding goodwill, acquired at the acquisition date.

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The amount of property, plant, and equipment recognized as of the acquisition date.

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Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

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Acquisitions (Opening Balance Sheet for Cymetrix) (Details) (USD $) In Thousands, unless otherwise specified	Jun. 30, 2014	Dec. 31, 2013	Jun. 30, 2013	Dec. 31, 2012	May 14, 2014 Cymetrix [Member]
Business Acquisition [Line Items]
Cash					$ 1,357
Accounts receivable, net					11,283
Other current assets					1,659
Property and equipment, net					11,813
Goodwill	571,863	615,343	606,483	619,932	71,212
Intangible assets					18,000
Total assets					115,324
Total liabilities					$ 36,975