INCOME TAXES (Details 4) (USD $)	12 Months Ended
	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Deferred tax assets:
Net operating loss carryovers, net of reserves	$ 13,561,000	$ 13,063,000
R&D and other tax credits, net of reserves	13,197,000	13,221,000
Allowances and reserves	6,546,000	5,911,000
Deferred revenue	2,261,000	4,522,000
Alternative Minimum Tax credit	1,549,000	948,000
Stock-based compensation	9,197,000	6,938,000
Other	278,000	861,000
Gross deferred tax assets	46,589,000	45,464,000
Subtotal	46,589,000	45,464,000
Deferred tax liabilities:
Property and equipment	(2,849,000)	(2,232,000)
Non-goodwill intangibles	(4,510,000)	(323,000)
Other	(1,269,000)	0
Gross deferred tax liabilities	(8,628,000)	(2,555,000)
Net deferred tax assets	37,961,000	42,909,000
Income tax benefits from employee stock compensation	400,000	0	100,000
Credit to additional paid-in capital upon utilization of tax loss carryforwards	400,000
Permanently reinvested undistributed earnings	132,700,000	105,700,000	73,300,000
Tax impact resulting from a distribution of earnings	$ 48,700,000	$ 38,700,000	$ 27,000,000