Exhibit 23.01

Consent of Independent Registered Public Accounting Firm

ACM Research, Inc.

42307 Osgood Road, Suite I

Fremont, California 94539

United States

We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (No. 333-222702, 333-232780 and 333-254150) of ACM Research, Inc. of our reports dated March 1, 2022, relating to the consolidated financial statements and the effectiveness of the Company’s internal control over financial reporting, which appear in this Form 10-K for the year ended December 31, 2021.

BDO China Shu Lun Pan Certified Public Accountants LLP

Shenzhen, The People’s Republic of China

March 1, 2022