Name:	us-gaap_ChangeInContractWithCustomerLiabilityAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

Amount of increase (decrease) in revenue recognized for cumulative catch-up adjustment from change in measure of progress which increases (decreases) right to consideration in exchange for good or service transferred to customer when right is conditioned on something other than passage of time.

Reference 1: http://www.xbrl.org/2003/role/exampleRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 606
-SubTopic 10
-Section 50
-Paragraph 10
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=121604090&loc=SL49130551-203045

Name:	us-gaap_ContractWithCustomerAssetCumulativeCatchUpAdjustmentToRevenueChangeInMeasureOfProgress
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

Amount, after allowance for credit loss, of right to consideration in exchange for good or service transferred to customer when right is conditioned on something other than passage of time.

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 606
-SubTopic 10
-Section 50
-Paragraph 8
-Subparagraph (a)
-URI http://asc.fasb.org/extlink&oid=121604090&loc=SL49130549-203045

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 606
-SubTopic 10
-Section 45
-Paragraph 1
-URI http://asc.fasb.org/extlink&oid=121556615&loc=SL49130531-203044

Reference 3: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 606
-SubTopic 10
-Section 45
-Paragraph 3
-URI http://asc.fasb.org/extlink&oid=121556615&loc=SL49130533-203044

Name:	us-gaap_ContractWithCustomerAssetNet
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- References

No definition available.

Name:	us-gaap_ContractWithCustomerAssetNetAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable.

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 606
-SubTopic 10
-Section 45
-Paragraph 1
-URI http://asc.fasb.org/extlink&oid=121556615&loc=SL49130531-203044

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 606
-SubTopic 10
-Section 50
-Paragraph 8
-Subparagraph (a)
-URI http://asc.fasb.org/extlink&oid=121604090&loc=SL49130549-203045

Reference 3: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 606
-SubTopic 10
-Section 45
-Paragraph 2
-URI http://asc.fasb.org/extlink&oid=121556615&loc=SL49130532-203044

Name:	us-gaap_ContractWithCustomerLiability
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- References

No definition available.

Name:	us-gaap_ContractWithCustomerLiabilityAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

Amount of increase (decrease) in revenue recognized for cumulative catch-up adjustment from change in measure of progress which (increases) decreases obligation to transfer good or service to customer for which consideration from customer has been received or is due.

Name:	us-gaap_ContractWithCustomerLiabilityCumulativeCatchUpAdjustmentToRevenueChangeInMeasureOfProgress
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

Name:	us-gaap_StatementBusinessSegmentsAxis=ivac_ThinfilmEquipmentSegmentMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Name:	us-gaap_AccountsNotesLoansAndFinancingReceivablesByBillingStatusTypeAxis=us-gaap_UnbilledRevenuesMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Name:	us-gaap_BalanceSheetLocationAxis=ivac_DeferredRevenueMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Name:	us-gaap_BalanceSheetLocationAxis=ivac_CustomerAdvancesMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Name:	us-gaap_StatementBusinessSegmentsAxis=ivac_PhotonicsSegmentMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type: