Fair Value Schedule of Fair Value Assets and Liabilities Measured on a Recurring Basis (Details) (USD $)	3 Months Ended				12 Months Ended																																																																													12 Months Ended
	Dec. 31, 2013	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011	Dec. 31, 2013 Short-Term Marketable Securities:	Dec. 31, 2012 Short-Term Marketable Securities:	Dec. 31, 2013 Long-Term Marketable Securities:	Dec. 31, 2012 Long-Term Marketable Securities:	Dec. 31, 2013 Freeslate Inc.	Dec. 31, 2012 Freeslate Inc.	Jul. 02, 2010 Freeslate Inc.	Dec. 31, 2013 Freeslate Inc. Carrying value	Dec. 31, 2013 Fair Value, Measurements, Recurring		Dec. 31, 2012 Fair Value, Measurements, Recurring		Dec. 31, 2013 Fair Value, Measurements, Recurring Long-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring U.S. Treasury securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring U.S. Treasury securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring U.S. Treasury securities Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring U.S. government and agency securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring U.S. government and agency securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring U.S. government and agency securities Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Commercial paper and certificates of deposit Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Commercial paper and certificates of deposit Short-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Corporate debt securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Corporate debt securities Short-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Corporate debt securities Long-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Corporate debt securities Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Municipal debt securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Municipal debt securities Short-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1)		Dec. 31, 2012 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1)		Dec. 31, 2013 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) Long-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) U.S. Treasury securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) U.S. Treasury securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) U.S. Treasury securities Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) U.S. government and agency securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) U.S. government and agency securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) U.S. government and agency securities Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) Commercial paper and certificates of deposit Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) Commercial paper and certificates of deposit Short-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) Corporate debt securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) Corporate debt securities Short-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) Corporate debt securities Long-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) Corporate debt securities Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) Municipal debt securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Quoted Market Prices for Identical Assets (Level 1) Municipal debt securities Short-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2)		Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2)		Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) Long-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) U.S. Treasury securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) U.S. Treasury securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) U.S. Treasury securities Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) U.S. government and agency securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) U.S. government and agency securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) U.S. government and agency securities Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) Commercial paper and certificates of deposit Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) Commercial paper and certificates of deposit Short-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) Corporate debt securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) Corporate debt securities Short-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) Corporate debt securities Long-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) Corporate debt securities Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) Municipal debt securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Other Observable Inputs (Level 2) Municipal debt securities Short-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3)		Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3)		Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) Long-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) Notes Receivable	Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) U.S. Treasury securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) U.S. Treasury securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) U.S. Treasury securities Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) U.S. government and agency securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) U.S. government and agency securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) U.S. government and agency securities Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) Commercial paper and certificates of deposit Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) Commercial paper and certificates of deposit Short-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) Corporate debt securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) Corporate debt securities Short-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) Corporate debt securities Long-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) Corporate debt securities Long-Term Marketable Securities:	Dec. 31, 2013 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) Municipal debt securities Short-Term Marketable Securities:	Dec. 31, 2012 Fair Value, Measurements, Recurring Significant Unobservable Inputs (Level 3) Municipal debt securities Short-Term Marketable Securities:
Assets, Fair Value Disclosure [Abstract]
Cash equivalents																$ 3,673,000	[1]	$ 46,043,000	[1]																	$ 3,673,000	[1]	$ 46,043,000	[1]																	$ 0	[1]	$ 0	[1]																	$ 0	[1]	$ 0	[1]
Total marketable securities:								25,880,000	26,851,000	2,879,000	12,548,000					28,759,000						1,503,000	1,805,000	1,521,000	152,000	3,023,000	158,000	1,300,000	6,003,000	22,425,000	16,020,000	2,879,000	10,869,000	500,000	0	1,503,000						1,503,000	1,805,000	1,521,000	0	0	0	0	0	0	0	0	0	0	0	27,256,000						0	0	0	152,000	3,023,000	158,000	1,300,000	6,003,000	22,425,000	16,020,000	2,879,000	10,869,000	500,000	0	0							0	0	0	0	0	0	0	0	0	0	0	0	0	0
Foreign currency forward contracts not designated as hedges																34,000																				0																				34,000																				0
Total assets measured at fair value																				32,466,000	85,442,000																			5,176,000	49,369,000																			27,290,000	36,073,000																			0	0
Long-Term Marketable Securities:
Acquisition-related contingent consideration																		241,000																				0																				0																				241,000
Foreign currency forward contracts not designated as hedges																		99,000																				0																				99,000																				0
Total liabilities at fair value																		340,000																				0																				99,000																				241,000
Note Receivable Impairment	1,663,000	0	0	0	1,663,000	0	0
Promissory notes receivable, net of current portion	6,393,000				6,393,000	8,901,000						7,400,000	8,900,000		9,100,000
Accrued interest receivable															600,000
Promissory note receivable, fair value														8,800,000		7,393,000																																																												7,393,000						8,100,000
Reserve related to impairment charge																																																																																		1,700,000
Impairment assessment discount rate																																																																																		11.00%
Contractual term of promissory note receivable from Intermolecular, Inc.																																																																																		6 years 3 months
Assumed payment due in March 2020																																																																																		4,000,000
Reduced amount of assumed payment in March 2020																																																																																		800,000
Fair value of note and related interest receivable if cash flows were not adjusted																																																																												9,700,000
Non-financial assets and liabilities deemed to be other than temporarily impaired					$ 0

[1] Cash equivalents are included in the Cash and cash equivalents line in the consolidated balance sheet