Exhibit 21.1

SUBSIDIARIES OF THE REGISTRANT

1.	Lotus Technologies, Inc. — Santa Clara, California
2.	IRPC, Inc. — Santa Clara, California
3.	DeltaNu, Inc. — Laramie, Wyoming
4.	Northern Acquisition Corporation, dba Creative Display Systems — Carlsbad, California
5.	Intevac Foreign Sales Corporation — Barbados
6.	Intevac Asia Private Limited — Singapore
7.	Intevac Malaysia Sdn Bhd — Malaysia
8.	Intevac Limited — Hong Kong
9.	Intevac (Shenzhen) Co. Ltd — China
10.	IVAC Co. Ltd — Korea
11.	Intevac Japan Kabushiki Kaisha (KK) — Japan